JP2006080296A - Dicing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dicing apparatus having an injection member which reduces a load by cutting water supplied to a blade under rotation. <P>SOLUTION: A plurality of cut water supply injection ports 4A, 4A and 5A, 5A each of which injects the cutting water toward the rotating direction of the blade 7 in a cutting point are aligned in parallel and formed to a pair of the injection member 4, the injection member 5 provided near the side face of the blade through the blade to supply the cutting water. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a dicing apparatus, and particularly to a dicing apparatus provided with an injection member that effectively supplies cutting water to a blade.

  A dicing apparatus that divides a work such as a wafer on which a semiconductor device or an electronic component is formed into individual chips includes at least a blade that is rotated at high speed by a spindle, a work table on which the work is placed, a work table and a blade X, Y, Z, and θ moving axes that change the relative positions of the workpieces are provided, and the workpieces are grooved and cut by the operations of these moving axes.

During machining, contaminants such as grinding scraps (called contamination or contamination) are generated from the workpiece, and frictional heat is generated between the blade and the workpiece. On the other hand, cutting water was supplied for the purpose of lubrication, cooling and cleaning. Among these, especially when cooling the blade, it is provided on the blade side surface, and it is provided near the cutting point. It has been performed to provide an injection member that supplies cutting water toward the surface (for example, see Patent Documents 1 and 2).
JP 2002-319553 A JP-A-7-299748

  However, when an injection member such as that described in Patent Documents 1 and 2 described above is used, the cutting water is applied against the side of the blade or against the rotation direction of the blade, so that a load is applied to the blade. There was a problem that the blades vibrated and the machining quality was affected.

  The present invention has been made to solve such a problem, and an object of the present invention is to provide a dicing apparatus provided with an injection member that reduces a load caused by cutting water on a rotating blade.

  In order to achieve the above object, the present invention includes a blade that is rotated at a high speed by a spindle and a work table on which a work is placed to perform relative movement with the blade. In the dicing apparatus that performs grooving and cutting of a workpiece with the blade, the dicing device includes a pair of injection members that are provided on both side surfaces of the blade with the blade interposed therebetween and that supply cutting water in the vicinity of a cutting point. Each of the plurality of cutting water injection ports is provided horizontally, and the plurality of cutting water injection ports are opened so as to inject cutting water obliquely toward the blade surface in the blade rotation direction at the cutting point. It is characterized by being.

  According to the first aspect of the present invention, since the cutting water is jetted obliquely toward the blade surface in the blade rotation direction at the cutting point, the cutting water is supplied without countering the rotation of the blade. For this reason, the load by the cutting water on the rotating blade is reduced, and the vibration of the blade can be suppressed, so that the processing quality is improved. Further, since the load due to the cutting water on the rotating blade is reduced, the rotational load of the spindle is also reduced, and the power consumption of the spindle can be suppressed.

  The invention described in claim 2 has a blade that is rotated at high speed by a spindle, and a work table that places a work and moves relative to the blade, and grooving or cutting the work by the blade. In the dicing apparatus for performing the above, a cutting water supply injection member is provided in the vicinity of the cutting point in the plane including the blade, and the tip of the injection member is formed obliquely in accordance with the tangential direction of the outer periphery of the blade. It is characterized by that.

  According to the invention of claim 2, since the injection member whose tip is formed obliquely in accordance with the tangential direction of the outer periphery of the blade is provided in the vicinity of the cutting point, cutting water can be injected toward the rotation direction of the blade, Reduce the load caused by cutting water on the rotating blade.

  The invention according to claim 3 is the invention according to claim 1 or 2, wherein the injection member is provided with an injection position adjusting mechanism for adjusting an injection position of the cutting water. .

  According to the invention of claim 3, it is possible to adjust the position of the cutting water sprayed onto the blade, and the spray position can be changed according to the size of the blade.

  As described above, according to the dicing apparatus of the present invention, the cutting water is supplied without countering the rotation of the blade, so that the load of the cutting water on the rotating blade is reduced and the vibration of the blade is suppressed. Therefore, machining quality can be improved.

  Preferred embodiments of a dicing apparatus according to the present invention will be described below in detail with reference to the accompanying drawings. In each figure, the same number or symbol is attached to the same member.

