JP2006087989A - Gas-liquid separation/mixing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a gas-liquid separation/mixing apparatus capable of dissolving a raw-material gas in raw-material water through a gas-permeable membrane to produce a gas-liquid mixed water, separating a gas-liquid mixed water into a raw-material gas and raw-material water through a gas-permeable membrane and detecting early raw-material water leaked from a gas-permeable membrane into a raw-material gas. <P>SOLUTION: The apparatus houses a gas-permeable membrane separating raw-material water from a raw-material gas within a mantle and has a leaked water discharge outlet discharging raw water leaked from the gas-permeable membrane into the raw-material gas out of the mantle. A sensor for detection of raw water leaked into the raw-material gas is arranged in a leaked water discharge tube connected to the discharge outlet from the outside of the mantle. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

In the present invention, raw gas can be dissolved in raw water through a gas permeable membrane to generate gas-liquid mixed water, or gas-liquid mixed water can be separated into raw gas and raw water through the gas permeable membrane. The present invention relates to a gas-liquid separation and mixing apparatus that can detect raw material water leaked from a gas permeable membrane into raw material gas at an early stage.

Conventionally, various kinds of gas-liquid mixed water such as ozone water obtained by dissolving ozone gas in water are known and used for various applications.
Ozone water obtained by dissolving ozone gas, which is one of these gas-liquid mixed water, in water exhibits excellent effects on sterilization, deodorization, bleaching, etc. due to the strong oxidizing power of ozone, and ozone gas is time-consuming. At the same time, it has been attracting attention as an environmentally friendly sterilization / cleaning / bleaching agent because it is self-decomposing into harmless oxygen (gas) and has no persistence. In recent years, with increasing interest in the environment, a cleaning process using ozone water has attracted attention. For example, application to cleaning of a semiconductor substrate and removal of a resist of a semiconductor substrate has been studied.

As a method for generating such ozone water, a method of dissolving ozone gas in water using a gas dissolution membrane is known. For example, Patent Document 1 discloses that a porous hollow tubular ozone gas permeable membrane has an ozone resistance. A raw material that is housed in a porous hollow tubular ozone gas permeable membrane by making a plurality of ozone dissolution modules and making the raw water and ozone gas contact each other through the porous hollow tubular ozone gas permeable membrane. A method for generating ozone water by diffusing ozone gas into raw material water via water is disclosed.

However, in the generation of ozone water using such an ozone dissolution module, a defect such as a crack occurs in the ozone gas permeable membrane, and raw water leaks into the ozone gas from this crack or the like, or the ozone gas permeable membrane is a porous hollow tube. If the ozone dissolution module is used for a long time, the raw material water may gradually permeate the porous hollow tube ozone gas permeable membrane and leak into the ozone gas, resulting in the generation of ozone water. Raw material water may be mixed in exhaust ozone gas exhausted without being used.

In such a gas-liquid separation and mixing device such as an ozone dissolution module, if the raw material water leaks into the raw material gas through the gas permeable membrane, it becomes impossible to generate the gas-liquid mixed water having the target gas concentration. Since a defect occurs, it is necessary to replace the gas permeable membrane.
However, the conventional gas-liquid separation and mixing apparatus has no means for detecting that raw material water has leaked into the raw material gas through the gas permeable membrane, and does not notice that raw material water has leaked into the raw material gas. In the worst case, the leakage of the raw material water into the raw material gas may be noticed only after the gas permeable membrane is destroyed.

In addition, when the gas-liquid separation and mixing device is used for the ozone dissolution module, the exhaust ozone gas that was not used when the ozone water was generated is a toxic gas having a high ozone concentration. Although it is self-decomposed, it cannot be discharged in an untreated state, and therefore it is necessary to send ozone to the decomposition tower once and decompose ozone using a catalyst until the ozone concentration falls below the environmental standard value.
However, since the catalyst used when decomposing ozone in the exhausted ozone gas is deactivated by moisture, the ozone water is not noticed that the raw water has leaked into the ozone gas as described above. When the generation of ozone and the treatment of exhaust ozone gas are performed, the catalyst of the decomposition tower is deactivated by the raw water mixed in the exhaust ozone gas, and there is a problem that ozone cannot be decomposed.

