JP2006102834A - Surface coated cermet-made cutting tool, having hard coating layer exhibiting excellent chipping resistance in high-speed intermittent cutting - Google Patents

Surface coated cermet-made cutting tool, having hard coating layer exhibiting excellent chipping resistance in high-speed intermittent cutting Download PDF

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JP2006102834A
JP2006102834A JP2004290049A JP2004290049A JP2006102834A JP 2006102834 A JP2006102834 A JP 2006102834A JP 2004290049 A JP2004290049 A JP 2004290049A JP 2004290049 A JP2004290049 A JP 2004290049A JP 2006102834 A JP2006102834 A JP 2006102834A
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JP4483510B2 (en
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Hisashi Honma
尚志 本間
Akira Osada
晃 長田
Keiji Nakamura
惠滋 中村
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Mitsubishi Materials Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface coated cermet-made cutting tool, having a hard coating layer exhibiting excellent chipping resistance in high-speed intermittent cutting. <P>SOLUTION: In this surface coated cutting tool, a hard coating layer composed of (a) a lower layer and (b) an upper layer is formed on the surface of a substrate. The lower layer (a) is formed of a Ti compound layer comprising two layers or more selected from a TiC layer, a TiN layer, a TiCN layer, a TiCO layer and a TiCNO layer which are chemically deposited and having a total average layer thickness of 3 to 20μm, and the upper layer (b) is formed of an Al<SB>2</SB>O<SB>3</SB>layer chemically deposited and has an average layer thickness of 1 to 15μm. One layer of the Ti compound layer comprises the TiCN layer having an average layer thickness of 2.5 to 15 μm, and having a measured inclined angle degree distribution graph obtained by applying an electron beam to individual crystal grains having a cubic crystal lattice existing in a measurement range of a surface polishing face using a field emission type scanning electron microscope and measuring an angle of inclination made by normal of [013] face which is a crystal face of crystal grain to the normal of the surface polishing face or a specific value. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

この発明は、特に鋼や鋳鉄などの高速断続切削加工で、硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具(以下、被覆サーメット工具という)に関するものである。   The present invention relates to a surface-coated cermet cutting tool (hereinafter referred to as a coated cermet tool) that exhibits excellent chipping resistance with a hard coating layer, particularly in high-speed intermittent cutting of steel or cast iron.

従来、一般に、炭化タングステン(以下、WCで示す)基超硬合金または炭窒化チタン(以下、TiCNで示す)基サーメットで構成された基体(以下、これらを総称して工具基体という)の表面に、
(a)下部層が、いずれも化学蒸着形成された、Tiの炭化物(以下、TiCで示す)層、窒化物(以下、同じくTiNで示す)層、炭窒化物(以下、TiCNで示す)層、炭酸化物(以下、TiCOで示す)層、および炭窒酸化物(以下、TiCNOで示す)層のうちの2層以上からなり、かつ3〜20μmの合計平均層厚を有するTi化合物層、
(b)上部層が、化学蒸着形成された、1〜15μmの平均層厚を有する酸化アルミニウム(以下、Al23で示す)層、
以上(a)および(b)で構成された硬質被覆層を形成してなる被覆サーメット工具が知られており、この被覆サーメット工具が、例えば各種の鋼や鋳鉄などの連続切削や断続切削に用いられていることも知られている。
特開平6−31503号公報
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) Ti carbide (hereinafter referred to as TiC) layer, nitride (hereinafter also referred to as TiN) layer, carbonitride (hereinafter referred to as TiCN) layer formed by chemical vapor deposition of the lower layers. A Ti compound layer consisting of two or more of a carbon oxide (hereinafter referred to as TiCO) layer and a carbonitride oxide (hereinafter referred to as TiCNO) layer and having a total average layer thickness of 3 to 20 μm,
(B) an aluminum oxide (hereinafter referred to as Al 2 O 3 ) layer having an average layer thickness of 1 to 15 μm, wherein the upper layer is formed by chemical vapor deposition;
A coated cermet tool formed by forming a hard coating layer composed of (a) and (b) above is known, and this coated cermet tool is used for continuous cutting and intermittent cutting of various steels and cast irons, for example. It is also known that
Japanese Unexamined Patent Publication No. 6-31503

近年の切削装置の高性能化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工は一段と高速化の傾向にあるが、上記の従来被覆サーメット工具においては、これを鋼や鋳鉄などの通常の条件での連続切削や断続切削に用いた場合には問題はないが、特にこれを切削条件の最も厳しい高速断続切削、すなわち切刃部にきわめて短いピッチで繰り返し機械的衝撃の加わる高速断続切削に用いた場合、これを構成する硬質被覆層は下部層のTi化合物層による高温強度、同上部層のAl23層による高温硬さおよび耐熱性を具備するものの、前記Ti化合物層による高温強度が不十分であるために、機械的衝撃に対して満足に対応することができず、この結果硬質被覆層にはチッピング(微小欠け)が発生し易くなることから、比較的短時間で使用寿命に至るのが現状である。 In recent years, the performance of cutting machines has been remarkable. On the other hand, there is a strong demand for labor saving, energy saving, and cost reduction for cutting work, and along with this, cutting work tends to be further accelerated. For coated cermet tools, there is no problem when this is used for continuous cutting and interrupted cutting under normal conditions such as steel and cast iron. When it is used for high-speed intermittent cutting with repeated mechanical impacts at extremely short pitches, the hard coating layer that composes this is the high-temperature strength of the lower Ti compound layer and the high-temperature hardness of the upper Al 2 O 3 layer. However, since the high-temperature strength of the Ti compound layer is insufficient, it cannot respond satisfactorily to mechanical impacts. Since the ping (small chipping) tends to occur, at present, leading to a relatively short time service life.

