JP2006065899A - Magnetic transfer apparatus - Google Patents

Magnetic transfer apparatus Download PDF

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JP2006065899A
JP2006065899A JP2004243968A JP2004243968A JP2006065899A JP 2006065899 A JP2006065899 A JP 2006065899A JP 2004243968 A JP2004243968 A JP 2004243968A JP 2004243968 A JP2004243968 A JP 2004243968A JP 2006065899 A JP2006065899 A JP 2006065899A
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slave
transfer
master carrier
holder
suction
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Akihito Kamatani
彰人 鎌谷
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Fujifilm Holdings Corp
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Fuji Photo Film Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To surely hold a master carrier and a slave medium on one inner surface of a transfer holder by reducing a gap for a sucking plane. <P>SOLUTION: Master carriers 3, 4 having a transfer pattern corresponding to transfer information are held by the transfer holder 1, when a slave medium 2 having a magnetic recording part receiving transfer is adhered closely to the master carriers 3, 4 and magnetic transfer is performed, the transfer holder 1 is provided with the inner surface holding the master carriers 3, 4, and a slave absorbing plane 8a sucking a part of the slave medium 2 projected to the approximately same height as the surface of the master carriers and overlapped on the master carriers, and the holder 1 has such structure that the slave sucking plane 8a is movable in the vertical direction to the surface of the master carriers 3, 4. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、情報が担持されたマスター担体からスレーブ媒体へ磁気転写する磁気転写装置に関し、特に上記マスター担体およびスレーブ媒体を保持して密着させる転写ホルダーの構造に関するものである。   The present invention relates to a magnetic transfer apparatus for magnetic transfer from a master carrier carrying information to a slave medium, and more particularly to a structure of a transfer holder for holding and closely contacting the master carrier and the slave medium.

本発明の対象とする磁気転写は、少なくとも表層に磁性層を有するサーボ信号等の転写パターンが凹凸形状あるいは埋め込み構造で形成されたマスター担体(パターンドマスター)を、磁気記録部を有するスレーブ媒体と密着させた状態で、転写用磁界を印加してマスター担体に担持した情報に対応する磁化パターンをスレーブ媒体に転写記録するものである。   The magnetic transfer that is the subject of the present invention includes a master carrier (patterned master) in which a transfer pattern such as a servo signal having a magnetic layer at least on the surface layer is formed in an uneven shape or an embedded structure, and a slave medium having a magnetic recording unit. In a state of being in close contact, a magnetic field for transfer is applied to transfer and record a magnetization pattern corresponding to information carried on the master carrier onto the slave medium.

上記スレーブ媒体がハードディスクまたは高密度フレキシブルディスクのような円盤状媒体の場合には、このスレーブ媒体の片面または両面に円盤状のマスター担体を密着させた状態で、その片側または両側に電磁石装置、永久磁石装置による磁界印加装置を配設して転写用磁界を印加する。   When the slave medium is a disk-shaped medium such as a hard disk or a high-density flexible disk, an electromagnet device or permanent magnet is attached to one or both sides of a disk-shaped master carrier in close contact with one or both surfaces of the slave medium. A magnetic field applying device using a magnet device is provided to apply a transfer magnetic field.

上記磁気転写を行う際には、前記マスター担体とスレーブ媒体とを均一に密着させるために、このマスター担体とスレーブ媒体を保持して押圧する転写ホルダーを用いるのが好ましい。また、磁気転写の際、転写ホルダーはその押圧内面にマスター担体を保持すると共に、スレーブ媒体を保持する必要があり、該ホルダーにマスター担体の厚さと略同じ高さの段差を持たせ、この段差の部分に吸着孔を設けてスレーブ媒体を吸着保持することが提案されている(例えば、特許文献1参照)。
特開2003−242638号公報
When performing the magnetic transfer, it is preferable to use a transfer holder that holds and presses the master carrier and the slave medium so that the master carrier and the slave medium are in close contact with each other. Also, during magnetic transfer, the transfer holder needs to hold the master carrier on its inner pressing surface and the slave medium, and the holder has a step approximately the same height as the thickness of the master carrier. It has been proposed that a suction hole is provided in this portion to hold the slave medium by suction (see, for example, Patent Document 1).
JP 2003-242638 A

ところで、前記磁気転写装置における転写ホルダーに、マスター担体を保持すると共にこのマスター担体に重ねてスレーブ媒体の一部を吸着保持するものでは、マスター担体の厚さばらつきや、段差の加工精度ばらつき分を考慮し、前述のスレーブ媒体を吸着保持する段差はマスター担体の厚さより低くする必要があった。   By the way, in the case where the master carrier is held on the transfer holder in the magnetic transfer device and a part of the slave medium is attracted and held on the master carrier, the thickness variation of the master carrier and the processing accuracy variation of the step are reduced. Considering this, the step for adsorbing and holding the slave medium needs to be lower than the thickness of the master carrier.

つまり、スレーブ吸着面を有する段差の高さが、マスター担体の厚さより高く突出していると、転写ホルダーを閉じてスレーブ媒体とマスター担体を密着させる際に、スレーブ吸着面の周囲でスレーブ媒体がマスター担体より浮き上がり、良好な密着が得られない。密着不良があると、磁気転写が起こらない領域が生じ、磁気転写が起こらないとスレーブ媒体に転写された磁気情報に信号抜けが発生して信号品位が低下し、記録した信号がサーボ信号の場合にはトラッキング機能が十分に得られずに信頼性が低下するという問題がある。また、スレーブ吸着面への強い接触によりスレーブ媒体へのダメージの発生や、それに伴う塵埃によりコンタミネーションの発生が問題となる。   In other words, if the height of the step having the slave suction surface protrudes higher than the thickness of the master carrier, when the transfer holder is closed and the slave medium and the master carrier are brought into close contact, the slave medium is mastered around the slave suction surface. It floats up from the carrier, and good adhesion cannot be obtained. If there is poor adhesion, there will be areas where magnetic transfer will not occur, and if magnetic transfer does not occur, signal loss will occur in the magnetic information transferred to the slave medium and the signal quality will deteriorate, and the recorded signal will be a servo signal. However, there is a problem that the tracking function cannot be sufficiently obtained and the reliability is lowered. In addition, damage to the slave medium due to strong contact with the slave attracting surface, and contamination due to the accompanying dust become a problem.

しかし、上記段差の吸着面をマスター担体の厚さより低くすると、スレーブ媒体とスレーブ吸着面との間に隙間が発生し、スレーブ媒体の吸着時に吸引エアがリークし、スレーブ媒体の吸着が不十分となり、スレーブ媒体の位置決め不良や、磁気転写処理中にスレーブ媒体が落下する恐れがある。   However, if the suction surface of the step is made lower than the thickness of the master carrier, a gap is generated between the slave medium and the slave suction surface, and suction air leaks when the slave medium is sucked, resulting in insufficient suction of the slave medium. There is a risk that the slave medium may be misaligned or the slave medium may fall during the magnetic transfer process.