Japanese Patent Application Laid-Open No. 07-213880

In view of the above-described situation, the present invention generates gas-liquid mixed water by dissolving a raw material gas in raw water through a gas permeable membrane, or separates the gas-liquid mixed water into raw material gas and raw water through the gas permeable membrane. On the other hand, an object of the present invention is to provide a gas-liquid separation and mixing apparatus that can detect raw material water leaked from a gas permeable membrane into raw material gas at an early stage.

The gas-liquid separation and mixing apparatus according to the first aspect of the present invention is a gas-liquid separation and mixing apparatus in which a gas permeable membrane for separating raw water and raw material gas is housed in an outer casing, and leaks from the gas permeable membrane into the raw material gas A leakage water discharge port for discharging the raw material water is formed in the mantle, and the raw water leaked into the raw material gas is detected from a leak water discharge pipe connected to the leakage water discharge port from the outside of the mantle. This is a gas-liquid separation and mixing device provided with a sensor for performing the above operation.

The gas-liquid separation and mixing device of the second aspect of the invention is a gas-liquid separation and mixing device in which a gas permeable membrane for separating raw water and raw material gas is housed in an outer shell, and the raw material gas is supplied from outside the outer shell. The gas-liquid separation and mixing device is provided with a sensor for detecting raw material water leaked into the raw material gas from the gas permeable membrane in a gas discharge pipe connected to a discharge gas discharge port.
The present invention is described in detail below.

The gas-liquid separation / mixing device of the present invention 1 and the gas-liquid separation / mixing device of the present invention 2 (hereinafter also referred to simply as “gas-liquid separation / mixing device of the present invention” unless otherwise distinguished) A gas permeable membrane for separating water and source gas is housed.
The gas permeable membrane is a membrane material that allows permeation of the raw material gas but prevents the permeation of raw material water. According to the gas-liquid separation and mixing apparatus of the present invention in which such a gas permeable membrane is housed in the jacket, the raw material water And the raw material gas are supplied into the jacket while being separated by the gas permeable membrane, and the raw material gas permeates the gas permeable membrane and dissolves in the raw material water to generate gas-liquid mixed water.

Further, the gas-liquid separation and mixing apparatus of the present invention is provided with a sensor for detecting the raw water leaked from the gas permeable membrane into the raw material gas.
Since the gas-liquid separation and mixing apparatus of the present invention has the above-described sensor, the raw material from the gas-permeable membrane is generated during the generation of the gas-liquid mixed water when a defect such as a crack occurs in the gas-permeable membrane or because it has been used for a long time. Even if the raw material water leaks into the gas, the leakage of the raw material water can be detected at an early stage.
The gas-liquid separation and mixing apparatus of the present invention having such a configuration can generate gas-liquid mixed water by dissolving various raw material gases in raw material water. Among them, ozone gas is used as the raw material gas, and By using an ozone gas permeable membrane as the gas permeable membrane, the gas-liquid separation and mixing device of the present invention can be suitably used as an ozone dissolution module for generating ozone water.

According to the present invention, the raw material gas is dissolved in the raw material water through the gas permeable membrane to generate gas-liquid mixed water, or the gas-liquid mixed water is separated into the raw material gas and the raw water through the gas permeable membrane. On the other hand, if the raw material water leaks from the gas permeable membrane into the raw material gas due to problems such as cracks in the gas permeable membrane or long-term use, the raw material water leaked into the raw material gas by the sensor Can be detected early.
That is, when the gas-liquid separation and mixing apparatus of the present invention is used in an ozone dissolution module, measures are taken to replace the ozone gas permeable membrane and to discharge the raw water leaked into the ozone gas before a large amount of raw water leaks into the ozone gas. Therefore, it is possible to prevent the generation of the ozone water and the treatment of the exhaust ozone gas without noticing the state in which the raw material water has leaked into the ozone gas.
Therefore, when the gas-liquid separation and mixing apparatus of the present invention is used for the ozone dissolution module, it is possible to prevent a large amount of raw material water from being mixed into the exhaust ozone gas that has not been used for the generation of ozone water. In the decomposition tower, it is possible to prevent deactivation of a catalyst that decomposes ozone in the exhausted ozone gas and lowers the ozone concentration to an environmental standard value or less.