そこで、本発明者等は、上述のような観点から、上記の被覆サーメット工具の硬質被覆層の耐チッピング性向上をはかるべく、これの下部層であるTi化合物層に着目し、研究を行った結果、
上記の被覆サーメット工具の硬質被覆層の下部層であるTi化合物層のうちのTiCN層(以下、従来TiCN層という)は、通常の化学蒸着装置にて、
反応ガス組成−体積%で、TiCl:2〜10%、CHCN:0.5〜3%、N:10〜30%、H:残り、
反応雰囲気温度:800〜900℃、
反応雰囲気圧力:6〜20kPa、
の条件で形成されるが、上記従来TiCN層の形成に先だって、
反応ガス組成−体積%で、TiCl:0.2〜1%、CH:1〜5%、H:20〜40%、N:5〜15%、Ar:残り、
反応雰囲気温度:760〜850℃、
反応雰囲気圧力:4〜8kPa、
成膜時間:0.8〜2.0時間、
の条件で、望ましくは0.8〜1.2μmの平均層厚で種薄膜としてのTiCN薄膜(以下、TiCN種薄膜という)を形成し、このTiCN種薄膜の上に上記の従来TiCN層の形成条件と同じ条件でTiCN層を形成すると、形成時の前記TiCN層は、前記TiCN種薄膜の結晶配列に著しく影響を受け、これを十分に履歴するようになり、しかもこの結果形成されたTiCN層(以下、履歴TiCN層という)は、上記の従来TiCN層に比して、一段とすぐれた高温強度を有し、すぐれた耐機械的衝撃性を具備するようになるので、硬質被覆層の上部層が前記Al23層、下部層が上記Ti化合物層で構成され、かつ前記Ti化合物層のうちの1層が前記履歴TiCN層からなる被覆サーメット工具は、特に激しい機械的衝撃を伴なう高速断続切削加工でも、前記硬質被覆層がすぐれた耐チッピング性を発揮し、長期に亘ってすぐれた耐摩耗性を示すようになること。
In view of the above, the present inventors conducted research by paying attention to the Ti compound layer, which is the lower layer, in order to improve the chipping resistance of the hard coating layer of the above-described coated cermet tool. result,
Of the Ti compound layer that is the lower layer of the hard coating layer of the above coated cermet tool, the TiCN layer (hereinafter referred to as the conventional TiCN layer) is a normal chemical vapor deposition apparatus.
Reaction gas composition - by volume%, TiCl 4: 2~10%, CH 3 CN: 0.5~3%, N 2: 10~30%, H 2: remainder,
Reaction atmosphere temperature: 800 to 900 ° C.
Reaction atmosphere pressure: 6-20 kPa,
However, prior to the formation of the conventional TiCN layer,
Reaction gas composition - by volume%, TiCl 4: 0.2~1%, CH 4: 1~5%, H 2: 20~40%, N 2: 5~15%, Ar: the remaining,
Reaction atmosphere temperature: 760 to 850 ° C.
Reaction atmosphere pressure: 4-8 kPa,
Deposition time: 0.8 to 2.0 hours
The TiCN thin film as a seed thin film (hereinafter referred to as a TiCN seed thin film) is preferably formed with an average layer thickness of 0.8 to 1.2 μm under the above conditions, and the above-mentioned conventional TiCN layer is formed on the TiCN seed thin film. When the TiCN layer is formed under the same conditions, the TiCN layer at the time of formation is significantly affected by the crystal arrangement of the TiCN seed thin film, and the TiCN layer is formed as a result. (Hereinafter referred to as a history TiCN layer) has a higher high-temperature strength and superior mechanical impact resistance compared to the above-described conventional TiCN layer. The coated cermet tool in which the Al 2 O 3 layer and the lower layer are composed of the Ti compound layer and one of the Ti compound layers is the hysteresis TiCN layer is accompanied by particularly severe mechanical impact. Even in high-speed intermittent cutting, the hard coating layer exhibits excellent chipping resistance and exhibits excellent wear resistance over a long period of time.

