JP2006102699A - Work holder - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a work holder, which suppresses the formation of breaks and cracks of works such as a crystal plate, a ceramic plate, or the like and has high reliability. <P>SOLUTION: A first work holding plate 1 has a rectangular recessed accommodation part 11 for accommodating a plurality of rectangular works W, window parts 12 through which part of the accommodation recessed part passes, and through holes on the corner of the accommodation recessed part, which is larger than the corner. A second work holding plate 2 has second windows formed at positions corresponding to the holes. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a workpiece holder for holding a workpiece such as a crystal plate or a ceramic plate, and to an improvement of the workpiece holder that can suppress cracking or chipping of the workpiece. In particular, the present invention relates to a workpiece holder that is preferable for use as a workpiece cleaning jig.

For example, a crystal resonator is configured by obtaining a plurality of crystal plates formed in a predetermined shape from a wafer and forming electrodes on each of these crystal plates. In order to improve the reliability of the adhesion between the crystal plate and the electrode material, before forming the electrode on the crystal plate, remove all unnecessary substances such as abrasives and etching liquid residues and dust attached to the surface of the crystal plate. A cleaning step for removal is essential. In the cleaning process, the crystal plates are individually housed in a work holder having a window portion into which the cleaning liquid is introduced, and the work holder is put into the cleaning liquid and swung up and down for cleaning. The cleaning liquid includes an acid solution, a surfactant solution, and warm pure water, and the workpiece holder is selectively put into the cleaning tank in which these individual cleaning liquids are placed, and cleaning is performed. The Recently, as shown in Patent Document 1, in order to be able to clean a crystal plate cleanly and uniformly in a short time, a cleaning jig in which individual crystal plates are cleaned in a flat arrangement is widely used. This is the current situation.
Japanese Patent Laid-Open No. 10-145166

  However, in the workpiece holder of Patent Document 1, since the edges of the workpiece such as a crystal plate are in point contact with the retaining piece, the workpiece swings within the arrangement portion, and this contact portion is interposed. Chips and cracks may occur on the workpiece. There is a very high risk that such cracks and chipping of the workpiece are caused by local concentration of stress on the workpiece. For this reason, there is a problem that a defective workpiece is generated and the yield is reduced.

  An object of the present invention is to provide a work holding tool with higher reliability by suppressing cracking and chipping of a work such as a crystal plate and a ceramic plate.

  Therefore, as shown in claim 1, the work holder according to the present invention is provided in close contact with a spacer in which a rectangular storage hole for storing a plurality of rectangular works is formed, and on the front and back surfaces of the spacer. And a workpiece holding tool comprising a first workpiece holding plate and a second workpiece holding plate in which a window portion is formed by exposing a part of the spacer accommodation hole, and the spacer is accommodated therein. A through hole larger than the angle is formed at a corner of the hole, and a second window is formed in the first work holding plate and the second work holding plate at a position corresponding to the through hole. To do.

  Moreover, as shown in claim 2, in addition to the above-described configuration, the spacer and the work holding plate on one side of the front and back are integrally formed to form a first work holding plate, and the first work holding plate Is a rectangular storage recess for storing a plurality of rectangular workpieces, a window portion that penetrates a part of the storage recess, and a through hole larger than the corner is formed at the corner of the storage recess, The second work holding plate is formed with a second window at a position corresponding to the through hole.

  According to a third aspect of the present invention, in addition to the above-described configuration, the work holding plate is placed in close contact with the work in a state in which the work is housed, and then the work holding tool is swung. It is characterized by being a workpiece cleaning jig that is cleaned.

  According to a fourth aspect of the present invention, in addition to the above-described configuration, the storage hole or the two opposing sides of the storage recess is a direction perpendicular to the swinging direction of the work holder. It is characterized by being formed so as to be biased toward the center from the end.

  In addition to the above-described configuration, the storage hole or the storage recess is formed in a matrix shape on the work holder and is in a swinging direction of the work holder. A window is formed by exposing or penetrating a part of the plurality of storage holes or the plurality of storage recesses in units of rows or columns.

  According to a sixth aspect of the present invention, in addition to the above-described configuration, the second work holding plate has a convex portion formed in a region corresponding to the storage hole or the storage recess, and the workpiece is When the respective elements of the workpiece holding plate are arranged in close contact with each other in a stored state, the position of the workpiece stored by the convex portion is regulated.

  According to claim 1 of the present invention, when the workpiece holder is used for transporting and cleaning, the corner portion of the rectangular workpiece does not come into contact with the corner portion of the storage hole, so that the corner portion of the workpiece is broken or cracked. Can be suppressed. Also, by checking the state of the corners of each workpiece from the four through holes of the storage holes and the second window of each workpiece holding plate, it is possible to detect workpieces and cracks at an early stage, and to select defective products. Easy to do. Accordingly, it is possible to provide a more reliable workpiece holder that is less likely to cause defective workpieces and can suppress a decrease in yield.