Hereinafter, the present invention will be described according to embodiments.
FIG. 1 (a) is a front view schematically showing an example of the gas-liquid separation and mixing device of the present invention 1, and (b) is the left side of the gas-liquid separation and mixing device of the present invention 1 shown in (a). It is a top view, (c) is a right side view of the gas-liquid separation and mixing apparatus of the present invention 1 shown in (a), (d) is the gas-liquid separation of the present invention 1 shown in (a). It is sectional drawing which showed the mode of the inside of a mixing apparatus typically. 2A is a partially enlarged view of a part of the gas-liquid separation and mixing apparatus of the present invention 1 shown in FIG. 1, and FIG. 2B is a diagram of the gas-liquid separation and mixing apparatus of the present invention 1. It is the side view which showed the embodiment.

As shown in FIG. 1, in the gas-liquid separation and mixing apparatus 10 of the present invention 1, four gas permeable membranes 12 having a hollow tubular and annular circulation part are accommodated in a cylindrical mantle 11. Further, on both end faces of the outer jacket 11, a raw water supply port 11c for supplying a plurality of raw water into the gas permeable membrane 12 in the outer jacket 11, and a gas-liquid mixture produced by dissolving the raw material gas in the raw water A mixed water discharge port 11d for discharging water to the outside of the mantle 11 is formed, and the raw water supply port 11c and the mixed solution discharge port 11d are connected to the gas permeable membrane 12, respectively.
In addition, a gas supply port 11a for allowing the source gas to flow between the mantle 11 and the gas permeable membrane 12 is formed at a substantially central side surface of the mantle 11 on the side where the above-described mixed water discharge port 11d is formed. A gas discharge port 11b for discharging the raw material gas to the outside of the mantle 11 is formed on the side surface of the mantle 11 on the side where the above-described raw material water supply port 11c is formed.
In the gas-liquid separation and mixing apparatus 10 of the first aspect of the present invention, the flow direction of the raw water and the gas-liquid mixed solution and the flow direction of the raw material gas face each other as shown by arrows in FIG. It becomes a direction like this.

The gas-liquid separation and mixing apparatus 10 of the present invention 1 shown in FIGS. 1 and 2 includes a raw material gas supply port 11a, a raw material gas discharge port 11b, a raw material water supply port 11c, and a mixed water discharge port 11d formed on the side surface. Is connected to a male threaded joint 16 projecting to the outside of the outer sleeve 11 and connected to an external pipe or the like via a cap nut 17 that can be screwed into the joint 16.
The joint 16 projecting outward from the side surface of the outer cannula 11 is fixed to the outer cannula 11 with a resin nut or the like. Further, the joint 16 has substantially the same shape as the side surface of the outer cannula 11 and is covered with a bolt or the like. The gas permeable membrane 12 communicates with a flange fixed to the side surface of 11.

In the gas-liquid separation and mixing apparatus 10 of the first aspect of the present invention, the raw material gas is circulated between the mantle 11 and the gas permeable membrane 12, and the raw water is circulated inside the gas permeable membrane 12. When the gas-liquid separation and mixing apparatus of the present invention 1 having such a structure is used in an ozone dissolution module, high-concentration ozone water can be generated.

The jacket constituting the gas-liquid separation and mixing apparatus of the present invention 1 is airtight and is not particularly limited when used in an ozone dissolution module, as long as it has ozone resistance. Examples thereof include those made of a tetrafluoroethylene copolymer such as tetrafluoroethylene resin (PTFE), perfluoroalkoxy resin (PFA), and fluorinated ethylene propylene resin (FEP).
Further, the shape of the mantle is not particularly limited, and examples thereof include a columnar shape; a polygonal column shape such as a triangular column and a quadrangular column; and an ellipsoidal shape.

The gas permeable membrane 12 is a membrane material that separates the raw material water and the raw material gas in the outer casing 11 and permeates the raw material gas but prevents the permeation of the raw material water. By doing so, gas-liquid mixed water such as ozone water is generated.