(b)上記の被覆サーメット工具の硬質被覆層の下部層を構成する従来TiCN層と履歴TiCN層について、
電界放出型走査電子顕微鏡を用い、図1(a),(b)に概略説明図で示される通り、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である{013}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフを作成した場合、前記従来TiCN層は、図3に例示される通り、{013}面の測定傾斜角の分布が0〜45度の範囲内で不偏的な傾斜角度数分布グラフを示すのに対して、前記履歴TiCN層は、図2に例示される通り、傾斜角区分の特定位置にシャープな最高ピークが現れ、このシャープな最高ピークは、グラフ横軸の傾斜角区分に現れる高さが上記TiCN種薄膜形成時の反応雰囲気温度および反応雰囲気圧力によって変化し、グラフ横軸の傾斜角区分位置が同じく反応ガスのTiCl含有量によって変化すること。
(B) About the conventional TiCN layer and the history TiCN layer that constitute the lower layer of the hard coating layer of the above coated cermet tool,
Using a field emission scanning electron microscope, as shown in the schematic explanatory diagrams of FIGS. 1A and 1B, electron beams are individually applied to crystal grains having a cubic crystal lattice existing within the measurement range of the surface polished surface. Irradiation is performed to measure an inclination angle formed by a normal line of a {013} plane that is a crystal plane of the crystal grain with respect to a normal line of the surface-polished surface. When the measured inclination angle within the range is divided for each pitch of 0.25 degrees and the inclination angle number distribution graph is created by summing up the frequencies existing in each division, the conventional TiCN layer is formed as shown in FIG. As shown in FIG. 2, the distribution of measured tilt angles on the {013} plane shows an unbiased tilt angle number distribution graph in the range of 0 to 45 degrees, whereas the history TiCN layer is illustrated in FIG. As shown, a sharp peak appears at a specific position in the tilt angle section. The maximum peak that appears on the horizontal axis of the graph varies depending on the reaction atmosphere temperature and the pressure of the reaction atmosphere when the TiCN seed thin film is formed. Varies with TiCl 4 content.

(c)上記の通り、上記TiCN種薄膜形成に際して、上記反応ガスにおけるTiClの含有量を0.2〜1%とすることにより、上記履歴TiCN層の傾斜角度数分布グラフで、シャープな最高ピークが傾斜角区分の20〜30度の範囲内に現れ、かつ、反応雰囲気温度を760〜850℃、反応雰囲気圧力を4〜8kPaとすることにより、前記20〜30度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の60〜85%の割合を占める傾斜角度数分布グラフを示すようになるが、この場合、試験結果によれば、TiClの含有量が0.2%未満になると、上記履歴TiCN層の傾斜角度数分布グラフで、最高ピークの傾斜角区分位置が30度を越えた位置に現れるようになり、一方その含有量が1%を越えると逆に最高ピークの傾斜角区分位置が20度未満の位置になってしまい、いずれの場合も前記履歴TiCN層に所望のすぐれた高温強度が得られず、また、反応雰囲気温度および反応雰囲気圧力に関しては、温度が760℃未満になったり、圧力が4kPa未満になると、前記履歴TiCN層の傾斜角度数分布グラフにおける20〜30度の範囲内に存在する度数数割合が85%を越えて高くなり過ぎて、高温硬さが急激に低下するようになり、一方温度が850℃を越えたり、圧力が8kPaを越えたりすると、同度数割合が60%未満になってしまい、所望のすぐれた高温強度を確保することができないこと。
以上(a)〜(c)に示される研究結果を得たのである。
(C) As described above, when the TiCN seed thin film is formed, by setting the content of TiCl 4 in the reaction gas to 0.2 to 1%, the gradient angle distribution graph of the history TiCN layer has a sharp maximum. A peak appears in the range of 20 to 30 degrees of the tilt angle section, and exists in the range of 20 to 30 degrees by setting the reaction atmosphere temperature to 760 to 850 ° C. and the reaction atmosphere pressure to 4 to 8 kPa. An inclination angle distribution graph occupying a ratio of 60 to 85% of the entire frequency in the inclination angle distribution graph is shown in this case. In this case, according to the test results, the content of TiCl 4 is 0. When it is less than 2%, the highest peak inclination angle section position appears in the above-mentioned history TiCN layer inclination angle number distribution graph, while its content is 1%. On the contrary, the inclination angle section position of the highest peak is less than 20 degrees, and in any case, the desired excellent high temperature strength cannot be obtained in the hysteresis TiCN layer, and the reaction atmosphere temperature and reaction atmosphere are not obtained. Regarding the pressure, when the temperature is less than 760 ° C. or the pressure is less than 4 kPa, the frequency ratio existing in the range of 20 to 30 degrees in the gradient angle distribution graph of the history TiCN layer exceeds 85%. When the temperature exceeds 850 ° C. or the pressure exceeds 8 kPa, the power ratio becomes less than 60%, which is the desired superiority. Inability to ensure high temperature strength.
The research results shown in (a) to (c) above were obtained.