さらに、マスター担体とスレーブ媒体との密着性を向上させるために、マスター担体裏面とホルダー面との間に弾性変形する緩衝材を介装する場合があり、このときには転写ホルダーを閉じて加圧密着した際に、緩衝材の圧縮変形分および緩衝材の厚さばらつきを考慮して、スレーブ吸着面を有する段差の高さを低く設定する必要がある。そのため、加圧する前の状態でスレーブ媒体を吸着する際に、スレーブ吸着面とスレーブ媒体との隙間がさらに大きくなってリークが増大し、吸着が不安定となる問題がある。   Furthermore, in order to improve the adhesion between the master carrier and the slave medium, there is a case where a cushioning material that is elastically deformed is interposed between the back surface of the master carrier and the holder surface. In this case, it is necessary to set the height of the step having the slave suction surface to be low in consideration of the compression deformation of the buffer material and the thickness variation of the buffer material. Therefore, when the slave medium is adsorbed in a state before pressurization, there is a problem that the gap between the slave adsorption surface and the slave medium is further increased, leakage increases, and the adsorption becomes unstable.

本発明はこのような点に鑑みなされたもので、転写ホルダーにマスター担体とスレーブ媒体とを重ねて保持するについて、スレーブ吸着面とスレーブ媒体との隙間を低減してスレーブ媒体を確実に保持できるようにした磁気転写装置を提供することを目的とするものである。   The present invention has been made in view of the above points, and with respect to holding the master carrier and the slave medium in an overlapping manner on the transfer holder, the gap between the slave suction surface and the slave medium can be reduced and the slave medium can be reliably held. It is an object of the present invention to provide a magnetic transfer apparatus.

本発明の磁気転写装置は、転写情報に対応した転写パターンを有するマスター担体を転写ホルダーに保持し、該マスター担体に対し転写を受ける磁気記録部を有するスレーブ媒体を密着させて転写用磁界を印加し磁気転写を行う磁気転写装置において、
前記転写ホルダーは、前記マスター担体を保持する内面と、該マスター担体の表面と略同等の高さに突出して該マスター担体に重ねられた前記スレーブ媒体の一部を吸着するスレーブ吸着面とを備え、該スレーブ吸着面が前記マスター担体の表面に垂直な方向に可動な構造であることを特徴とするものである。
The magnetic transfer apparatus of the present invention holds a master carrier having a transfer pattern corresponding to transfer information on a transfer holder, and applies a magnetic field for transfer by bringing a slave medium having a magnetic recording portion to receive the transfer into close contact with the master carrier. In a magnetic transfer apparatus that performs magnetic transfer,
The transfer holder includes an inner surface that holds the master carrier, and a slave suction surface that protrudes to a height substantially equal to the surface of the master carrier and sucks a part of the slave medium that is stacked on the master carrier. The slave adsorption surface has a structure movable in a direction perpendicular to the surface of the master carrier.

前記転写ホルダーは、接離移動する片側ホルダーと、該片側ホルダーとの間で転写を受けるスレーブ媒体の片側または両側に前記マスター担体を密着させる他側ホルダーとを備え、該片側ホルダーまたは他側ホルダーの一方に、前記マスター担体を保持する内面と、前記スレーブ媒体の一部を吸着する、前記マスター担体の表面に垂直な方向に可動な構造のスレーブ吸着面とを備えるように構成可能である。   The transfer holder includes a one-side holder that moves toward and away, and an other-side holder that closely contacts the master carrier to one or both sides of a slave medium that receives the transfer between the one-side holder and the one-side holder or the other-side holder. On one of them, an inner surface holding the master carrier and a slave adsorption surface having a structure movable in a direction perpendicular to the surface of the master carrier, which adsorbs a part of the slave medium, can be configured.

また、前記転写ホルダーは片側ホルダーのみ備え、該片側ホルダーに前記マスター担体を保持する内面と、前記スレーブ媒体の一部を吸着する、前記マスター担体の表面に垂直な方向に可動な構造のスレーブ吸着面とを備えるように構成可能である。その際、前記スレーブ媒体の前記マスター担体との反対面には、中心部が閉じた他のマスター担体を保持して密着させることで両面転写が行える。   Further, the transfer holder is provided with only one side holder, the inner surface holding the master carrier in the one side holder, and a slave adsorption having a structure movable in a direction perpendicular to the surface of the master carrier to adsorb a part of the slave medium. And a surface. At this time, double-sided transfer can be performed by holding and closely contacting another master carrier having a closed center on the opposite surface of the slave medium to the master carrier.

前記スレーブ吸着面を備えた部材を弾性材で構成し、その変形によって前記スレーブ吸着面が前記マスター担体の表面に垂直な方向に移動するように構成できる。その際、前記マスター担体と前記転写ホルダーとの間に緩衝材を備え、該緩衝材と前記スレーブ吸着面を備えた前記弾性材とを一体に構成してもよい。   The member having the slave suction surface may be made of an elastic material, and the slave suction surface may be configured to move in a direction perpendicular to the surface of the master carrier by deformation thereof. At this time, a buffer material may be provided between the master carrier and the transfer holder, and the buffer material and the elastic material provided with the slave suction surface may be configured integrally.

前記スレーブ吸着面を備えた部材を、前記転写ホルダーに対して移動可能に保持し、付勢部材で突出方向に付勢するように構成できる。   The member provided with the slave suction surface can be configured to be movably held with respect to the transfer holder and biased in the protruding direction by the biasing member.

上記のような本発明の磁気転写装置によれば、転写ホルダーがマスター担体を保持する内面と、マスター担体の表面と略同等の高さに突出してマスター担体に重ねられたスレーブ媒体の一部を吸着するスレーブ吸着面とを備え、このスレーブ吸着面が前記マスター担体の表面に垂直な方向に可動な構造としたことにより、マスター担体とスレーブ媒体とを密着させた磁気転写時に、スレーブ媒体とスレーブ吸着面とが強く当たることがなく、マスター担体とスレーブ媒体との密着不良が発生したり、スレーブ媒体に傷を付けたりすることがない。   According to the magnetic transfer apparatus of the present invention as described above, the transfer holder holds the master carrier and the part of the slave medium that is superimposed on the master carrier so as to protrude to the same height as the surface of the master carrier. A slave adsorption surface that adsorbs the slave medium, and the slave adsorption surface is movable in a direction perpendicular to the surface of the master carrier. There is no strong contact with the suction surface, and there is no occurrence of poor adhesion between the master carrier and the slave medium, and no damage to the slave medium.