The gas permeable membrane is not particularly limited and is appropriately selected according to the type of raw material gas to be used. For example, when the gas-liquid separation and mixing apparatus of the first aspect of the present invention is used as an ozone dissolution module, a silicone resin or fluorine It is preferable to consist of a resin. Silicone resin or fluorine resin is excellent in corrosion resistance and deterioration resistance, and a gas permeable membrane using a silicone resin or fluorine resin has a property of efficiently transmitting ozone gas. The gas-liquid separation and mixing apparatus can be suitably used as an ozone dissolution module.

The fluororesin is not particularly limited, and examples thereof include tetrafluoroethylene resin polymers such as polytetrafluoroethylene copolymer (PTFE), perfluoroalkoxy resin (PFA), and fluorinated ethylene propylene resin (FEP). A fluorine-based rubber or the like.
Moreover, it does not specifically limit as said silicone resin, For example, polydimethylsiloxane, methyl silicone rubber, etc. are mentioned.
In addition, as long as it is a perfluorinated resin, any resin can be used as a raw material of the non-porous film mentioned later.

The gas permeable membrane may be a porous membrane or a non-porous membrane, but is preferably a non-porous membrane.
If the gas permeable membrane is a porous membrane, for example, when the source gas is dissolved in the source water, the source gas is first dissolved in the source water soaked in the pores of the gas permeable membrane, and then according to the concentration gradient. Since the molecules of the raw material gas diffuse into the raw material water, if the raw material water mixed with foreign matters is circulated, the holes are clogged with foreign matters and the raw material gas cannot be dissolved in the raw material water. On the other hand, when a non-porous film without pores is used as the gas permeable film, the gas permeable film is not clogged. In addition, when the gas permeable membrane is a porous membrane, the raw material gas dissolves in the raw material water through the raw material water soaked in the pores. Since it is necessary to adjust precisely so that it may become low, the density | concentration of the raw material gas melt | dissolved in raw material water cannot be made high. On the other hand, if the gas permeable membrane is a non-porous membrane, the source gas pressure need not be lower than the liquid pressure, and the source gas pressure can be increased to dissolve the source gas in the source water at a high concentration. it can.

The gas permeable membrane is not particularly limited as long as the raw water and the raw material gas can be separated from each other in the jacket, but the required inner diameter and length are the same as the gas permeable membrane 12 shown in FIG. It is preferably a hollow tubular shape (hollow fiber shape, tube shape) formed into a hollow shape. This is because by using a hollow tube, the raw material gas can be efficiently dissolved in the raw material water rather than being used as a flat membrane.
Furthermore, when the gas permeable membrane is a hollow tubular shape, it may be a circular tubular shape, but is preferably a tubular shape having an irregular cross-sectional shape. This is because the contact area between the source gas and the outer periphery of the gas permeable membrane is increased, and the source gas can be dissolved in the source water flowing through the gas permeable membrane more efficiently.

When the gas permeable membrane has a hollow tube shape, the preferable lower limit of the inner diameter is 0.1 mm, and the preferable upper limit is 1 mm. When it is less than 0.1 mm, when raw material water flows inside the hollow tubular ozone gas permeable membrane, it may become difficult to flow due to the viscous resistance of the raw material water. When it exceeds 1 mm, the hollow tube is thinned It may break during the secondary processing. A more preferred lower limit is 0.3 mm.

When the gas permeable membrane is a hollow tube, the preferable lower limit of the thickness is 10 μm, and the preferable upper limit is 100 μm. In consideration of the raw material gas permeability, it is preferable that the wall thickness is thin, but it is within this range from the handling surface, for example, it is easy to break when performing secondary processing for bundling a hollow tubular ozone gas permeable membrane. preferable.

When the gas permeable membrane is a hollow tube, the number of gas permeable membranes housed in the mantle is not limited to four as in the gas permeable membrane 12 shown in FIG. It may be more than one, and is appropriately determined in consideration of the size of the mantle.
Further, in the gas-liquid separation and mixing device 10 of the present invention 1 shown in FIG. 1, one gas permeable membrane 12 is formed in the raw water supply port 11 c and the mixed water discharge hole 11 d respectively formed on both end faces of the mantle 11. Although connected, for example, a plurality of gas permeable membranes may be connected to a raw water supply port and a mixed water discharge port formed on both end faces of the outer jacket in a bundled state.