この発明は、上記の研究結果に基づいてなされたものであって、WC基超硬合金またはTiCN基サーメットで構成された工具基体の表面に、
(a)下部層が、いずれも化学蒸着形成された、TiC層、TiN層、TiCN層、TiCO層、およびTiCNO層のうちの2層以上からなり、かつ3〜20μmの合計平均層厚を有するTi化合物層、
(b)上部層が、化学蒸着形成された、1〜15μmの平均層厚を有するAl層、
以上(a)および(b)で構成された硬質被覆層を形成してなる表面被覆サーメット製切削工具において、上記(a)のTi化合物層のうちの1層を、2.5〜15μmの平均層厚を有し、かつ、
電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である{013}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、20〜30度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記20〜30度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の60〜85%の割合を占める傾斜角度数分布グラフを示す履歴TiCN層、
で構成してなる、高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する被覆サーメット工具に特徴を有するものである。
The present invention has been made based on the above research results, and on the surface of a tool base composed of a WC-based cemented carbide or TiCN-based cermet,
(A) The lower layer is composed of two or more of a TiC layer, a TiN layer, a TiCN layer, a TiCO layer, and a TiCNO layer, all formed by chemical vapor deposition, and has a total average layer thickness of 3 to 20 μm. Ti compound layer,
(B) Al 2 O 3 layer having an average layer thickness of 1 to 15 μm, wherein the upper layer is formed by chemical vapor deposition,
In the surface-coated cermet cutting tool formed by forming the hard coating layer composed of (a) and (b) above, one of the Ti compound layers of the above (a) is an average of 2.5 to 15 μm. Having a layer thickness, and
Using a field emission scanning electron microscope, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface is irradiated with an electron beam, and the crystal grain is normal to the surface polished surface. The tilt angle formed by the normal line of the {013} plane, which is the crystal plane, is measured, and among the measured tilt angles, the measured tilt angles within the range of 0 to 45 degrees are classified for each pitch of 0.25 degrees. In addition, in the inclination angle number distribution graph obtained by summing up the frequencies existing in each section, the highest peak exists in the tilt angle section within the range of 20 to 30 degrees and also exists within the range of 20 to 30 degrees. A history TiCN layer showing an inclination angle frequency distribution graph in which the total frequency to be occupied accounts for 60 to 85% of the entire frequency in the inclination angle frequency distribution graph,
It is characterized by a coated cermet tool that exhibits excellent chipping resistance with a hard coating layer in high-speed intermittent cutting.

つぎに、この発明の被覆サーメット工具の硬質被覆層の構成層について、上記の通りに数値限定した理由を以下に説明する。
(a)Ti化合物層(下部層)
Ti化合物層は、自体が高温強度を有し、これの存在によって硬質被覆層が高温強度を具備するようになるほか、工具基体と上部層であるAl23層のいずれにも強固に密着し、よって硬質被覆層の工具基体に対する密着性向上に寄与する作用をもつが、その合計平均層厚が3μm未満では、前記作用を十分に発揮させることができず、一方その合計平均層厚が20μmを越えると、特に高熱発生を伴なう高速断続切削で熱塑性変形を起し易くなり、これが偏摩耗の原因となることから、その合計平均層厚を3〜20μmと定めた。
Next, the reason why the constituent layers of the hard coating layer of the coated cermet tool of the present invention are numerically limited as described above will be described below.
(A) Ti compound layer (lower layer)
The Ti compound layer itself has high-temperature strength, and the presence of the Ti compound layer makes the hard coating layer have high-temperature strength, and firmly adheres to both the tool base and the upper Al 2 O 3 layer. Therefore, it has an effect of improving the adhesion of the hard coating layer to the tool base, but if the total average layer thickness is less than 3 μm, the above-mentioned effect cannot be sufficiently exhibited, while the total average layer thickness is If it exceeds 20 μm, it becomes easy to cause thermoplastic deformation particularly by high-speed intermittent cutting accompanied by generation of high heat, which causes uneven wear. Therefore, the total average layer thickness is set to 3 to 20 μm.

(b)履歴TiCN層(下部層)
上記の通り、上記TiCN種薄膜形成に際して、上記反応ガスにおけるTiClの含有量を0.2〜1%とすることにより、傾斜角度数分布グラフで、シャープな最高ピークが傾斜角区分の20〜30度の範囲内に現れ、かつ、反応雰囲気温度を760〜850℃、反応雰囲気圧力を4〜8kPaとすることにより、前記20〜30度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の60〜85%の割合を占める傾斜角度数分布グラフを示す履歴TiCN層が形成されるようになり、この結果として前記履歴TiCN層はすぐれた高温強度を具備するようになるが、その平均層厚が2.5μm未満では所望のすぐれた高温強度を硬質被覆層に具備せしめることができず、一方その平均層厚が15μmを越えると、偏摩耗の原因となる熱塑性変形が発生し易くなり、摩耗が加速するようになることから、その平均層厚を2.5〜15μmと定めた。
(B) History TiCN layer (lower layer)
As described above, when the TiCN seed thin film is formed, by setting the content of TiCl 4 in the reaction gas to 0.2 to 1%, the sharpest peak in the tilt angle distribution graph is 20 to 20 in the tilt angle section. When the reaction atmosphere temperature is set to 760 to 850 ° C. and the reaction atmosphere pressure is set to 4 to 8 kPa, the sum of the frequencies existing in the range of 20 to 30 degrees is the inclination angle number. A hysteresis TiCN layer showing an inclination angle frequency distribution graph that occupies 60 to 85% of the total frequency in the distribution graph is formed, and as a result, the hysteresis TiCN layer has excellent high-temperature strength. However, if the average layer thickness is less than 2.5 μm, the hard coating layer cannot be provided with the desired excellent high-temperature strength, while if the average layer thickness exceeds 15 μm. Easily thermoplastic deformation which causes partial wear is generated, since it becomes worn accelerates, determined the average layer thickness and 2.5~15Myuemu.

(c)Al23層(上部層)
Al23層は、すぐれた高温硬さと耐熱性を有し、硬質被覆層の耐摩耗性向上に寄与するが、その平均層厚が1μm未満では、硬質被覆層に十分な耐摩耗性を発揮せしめることができず、一方その平均層厚が15μmを越えて厚くなりすぎると、チッピングが発生し易くなることから、その平均層厚を1〜15μmと定めた。
(C) Al 2 O 3 layer (upper layer)
The Al 2 O 3 layer has excellent high-temperature hardness and heat resistance, and contributes to improving the wear resistance of the hard coating layer. However, if the average layer thickness is less than 1 μm, the hard coating layer has sufficient wear resistance. On the other hand, if the average layer thickness exceeds 15 μm and becomes too thick, chipping tends to occur. Therefore, the average layer thickness is set to 1 to 15 μm.