また、転写ホルダーに保持したマスター担体に重ねてスレーブ媒体をセットする際にも、このスレーブ媒体の内面にスレーブ吸着面が接するように接近し、スレーブ吸着用の吸引エアのリークが少ないため、十分なスレーブ保持力が得られ、スレーブの位置ずれや脱落を確実に防止することができる。   In addition, when setting the slave medium over the master carrier held in the transfer holder, the slave suction surface is close to the inner surface of the slave medium and there is little leakage of suction air for slave suction. Slave holding force can be obtained, and it is possible to reliably prevent the slave from being displaced or dropped.

さらに、マスター担体とスレーブ媒体との密着性を向上させるためにマスター担体と転写ホルダーとの間に緩衝材を介装した場合においても、この緩衝材の変形分だけスレーブ吸着面を低く設定する必要がなく、スレーブ媒体の裏面とスレーブ吸着面との隙間が小さくて吸引エアのリークが少なく、良好なスレーブ媒体の吸着保持機能が得られるとともに、緩衝材に求められる厚み公差が大きくなり、緩衝材製作時のコスト低減が可能となる。   Furthermore, even when a buffer material is interposed between the master carrier and the transfer holder in order to improve the adhesion between the master carrier and the slave medium, it is necessary to set the slave suction surface as low as the deformation of the buffer material. The gap between the back surface of the slave medium and the slave suction surface is small, there is little leakage of suction air, a good suction retention function of the slave medium is obtained, and the thickness tolerance required for the cushioning material is increased. Costs during production can be reduced.

前記スレーブ吸着面を備えた部材を弾性材で構成した場合には、構造が簡易に構成できる。その際、前記弾性材と前記緩衝材とを一体に構成したものでは、さらに構造が簡易に構成できる。一方、スレーブ吸着面を備えた部材をホルダーに対して移動可能の保持し、付勢部材で突出方向に付勢したものでは、耐久性に優れた構造となる。   When the member having the slave suction surface is made of an elastic material, the structure can be easily configured. In that case, if the elastic material and the cushioning material are integrated, the structure can be further simplified. On the other hand, when the member having the slave suction surface is held movable relative to the holder and is urged in the protruding direction by the urging member, the structure has excellent durability.

以下、図面に示す実施の形態に基づいて本発明を詳細に説明する。図1は第1の実施形態にかかる磁気転写装置の開状態にある転写ホルダーを示す概略断面図、図2は図1の要部拡大図である。なお、図は模式図であり各部の寸法は実際とは異なる比率で示している。   Hereinafter, the present invention will be described in detail based on embodiments shown in the drawings. FIG. 1 is a schematic sectional view showing a transfer holder in an open state of the magnetic transfer apparatus according to the first embodiment, and FIG. 2 is an enlarged view of a main part of FIG. In addition, the figure is a schematic diagram, and the dimensions of each part are shown at a ratio different from the actual.

図1に示す磁気転写装置の転写ホルダー1は、両面同時磁気転写を行うものであり、接離移動可能ないずれもステンレススチール、アルミニウム、セラミックスなどからなる片側ホルダー5と他側ホルダー6とを備え、片側ホルダー5の内面5aに一方のマスター担体3およびスレーブ媒体2を保持し、他側ホルダー6の内面6aに他方のマスター担体4を保持している。両側ホルダー5,6の接近により、両者間にスレーブ媒体2の両面に両側のマスター担体3,4を密着させる。   A transfer holder 1 of the magnetic transfer apparatus shown in FIG. 1 performs double-sided simultaneous magnetic transfer, and includes a one-side holder 5 and an other-side holder 6 each made of stainless steel, aluminum, ceramics and the like that can be moved toward and away from each other. One master carrier 3 and the slave medium 2 are held on the inner surface 5 a of the one-side holder 5, and the other master carrier 4 is held on the inner surface 6 a of the other-side holder 6. By approaching the both side holders 5 and 6, the master carriers 3 and 4 on both sides are brought into close contact with both sides of the slave medium 2 between them.

磁気転写装置は、図示していないが、例えば、転写ホルダー1の片側ホルダー5と他側ホルダー6とで密閉された内部空間を形成し、この内部空間のエアーを真空吸引し内部を減圧状態として密着力を得る真空吸引手段と、転写ホルダー1を回転させつつ転写用磁界を印加する磁界印加装置とを備える。また、スレーブ媒体2とマスター担体3,4との密着は、接触密着、ごく僅かな隙間を空けて対峙密着させることの何れかを指すものとする。   Although not shown, the magnetic transfer device forms, for example, an internal space that is hermetically sealed by the one-side holder 5 and the other-side holder 6 of the transfer holder 1, and vacuums the air in the internal space to reduce the inside to a reduced pressure state. A vacuum suction means for obtaining an adhesion force and a magnetic field applying device for applying a transfer magnetic field while rotating the transfer holder 1 are provided. Further, the close contact between the slave medium 2 and the master carriers 3 and 4 indicates either contact close contact or close contact with a very small gap.

スレーブ媒体2は円盤状で所定径の中心孔2aが開口され、両面に磁気記録部(磁性層)が形成されたハードディスク、高密度フレキシブルディスクなどの円盤状磁気記録媒体が使用される。その磁気記録部は塗布型磁気記録層あるいは金属薄膜型磁気記録層で構成される。また、マスター担体3,4は円盤状ディスクに形成され、所定径の中心孔3a,4aが開口され、基板上に形成された微細凹凸パターンに軟磁性体が被覆されてなる転写パターン(不図示)を同心円状に有する。   As the slave medium 2, a disk-shaped magnetic recording medium such as a hard disk or a high-density flexible disk having a disk shape with a center hole 2 a having a predetermined diameter and a magnetic recording portion (magnetic layer) formed on both surfaces is used. The magnetic recording part is composed of a coating type magnetic recording layer or a metal thin film type magnetic recording layer. The master carriers 3 and 4 are formed on a disk-like disk, center holes 3a and 4a having predetermined diameters are opened, and a transfer pattern (not shown) is formed by covering a fine uneven pattern formed on a substrate with a soft magnetic material. ) In concentric circles.

上記スレーブ媒体2の中心孔2aの内径は、マスター担体3の中心孔3aの内径より、所定の内径差を持って小さく設定され、この内径差部位が後述のスレーブ吸着面8aに吸引保持される。   The inner diameter of the central hole 2a of the slave medium 2 is set smaller than the inner diameter of the central hole 3a of the master carrier 3 with a predetermined inner diameter difference, and this inner diameter difference portion is sucked and held by a slave suction surface 8a described later. .