As shown in FIGS. 1 and 2, the gas-liquid separation and mixing device 10 of the present invention 1 has a leaked water discharge port 13 on the end surface of the outer casing 11 on the side where the gas discharge port 11b and the raw material water supply port 11c are formed. A leakage water discharge pipe 14 is connected to the leakage water discharge port 13 via a male threaded joint 16 projecting to the outside of the outer sleeve 11 and a cap nut 17 that can be screwed to the joint 16. Furthermore, a sensor 15 is provided in the leaked water discharge pipe 14.

The leakage water discharge port 13 is formed on the end surface of the outer sleeve 11 on the side where the gas discharge port and the like are formed in order to discharge the raw material water leaked into the raw material gas through the gas permeable membrane 12. Although the formation position is not particularly limited, as shown in FIGS. 1 and 2, it is formed below the center of the end surface of the outer mantle 11 on the side where the gas discharge port is formed. preferable.

In the gas-liquid separation and mixing apparatus according to the first aspect of the present invention, the leakage water discharge port does not necessarily have to be formed on the end surface on which the jacket gas supply port is formed. For example, the jacket gas supply port is formed. It may be formed on the end surface on the other side, the side surface of the mantle or the like.
When the leaked water discharge port is formed on the side surface of the mantle, the lower surface of the mantle is provided with a slope for collecting the raw water leaked into the raw material gas at one point, and the raw water leaked at the bottom of the slope is provided. It is preferable that the leakage water discharge pipe for discharging to the outside of the mantle is connected. With such a structure, since the leaked raw water is efficiently collected on the lower surface of the mantle and discharged into the leaked water discharge pipe, the leaked raw water can be detected more quickly and accurately by the sensor. it can.

The leaked water discharge pipe 14 is a tubular member connected to the leaked water discharge port 13 by a joint 16 communicating with the leaked water discharge port 13 from the outside of the mantle 11 and a cap nut 17 screwed into the joint 16.
In the gas-liquid separation and mixing device of the present invention 1 provided with such a leakage water discharge hole 13 and a leakage water discharge pipe 14, when the raw material water leaks into the raw material gas through the gas permeable membrane 12, this leakage The raw material water is discharged to the leakage water discharge pipe 14 through the leakage water discharge port 13 together with the raw material gas. Since the leaked raw material water is detected by the sensor 15 provided in the leaked water discharge pipe 14, it is possible to detect at an early stage that a defect such as a crack has occurred in the gas permeable membrane.

The leaked water discharge pipe is exhausted after the discharged raw material gas is dried, but may be circulated so as to be supplied to the jacket again. For example, when the raw material gas is ozone gas, the exhausted ozone gas discharged to the leaked water discharge pipe is once sent to the decomposition tower before being discharged to the outside using a catalyst until the ozone concentration falls below the environmental standard value. Need to be disassembled. However, when cracks or the like occur in the gas permeable membrane and the raw water is mixed into the exhaust ozone gas, the sensor can detect the raw water mixed in the exhaust ozone gas at an early stage, but the sensor is in the exhaust ozone gas. Until the raw water is detected and the generation of ozone water is stopped, exhaust ozone gas mixed with the raw water is sent to the cracking tower. It may be impossible.
In addition, when the raw material gas does not need to be processed in a cracking tower like the ozone gas, or needs to be processed in a cracking tower or the like, there is no problem caused by mixing raw material water. In this case, the leakage water discharge pipe does not need to be connected to the gas supply pipe.

FIG. 3 is a partially enlarged cross-sectional view schematically showing a preferred example of the gas-liquid separation and mixing apparatus of the first aspect of the present invention.
As shown in FIG. 3, the gas-liquid separation and mixing apparatus of the present invention 1 includes a leakage water discharge pipe 34 connected to the leakage water discharge port 13 formed in the outer cannula 11 from the outside of the outer cannula 11, It is preferable that a water storage section 30 for storing the raw material water leaked into the water storage section 30 is formed, and the sensor 15 is provided in the water storage section 30.