  First, the configuration of the dicing apparatus will be described. FIG. 1 is a perspective view showing an appearance of a dicing apparatus according to the present invention. As shown in FIG. 1, the dicing apparatus 10 includes a processing unit 20, an operation / display unit 11, an imaging unit 12, a monitor television 13, an indicator lamp 14, a controller 15, and the like.

  In the processing unit 20, a blade, which is a rotary blade, is attached to the tip of a spindle supported by an air bearing built in a high frequency motor, and is rotated at a high speed of 30,000 rpm to 60,000 rpm, and infeed in the Z direction in the figure. And index feed in the Y direction are performed. The work table on which the work to be processed is placed is rotated by θ and is ground and fed in the X direction.

  As the blade for processing the workpiece, an electrodeposition blade in which diamond abrasive grains or CBN abrasive grains are electrodeposited with nickel, a metal resin bond blade bonded with a resin mixed with metal powder, or the like is used. Also, the dimensions of the blade are variously selected depending on the processing content, but when dicing an ordinary semiconductor wafer, a blade having a diameter of about 50 mm and a thickness of about 30 μm is used.

  The image pickup means 12 for picking up an image of the surface of the work or picking up a flaw on the upper surface of the work table includes a microscope and a CCD camera, and the picked-up image is displayed on the monitor television 13. The operation / display unit 11 incorporates a switch and a display device for performing each operation of the dicing apparatus 10.

  The indicator lamp 14 displays an operation end and an abnormality alarm during the operation of the dicing apparatus 10, and is provided at a high position so that it can be recognized even from a distant position. The controller 15 that controls the operation of each unit of the dicing apparatus 10 includes a CPU, a memory, an input / output circuit unit, various control circuit units, and the like, and is incorporated in the frame of the dicing apparatus 10.

  FIG. 2 is a front view showing the processing section 20 of the dicing apparatus 10 according to the present invention, and FIG. 3 is a bottom view of the blade mounting portion at the tip of the spindle in FIG. The dicing apparatus 10 is provided with a spindle 2 having a blade (rotating blade) 7 attached to the tip. The blade 7 is sandwiched between the flanges 6 and is fixed to the spindle 2 together with the flanges 6 and rotates in the direction of arrow A in FIG.

  A wheel cover 1 is attached around the flange 6 and the blade 7 to prevent the cutting water wound up by the blade 7 from violently splashing around. A block 8 and a block 9 are attached to the wheel cover 1, an injection member 3 is attached to the block 8, and cutting water B mainly supplied for cleaning is supplied to the wheel cover 1, and the injection member 4 is supplied to the block 9. A pair of injection members composed of the injection member 5 and the injection member 5 are attached, and cutting water C mainly for cooling the blade is supplied. Cutting water is supplied toward the blade 7 by this injection member.

  In the injection member 4 and the injection member 5, the cutting water injection ports 4A, 4A,..., The cutting water injection ports 5A, 5A are inclined in the direction of rotation A at the cutting point E of the blade 7 shown in FIG. A plurality of... Are provided. Usually, the number of injection ports is about three or four, and there may be a larger number. In the present embodiment, there are three.

  The injection member 3 is formed so that the tip thereof is slanted in accordance with the tangential direction D (the direction of arrow D in FIG. 2) of the blade 7 so that it approaches the outer peripheral portion of the blade 7 as much as possible within the plane including the blade 7. And in the vicinity of the cutting point E.

  The block 8 to which the ejection member 3 is attached is provided with a position adjusting fixing screw 8A and a long hole 8B as the nozzle position adjusting mechanism 81. Similarly, a block 9 to which the injection member 4 and the injection member 5 are attached is provided with a position adjusting fixing screw 9A and a long hole 9B as a nozzle position adjusting mechanism 91. Thereby, the position of the injection member 3, the injection member 4, and the injection member 5 can be adjusted in the vertical direction, and the position can be adjusted according to the size of the blade 7, the flange 6, the workpiece 17, and the like.

  With this configuration, the cutting water is supplied without countering the rotation of the blade 7, so the load of the cutting water on the rotating blade 7 is reduced and the vibration of the blade 7 can be suppressed, so that the machining quality is improved. Further, since the load due to the cutting water on the rotating blade 7 is reduced, the rotational load of the spindle is also reduced, and the power consumption of the spindle can be suppressed.