前記片側ホルダー5および他側ホルダー6は円盤状で、マスター担体3,4の外径より大きい円形状の押圧内面5a,6aを備え、この押圧内面5a,6aにそれぞれマスター担体3,4を両側ホルダー5,6の中心に対して所定の位置決め精度で保持する。   The one-side holder 5 and the other-side holder 6 are disk-shaped and include circular pressing inner surfaces 5a and 6a larger than the outer diameter of the master carriers 3 and 4, and the master carriers 3 and 4 are disposed on both sides of the pressing inner surfaces 5a and 6a, respectively. The holders 5 and 6 are held with a predetermined positioning accuracy.

上記両側ホルダー5,6の押圧内面5a,6aへのマスター担体3,4の保持は、この押圧内面5a,6aに多数のエアー吸引孔(不図示)がほぼ均等に開口され、マスター担体3,4を吸引保持することなどにより行われる。   To hold the master carriers 3 and 4 on the pressing inner surfaces 5a and 6a of the holders 5 and 6 on the both sides, a large number of air suction holes (not shown) are opened almost uniformly on the pressing inner surfaces 5a and 6a. This is performed by sucking and holding 4.

なお、図示してないが、両側ホルダー5,6の背面にはそれぞれ支持軸を備え、回転可能に保持される。また、片側ホルダー5および他側ホルダー6は一方または両方が軸方向に移動して開閉可能に設けられている。   Although not shown, the back surfaces of the side holders 5 and 6 are each provided with a support shaft and are rotatably held. One or both of the one-side holder 5 and the other-side holder 6 are provided so as to be opened and closed by moving in the axial direction.

そして、片側ホルダー5においては、前述のように、一方のマスター担体3上にスレーブ媒体2を重ねて吸着保持するものであるが、これは上記マスター担体3の中心孔3aの内周側部位に吸引孔8bが開口したスレーブ吸着面8aを備えて行われる。このスレーブ吸着面8aは、円弧状の弾性材によるスレーブ吸着部材8で構成され、その弾性変形によってスレーブ吸着面8aが片側ホルダー5と他側ホルダー6の接離方向すなわち前記マスター担体の表面に垂直な方向に変位可能で可動な構造となっている。   In the one-side holder 5, as described above, the slave medium 2 is stacked and held on one master carrier 3 by suction, and this is formed at the inner peripheral side portion of the central hole 3 a of the master carrier 3. This is performed by providing a slave suction surface 8a having a suction hole 8b. The slave suction surface 8a is composed of a slave suction member 8 made of an arc-shaped elastic material, and the slave suction surface 8a is perpendicular to the contact / separation direction of the one-side holder 5 and the other-side holder 6, that is, the surface of the master carrier. It has a movable structure that can be displaced in any direction.

上記スレーブ吸着部材8は、マスター担体3の中心孔3aに沿って設置され、その高さはスレーブ吸着面8aがマスター担体3の表面と略同等の高さとなるように、もしくは若干突出するように設定されている。   The slave adsorption member 8 is installed along the central hole 3a of the master carrier 3 so that the height of the slave adsorption surface 8a is substantially equal to the surface of the master carrier 3 or slightly protrudes. Is set.

このスレーブ吸着部材8の内部に貫通形成された吸引孔8bは、底面で片側ホルダー5の内面5aに開口したエア通路15と連通し、このエア通路15は片側ホルダー5の内部を通って不図示の支持軸を通して外部に導出され、真空ポンプに接続され吸引圧力が導入される。このエア通路15を経てスレーブ吸着部材8の吸着面8aに開口した吸引孔8bに作用するエア吸引力によって、マスター担体3の中心孔3aより内周に位置する、前記スレーブ媒体2の中心孔2a近傍の内径差部位をマスター担体3側に吸引し、マスター担体3と密着させるように保持する。   A suction hole 8b formed through the inside of the slave suction member 8 communicates with an air passage 15 opened to the inner surface 5a of the one-side holder 5 at the bottom surface, and this air passage 15 passes through the inside of the one-side holder 5 and is not shown. It is led out through the support shaft and connected to a vacuum pump to introduce suction pressure. The central hole 2a of the slave medium 2 located on the inner periphery of the central hole 3a of the master carrier 3 by the air suction force acting on the suction hole 8b opened on the suction surface 8a of the slave suction member 8 through the air passage 15. The adjacent inner diameter difference portion is sucked to the master carrier 3 side and held so as to be in close contact with the master carrier 3.

本実施形態においては、スレーブ吸着部材8を弾性材で構成したことにより、密着時に両側ホルダー5,6が閉じて、スレーブ媒体2がマスター担体3に押圧された際にはスレーブ吸着部材8が弾性変形し、そのスレーブ吸着面8aがスレーブ媒体2の面と密着して吸引エアのリークが少ない状態で確実に吸引保持できる。弾性材としては、例えばポリウレタンゴム、フッ素ゴム、シリコーンゴム、エチレン−プロピレンゴム、ブタジエンゴム、ニトリルゴム等を挙げることができる。   In the present embodiment, since the slave suction member 8 is made of an elastic material, when the both side holders 5 and 6 are closed at the time of close contact and the slave medium 2 is pressed against the master carrier 3, the slave suction member 8 is elastic. The slave suction surface 8a is deformed and is in close contact with the surface of the slave medium 2, so that suction and holding can be reliably performed in a state where there is little leakage of suction air. Examples of the elastic material include polyurethane rubber, fluorine rubber, silicone rubber, ethylene-propylene rubber, butadiene rubber, and nitrile rubber.

なお、スレーブ媒体2が押圧される前の状態のスレーブ吸着部材8のスレーブ吸着面8aは、片側ホルダー5に保持されたマスター担体3の表面より若干突出するように設けるのが、エアリークを低減する上では好適である。   Note that the slave suction surface 8a of the slave suction member 8 in a state before the slave medium 2 is pressed is provided so as to slightly protrude from the surface of the master carrier 3 held by the one-side holder 5 to reduce air leakage. Above is preferred.

次に、図3および図4は第2の実施形態を示し、図3は磁気転写装置の開状態にある転写ホルダーを示す概略断面図、図4は図2の要部拡大図である。   Next, FIG. 3 and FIG. 4 show a second embodiment, FIG. 3 is a schematic sectional view showing a transfer holder in an open state of the magnetic transfer device, and FIG. 4 is an enlarged view of a main part of FIG.

この実施形態の転写ホルダー10では、片側ホルダー5の内面5aとマスター担体3の裏面との間に弾性変形する緩衝材7を介装して、その変形によって均等に加圧力が作用するようにしてマスター担体3,4とスレーブ媒体2との密着性を向上させるものであり、これに応じてスレーブ吸着部材18の高さを変更している。その他は前例と同様であり、同一構成には同一符号を付してその説明を省略する。   In the transfer holder 10 of this embodiment, a shock-absorbing material 7 that is elastically deformed is interposed between the inner surface 5a of the one-side holder 5 and the back surface of the master carrier 3 so that the applied pressure is evenly applied by the deformation. The adhesion between the master carriers 3 and 4 and the slave medium 2 is improved, and the height of the slave suction member 18 is changed accordingly. Others are the same as the previous example, and the same reference numerals are given to the same components, and the description thereof is omitted.

