JP2004086995A - Holder of magnetic transfer device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide the holder of a magnetic transfer device which enhances the quality of a transfer signal by raising adhesiveness while using shock absorbing material in close adhesion with a slave medium and master carriers and also prevent a misregistration and generation of dust and realizes the improving of durability of the master carriers, etc. <P>SOLUTION: In a holder 10 which makes master carriers 3, 4 carrying transfer information and a slave medium 2 which receives transference to be closely adhered with each other while being confronted with each other in an internal space which is to be opened and closed between one-side holder 5 and other-side holder 6 which perform approaching and separating movement, shock absorbing material 8 having an elastic characteristic is provided on the pressuring inside of at least one holder of the one-side holder 5 and the other-side holder 6 and the deformation amount of the pressuring direction of the material 8 when adhesion pressurization is made to be 5 μm to 500 μm. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a holder for accommodating and closely contacting the master carrier and the slave medium in an internal space in a magnetic transfer apparatus for magnetic transfer from a master carrier carrying information to a slave medium.
[0002]
[Prior art]
The magnetic transfer that is the subject of the present invention includes a master carrier (patterned master) in which a transfer pattern such as a servo signal having a magnetic layer at least on the surface layer is formed in a concavo-convex shape or an embedded structure, and a slave medium having a magnetic recording unit. In a state of being in close contact, a magnetic field for transfer is applied to transfer and record a magnetization pattern corresponding to information carried on the master carrier onto the slave medium. Examples of this magnetic transfer are disclosed in, for example, JP-A 63-183623, JP-A 10-40544, JP-A 10-269656, JP-A 2001-256644, and the like.
[0003]
When the slave medium is a disk-like medium such as a hard disk or a high-density flexible disk, an electromagnet device, a permanent magnet is attached to one or both sides of the slave medium in a state where a disk-like master carrier is in close contact with one or both sides. A magnetic field applying device using a magnet device is provided to apply a transfer magnetic field.
[0004]
In order to improve the transfer quality in this magnetic transfer, it is an important issue how the slave medium and the master carrier are in close contact with each other. In other words, if there is poor adhesion, there will be areas where magnetic transfer will not occur, and if magnetic transfer does not occur, signal loss will occur in the magnetic information transferred to the slave medium, the signal quality will deteriorate, and the recorded signal will be In this case, there is a problem that the tracking function cannot be sufficiently obtained and the reliability is lowered. Also, it is important that no dust is present on the contact surface. If dust adheres, the master carrier and the slave medium cannot be secured from the center of the attachment part to the periphery, and signal loss may not occur. Occurs and the signal quality deteriorates.
[0005]
[Problems to be solved by the invention]
By the way, in the magnetic transfer as described above, the master carrier and the slave medium are accommodated in the internal space of the holder including the one-side holder and the other-side holder that move toward and away from each other, and are in close contact with each other. In order to bring the medium into close contact with the entire surface, a buffer material made of an elastic material is installed on the pressing inner surface of the holder, and the back surface of the master carrier or the slave medium is pressed through the buffer material. It has been proposed to improve the adhesion by applying an adhesion force evenly to the adhesion surface.
[0006]
However, since a very flexible material such as urethane foam has been used as the cushioning material in the past, there is a problem that the positioning accuracy is lowered due to the master carrier moving in the surface direction when the master carrier and the slave medium are in close contact pressure. there were.
[0007]
That is, a slave medium in which the master carrier is positioned and held with high accuracy with respect to the reference position of the holder by, for example, an image processing method on the buffer material installed on the inner surface of the holder, and the master carrier is closed and positioned on the other holder. In the double-sided simultaneous transfer or single-sided transfer method that presses and adheres to the surface, a very flexible cushioning material is greatly deformed by the pressure during pressurization, and the center position of the master carrier shifts due to the component parallel to the contact surface of the deformation, and the slave The center position with respect to the medium changes, and the position accuracy of the signal recorded on the slave medium decreases. For example, the allowable misalignment amount of the servo signal is generally 50 μm to 100 μm, and if the positional deviation exceeds this, there is a possibility that a desired servo track function cannot be obtained.
[0008]
As a countermeasure against the above-mentioned positional deviation, there is a means that uses a positioning member that holds the inner diameter or outer diameter of the master carrier. However, the buffer material is greatly compressed and deformed during pressurization. Since the rubbing occurs between the positioning member and the master carrier, the life of the master carrier is reduced, and dust generation problems such as deterioration of the transfer signal due to wear powder adhering to the contact surface are caused. There was a fear.
[0009]
In addition, the slave medium is positioned and set with high accuracy with respect to the master carrier on the master carrier installed on the inner surface of one holder, for example, and the back surface of the slave medium is pressed with a cushioning material installed on the inner surface of the other holder. In the case of the single-sided transfer system that is in close contact, the very flexible cushioning material is greatly deformed by the pressure at the time of pressurization, the slave medium is displaced in the surface direction, the center position with the master carrier is changed, The positional accuracy of the transferred and recorded signal is lowered.
