JP2006066747A - 基板の位置決め装置及び位置決め方法 - Google Patents

基板の位置決め装置及び位置決め方法 Download PDF

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JP2006066747A
JP2006066747A JP2004249380A JP2004249380A JP2006066747A JP 2006066747 A JP2006066747 A JP 2006066747A JP 2004249380 A JP2004249380 A JP 2004249380A JP 2004249380 A JP2004249380 A JP 2004249380A JP 2006066747 A JP2006066747 A JP 2006066747A
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substrate
positioning
pins
glass substrate
slide
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JP2006066747A5 (enExample
Inventor
Akira Hayano
明 早野
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Hitachi High Tech Corp
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Hitachi High Tech Electronics Engineering Co Ltd
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Priority to JP2004249380A priority Critical patent/JP2006066747A/ja
Publication of JP2006066747A publication Critical patent/JP2006066747A/ja
Publication of JP2006066747A5 publication Critical patent/JP2006066747A5/ja
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JP2004249380A 2004-08-30 2004-08-30 基板の位置決め装置及び位置決め方法 Pending JP2006066747A (ja)

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JP2004249380A JP2006066747A (ja) 2004-08-30 2004-08-30 基板の位置決め装置及び位置決め方法

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JP2004249380A JP2006066747A (ja) 2004-08-30 2004-08-30 基板の位置決め装置及び位置決め方法

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JP2006066747A true JP2006066747A (ja) 2006-03-09
JP2006066747A5 JP2006066747A5 (enExample) 2007-10-18

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008306109A (ja) * 2007-06-11 2008-12-18 Nsk Ltd 露光装置用基板搬送機構
KR200458076Y1 (ko) 2007-04-24 2012-01-18 삼성전자주식회사 기판정렬시스템
KR101324470B1 (ko) 2013-04-03 2013-11-01 주식회사 트레이스 디스플레이 기판 정렬장치
CN105300111A (zh) * 2014-07-24 2016-02-03 中外炉工业株式会社 平台单元
JP2018536986A (ja) * 2015-10-15 2018-12-13 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 基板キャリアシステム

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200458076Y1 (ko) 2007-04-24 2012-01-18 삼성전자주식회사 기판정렬시스템
JP2008306109A (ja) * 2007-06-11 2008-12-18 Nsk Ltd 露光装置用基板搬送機構
KR101324470B1 (ko) 2013-04-03 2013-11-01 주식회사 트레이스 디스플레이 기판 정렬장치
CN105300111A (zh) * 2014-07-24 2016-02-03 中外炉工业株式会社 平台单元
CN105300111B (zh) * 2014-07-24 2018-09-25 中外炉工业株式会社 平台单元
TWI648510B (zh) * 2014-07-24 2019-01-21 日商中外爐工業股份有限公司 固定盤單元
JP2018536986A (ja) * 2015-10-15 2018-12-13 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 基板キャリアシステム

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