上記緩衝材7はマスター担体3と同形の円盤状であり、その中心孔7aの内径はマスター担体3と略同一に形成されている。この緩衝材7とマスター担体3の中心孔7a,3aに設置される、本実施形態のスレーブ吸着部材18は、前例と同様に弾性材で構成されている。このスレーブ吸着部材18は、吸引孔18bが開口したスレーブ吸着面18aを有し、平面的には前例の図1,図2のスレーブ吸着部材8と同形であるが、緩衝材7の厚さ分だけ大きな高さに設定され、その高さはスレーブ吸着面18aがマスター担体3の表面と略同等の高さとなるように、もしくは若干突出するように設定されている。   The cushioning material 7 has a disk shape that is the same shape as the master carrier 3, and the inner diameter of the central hole 7 a is formed substantially the same as that of the master carrier 3. The buffer member 7 and the slave suction member 18 of the present embodiment installed in the central holes 7a and 3a of the master carrier 3 are made of an elastic material as in the previous example. The slave suction member 18 has a slave suction surface 18a having suction holes 18b open, and is planarly the same shape as the slave suction member 8 of FIGS. The height is set to be as large as possible, and the height is set so that the slave suction surface 18a is substantially equal to the surface of the master carrier 3 or slightly protrudes.

このスレーブ吸着部材18の吸引孔18bは、同様に片側ホルダー5のエア通路15と連通され、吸引孔18bに作用するエア吸引力によって、スレーブ媒体2の中心孔2a近傍の内径差部位をマスター担体3側に吸引保持する。   Similarly, the suction hole 18b of the slave suction member 18 communicates with the air passage 15 of the one-side holder 5, and an air suction force acting on the suction hole 18b causes an inner diameter difference portion near the center hole 2a of the slave medium 2 to be a master carrier. Suction and hold on 3 side.

本実施形態においても、スレーブ吸着部材18を弾性材で構成したことにより、密着時に両側ホルダー5,6が閉じて、スレーブ媒体2がマスター担体3に押圧された際には、緩衝材7が押圧変形するとともにスレーブ吸着部材18が弾性変形し、そのスレーブ吸着面18aがスレーブ媒体2の面と密着して吸引エアのリークが少ない状態で確実に吸引保持できる。   Also in this embodiment, since the slave adsorption member 18 is made of an elastic material, when the both side holders 5 and 6 are closed at the time of close contact and the slave medium 2 is pressed against the master carrier 3, the buffer material 7 is pressed. In addition to the deformation, the slave suction member 18 is elastically deformed, and the slave suction surface 18a is in close contact with the surface of the slave medium 2, so that suction and holding can be reliably performed in a state where the suction air leak is small.

次に、図5は第3の実施形態にかかる磁気転写装置の転写ホルダーを示す要部拡大図であり、この実施形態は上記第2の実施形態の変形例である。   Next, FIG. 5 is an enlarged view of a main part showing a transfer holder of a magnetic transfer apparatus according to the third embodiment, and this embodiment is a modification of the second embodiment.

この実施形態の転写ホルダー20では、片側ホルダー5の内面5aとマスター担体3の裏面との間に介装した緩衝材7と、弾性材によるスレーブ吸着部材28とを一体に構成してなる。このスレーブ吸着部材28は、吸引孔28bが開口したスレーブ吸着面28aを有し、その形態は前例の図3,図4のスレーブ吸着部材18と同一であり、その吸引孔28bは、片側ホルダー5のエア通路15と連通され、吸引孔28bに作用するエア吸引力によって、スレーブ媒体2の中心孔2a近傍の内径差部位をマスター担体3側に吸引保持する。   In the transfer holder 20 of this embodiment, the cushioning material 7 interposed between the inner surface 5a of the one-side holder 5 and the back surface of the master carrier 3 and the slave adsorption member 28 made of an elastic material are integrally formed. This slave suction member 28 has a slave suction surface 28a with a suction hole 28b opened, and the form thereof is the same as that of the slave suction member 18 in FIGS. 3 and 4 of the previous example, and the suction hole 28b is formed on the one-side holder 5. The inner diameter difference portion in the vicinity of the central hole 2a of the slave medium 2 is sucked and held on the master carrier 3 side by the air suction force that communicates with the air passage 15 and acts on the suction hole 28b.

本実施形態では、スレーブ吸着部材28および緩衝材7は前例と同様の機能を有し、両者が一体に構成されていることで、構造の簡素化、組み立ての容易さを得ている。   In the present embodiment, the slave suction member 28 and the cushioning material 7 have the same functions as those of the previous example, and both are integrally configured, so that the structure is simplified and the assembly is easy.

次に、図6は第4の実施形態にかかる磁気転写装置の転写ホルダーを示す要部拡大図である。この実施形態の転写ホルダー30は、緩衝材7が設置されていない第1の実施形態(図1)と同様のタイプである。   Next, FIG. 6 is an enlarged view of a main part showing a transfer holder of the magnetic transfer apparatus according to the fourth embodiment. The transfer holder 30 of this embodiment is the same type as that of the first embodiment (FIG. 1) in which the buffer material 7 is not installed.

この実施形態におけるスレーブ吸着部材38は、スレーブ媒体2の内周部を吸着するスレーブ吸着面38aを備え、このスレーブ吸着面38aを含む全体が、片側ホルダー5に対して移動可能に保持され、背部に設置された付勢部材37で突出方向に付勢されている。   The slave suction member 38 in this embodiment includes a slave suction surface 38a that sucks the inner peripheral portion of the slave medium 2, and the entirety including the slave suction surface 38a is held movably with respect to the one-side holder 5, and the back portion. It is urged | biased by the urging | biasing member 37 installed in the protrusion direction.