なお、切削工具の使用前後の識別を目的として、黄金色の色調を有するTiN層を、必要に応じて蒸着形成してもよいが、この場合の平均層厚は0.1〜1μmでよく、これは0.1μm未満では、十分な識別効果が得られず、一方前記TiN層による前記識別効果は1μmまでの平均層厚で十分であるという理由からである。   In addition, for the purpose of identification before and after the use of the cutting tool, a TiN layer having a golden color tone may be vapor-deposited as necessary, but the average layer thickness in this case may be 0.1 to 1 μm, This is because if the thickness is less than 0.1 μm, a sufficient discrimination effect cannot be obtained, while the discrimination effect by the TiN layer is sufficient with an average layer thickness of up to 1 μm.

この発明被覆サーメット工具は、機械的熱的衝撃がきわめて高い鋼や鋳鉄などの高速断続切削でも、硬質被覆層の下部層のうちの1層である履歴TiCN層がすぐれた高温強度を有し、すぐれた耐チッピング性を発揮することから、硬質被覆層にチッピングの発生なく、すぐれた耐摩耗性を示すものである。   This invention-coated cermet tool has a high-temperature strength in which the hysteresis TiCN layer, which is one of the lower layers of the hard coating layer, is excellent even in high-speed intermittent cutting such as steel and cast iron with extremely high mechanical and thermal shock, Since it exhibits excellent chipping resistance, the hard coating layer exhibits excellent wear resistance without occurrence of chipping.

つぎに、この発明の被覆サーメット工具を実施例により具体的に説明する。   Next, the coated cermet tool of the present invention will be specifically described with reference to examples.

原料粉末として、いずれも1〜3μmの平均粒径を有するWC粉末、TiC粉末、ZrC粉末、VC粉末、TaC粉末、NbC粉末、Cr32粉末、TiN粉末、TaN粉末、およびCo粉末を用意し、これら原料粉末を、表1に示される配合組成に配合し、さらにワックスを加えてアセトン中で24時間ボールミル混合し、減圧乾燥した後、98MPaの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を5Paの真空中、1370〜1470℃の範囲内の所定の温度に1時間保持の条件で真空焼結し、焼結後、切刃部にR:0.07mmのホーニング加工を施すことによりISO・CNMG120408に規定するスローアウエイチップ形状をもったWC基超硬合金製の工具基体A〜Fをそれぞれ製造した。 WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, and Co powder all having an average particle diameter of 1 to 3 μm are prepared as raw material powders. These raw material powders were blended into the composition shown in Table 1, added with wax, ball milled in acetone for 24 hours, dried under reduced pressure, and pressed into a green compact with a predetermined shape at a pressure of 98 MPa. The green compact was vacuum sintered at a predetermined temperature in the range of 1370 to 1470 ° C. for 1 hour in a vacuum of 5 Pa. After sintering, the cutting edge portion was R: 0.07 mm honing By performing the processing, tool bases A to F made of a WC-base cemented carbide having a throwaway tip shape specified in ISO · CNMG120408 were manufactured.

また、原料粉末として、いずれも0.5〜2μmの平均粒径を有するTiCN(質量比でTiC/TiN=50/50)粉末、Mo2C粉末、ZrC粉末、NbC粉末、TaC粉末、WC粉末、Co粉末、およびNi粉末を用意し、これら原料粉末を、表2に示される配合組成に配合し、ボールミルで24時間湿式混合し、乾燥した後、98MPaの圧力で圧粉体にプレス成形し、この圧粉体を1.3kPaの窒素雰囲気中、温度:1540℃に1時間保持の条件で焼結し、焼結後、切刃部分にR:0.07mmのホーニング加工を施すことによりISO規格・CNMG120412のチップ形状をもったTiCN基サーメット製の工具基体a〜fを形成した。 In addition, as raw material powders, TiCN (mass ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder, all having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and pressed into a compact at a pressure of 98 MPa. The green compact was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after the sintering, the cutting edge portion was subjected to a honing process of R: 0.07 mm. Tool bases a to f made of TiCN-based cermet having a standard / CNMG12041 chip shape were formed.

つぎに、これらの工具基体A〜Fおよび工具基体a〜fの表面に、通常の化学蒸着装置を用い、表3に示される条件にて、硬質被覆層の下部層としてTi化合物層を形成し、この場合、前記Ti化合物層のうちの履歴TiCN層を形成するに際しては、まず表4に示される条件、すなわち試験結果に基づいて定められた目標履歴TiCN層に対する種薄膜a〜kの条件でTiCN種薄膜を形成し、引続いて、上記の通り表3に示される従来TiCN層の形成条件と同じ条件で履歴TiCN層を、表5に示される組み合わせおよび目標層厚で蒸着形成し、ついで同じく表3に示される条件にて、上部層としてAl23層を同じく表5に示される組み合わせで、かつ目標層厚で蒸着形成することにより本発明被覆サーメット工具1〜13をそれぞれ製造した。 Next, a Ti compound layer is formed as a lower layer of the hard coating layer on the surfaces of the tool bases A to F and the tool bases a to f using a normal chemical vapor deposition apparatus under the conditions shown in Table 3. In this case, when forming the history TiCN layer of the Ti compound layer, first, the conditions shown in Table 4, that is, the conditions of the seed thin film a to k for the target history TiCN layer determined based on the test results A TiCN seed thin film is formed, and subsequently, a history TiCN layer is formed by vapor deposition with the combination shown in Table 5 and the target layer thickness under the same conditions as those for forming the conventional TiCN layer shown in Table 3 as described above. also under the conditions shown in Table 3, the combination also shown in Table 5 the Al 2 O 3 layer as an upper layer, and the present invention coated cermet tools 1 to 13 by depositing formed at the target layer thickness it The manufactured.