  According to the second aspect of the present invention, in addition to the above-described effects, the spacer and one work holding body are integrally formed. Therefore, the work holding body is easily assembled and is not easily displaced.

  According to claim 3 of the present invention, in addition to the above-described effects, when the workpiece holder is swung to wash the workpiece, the corner portion of the rectangular workpiece contacts the corner portion of the storage hole. It is possible to suppress the occurrence of cracks and cracks from the corners of the workpiece. In addition, the cleaning liquid can be flowed in and out from the storage hole or the four through holes of the storage recess and the corresponding second window of the holding plate. The cleaning effect is enhanced by flowing in and discharging the cleaning liquid from the corner of the workpiece. Accordingly, it is possible to provide a more reliable workpiece holder for cleaning, which is less likely to cause defective workpieces and can suppress a decrease in yield while further improving the circulation function of the cleaning liquid.

  According to claim 4 of the present invention, in addition to the above-described effects, when washing, two sides facing each other in a direction perpendicular to the swinging direction of the storage hole or the storage recess are mutually connected from the end of the through hole. Since it is formed to be biased toward the center, the two sides of the workpiece orthogonal to the swinging direction do not come into contact with the boundary part between the two sides facing the swinging direction of the storage hole or the storage recess and the through hole. For this reason, there is no chipping or cracking of the workpiece due to local stress concentration on the workpiece due to the contact of this portion.

  According to claim 5 of the present invention, in addition to the above-described effects, the window portion includes a plurality of storage holes or a part of the plurality of storage recesses along the direction in which the workpiece swings in row units or column units. Since it is exposed or penetrated, it is possible to enhance the flowability and dischargeability of the cleaning liquid into the storage hole or the storage recess without enlarging the area of the window more than necessary. Therefore, the mechanical strength of the cleaning jig does not decrease due to an excessively large window area with respect to the storage hole or the storage recess. In addition, the contact area with the storage hole or storage recess for supporting the work is reduced, and there is no inconvenience that stress is concentrated on the work during cleaning or the work is dropped from the window.

  According to claim 6 of the present invention, in addition to the above-described effects, the convex portion of the second work holding plate swings in a state where the work main surface in the storage hole or the storage recess is inclined when cleaning is performed. Can be suppressed. Therefore, chipping and cracking of the workpiece due to local stress concentration on the workpiece can be further suppressed. In addition, since the contact area between the workpiece and the second workpiece holding plate is reduced, sticking between the workpiece and the workpiece holding plate is suppressed by the surface tension of the cleaning liquid, so that the workpiece oscillating property is not deteriorated and the workpiece cleaning is performed. Later drying is also enhanced.

  A first embodiment according to the present invention will be described with reference to the drawings, taking a cleaning jig as an example of a work holder used for a rectangular crystal plate. FIG. 1 is a schematic exploded perspective view showing a work holder according to an embodiment of the present invention, FIG. 2 is a plan view of a storage side of a first work holding plate according to the first embodiment, and FIG. FIG. 4 is a plan view of the storage side of the second work holding plate according to the first embodiment, and FIG. 4 is a partial cross-sectional view of the assembled state of FIGS. The workpiece cleaning jig is, for example, a rectangular plate as a whole, and is made of SUS-304 or the like. It consists of a first work holding plate 1 and a second work holding plate 2 and is configured to be detachable.

  The first work holding plate 1 has a plurality of rectangular storage recesses 11 for storing a rectangular crystal plate W in a matrix. Each of the storage recesses 11 is formed in a rectangular shape corresponding to the rectangular crystal plate W to be stored, so that the two opposing short sides (W1, W3) of the crystal plate, or the opposing lengths thereof. Two sides (W2, W4) of the side are formed substantially in parallel with two opposing short sides (115, 117) or two opposing long sides (116, 118) of the storage recess. . In addition, for example, circular through holes 111, 112, 113, 114 larger than the corners are formed at the four corners of each storage recess 11, and the corners of the rectangular quartz crystal plate W are the corners of the storage recess 11. It is configured not to touch the part. With this configuration, it is possible to suppress the occurrence of cracks and cracks from the corners of the workpiece. Further, the first work holding plate 1 has a single slit (window) 12 that allows the cleaning liquid to flow in and out while partially passing through the storage recesses 11 in units of columns (or in units of rows). Is formed. The slit 12 is formed along the direction in which the crystal plate W swings when the crystal plate W is cleaned.