片側ホルダー5の中心部には円形状の凹部5bが形成され、この凹部5bに軸方向に移動可能に円盤状のスレーブ吸着部材38が挿入されている。スレーブ吸着部材38は前面の外周部に吸引孔38bが開口し、スレーブ媒体の中心孔2aに相当する中心部位は凹状(必ずしも必要ない)に形成されている。外周部の吸引孔38bは、底部で中心方向に屈曲し、背面中央の連通孔38cに開口している。上記連通孔38cに対向して、片側ホルダー5の凹部5bの中心部には吸引圧導入口16が開口し、両者が連通する。このスレーブ吸着部材38の連通孔38cと吸引圧導入口16との間には、スレーブ吸着部材38の変位を吸収する弾性材による連結管36が設置され、吸引エアのリークを低減している。   A circular recess 5b is formed at the center of the one-side holder 5, and a disk-shaped slave suction member 38 is inserted into the recess 5b so as to be movable in the axial direction. In the slave suction member 38, a suction hole 38b is opened in the outer peripheral portion of the front surface, and a central portion corresponding to the central hole 2a of the slave medium is formed in a concave shape (not necessarily required). The suction hole 38b at the outer peripheral portion is bent toward the center at the bottom and opens to the communication hole 38c at the center of the back surface. Opposite to the communication hole 38c, a suction pressure introduction port 16 is opened at the center of the recess 5b of the one-side holder 5, and both communicate with each other. A connecting pipe 36 made of an elastic material that absorbs the displacement of the slave suction member 38 is installed between the communication hole 38c of the slave suction member 38 and the suction pressure introduction port 16 to reduce leakage of suction air.

なお、上記連結管36は、スレーブ吸着面38aにスレーブ媒体2が接触した状態では、スレーブ吸着部材38の外周部のリークは殆どなくなるので、設置しなくてもよい。   It should be noted that the connecting pipe 36 does not need to be installed since the leakage of the outer peripheral portion of the slave suction member 38 is almost eliminated when the slave medium 2 is in contact with the slave suction surface 38a.

また、上記付勢部材37は板バネで構成され、スレーブ吸着面38aがスレーブ媒体2に接触するようにスレーブ吸着部材38を付勢しているが、スレーブ吸着面38aがマスター担体3の表面より大きく突出しないように付勢量が設定されている。   The biasing member 37 is configured by a leaf spring, and biases the slave suction member 38 so that the slave suction surface 38a contacts the slave medium 2. The slave suction surface 38a is formed from the surface of the master carrier 3. The urging amount is set so as not to protrude greatly.

本実施形態においては、スレーブ吸着部材38を片側ホルダー5に移動可能に設置したことにより、密着時に両側ホルダー5,6が閉じて、スレーブ媒体2がマスター担体3に押圧された際にはスレーブ吸着部材38が没入移動し、そのスレーブ吸着面38aがスレーブ媒体2の面と密着して吸引エアのリークが少ない状態で確実に吸引保持できる。   In the present embodiment, the slave suction member 38 is movably installed on the one-side holder 5, so that the both-side holders 5 and 6 are closed at the time of close contact and the slave medium 2 is pressed against the master carrier 3. The member 38 is immersed, and the slave suction surface 38a is in close contact with the surface of the slave medium 2, so that suction and holding can be reliably performed in a state where there is little leakage of suction air.

次に、図7は第5の実施形態にかかる磁気転写装置の転写ホルダーを示す要部拡大図である。この実施形態の転写ホルダー40は、緩衝材7が設置されている第2の実施形態(図3)と同様のタイプであり、それに応じてスレーブ吸着部材48の高さを変更したものであり、その他は前例と同様であり、同一構成には同一符号を付してその説明を省略する。   Next, FIG. 7 is an essential part enlarged view showing a transfer holder of a magnetic transfer apparatus according to a fifth embodiment. The transfer holder 40 of this embodiment is the same type as the second embodiment (FIG. 3) in which the buffer material 7 is installed, and the height of the slave suction member 48 is changed accordingly. Others are the same as the previous example, and the same reference numerals are given to the same components, and the description thereof is omitted.

この実施形態のスレーブ吸着部材48は、吸引孔48bが開口したスレーブ吸着面48aを有し、平面的には前例の図6のスレーブ吸着部材38と同形であるが、緩衝材7の厚さ分だけ大きな高さに設定され、同様に板バネによる付勢部材37で吐出方向に付勢され、そのスレーブ吸着面48aがマスター担体3の表面と略同等の高さとなるように、もしくは若干突出するように設定されている。   The slave suction member 48 of this embodiment has a slave suction surface 48a in which a suction hole 48b is opened, and is planarly the same shape as the slave suction member 38 of FIG. Is set to a large height, and is similarly urged in the discharge direction by a urging member 37 by a leaf spring, so that its slave suction surface 48a has a height substantially equal to the surface of the master carrier 3 or slightly protrudes. Is set to

このスレーブ吸着部材48の吸引孔48bは、連通口48cを経て同様に片側ホルダー5の吸引圧導入口16と連通され、エア吸引力によってスレーブ媒体2の中心孔2a近傍の内径差部位をマスター担体3側に吸引保持する。   The suction hole 48b of the slave suction member 48 is similarly communicated with the suction pressure introduction port 16 of the one-side holder 5 through the communication port 48c, and an inner diameter difference portion in the vicinity of the center hole 2a of the slave medium 2 is set as a master carrier by air suction force. Suction and hold on 3 side.

本実施形態においても、スレーブ吸着部材48を片側ホルダー5に移動可能に設置したことにより、密着時に両側ホルダー5,6が閉じて、スレーブ媒体2がマスター担体3に押圧された際にはスレーブ吸着部材48が没入移動し、そのスレーブ吸着面48aがスレーブ媒体2の面と密着して吸引エアのリークが少ない状態で確実に吸引保持できる。   Also in the present embodiment, the slave suction member 48 is movably installed on the one-side holder 5, so that the both-side holders 5 and 6 are closed at the time of close contact and the slave medium 2 is pressed against the master carrier 3. The member 48 is immersed, and the slave suction surface 48a is in close contact with the surface of the slave medium 2, so that suction and holding can be reliably performed in a state where there is little leakage of suction air.

次に、図8は第6の実施形態にかかる磁気転写装置の転写ホルダーを示す要部拡大図である。この実施形態の転写ホルダー50は、緩衝材7が設置されている第2の実施形態(図3)と同様のタイプであり、それに応じて図7と同様にスレーブ吸着部材58の高さを変更し、さらに、摺動部を無くしたものであり、その他は前例と同様であり、同一構成には同一符号を付してその説明を省略する。   Next, FIG. 8 is an enlarged view of a main part showing a transfer holder of the magnetic transfer apparatus according to the sixth embodiment. The transfer holder 50 of this embodiment is the same type as that of the second embodiment (FIG. 3) in which the cushioning material 7 is installed, and the height of the slave suction member 58 is changed accordingly as in FIG. Further, the sliding portion is eliminated, and the others are the same as in the previous example, and the same components are denoted by the same reference numerals and the description thereof is omitted.