また、比較の目的で、表6に示される通り、硬質被覆層の下部層および上部層として同じく表3に示される条件で、同じく表6に示される目標層厚のTi化合物層およびAl23層を蒸着形成することにより従来被覆サーメット工具1〜13をそれぞれ製造した。 For comparison purposes, as shown in Table 6, under the conditions shown in Table 3 as the lower and upper layers of the hard coating layer, the Ti compound layer and Al 2 O having the target layer thickness shown in Table 6 are also used. Conventionally coated cermet tools 1 to 13 were produced by vapor deposition of three layers, respectively.

ついで、上記の本発明被覆サーメット工具と従来被覆サーメット工具の硬質被覆層を構成する履歴TiCN層および従来TiCN層について、電界放出型走査電子顕微鏡を用いて、傾斜角度数分布グラフをそれぞれ作成した。
すなわち、上記傾斜角度数分布グラフは、上記の履歴TiCN層および従来TiCN層の表面を研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に70度の入射角度で15kVの加速電圧の電子線を1nAの照射電流で、前記表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に照射して、電子後方散乱回折像装置を用い、30×50μmの領域を0.1μm/stepの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である{013}面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより作成した。
Next, an inclination angle number distribution graph was created for each of the hysteresis TiCN layer and the conventional TiCN layer constituting the hard coating layer of the present invention coated cermet tool and the conventional coated cermet tool using a field emission scanning electron microscope.
That is, the inclination angle number distribution graph is set in a lens barrel of a field emission scanning electron microscope in a state where the surfaces of the hysteresis TiCN layer and the conventional TiCN layer are polished surfaces, and 70 ° An electron backscatter diffraction image apparatus is used by irradiating an electron beam with an acceleration voltage of 15 kV at an incident angle with an irradiation current of 1 nA on each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface. , Measuring the inclination angle formed by the normal of the {013} plane, which is the crystal plane of the crystal grain, with respect to the normal of the polished surface at an interval of 0.1 μm / step in a region of 30 × 50 μm, Based on the measurement results, the measurement inclination angles within the range of 0 to 45 degrees out of the measurement inclination angles are divided for each pitch of 0.25 degrees, and the frequencies existing in each division are tabulated. Created by.

この結果得られた各種の改質TiCN層および従来TiCNの傾斜角度数分布グラフにおいて、{013}面が最高ピークを示す傾斜角区分、並びに20〜30度の範囲内の傾斜角区分内に存在する傾斜角度数の傾斜角度数分布グラフ全体の傾斜角度数に占める割合をそれぞれ表5,6にそれぞれ示した。   In the graphs showing the distribution of tilt angles of various modified TiCN layers and conventional TiCN obtained as a result, the {013} plane is present in the tilt angle section where the peak is the highest, and in the tilt angle section within the range of 20 to 30 degrees. Tables 5 and 6 show the ratios of the tilt angle numbers to the tilt angle number distribution graph as a whole.

上記の各種の傾斜角度数分布グラフにおいて、表5,6にそれぞれ示される通り、本発明被覆サーメット工具の履歴TiCN層は、いずれも{013}面の測定傾斜角の分布が20〜30度の範囲内の傾斜角区分に最高ピークが現れ、かつ20〜30度の範囲内の傾斜角区分内に存在する傾斜角度数の割合が60〜85%である傾斜角度数分布グラフを示すのに対して、従来被覆サーメット工具の従来TiCN層は、いずれも{013}面の測定傾斜角の分布が0〜45度の範囲内で不偏的で、最高ピークが存在せず、20〜30度の範囲内の傾斜角区分内に存在する傾斜角度数の割合も30%以下である傾斜角度数分布グラフを示すものであった。
なお、図2は、本発明被覆サーメット工具9の履歴TiCN層の傾斜角度数分布グラフ、図3は、従来被覆サーメット工具9の従来TiCN層の傾斜角度数分布グラフをそれぞれ示すものである。
In each of the above-mentioned various inclination angle number distribution graphs, as shown in Tables 5 and 6, the history TiCN layer of the coated cermet tool of the present invention has a measured inclination angle distribution on the {013} plane of 20 to 30 degrees. In contrast to the inclination angle distribution graph, the highest peak appears in the inclination angle section within the range, and the ratio of the inclination angle numbers existing in the inclination angle section within the range of 20 to 30 degrees is 60 to 85%. In the conventional TiCN layer of the conventional coated cermet tool, the distribution of the measured inclination angle of the {013} plane is unbiased within the range of 0 to 45 degrees, the highest peak does not exist, and the range of 20 to 30 degrees. The inclination angle number distribution graph in which the ratio of the inclination angle numbers existing in the inclination angle section is 30% or less was also shown.
FIG. 2 is a graph showing the inclination angle number distribution of the history TiCN layer of the coated cermet tool 9 of the present invention, and FIG. 3 is a graph showing the inclination angle number distribution graph of the conventional TiCN layer of the conventional coated cermet tool 9.