The water reservoir 30 is a portion where the leaked water discharge pipe 34 is bent in a U shape downward, and can store the raw water discharged into the leaked water discharge pipe 34. The raw water stored in the water storage unit 30 is detected by a sensor 15 provided in the water storage unit 30.

In the gas-liquid separation / mixing device of the first aspect of the present invention, the water storage part formed in the leaked water discharge pipe may have any shape that can store the raw water discharged from the leaked water discharge pipe. It may be bent. Further, instead of bending the leaked water discharge pipe to form the water storage part, for example, a concave part may be formed in a part of the bottom surface of the leaked water discharge pipe, and this concave part may be used as the water storage part.

Although it does not specifically limit as a material which comprises such a leakage water discharge pipe, It is preferable that it is transparent materials, such as PFA. When the leaked water discharge pipe is made of a transparent material, an optical sensor can be used as a sensor for detecting raw material water stored in a water storage section described later.
The leaked water discharge pipe may be made of the same material as the above-described mantle except for the water storage part, and the water storage part may be made of a transparent material such as PFA.

As the sensor 15, a conventionally known sensor capable of detecting raw material water leaked into the raw material gas through the gas permeable membrane discharged to the leakage water discharge pipe through the leakage water discharge port described above together with the raw material gas. For example, when the leaked water discharge pipe of the gas-liquid separation and mixing apparatus of the present invention 1 has a structure in which the water storage section 30 as shown in FIG. 3 is formed, the sensor 15 has a water storage section. An optical sensor that can detect the raw water stored in 30 is included.

In the gas-liquid separation and mixing apparatus of the first aspect of the present invention, it is preferable that a leaked water outlet pipe 31 connected to the leaked water discharge port 13 is provided in the outer jacket 11 as shown in FIG. The raw water W leaked into the raw material gas and stored in the outer cannula 11 can be efficiently sucked out of the outer cannula 11 and discharged, and a large amount of raw material water is prevented from being mixed into the raw material gas discharged from the outer mantle. Because it can.
The leaked water discharge pipe 31 is a tubular member, one end of which is arranged near the lower surface inside the outer cannula 11, and the other end is a leaked water discharge port of the outer cannula 11. 13 is connected.
The material constituting the leaked water discharge pipe 31 is not particularly limited, but is preferably the same material as that of the mantle 11 described above, for example.

The gas-liquid separation and mixing apparatus of the first aspect of the present invention provided with a water storage section as shown in FIG. 3 discharges raw water leaked into the raw material gas from the gas permeable membrane from the leakage water discharge port to the leakage water discharge pipe. Since it can be stored in the water storage part, the leakage of the raw material water can be detected at an early stage.
In addition, the gas-liquid separation and mixing apparatus of the first aspect of the present invention provided with the leaked water outlet pipe can quickly discharge the raw water leaked into the raw material gas to the outside of the raw material gas in the jacket. Can be prevented from being mixed in a large amount in the exhaust gas.

FIG. 4 is a front view schematically showing an example of the gas-liquid separation and mixing apparatus of the second aspect of the present invention.
As shown in FIG. 4, the gas-liquid separation and mixing device 40 of the second aspect of the present invention houses four gas permeable membranes (not shown) having a hollow tubular and annular circulation portion in a cylindrical mantle 41. . Further, on both end faces of the outer jacket 41, a raw water supply port 41c for supplying a plurality of raw water into the gas permeable membrane in the outer jacket 41, and a gas-liquid mixed water generated by dissolving the raw material gas in the raw water. The mixed water discharge port 41d for discharging the water to the outside of the mantle 41 is formed, and the raw water supply port 41c and the mixed solution discharge port 41d are respectively connected to the gas permeable membrane.
In addition, at substantially the center of both end faces of the outer cannula 41, there are a gas supply port 41a for allowing the source gas to flow between the outer cannula 41 and the gas permeable membrane, and a gas outlet 41b for discharging the source gas to the outside of the outer cannula 41. A gas exhaust pipe 44 provided with a sensor 45 is connected to the gas exhaust port 41b from the outside of the outer jacket 41.
In the gas-liquid separation and mixing apparatus 40 of the second aspect of the present invention, as shown by arrows in FIG. 4, the flow directions of the raw water and the gas-liquid mixture are from right to left in the figure, and the flow of the raw gas The directions are from left to right in the figure, and are opposite to each other.