この実施形態のスレーブ吸着部材58は、吸引孔58bが開口したスレーブ吸着面58aを有し、外径が片側ホルダー5の凹部5bの開口径より小さく設定されて、両者間に隙間を形成し、スレーブ吸着部材58の移動に伴う摩耗、塵埃の発生を抑制する構造としたものである。   The slave suction member 58 of this embodiment has a slave suction surface 58a in which a suction hole 58b is opened, the outer diameter is set smaller than the opening diameter of the concave portion 5b of the one-side holder 5, and a gap is formed between the two. In this structure, wear and dust generated by the movement of the slave suction member 58 are suppressed.

スレーブ吸着部材58の吸引孔58bは、連通口58cを経て同様に片側ホルダー5の吸引圧導入口16と連通され、エア吸引力によってスレーブ媒体2の中心孔2a近傍の内径差部位をマスター担体3側に吸引保持する。   The suction hole 58b of the slave suction member 58 is similarly communicated with the suction pressure introduction port 16 of the one-side holder 5 through the communication port 58c, and an inner diameter difference portion in the vicinity of the central hole 2a of the slave medium 2 is caused by the air suction force. Hold by suction to the side.

次に、図9は第7の実施形態にかかる磁気転写装置の転写ホルダーを示す概略断面図である。この実施形態における磁気転写装置の転写ホルダー60は、両面同時磁気転写を行うものであるが、片側ホルダー5のみで構成され、前述の各実施形態における他側ホルダー6は備えていない。   Next, FIG. 9 is a schematic sectional view showing a transfer holder of the magnetic transfer apparatus according to the seventh embodiment. The transfer holder 60 of the magnetic transfer apparatus in this embodiment performs double-sided simultaneous magnetic transfer, but is configured by only the one-side holder 5 and does not include the other-side holder 6 in each of the above-described embodiments.

そして、片側ホルダー5、スレーブ媒体2、一方のマスター担体3およびスレーブ吸着部材8は、第1の実施形態と同様に構成され、片側ホルダー5の内面5aに一方のマスター担体3およびスレーブ媒体2を重ねて吸着保持する。   The one-side holder 5, the slave medium 2, the one master carrier 3 and the slave adsorption member 8 are configured in the same manner as in the first embodiment, and the one master carrier 3 and the slave medium 2 are placed on the inner surface 5 a of the one-side holder 5. Adsorb and hold repeatedly.

つまり、スレーブ吸着部材8の内部に貫通形成された吸引孔8bが、底面で片側ホルダー5の内面5aに開口したエア通路15と連通し、このエア通路15を経てスレーブ吸着部材8の吸着面8aに開口した吸引孔8bに作用するエア吸引力によって、マスター担体3の中心孔3aより内周に位置する、前記スレーブ媒体2の中心孔2a近傍の内径差部位をマスター担体3側に吸引し、マスター担体3と密着させるように保持する。   That is, the suction hole 8b penetratingly formed inside the slave suction member 8 communicates with the air passage 15 opened to the inner surface 5a of the one-side holder 5 on the bottom surface, and the suction surface 8a of the slave suction member 8 passes through the air passage 15. An air suction force acting on the suction hole 8b that is opened to the suction hole 8b causes the inner diameter difference portion in the vicinity of the center hole 2a of the slave medium 2 located on the inner periphery from the center hole 3a of the master carrier 3 to be sucked to the master carrier 3 side, The master carrier 3 is held in close contact.

また、上記スレーブ媒体2の片側ホルダー5と反対面には、他方のマスター担体4’が吸着保持され、これによりスレーブ媒体2の両面に両側のマスター担体3,4’を密着させる。この他方のマスター担体4’は円盤状ディスクに形成され、基板上に形成された微細凹凸パターンに軟磁性体が被覆されてなる転写パターン(不図示)を同様に有するが、中心孔は開口されずに中心部が閉じ、スレーブ媒体2に密着された際に、該スレーブ媒体2の中心孔2aを閉塞するようになっている。   Further, the other master carrier 4 ′ is adsorbed and held on the surface of the slave medium 2 opposite to the one-side holder 5, thereby bringing the master carriers 3 and 4 ′ on both sides into close contact with both surfaces of the slave medium 2. The other master carrier 4 'is formed on a disc-like disk and similarly has a transfer pattern (not shown) in which a fine uneven pattern formed on a substrate is covered with a soft magnetic material, but the center hole is opened. The center hole 2a of the slave medium 2 is closed when the central portion is closed and is in close contact with the slave medium 2.

そして、片側ホルダー5の内面5aには、前記エア通路15とは別途に、スレーブ吸着部材8の内周側に開口するエア通路17が形成され、このエア通路17が連通するスレーブ吸着部材8の内周側およびスレーブ媒体2の中心孔2aに作用するエア吸引力によって、他方のマスター担体4’を片側ホルダー5側に吸引し、スレーブ媒体2と密着させるように保持する。   An air passage 17 that opens to the inner peripheral side of the slave suction member 8 is formed on the inner surface 5a of the one-side holder 5 separately from the air passage 15, and the slave suction member 8 that communicates with the air passage 17 is formed. The other master carrier 4 ′ is sucked toward the one-side holder 5 by the air suction force acting on the inner peripheral side and the center hole 2 a of the slave medium 2, and is held in close contact with the slave medium 2.

本実施形態においては、他側ホルダー6を省略したことにより、磁気転写時に転写用磁界を印加する不図示の磁界印加装置をスレーブ媒体2とマスター担体3,4’の密着面に近接させることができる。また、スレーブ吸着部材8を弾性材で構成したことにより、第1の実施形態と同様の作用が得られる。   In this embodiment, by omitting the other-side holder 6, a magnetic field applying device (not shown) that applies a transfer magnetic field during magnetic transfer can be brought close to the contact surface between the slave medium 2 and the master carriers 3 and 4 ′. it can. Further, since the slave suction member 8 is made of an elastic material, the same action as in the first embodiment can be obtained.

また、本実施形態における他側ホルダー6を省略し、片側ホルダー5のみによる転写ホルダーの形態は、前述の第2〜6の実施形態についても適用可能であり、エア通路15または吸引圧導入口16とは別途に、スレーブ媒体2の中心孔2aに吸引力を作用させて他方のマスター担体4’を吸引保持するように構成可能である。   In addition, the other side holder 6 in this embodiment is omitted, and the form of the transfer holder using only the one side holder 5 can be applied to the above-described second to sixth embodiments, and the air passage 15 or the suction pressure introduction port 16. Separately, the other master carrier 4 ′ can be sucked and held by applying a suction force to the central hole 2 a of the slave medium 2.

その他、前述の各実施形態においては、スレーブ媒体2の両面にマスター担体3,4または4’を密着させて両面同時磁気転写を行う態様を示しているが、他方のマスター担体4,4’は省略して片面逐次磁気転写を行うように構成してもよい。   In each of the above-described embodiments, the master carrier 3, 4 or 4 ′ is brought into close contact with both surfaces of the slave medium 2 to perform double-sided simultaneous magnetic transfer, but the other master carrier 4, 4 ′ is It may be omitted and one-sided sequential magnetic transfer may be performed.

