JPH06258608A - Glass substrate cleaning and holding device - Google Patents

Abstract

PURPOSE:To provide the cleaning and holding device for cleaning a more precise glass substrate which has no residue. CONSTITUTION:Three cleaning shafts 11 where V-shaped grooves for holding the glass substrate 12 are formed at plural places in the length direction, are arranged in an inverted triangular shape and both the end parts are fixed to a side plate 13. While the glass substrate 12 are mounted in the groove parts of the cleaning shafts 11 and held, both the upper and lower end surfaces of the glass substrate 12 are slanted at an angle theta. Multi-stage angled parts are formed in the grooves of the cleaning shafts 11. The glass substrate 11 which is held slantingly, is dipped in a cleaning liquid or vapor tank, and cleaning liquid sticking on the glass substrate end part after the glass substrate is lifted, becomes easy to flow along the slanting end surface and decreases in sticking amount, so cleaning of high quality is enabled.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to a mask substrate and an LCD.
The present invention relates to a glass substrate cleaning / holding device (jig) used in a precision cleaning process of glass substrates for electronic materials such as (liquid crystal devices).

[0002]

2. Description of the Related Art A conventional glass substrate cleaning and holding device (hereinafter, referred to as
It is called a cleaning and holding device for short. ), As shown in FIGS. 7 (a) and 7 (b), shows a cleaning shaft 1 composed of metal (SUS) in the central portion 1a and ethylene tetrafluoride (PTFE) in the peripheral portion 1b. As shown in FIG. 8, a plurality of (six in the figure) are arranged along the peripheral surface of the glass substrate 2 in a vertical state, and the cleaning shaft 1 is formed on the peripheral surface of approximately 90 °.
The glass substrate 2 is held so as to be placed in the groove portion 3 having the angle θ ₁ of
Both ends are fixed by side plates (not shown) made of resin or metal such as SUS (stainless steel).

The conventional cleaning of the glass substrate is performed by the above-mentioned FIG.
In the state as shown in (1), the glass substrate 2 was held by the cleaning shaft 1 and immersed in a cleaning liquid tank or a steam tank (not shown), and this was repeated 1 to several times for cleaning. As the cleaning liquid at this time, there are mainly pure water, ultrapure water, a detergent using a surfactant, an acid solution, and an alkaline solution solvent. Some steam tanks mainly use ultrapure water and a solvent, which are used in combination depending on the purpose and quality of cleaning.

[0004]

In the conventional cleaning / holding device described above, as shown in FIG. 8, the upper and lower end surfaces of the glass substrate 2 as the object to be cleaned are conveyed horizontally, and therefore the cleaning liquid tank or the steam tank. As shown in FIG. 9, the cleaning liquid adheres to the upper and lower end surfaces 2a of the upper and lower end surfaces 2a after being soaked in the solution and the residue composed of fine particle ions adversely affects the cleaning quality in precision cleaning. There was a point.

On the other hand, in the conventional cleaning and holding device, as shown in FIG.
The problem that the cleaning liquid adheres 5 as shown in FIG. 10 to the contact portion between the groove 3 of the cleaning shaft 1 and the glass substrate 2 shown in FIG. 10 and this residue adversely affects the cleaning quality in precision cleaning. There was a point.

The present invention solves the above-mentioned problems of the prior art, and an object of the present invention is to provide a cleaning / holding device for cleaning a glass substrate more precisely without residues.

[0007]

In order to achieve the above object, the present invention provides a plurality of end surfaces of a glass substrate so that a cleaning shaft for holding the glass substrate is held by inclining the upper and lower end surfaces of the glass substrate. It is characterized by being placed in contact with a point.

Further, the cleaning shaft for holding the glass substrate is characterized in that a step portion having a multi-step angle is formed in the groove portion, and further, the surface material of the cleaning shaft for holding the glass substrate is made of tetrafluoroethylene perfluoride. It is characterized by using fluoroalkoxyethylene (PFA).

[0009]

With the above construction, when the glass substrate is set in the cleaning and holding apparatus of the present invention, the glass substrate held in the vertical state is tilted, and in this state, the glass substrate is washed with the cleaning liquid or the cleaning liquid. As shown in FIG. 3, the cleaning liquid adhered to the end surface portion of the glass substrate after being immersed in the steam tank and pulled up easily flows down along the end surface, and the adhered amount decreases.