[0010]
The present invention has been made in view of such a problem. The buffer material is used to improve the adhesion between the master carrier and the slave medium to improve the quality of the transfer signal. It is an object of the present invention to provide a holder for a magnetic transfer apparatus that realizes improvement in durability and the like.
[0011]
[Means for Solving the Problems]
The holder of the magnetic transfer apparatus according to the present invention accommodates the master carrier carrying the transfer information and the slave medium receiving the transfer in the internal space opened and closed between the one-side holder that moves toward and away from the other-side holder. In the holder of the magnetic transfer device to be in close contact, at least one pressing inner surface of the one side holder and the other side holder is provided with a buffer material having elastic characteristics, and the amount of deformation in the pressurizing direction of the buffer material at the time of close contact is 5 μm to It is 500 μm.
[0012]
The elastic material (Young's modulus) of the buffer material is preferably 5 MPa to 200 MPa. As for the said buffer material, it is desirable for the thickness variation of a press part to be 100 micrometers or less. Further, the cushioning material may include a suction hole.
[0013]
The optimal amount of deformation of the cushioning material is preferably equal to or greater than the sum of the flatness of the pressing inner surface holding the buffering material of the holder and the flatness of the pressing inner surface of the other holder. Further, the optimum elastic modulus of the cushioning material is determined by factors such as the thickness of the elastic material to be used, variation in thickness, manufacturing accuracy of the holder, pressure applied during transfer, and the like.
[0014]
As the material of the buffer material, an elastic material such as urethane rubber or NBR (nitrile butadiene rubber) can be used. When this elastic material is impregnated with fluorine or the like, the surface friction coefficient is reduced, and dust generation can be further suppressed. The buffer material is processed into a desired shape by injection molding, water jet processing, cold processing, or the like.
[0015]
Here, “at the time of pressurization” refers to a state in which an adhesion force is applied between the master carrier and the slave medium so that at least a transfer magnetic field is applied. Application of the adhesion force includes a mechanical external pressure application method, a pressure application method by vacuum suction inside the holder, and a combination method of both. Also, the “deformation amount” is the amount of change in the thickness of the buffer material before and after pressure application. To obtain the same deformation amount, the elastic modulus is increased for thick ones and the elastic modulus is lower for thin ones. The amount of deformation is set in the range of 5 to 500 μm regardless of the thickness of the buffer material.
[0016]
On the other hand, for positioning the master carrier with respect to the holder, a method of aligning both positioning marks by image processing taken by a CCD or the like, a method of aligning by a positioning member, and the like can be appropriately employed.
[0017]
There are cases where the master carrier is brought into close contact with both sides of the slave medium and magnetic transfer is performed simultaneously on both sides, and when the master carrier is brought into close contact with one side of the slave medium and single-sided transfer is carried out, and double-sided sequential transfer is carried out as necessary. Yes, the cushioning material is installed on one or both of the inner pressing surfaces on both sides of the holder.If one side is insufficient for double-sided transfer, good results can be obtained by installing the cushioning material on one side for single-sided transfer. It was. In the case of double-sided simultaneous transfer, one or both master carriers are held in a buffer material, and a suction hole for that purpose is provided, and the back surface of the master carrier is sucked and held through this hole. Is preferred. At that time, the cushioning material may be sucked and held simultaneously with respect to the holder. Further, the buffer material may be fixed to the holder by adhesion or the like, and the master carrier may be fixedly held to the buffer material by adhesion or the like.
[0018]
【The invention's effect】
According to the present invention, at least one pressing inner surface of the holder is provided with a buffer material that applies an adhesion force to the master carrier and the slave medium, and the amount of deformation in the pressing direction when the buffer material is pressed is set to 5 μm to 500 μm. As a result, the deformation of the buffer material allows the master carrier and the slave medium to be evenly adhered over the entire surface, and the deformation amount is as small as 5 to 500 μm, and the movement of the master carrier or the slave medium in the surface direction is small. The positioning of the two can be maintained with high accuracy, the transfer signal quality and the positional accuracy are good, and the generation of dust and the decrease in the life of the master carrier can be suppressed.
[0019]
Further, by suppressing the positional deviation in the surface direction at the time of close contact, magnetic transfer can be performed in a state where the central axis of the slave medium and the central axis of the pattern on the master carrier are matched with high accuracy. In other words, after the positioning of the holder and the master carrier or the master carrier and the slave medium with high accuracy using image means or the like, when the adhesion force is applied, the master carrier or the slave medium is moved along with the deformation of the buffer material. If it moves greatly in the surface direction, the positioning accuracy is lowered, and it is possible to prevent the position accuracy of the transferred and recorded signal from being lowered.
