JP2006086244A5 - - Google Patents
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- Publication number
- JP2006086244A5 JP2006086244A5 JP2004267800A JP2004267800A JP2006086244A5 JP 2006086244 A5 JP2006086244 A5 JP 2006086244A5 JP 2004267800 A JP2004267800 A JP 2004267800A JP 2004267800 A JP2004267800 A JP 2004267800A JP 2006086244 A5 JP2006086244 A5 JP 2006086244A5
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- semiconductor device
- probes
- cleaning step
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004267800A JP4574302B2 (ja) | 2004-09-15 | 2004-09-15 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004267800A JP4574302B2 (ja) | 2004-09-15 | 2004-09-15 | 半導体装置の製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006086244A JP2006086244A (ja) | 2006-03-30 |
JP2006086244A5 true JP2006086244A5 (zh) | 2007-10-25 |
JP4574302B2 JP4574302B2 (ja) | 2010-11-04 |
Family
ID=36164508
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004267800A Expired - Fee Related JP4574302B2 (ja) | 2004-09-15 | 2004-09-15 | 半導体装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4574302B2 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009115720A (ja) * | 2007-11-08 | 2009-05-28 | Japan Electronic Materials Corp | プローブのクリーニング方法およびプローブのクリーニング装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5840836A (ja) * | 1981-09-03 | 1983-03-09 | Seiko Epson Corp | 半導体装置の製造方法 |
JPH0442944A (ja) * | 1990-06-06 | 1992-02-13 | Matsushita Electron Corp | 半導体装置 |
JP2004228314A (ja) * | 2003-01-22 | 2004-08-12 | Renesas Technology Corp | パッドを有する半導体装置 |
-
2004
- 2004-09-15 JP JP2004267800A patent/JP4574302B2/ja not_active Expired - Fee Related
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