Further, by increasing the angle on the bottom side of the groove step formed in the cleaning shaft of the present invention, the contact angle with the glass substrate can be increased as shown in FIG. The adhesion of the cleaning liquid similar to the above is reduced.

On the other hand, by reducing the angle of the upper side of the groove step portion, it is possible to improve the stability when holding the glass substrate by the cleaning and holding device and to improve the position accuracy.

Further, by using tetrafluoroethylene perfluoroalkoxyethylene (PFA) as the surface material of the cleaning shaft for holding the glass substrate, the coefficient of friction between the cleaning shaft and the glass substrate is increased, and therefore the glass is The stability of holding the substrate can be further improved.

[0013]

Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a side view of an embodiment of the cleaning and holding apparatus of the present invention, showing a state in which a glass substrate is held.

In the figure, the cleaning and holding device 10 arranges three cleaning shafts 11 in an inverted triangular shape so that the upper and lower end surfaces of the glass substrate 12 are at an angle θ with respect to the horizontal.
The cleaning shafts 11 are held so as to be inclined, and the respective cleaning shafts 11 are fixed by side plates 13 made of resin or metal such as SUS disposed at both ends.

FIG. 2A shows the cleaning shaft 11 of the present invention.
FIG. 1B is an enlarged cross-sectional view of a main part of a portion A of FIG.

In the figure, the cleaning shaft 11 is constructed by using metal (SUS) for the central portion 11a and using tetrafluoroethylene perfluoroalkoxyethylene (PFA) for the surface material of the peripheral portion 11b. A plurality of grooves 14 for holding the glass substrate are formed at the points. As shown in FIG. 3B, the groove 14 is formed with a step portion having a multi-step angle so that the angle θ ₂ of the bottom side step portion 14a is large and the angle θ ₃ of the top side step portion 14b is small. They are formed, and these groove angles are θ ₂ > conventional angle θ ₁ > θ ₃ .

Next, the manner of cleaning the glass substrate 12 using the cleaning device 10 will be described with reference to FIG. 6. The glass substrate 12 held by the three cleaning shafts 11 with its upper and lower end surfaces tilted in the vertical state is shown in FIG. First, the detergent 15
It is immersed in the water tank 15 containing a to remove the dirt adhering to the glass substrate surface, and then the water tank 15 containing pure water 15b is cleaned to remove the detergent adhering to the glass substrate surface. All the ions and impurities on the glass substrate surface are removed in a water tank 15 containing water 15c. At this time, in order to remove the deposits on the surface of the glass substrate better, each water tank 15
An ultrasonic transducer 16 is attached to the bottom of the.

In each of the above cleaning steps, when the glass substrate 12 is pulled up from the water tank 15, the cleaning liquid attached to the end surface of the glass substrate 11 is, as shown by the arrow a in FIG.
Since it easily flows down along the end face, the adhesion amount decreases. Moreover, since the angle θ ₂ of the step portion 14a on the bottom side of the groove 14 of the cleaning shaft 11 is formed to be large,
As shown in FIG. 4, the contact angle with the glass substrate 12 can be increased, and the adhesion 5 of the cleaning liquid is reduced, so that the contamination of the next tank is prevented, and the residue at the time of cleaning and drying is reduced, so that high quality It enables cleaning.

On the other hand, since the angle θ ₃ of the upper side step 14b of the groove 14 is formed small, the cleaning shaft 1
1 improves the stability when holding the glass substrate 12, and improves the position accuracy.

Furthermore, the surface material of the cleaning shaft 11 is 4
Fluorinated ethylene Perfluoroalkoxy ethylene (PF
By using A), the coefficient of friction between the cleaning shaft 11 and the glass substrate 12 is increased, and the stability of holding the glass substrate 12 can be further improved.