さらに、上記の本発明被覆サーメット工具1〜13および従来被覆サーメット工具1〜13について、これの硬質被覆層の構成層を電子線マイクロアナライザー(EPMA)およびオージェ分光分析装置を用いて観察(層の縦断面を観察)したところ、前者および後者とも目標組成と実質的に同じ組成を有するTi化合物層とAl23層からなることが確認された。また、これらの被覆サーメット工具の硬質被覆層の構成層の厚さを、走査型電子顕微鏡を用いて測定(同じく縦断面測定)したところ、いずれも目標層厚と実質的に同じ平均層厚(5点測定の平均値)を示した。 Further, for the above-described coated cermet tools 1 to 13 and the conventional coated cermet tools 1 to 13, the constituent layers of the hard coating layer were observed using an electron beam microanalyzer (EPMA) and an Auger spectroscopic analysis device (layer When the longitudinal section was observed), it was confirmed that both the former and the latter were composed of a Ti compound layer and an Al 2 O 3 layer having substantially the same composition as the target composition. Moreover, when the thickness of the constituent layer of the hard coating layer of these coated cermet tools was measured using a scanning electron microscope (same longitudinal section measurement), the average layer thickness (substantially the same as the target layer thickness) Average value of 5-point measurement) was shown.

つぎに、上記の各種の被覆サーメット工具をいずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、本発明被覆サーメット工具1〜13および従来被覆サーメット工具1〜13について、
被削材:JIS・SCM440の長さ方向等間隔4本縦溝入り丸棒、
切削速度:360m/min、
切り込み:1.5mm、
送り:0.20mm/rev、
切削時間: 分、
の条件(切削条件A)での合金鋼の乾式高速断続切削試験(通常の切削速度は220m/min)、
被削材:JIS・S50Cの長さ方向等間隔4本縦溝入り丸棒、
切削速度:360m/min、
切り込み:2.0mm、
送り:0.25mm/rev、
切削時間:10分、
の条件(切削条件B)での炭素鋼の乾式高速断続切削試験(通常の切削速度は250m/min)、
被削材:JIS・FCD450の長さ方向等間隔4本縦溝入り丸棒、
切削速度:360m/min、
切り込み:2.0mm、
送り:0.40mm/rev、
切削時間:10分、
の条件(切削条件C)でのダクタイル鋳鉄の乾式高速断続切削試験(通常の切削速度は220m/min)を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表7に示した。
Next, in the state where each of the various coated cermet tools is screwed to the tip of the tool steel tool with a fixing jig, the present coated cermet tools 1 to 13 and the conventional coated cermet tools 1 to 13 are as follows.
Work material: JIS · SCM440 lengthwise equidistant 4 vertical grooved round bar,
Cutting speed: 360 m / min,
Incision: 1.5mm,
Feed: 0.20mm / rev,
Cutting time: minutes,
Dry high-speed intermittent cutting test (normal cutting speed is 220 m / min) of alloy steel under the above conditions (cutting condition A),
Work material: JIS / S50C lengthwise equal 4 round bars with vertical grooves,
Cutting speed: 360 m / min,
Cutting depth: 2.0 mm
Feed: 0.25mm / rev,
Cutting time: 10 minutes,
Dry high-speed intermittent cutting test of carbon steel under the conditions (cutting condition B) (normal cutting speed is 250 m / min),
Work material: JIS / FCD450 lengthwise equidistant round bars with 4 vertical grooves,
Cutting speed: 360 m / min,
Cutting depth: 2.0 mm
Feed: 0.40mm / rev,
Cutting time: 10 minutes,
The dry high-speed intermittent cutting test (normal cutting speed is 220 m / min) of ductile cast iron under the above conditions (cutting condition C), and the flank wear width of the cutting edge was measured in any cutting test. The measurement results are shown in Table 7.

Figure 2006102834
Figure 2006102834

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表5〜7に示される結果から、本発明被覆サーメット工具1〜13は、いずれも硬質被覆層の下部層のうちの1層が、{013}面の傾斜角が20〜30度の範囲内の傾斜角区分で最高ピークを示すと共に、前記20〜30度の傾斜角区分範囲内に存在する度数の合計割合が60〜85%を占める傾斜角度数分布グラフを示す履歴TiCN層で構成され、機械的衝撃がきわめて高い鋼や鋳鉄の高速断続切削でも、前記履歴TiCN層がすぐれた高温強度を有し、すぐれた耐チッピング性を発揮することから、切刃部のチッピング発生が著しく抑制され、すぐれた耐摩耗性を示すのに対して、硬質被覆層の下部層のうちの1層が、{013}面の測定傾斜角の分布が0〜45度の範囲内で不偏的で、最高ピークが存在しない傾斜角度数分布グラフを示す従来TiCN層で構成された従来被覆サーメット工具1〜13においては、いずれも高速断続切削では硬質被覆層の耐機械的衝撃性が不十分であるために、切刃部にチッピングが発生し、比較的短時間で使用寿命に至ることが明らかである。   From the results shown in Tables 5 to 7, in the coated cermet tools 1 to 13 of the present invention, one of the lower layers of the hard coating layer is within the range where the inclination angle of the {013} plane is 20 to 30 degrees. And a history TiCN layer showing an inclination angle number distribution graph in which the total ratio of the frequencies existing in the inclination angle division range of 20 to 30 degrees occupies 60 to 85%. Even in high-speed intermittent cutting of steel and cast iron with extremely high mechanical impact, the history TiCN layer has excellent high-temperature strength and exhibits excellent chipping resistance, so that the occurrence of chipping at the cutting edge is remarkably suppressed, While exhibiting excellent wear resistance, one of the lower layers of the hard coating layer is unbiased in the distribution of the measured inclination angle of the {013} plane within the range of 0 to 45 degrees, the highest peak Inclination angle distribution graph In the conventional coated cermet tools 1 to 13 constituted by the conventional TiCN layer, the mechanical impact resistance of the hard coating layer is insufficient in high-speed intermittent cutting, so that chipping occurs at the cutting edge. It is clear that the service life is reached in a relatively short time.