  The second workpiece holding plate 2 is formed with a similar single slit (window) 22 formed by allowing the cleaning liquid to flow in and out at a portion corresponding to the slit (window) 12 of the first workpiece holding plate. ing. In addition, circular second windows 211, 212, 213, and 214 similar to the first work holding plate are formed in portions corresponding to the through holes 111, 112, 113, and 114 of the first work holding plate. Is formed. With these configurations, when the second work holding plate is closely disposed in a state in which the crystal plate W is housed in the housing recess of the first work holding plate, the through holes 111 of the first work holding plate, Since 112, 113, 114 and the slit 12 are arranged at positions where they overlap the second windows 211, 212, 213, 214 and the slit 22 of the second work holding plate, the cleaning liquid flows into the storage recess 11. And discharge can be improved.

  The storage recesses, the through holes, the second window portions, the slits, and the like in each workpiece holding plate are formed by an etching technique from the viewpoint of ease of creation and cost advantages. Although not shown, the first work holding plate and the second work holding plate are configured by welding a stack of thin plates etched so as to correspond to the shape described above. Further, the first work holding plate is configured to be separated into a spacer portion and a lower work holding plate portion (first holding plate) when welding the laminated thin plates as described above. You can also do things. In this embodiment, since there is a merit that the assembly is easy, only the spacer and one work holding body are integrally formed are shown. Moreover, since the thickness of the thin plate of each layer is set to 0.1 mm or less, the edge of the cross section by the etching can be reduced, so that even if the cross section of the storage recess comes into contact with the work, chipping or cracking of the work can be suppressed.

  The second workpiece holding plate 2 is disposed in close contact with the storage recess 11 of the first workpiece holding plate 1 configured as described above in a state in which the quartz plate W is stored, and is screwed, for example. The workpiece cleaning jig is put into a cleaning tank (not shown) in which a cleaning liquid is placed. The cleaning jig is, for example, the short side (W1, W3) of the quartz plate, and along the short side (115, 117) of the storage recess formed substantially parallel to the short side of the quartz plate. By swinging (in the direction along the slit 12), the surface of the crystal plate W inside the workpiece cleaning jig can be cleaned. At this time, the quartz plate W swings linearly along the short sides (115, 117) of the storage recess, so that it can be suppressed from rotating while rotating in the storage recess. Therefore, the corner portion of the crystal plate contacts the short side portion or the long side portion in the storage recess, or the specific portion of the storage recess contacts the dot side to the short side portion or the long side portion of the crystal plate. This prevents the workpiece from being broken or cracked due to local stress concentration on the quartz plate. The direction in which the cleaning jig swings may be a direction along the long side of the quartz plate that is inverted by 90 °.

  Next, a second embodiment according to the present invention will be described with reference to the drawings, taking a cleaning jig as an example of a workpiece holder used for a rectangular crystal plate. FIG. 5 is a plan view of the storage side of the first work holding plate according to the second embodiment of the present invention, and FIG. 6 is a plan view of the storage side of the second work holding plate according to the second embodiment. 7 is a partial cross-sectional view of the assembled state of FIGS. 5 and 6. In addition, the same number is attached | subjected about the part similar to the said 1st Embodiment, and it demonstrates focusing on difference while omitting a part of description.

  In the second embodiment, as shown in FIG. 5, the short sides 115 and 117 (facing in the direction perpendicular to the swinging direction) of the storage concave portion 11 of the first work holding plate 1 are opposed to the storage concave portion. A gap L is formed by deviating toward the center from the boundary portions (end portions) K1, K2, K3, K4 between the long sides 116, 118 and the through holes 111, 112, 113, 114. With these configurations, when the quartz plate W is swung, the long sides W1 and W2 of the quartz plate orthogonal to the rocking direction correspond to the boundary portion K1 of the storage recess. There is no contact with K2, K3, K4. The boundary portion is formed with corners, and any chipping or cracking due to local stress concentration on the long sides W1, W2 of the quartz plate due to contact with the boundary portion is eliminated.

  Moreover, as shown in FIG. 6, the convex part 21 is formed in the part corresponding to the accommodation recessed part 11 of the said 1st workpiece holding board about the 2nd workpiece holding board 2 by methods, such as an etching. With these configurations, as shown in FIG. 7, the second work holding plate is placed in a state where the crystal plate W is housed in the housing recess of the first work holding plate as compared with the structure of the first embodiment. When closely arranged, the position of the crystal plate W in the storage recess 11 is regulated by the convex portion 21, and the workpiece main surface in the storage recess is prevented from being swung in an inclined state. Therefore, cracks and cracks due to local stress concentration on the quartz plate W are further suppressed.