In the embodiment shown in FIG. 1 described above, the structure in which the three cleaning shafts 11 are provided has been described. However, in order to further improve the stability when holding the glass substrate 12, the cleaning shaft 11 is replaced by three cleaning shafts. More than one book may be provided. Further, as the shape of the groove 14 of the cleaning shaft 11, FIG.
As shown in (a), the groove step angle is set to three or more levels,
Further, the groove shape may be an arc or a curve as shown in FIG.

[0022]

As described above, according to the present invention,
In a cleaning and holding device used for precision wet cleaning of a glass substrate, a cleaning shaft for holding the glass substrate is arranged in contact with a plurality of end surfaces of the glass substrate so that the upper and lower end surfaces of the glass substrate are inclined and held. By doing so, in the precision cleaning of the glass substrate, it is possible to dip the glass substrate in the cleaning liquid or the vapor tank and to reduce the cleaning liquid attached to the upper end surface portion and the lower end surface portion of the glass substrate when the glass substrate is pulled up. It is possible to prevent the deterioration of the cleaning quality of the glass substrate due to, and to make the cleaning quality extremely high.

Further, since at least three cleaning shafts for holding the glass substrate are sufficient, it is possible to reduce the cleaning liquid adhering to the holding portion.

In addition, since the groove portion for holding the glass substrate provided on the cleaning shaft is formed with the step portion having a multi-step angle, the contact angle of the groove portion of the cleaning shaft with the glass substrate on the bottom side is increased. It is possible to reduce the amount of cleaning liquid that adheres to the portion, reduce the contact angle on the upper side, improve the stability when holding the glass substrate, and improve the position accuracy.

Further, by using tetrafluoroethylene perfluoroalkoxyethylene (PFA) as the surface material of the cleaning shaft, the coefficient of friction between the cleaning shaft and the glass substrate can be increased, so that the stability of holding of the glass substrate is improved. Can be further improved.

[Brief description of drawings]

FIG. 1 is a side view showing a state in which a glass substrate of a cleaning and holding device according to an embodiment of the present invention is held.

2A and 2B show an embodiment of a cleaning shaft that constitutes the cleaning and holding apparatus of the present invention, in which FIG. 2A is a side view and FIG.
It is a principal part expanded sectional view of the A section.

FIG. 3 is an explanatory diagram showing a flow of a cleaning liquid attached to a glass substrate.

FIG. 4 is an explanatory view showing a cleaning liquid adhesion state of a glass substrate holding portion of the cleaning shaft of the present invention.

5 (a) and 5 (b) are side views of essential parts of a cleaning shaft showing another embodiment of the present invention.

FIG. 6 is a process explanatory view showing an example of cleaning the glass substrate of the present invention.

7A shows a conventional example, FIG. 7A is a side view of a cleaning shaft, and FIG. 7B is an enlarged view of a main part of a portion A in FIG.

FIG. 8 is a side view showing a state in which a glass substrate of a conventional cleaning and holding device is held.

FIG. 9 is a cross-sectional view of the cleaning liquid deposition on the upper end surface portion during the conventional glass substrate cleaning.

FIG. 10 is a cross-sectional view of a cleaning liquid deposition on a glass substrate holding part during conventional glass substrate cleaning.

[Explanation of symbols]

 4 Adhesion of cleaning liquid 5 Adhesion of cleaning liquid 10 Glass substrate cleaning / holding device 11 Cleaning shaft 12 Glass substrate 13 Side plate 14 Groove 14a Bottom side step 14b Top side step 15 Water tank 15a Detergent 15b Pure water 15c Ultrapure water 16 Ultrasonic transducer

Claims (3)

[Claims] 1. A cleaning and holding apparatus used for precision wet cleaning of a glass substrate, wherein a cleaning shaft for holding the glass substrate is held at a plurality of positions on the end surface of the glass substrate so that the upper and lower end surfaces of the glass substrate are tilted and held. An apparatus for cleaning and holding a glass substrate, which is placed in contact with a glass substrate. 2. The glass substrate cleaning / holding apparatus according to claim 1, wherein a groove portion provided in a cleaning shaft for holding the glass substrate is provided with step portions having multi-step angles. 3. The glass substrate cleaning / holding apparatus according to claim 1, wherein the surface material of the cleaning shaft for holding the glass substrate is ethylene tetrafluoride perfluoroalkoxyethylene.