本発明の第1の実施形態にかかる磁気転写装置の転写ホルダーを示す概略断面図1 is a schematic sectional view showing a transfer holder of a magnetic transfer apparatus according to a first embodiment of the present invention. 図1の要部拡大図1 is an enlarged view of the main part of FIG. 第2の実施形態にかかる磁気転写装置の転写ホルダーを示す概略断面図Schematic sectional view showing a transfer holder of a magnetic transfer apparatus according to a second embodiment 図2の要部拡大図2 is an enlarged view of the main part of FIG. 第3の実施形態にかかる磁気転写装置の転写ホルダーを示す要部拡大図The principal part enlarged view which shows the transfer holder of the magnetic transfer apparatus concerning 3rd Embodiment 第4の実施形態にかかる磁気転写装置の転写ホルダーを示す要部拡大図The principal part enlarged view which shows the transfer holder of the magnetic transfer apparatus concerning 4th Embodiment 第5の実施形態にかかる磁気転写装置の転写ホルダーを示す要部拡大図The principal part enlarged view which shows the transfer holder of the magnetic transfer apparatus concerning 5th Embodiment 第6の実施形態にかかる磁気転写装置の転写ホルダーを示す要部拡大図The principal part enlarged view which shows the transfer holder of the magnetic transfer apparatus concerning 6th Embodiment 第7の実施形態にかかる磁気転写装置の転写ホルダーを示す概略断面図Schematic sectional view showing a transfer holder of a magnetic transfer apparatus according to a seventh embodiment

符号の説明Explanation of symbols

1,10,20,30,40,50,60 転写ホルダー
2 スレーブ媒体
2a 中心孔
3,4,4’ マスター担体
3a,4a 中心孔
5 片側ホルダー
6 他側ホルダー
7 緩衝材
8,18,28,38,48,58 スレーブ吸着部材
8a,18a,28a,38a,48a,58a スレーブ吸着面
27 付勢部材
1,10,20,30,40,50,60 Transfer holder 2 Slave media
2a Center hole 3, 4, 4 'Master carrier
3a, 4a Center hole 5 One side holder 6 Other side holder 7 Cushioning material 8, 18, 28, 38, 48, 58 Slave suction member
8a, 18a, 28a, 38a, 48a, 58a Slave adsorption surface
27 Biasing member

Claims (7)

転写情報に対応した転写パターンを有するマスター担体を転写ホルダーに保持し、該マスター担体に対し転写を受ける磁気記録部を有するスレーブ媒体を密着させて転写用磁界を印加し磁気転写を行う磁気転写装置において、
前記転写ホルダーは、前記マスター担体を保持する内面と、該マスター担体の表面と略同等の高さに突出して該マスター担体に重ねられた前記スレーブ媒体の一部を吸着するスレーブ吸着面とを備え、該スレーブ吸着面が前記マスター担体の表面に垂直な方向に可動な構造であることを特徴とする磁気転写装置。
A magnetic transfer device for holding a master carrier having a transfer pattern corresponding to transfer information in a transfer holder, and applying a magnetic field for transfer by bringing a slave medium having a magnetic recording portion to receive the transfer into close contact with the master carrier and performing magnetic transfer In
The transfer holder includes an inner surface that holds the master carrier, and a slave suction surface that protrudes to a height substantially equal to the surface of the master carrier and sucks a part of the slave medium that is stacked on the master carrier. The magnetic transfer device is characterized in that the slave attracting surface is movable in a direction perpendicular to the surface of the master carrier.
前記転写ホルダーは、接離移動する片側ホルダーと、該片側ホルダーとの間で転写を受けるスレーブ媒体の片側または両側に前記マスター担体を密着させる他側ホルダーとを備え、該片側ホルダーまたは他側ホルダーの一方に、前記マスター担体を保持する内面と、前記スレーブ媒体の一部を吸着する、前記マスター担体の表面に垂直な方向に可動な構造のスレーブ吸着面とを備えたことを特徴とする請求項1に記載の磁気転写装置。   The transfer holder includes a one-side holder that moves toward and away, and an other-side holder that closely contacts the master carrier to one or both sides of a slave medium that receives the transfer between the one-side holder and the one-side holder or the other-side holder. And a slave suction surface having a structure movable in a direction perpendicular to the surface of the master carrier for sucking a part of the slave medium. Item 2. The magnetic transfer device according to Item 1. 前記転写ホルダーは片側ホルダーのみ備え、該片側ホルダーに前記マスター担体を保持する内面と、前記スレーブ媒体の一部を吸着する、前記マスター担体の表面に垂直な方向に可動な構造のスレーブ吸着面とを備えたことを特徴とする請求項1に記載の磁気転写装置。   The transfer holder comprises only one side holder, an inner surface for holding the master carrier in the one side holder, and a slave adsorption surface having a structure movable in a direction perpendicular to the surface of the master carrier to adsorb a part of the slave medium. The magnetic transfer apparatus according to claim 1, further comprising: 前記スレーブ媒体の前記マスター担体との反対面には、中心部が閉じた他のマスター担体を保持して密着させることを特徴とする請求項3に記載の磁気転写装置。   4. The magnetic transfer apparatus according to claim 3, wherein another master carrier having a closed central portion is held and adhered to the opposite surface of the slave medium to the master carrier. 前記スレーブ吸着面を備えた部材を弾性材で構成し、その変形によって前記スレーブ吸着面が前記マスター担体の表面に垂直な方向に移動することを特徴とする請求項1,2または3に記載の磁気転写装置の転写ホルダー。   The member having the slave adsorption surface is made of an elastic material, and the deformation causes the slave adsorption surface to move in a direction perpendicular to the surface of the master carrier. Transfer holder for magnetic transfer device. 前記マスター担体と前記転写ホルダーとの間に緩衝材を備え、該緩衝材と前記スレーブ吸着面を備えた前記弾性材とを一体に構成したことを特徴とする請求項5に記載の磁気転写装置。   6. The magnetic transfer apparatus according to claim 5, wherein a buffer material is provided between the master carrier and the transfer holder, and the buffer material and the elastic material provided with the slave suction surface are integrally formed. . 前記スレーブ吸着面を備えた部材を、前記転写ホルダーに対して移動可能に保持し、付勢部材で突出方向に付勢したことを特徴とする請求項1,2または3に記載の磁気転写装置。   4. The magnetic transfer device according to claim 1, wherein the member having the slave attracting surface is movably held with respect to the transfer holder and biased in a protruding direction by a biasing member. .
JP2004243968A 2004-08-24 2004-08-24 Magnetic transfer apparatus Withdrawn JP2006065899A (en)

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