  The second workpiece holding plate 2 is disposed in close contact with the storage recess 11 of the first workpiece holding plate 1 configured as described above in a state in which the quartz plate W is stored, and is screwed, for example. The workpiece cleaning jig is put into a cleaning tank (not shown) in which a cleaning liquid is placed. The cleaning jig is, for example, the short side (W1, W3) of the quartz plate, and along the short side (115, 117) of the storage recess formed substantially parallel to the short side of the quartz plate. By swinging (in the direction along the slit 12), the surface of the crystal plate W inside the workpiece cleaning jig can be cleaned. The direction in which the cleaning jig swings may be a direction along the long side of the quartz plate that is inverted by 90 °.

  In each of the above embodiments, the through hole shape of the first work holding plate is a circular shape as an example. However, if the corner portion of the rectangular crystal plate can be prevented from contacting the side portion of the storage recess, Other shapes may be used. Further, if the through hole of the first work holding plate and the through hole of the second work holding plate are arranged at the overlapping position, it is not necessary to have the same shape. Furthermore, although the window portion has a single slit shape as an example, other shapes may be used as long as they do not reduce the inflow and discharge properties of the cleaning liquid into the storage recess. Moreover, although the form of this invention demonstrated what wash | cleaned by rock | fluctuating a cleaning jig in a specific direction, it combined with another mechanism, such as an ultrasonic wave, or cleaned only with another mechanism, such as an ultrasonic wave. You may do. Furthermore, although the quartz plate is taken as an example of the rectangular workpiece, the rectangular workpiece can be applied to other piezoelectric plates such as a rectangular quartz wafer and ceramic. In the above embodiment, the example of use as a cleaning jig is mainly described as a work holder, but it can also be used as a transfer work holder or a film forming work holder.

  The present invention can be implemented in various other forms without departing from the spirit or containment characteristics thereof, and should not be interpreted in a limited manner. The scope of the present invention is indicated by the claims, and is not limited by the text of the specification. Further, all modifications and changes belonging to the equivalent scope of the claims are within the scope of the present invention.

The typical disassembled perspective view which shows the workpiece | work washing jig | tool of embodiment of this invention. The storage side top view of the 1st workpiece holding plate by a 1st embodiment. The storage side top view of the 2nd workpiece holding board by a 1st embodiment. FIG. 4 is a partial cross-sectional view of the assembled state of FIGS. 2 and 3. The storage side top view of the 1st workpiece holding plate by a 2nd embodiment. The storage side top view of the 2nd workpiece holding board by a 2nd embodiment. FIG. 7 is a partial cross-sectional view of the assembled state of FIGS. 5 and 6.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 1st work holding plate 2 2nd work holding plate W Crystal board (work)

Claims (6)

A spacer formed with a rectangular storage hole for storing a plurality of rectangular workpieces, and a window portion that is in close contact with the front and back surfaces of the spacer and that exposes a part of the spacer storage hole are formed. A workpiece holder comprising the first workpiece holding plate and the second workpiece holding plate, wherein a through hole larger than the corner is formed at a corner of the storage hole of the spacer. A work holder, wherein a second window is formed at a position corresponding to the through hole in the holding plate and the second work holding plate. The spacer and one of the front and back work holding plates are integrally formed to form a first work holding plate, and the first work holding plate includes a rectangular storage recess for storing a plurality of rectangular works. A through-hole passing through a part of the storage recess, and a through-hole larger than the corner is formed at a corner of the storage recess, and the second work holding plate is positioned at a position corresponding to the through-hole. The workpiece holder according to claim 1, wherein two windows are formed. Patent is characterized in that it is a workpiece cleaning jig in which each element of the workpiece holding plate is placed in close contact with the workpiece stored and placed in a cleaning liquid, and the workpiece holder is swung to perform cleaning. The workpiece holder according to claim 1 or claim 2. It is a direction orthogonal to the swinging direction of the workpiece holder, and the two opposing sides of the storage hole or the storage recess are formed so as to be offset from each other toward the center from the end of the through hole. The workpiece holder according to claim 3. The storage holes or the storage recesses are formed in a matrix in the work holder, and a plurality of storage holes or a part of the plurality of storage recesses in the swinging direction of the work holders are arranged in rows or The workpiece holder according to claim 3 or 4, wherein a window portion is formed which is exposed or penetrated in units of rows. The second work holding plate has a convex portion formed in a region corresponding to the storage hole or the storage concave portion, and when the elements of the work holding plate are arranged in close contact with the work being stored. The workpiece holder according to any one of claims 3 to 5, wherein a position of a workpiece accommodated by the convex portion is regulated.

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