As shown in FIG. 4, the gas-liquid separation and mixing apparatus of the present invention 2 is not provided with a leak water discharge port and a leak water discharge pipe, and is a gas discharge that discharges the raw material gas supplied to the mantle to the mantle. Except that the sensor is provided in the tube, it is composed of substantially the same members and configuration as the gas-liquid separation and mixing apparatus of the first aspect of the present invention shown in FIG.
That is, when the raw material water leaks into the raw material gas through the gas permeable membrane, the leaked raw material water is detected by a sensor provided in the gas discharge pipe. It is possible to detect at an early stage that a defect such as a crack has occurred in the permeable membrane.

In the gas-liquid separation and mixing apparatus according to the second aspect of the present invention, it is preferable that a water storage part for storing raw water leaked in the raw material gas is formed in the gas discharge pipe, and a sensor is provided in the water storage part. That is, the gas discharge pipe of the gas-liquid separation and mixing apparatus of the present invention 2 preferably has the same structure as the leaked water discharge pipe 34 in which the water storage section 30 described with reference to FIG. 3 is formed.

Furthermore, the gas-liquid separation and mixing apparatus of the second aspect of the present invention is preferably provided with a leaked water outlet pipe connected to the gas discharge port in the jacket. That is, in the gas-liquid separation and mixing apparatus of the second aspect of the present invention, it is preferable that a leaked water outlet pipe similar to the leaked water outlet pipe 31 described with reference to FIG.

As described above, the gas-liquid separation and mixing apparatus of the present invention is the raw material leaked into the raw material gas from the gas permeable membrane when the raw material gas is dissolved in the raw material water through the gas permeable membrane to produce the gas-liquid mixed water. Although water can be detected at an early stage, the gas-liquid separation and mixing apparatus of the present invention can also separate the gas-liquid mixed water into raw material gas and raw water through the gas permeable membrane.
In this case, the gas-liquid mixed water is supplied from the above-described raw water supply port, while the raw gas is not supplied from the gas supply port, so that the gas-liquid mixed water is separated into the raw material gas and the raw water. Can do.

Hereinafter, the present invention will be described in more detail with reference to examples. However, the present invention is not limited to these examples.

Example 1
400 hollow ozone gas permeable membranes made of perfluoroalkoxy resin having an inner diameter of 0.5 mm, a thickness of 0.04 mm, and a length of 350 cm were bundled and stored in a mantle having a cylindrical shape with an inner diameter of 15 cm and a length of 20 cm. An ozone dissolution module was produced (see FIG. 1).
In addition, a tubular leaked water outlet pipe made of PFA with an inner diameter of 4 mm is connected to a leaked water discharge pipe having one end arranged near the lower surface in the outer jacket and the other end formed on one end face of the outer jacket, A leakage water discharge pipe having an inner diameter of 4 mm made of PFA is connected to the leakage water discharge pipe from the outer side of the mantle, and a U-shaped water storage part made of PFA is formed in the middle of the leakage water discharge pipe. An optical sensor (manufactured by OMRON Corporation, liquid level sensor E32-L25T) was provided (see FIG. 3).

Raw material gas is sent to an ozone gas generator (Sumitomo Seimitsu Co., Ltd .: GR-RB) at an oxygen flow rate of 2 L / min and a nitrogen flow rate of 40 mL / min to generate ozone gas, and the generated ozone gas is pressurized to an ozone gas pressure of 0.25 MPa and sent out. The ozone concentration of the ozone gas monitored with an ozone gas concentration meter (manufactured by Riko Chemical Co., Ltd .: OZR-3000) is supplied between the jacket of the ozone dissolution module and the ozone gas permeable membrane (from the gas supply port 11a to the gas discharge port 11b). Route), supplying pure water stored in the tank via a pump into the ozone gas permeable membrane of the ozone dissolution module at a water temperature of 20 ° C. and a flow rate of 1 L / min (route from the raw water supply port 11c to the mixed water discharge port 11d), Ozone water was generated.
In addition, ozone gas that was not used to generate ozone water is sent to the decomposition tower as exhaust ozone gas, and the ozone concentration in the exhaust ozone gas is below the environmental standard value using the catalyst of the decomposition tower (manufactured by Shinagawa Kasei Co., Ltd., Secard KR). The ozone was decomposed until