  Next, the operation of the dicing apparatus 10 according to the invention will be described. First, the work 17 is sucked and placed on the work table 16. After the suction placement, the reference mark on the workpiece 17, the peripheral portion of the workpiece 17, and the like are observed using the imaging means 12 of FIG. 1, and the processing position is adjusted. After the machining position adjustment is completed, the machining operation is started.

  When the machining operation is started, the blade 7 is rotated at a high speed by the spindle 2. Further, the supply of the cutting water B and the cutting water C to the injection member 3, the injection member 4, and the injection member 5 is started, and the cutting water is injected from each injection member toward the blade 7.

  At this time, the cutting water injection ports 4A, 4A,... 5A, 5A,... Of the injection member 4 and the injection member 5 inject cutting water toward the rotation direction of the blade 7, and thus are injected during the machining operation. The cutting water that is applied to the blade 7 is small.

  Moreover, since the tip of the injection member 3 is machined toward the tangential direction of the blade 7, it is possible to inject cutting water along the rotation direction, so that the load of cutting water applied to the blade 7 is similarly reduced. it can.

  Therefore, it is possible to suppress the vibration of the blade 7, improve the processing quality, reduce the rotational load of the spindle 2, and obtain the effect of reducing power consumption.

  Then, when the blade 7 rotates at high speed and cutting water starts to be supplied from each of the injection members, the spindle 2 is index-fed in the Y direction to the position where the machining is performed first, and cut in the Z direction. Accordingly, the work table 16 is processed and fed in the X direction, and one line is processed on the work 17 on the work table 16.

  When the processing of one line is completed, the spindle 2 is indexed in the Y direction to process the second line. This process is repeated, and when processing of all the lines in the direction is completed, the work table 16 rotates in the θ direction and changes its direction to the next direction. Usually, since the workpiece is processed into the shape of a ridge, the rotation angle is generally 90 degrees. When the processing of the lines in all directions is completed, the processing is completed, and the processing operation is completed after washing, drying, and the like.

  In addition, in embodiment mentioned above, although demonstrated with the form which provided both the injection member 4, the injection member 5, and the injection member 3, you may use only one of them. The injection member 4 and the injection member 5 may be formed by arranging a plurality of small injection members with the injection ports directed in the rotation direction of the blade 7.

  As described above, according to the present invention, the cutting water is supplied without countering the rotation of the blade, so that the load of the cutting water on the rotating blade is reduced, and the vibration of the blade can be suppressed. Quality can be improved. In addition, since the load of cutting water on the rotating blade is reduced, the rotational load of the spindle is also reduced, and the power consumption of the spindle is reduced.

1 is an external view showing a dicing apparatus according to an embodiment of the present invention. The front view showing the process part of the dicing apparatus which concerns on embodiment of this invention. A bottom view showing the blade mounting portion in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Wheel cover 2 ... Spindle 3, 4, 5 ... Injection member 4A, 5A ... Cutting water injection port 6 ... Flange 7 ... Blade 8A, 9A ... Adjustment screw 8B, 9B ... Slot 10 ... Dicing apparatus 15 ... Controller 16 ... Work table 17 ... Work 20 ... Processing part 81, 91 ... Injection position adjusting mechanism A ... Blade rotation direction B, C ... Washing water D ... Blade tangential direction E ... Cutting point

Claims (3)

In a dicing apparatus that has a blade that is rotated at high speed by a spindle and a work table that places a workpiece and moves relative to the blade, and performs groove processing and cutting of the workpiece by the blade,
Provided on both sides of the blade across the blade, and having a pair of injection members for supplying cutting water near the cutting point;
The injection member is provided with a plurality of cutting water injection ports arranged horizontally, and the plurality of cutting water injection ports inject the cutting water obliquely toward the blade surface in the blade rotation direction at the cutting point. A dicing apparatus having an opening. In a dicing apparatus that has a blade that is rotated at high speed by a spindle and a work table that places a workpiece and moves relative to the blade, and performs groove processing and cutting of the workpiece by the blade,
An injection member for supplying cutting water in the vicinity of the cutting point in the plane including the blade,
A dicing apparatus characterized in that the tip of the injection member is formed obliquely in accordance with a tangential direction of the outer periphery of the blade.   The dicing apparatus according to claim 1, wherein the injection member is provided with an injection position adjustment mechanism that adjusts an injection position of the cutting water.

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