JP2006066747A5 - - Google Patents

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Publication number
JP2006066747A5
JP2006066747A5 JP2004249380A JP2004249380A JP2006066747A5 JP 2006066747 A5 JP2006066747 A5 JP 2006066747A5 JP 2004249380 A JP2004249380 A JP 2004249380A JP 2004249380 A JP2004249380 A JP 2004249380A JP 2006066747 A5 JP2006066747 A5 JP 2006066747A5
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JP
Japan
Prior art keywords
substrate
pins
movable member
positioning
predetermined position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004249380A
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English (en)
Japanese (ja)
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JP2006066747A (ja
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Publication date
Application filed filed Critical
Priority to JP2004249380A priority Critical patent/JP2006066747A/ja
Priority claimed from JP2004249380A external-priority patent/JP2006066747A/ja
Publication of JP2006066747A publication Critical patent/JP2006066747A/ja
Publication of JP2006066747A5 publication Critical patent/JP2006066747A5/ja
Pending legal-status Critical Current

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JP2004249380A 2004-08-30 2004-08-30 基板の位置決め装置及び位置決め方法 Pending JP2006066747A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004249380A JP2006066747A (ja) 2004-08-30 2004-08-30 基板の位置決め装置及び位置決め方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004249380A JP2006066747A (ja) 2004-08-30 2004-08-30 基板の位置決め装置及び位置決め方法

Publications (2)

Publication Number Publication Date
JP2006066747A JP2006066747A (ja) 2006-03-09
JP2006066747A5 true JP2006066747A5 (https=) 2007-10-18

Family

ID=36112928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004249380A Pending JP2006066747A (ja) 2004-08-30 2004-08-30 基板の位置決め装置及び位置決め方法

Country Status (1)

Country Link
JP (1) JP2006066747A (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5279207B2 (ja) * 2007-06-11 2013-09-04 Ｎｓｋテクノロジー株式会社 露光装置用基板搬送機構
KR200458076Y1 (ko) 2007-04-24 2012-01-18 삼성전자주식회사 기판정렬시스템
KR101324470B1 (ko) 2013-04-03 2013-11-01 주식회사 트레이스 디스플레이 기판 정렬장치
JP5701436B1 (ja) * 2014-07-24 2015-04-15 中外炉工業株式会社 定盤ユニット
WO2017066418A1 (en) * 2015-10-15 2017-04-20 Applied Materials, Inc. Substrate carrier system

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