After that, generation of ozone water and treatment of exhaust ozone gas are continued, and when the optical sensor detects that raw material water has accumulated in the water storage part, the pump is stopped and the supply of pure water and the ozone gas generator And the supply of oxygen were stopped. The supply of nitrogen gas continued without stopping.
And when the inside of the mantle was examined, it was confirmed that the raw material water leaked from the ozone gas permeable membrane into the ozone gas.
In addition, since it was discovered early that raw water was leaking into the ozone gas from the ozone gas permeable membrane, it was possible to prevent the raw water leaked into the exhausted ozone gas sent to the decomposition tower, and the catalyst was deactivated. This has been prevented.

According to the present invention, the raw material gas is dissolved in the raw material water through the gas permeable membrane to generate gas-liquid mixed water, or the gas-liquid mixed water is separated into the raw material gas and the raw water through the gas permeable membrane. On the other hand, it is possible to provide a gas-liquid separation and mixing device that can detect raw material water leaked into the raw material gas from the gas permeable membrane at an early stage.

(A) is a front view which shows typically an example of the gas-liquid separation mixing apparatus of this invention 1, (b) is the left view of the gas-liquid separation mixing apparatus of this invention 1 shown to (a). (C) is a right side view of the gas-liquid separation and mixing apparatus of the present invention 1 shown in (a), and (d) is the gas-liquid separation and mixing apparatus of the present invention 1 shown in (a). It is sectional drawing which showed the mode of the inside of. (A) is the elements on larger scale which expanded a part of the gas-liquid separation mixing apparatus of this invention 1 shown in FIG. 1, (b) is the embodiment of the gas-liquid separation mixing apparatus of this invention 1. It is the side view shown. It is a partial expanded sectional view which shows typically a preferable example of the gas-liquid separation mixing apparatus of this invention 1. FIG. It is a front view which shows typically an example of the gas-liquid separation mixing apparatus of this invention 2.

Explanation of symbols

10, 40 Gas-liquid separation and mixing device 11, 41 Mantle 11a, 41a Gas supply port 11b, 41b Gas discharge port 11c, 41c Raw material water supply port 11d, 41d Mixed liquid discharge port 12, 42 Gas permeable membrane 13 Leaked water discharge port 14 , 44 Leaked water discharge pipe 15, 45 Sensor 16 Joint 17 Cap nut 30 Water reservoir 31 Leaked water outlet pipe

Claims (6)

A gas-liquid separation and mixing device in which a gas permeable membrane for isolating raw material water and raw material gas is housed in an outer jacket,
A leaked water discharge port for discharging the raw water leaked into the raw material gas from the gas permeable membrane is formed in the mantle.
A gas-liquid separation and mixing device, wherein a sensor for detecting raw water leaked into the raw material gas is provided in a leaked water discharge pipe connected to the leaked water discharge port from the outside of the jacket. 2. The gas-liquid separation and mixing device according to claim 1, wherein a water storage part for storing the raw water leaked into the raw material gas is formed in the leakage water discharge pipe, and a sensor is provided in the water storage part. The gas-liquid separation and mixing device according to claim 1 or 2, wherein a leaked water outlet pipe connected to the leaked water discharge port is provided in the outer jacket. A gas-liquid separation and mixing device in which a gas permeable membrane for isolating raw material water and raw material gas is housed in an outer jacket,
A gas discharge pipe connected to a gas discharge port for discharging the source gas from the outside of the mantle is provided with a sensor for detecting source water leaked into the source gas from the gas permeable membrane. Gas-liquid separation and mixing device. 5. The gas-liquid separation and mixing apparatus according to claim 4, wherein a water storage part for storing the raw water leaked into the raw material gas is formed in the gas discharge pipe, and a sensor is provided in the water storage part. 6. The gas-liquid separation and mixing device according to claim 4, wherein a leaked water outlet pipe connected to the gas discharge port is provided in the jacket.

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