上述のように、この発明の被覆サーメット工具は、各種鋼や鋳鉄などの通常の条件での連続切削や断続切削は勿論のこと、特に高温強度が要求される高速断続切削でもすぐれた耐チッピング性を示し、長期に亘ってすぐれた切削性能を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。   As described above, the coated cermet tool of the present invention has excellent chipping resistance not only for continuous cutting and interrupted cutting under normal conditions such as various steels and cast iron, but also for high-speed interrupted cutting particularly requiring high-temperature strength. Since it exhibits excellent cutting performance over a long period of time, it can sufficiently satisfy the high performance of the cutting device, the labor saving and energy saving of the cutting work, and the cost reduction.

硬質被覆層を構成する各種TiCN層における結晶粒の{013}面の傾斜角の測定範囲を示す概略説明図である。It is a schematic explanatory drawing which shows the measurement range of the inclination angle of the {013} plane of the crystal grain in the various TiCN layers which comprise a hard coating layer. 本発明被覆サーメット工具9の硬質被覆層の下部層を構成する履歴TiCN層の{013}面の傾斜角度数分布グラフである。It is an inclination angle number distribution graph of the {013} plane of the history TiCN layer which constitutes the lower layer of the hard coating layer of the present coated cermet tool 9. 従来被覆サーメット工具9の硬質被覆層下部層を構成する従来TiCN層の{013}面の傾斜角度数分布グラフである。6 is a graph showing the inclination angle distribution of the {013} plane of the conventional TiCN layer constituting the lower hard coating layer of the conventional coated cermet tool 9.

Claims (1)

炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に、
(a)下部層が、いずれも化学蒸着形成された、Tiの炭化物層、窒化物層、炭窒化物層、炭酸化物層、および炭窒酸化物層のうちの2層以上からなり、かつ3〜20μmの合計平均層厚を有するTi化合物層、
(b)上部層が、化学蒸着形成された、1〜15μmの平均層厚を有する酸化アルミニウム層、
以上(a)および(b)で構成された硬質被覆層を形成してなる表面被覆サーメット製切削工具において、
上記(a)のTi化合物層のうちの1層を、2.5〜15μmの平均層厚を有し、かつ、
電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である{013}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、20〜30度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記20〜30度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の60〜85%の割合を占める傾斜角度数分布グラフを示す炭窒化チタン層、
で構成したことを特徴とする高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具。
On the surface of the tool base composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(A) The lower layer is composed of two or more of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer, and carbonitride layer, all formed by chemical vapor deposition, and 3 A Ti compound layer having a total average layer thickness of ˜20 μm,
(B) an aluminum oxide layer having an average layer thickness of 1 to 15 μm, wherein the upper layer is formed by chemical vapor deposition;
In the cutting tool made of surface-coated cermet formed by forming the hard coating layer composed of (a) and (b) above,
One of the Ti compound layers of (a) above has an average layer thickness of 2.5 to 15 μm, and
Using a field emission scanning electron microscope, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polishing surface is irradiated with an electron beam, and the crystal grain is compared with the normal line of the surface polishing surface. The tilt angle formed by the normal of the {013} plane, which is the crystal plane, is measured, and among the measured tilt angles, the measured tilt angles within the range of 0 to 45 degrees are classified for each pitch of 0.25 degrees. In addition, in the inclination angle number distribution graph obtained by summing up the frequencies existing in each section, the highest peak exists in the inclination angle section in the range of 20 to 30 degrees and also exists in the range of 20 to 30 degrees. A titanium carbonitride layer showing a tilt angle frequency distribution graph in which the total frequency to be occupied accounts for 60 to 85% of the total power in the tilt angle frequency distribution graph,
A surface-coated cermet cutting tool that exhibits excellent chipping resistance with a hard coating layer in high-speed intermittent cutting characterized by comprising
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Publication number Priority date Publication date Assignee Title
JP2009006426A (en) * 2007-06-27 2009-01-15 Mitsubishi Materials Corp Surface coated cutting tool with hard coating layer exerting superior wear resistance in high speed cutting

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009006426A (en) * 2007-06-27 2009-01-15 Mitsubishi Materials Corp Surface coated cutting tool with hard coating layer exerting superior wear resistance in high speed cutting

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