[0020]
In addition, the amount of deformation of the cushioning material during pressurization is small, and dust generation due to rubbing when using a positioning member is small, so that the deterioration of the transfer signal quality is suppressed, and the wear of the master carrier is reduced, resulting in durability. Improvement can be achieved.
[0021]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in detail based on embodiments shown in the drawings. FIG. 1 is a schematic cross-sectional view showing an open state of a holder of a magnetic transfer apparatus according to an embodiment. Each figure is a schematic diagram, and the dimensions of each part are shown in proportions different from actual ones.
[0022]
A holder 10 of the magnetic transfer apparatus shown in FIG. 1 performs double-sided simultaneous magnetic transfer, and includes a left-side holder 5 and a right-side other holder 6 that can move toward and away from each other. The slave medium 2 and the master carriers 3 and 4 are brought into close contact with each other in a state in which the slave medium 2 and the master carriers 3 and 4 on both sides are arranged in the internal space hermetically formed by the seal portion 7 and the center positions are aligned. Here, facing contact refers to either contact contact or facing with a very small gap.
[0023]
One master carrier 3 and slave medium 2 for transferring information such as servo signals to one side of the slave medium 2 are held on the pressing inner surface 5 a serving as a reference of the one-side holder 5. The pressing inner surface 6 a of the other side holder 6 is provided with a sheet-like cushioning material 8 made of an elastic material, and the other master carrier 4 for transferring information such as a servo signal to the other side of the slave medium 2 is held on the cushioning material 8. To do.
[0024]
That is, the one-side holder 5 has a disk shape, and a suction hole 5b is opened in the center of the circular pressing inner surface 5a larger than the outer diameter of the master carrier 3 in a range corresponding to the size of the master carrier 3. An air passage 5c communicating with the hole 5b is installed in the one-side holder 5, connected to a vacuum pump (not shown) installed outside through the support shaft 5d, and holds the back surface of the master carrier 3 by suction by introducing suction pressure. .
[0025]
On the other hand, the other-side holder 6 is also disk-shaped, and a concave portion having a depth corresponding to the thickness of the buffer material 8 is formed on the pressing inner surface 6a larger than the outer diameter of the master carrier 4, and a plurality of suction holes 6b are formed on the concave surface. The air passage 6c communicating with the suction hole 6b is installed in the other holder 6 and connected to a vacuum pump (not shown) installed outside through the support shaft 6d. In addition, a suction hole 8a communicating with a part of the suction hole 6b of the inner surface 6a is opened through the buffer material 8, and air suction is performed. Thereby, the buffer material 8 is adsorbed and held on the inner surface 6a of the other holder 6 by a part of the vacuum pressure introduced into the air passage 6c, and the remaining portion of the vacuum pressure through the hole 8a of the buffer material 8 The master carrier 4 is adsorbed and held on the surface.
[0026]
The mounting of the cushioning material 8 on the other side holder 6 may be fixed to the inner surface 6a with an adhesive instead of sucking and holding. The master carrier 4 may be held on the buffer material 8 by using an adhesive. In that case, formation of the hole 8a to the shock absorbing material 8 becomes unnecessary.
[0027]
Further, the seal portion 7 installed on the outer periphery of the other holder 6 has a ring shape, is attached to a flange 6e protruding from the outer peripheral surface of the other holder 6, and is axially (contacted) via the elastic member 7a. It is possible to move in that direction by the amount of deformation. An end face sealing material 7b made of an O-ring is provided on the end face of the seal portion 7, and the inner space is opened and closed by being pressed against the inner face 5a of the one-side holder 5. Further, the inner peripheral surface of the seal portion 7 is provided with a peripheral surface sealing material 7 c using an O-ring, and performs a sliding seal with the outer peripheral surface of the other holder 6.
[0028]
Support shafts 5d and 6d project from the center positions of the back surfaces of the one-side holder 5 and the other-side holder 6 and are supported by an apparatus body (not shown). The one-side holder 5 and the other-side holder 6 are linked to a rotation mechanism (not shown) and are driven to rotate integrally around the support shafts 5d and 6d during magnetic transfer.
[0029]
Although not shown, the magnetic transfer device applies a magnetic field for transfer while rotating the holder 10 and a vacuum suction means for vacuuming the air in the internal space of the holder 10 to obtain a close contact with the inside in a reduced pressure state. And a magnetic field applying device.
[0030]
The internal space of the holder 10 is controlled to a predetermined degree of vacuum by the vacuum suction means, and the slave medium 2 and the master carriers 3 and 4 are set to have a predetermined contact pressure, and air is released from both contact surfaces. Is performed to improve the adhesion.
[0031]
In addition to or instead of the vacuum suction means, a pressing means for mechanically pressurizing the holder 10 from the outside may be provided in order to apply the adhesion force. The pressing means may include a pressure cylinder, and the tip of the pressing rod may be configured to apply a predetermined pressing load to the support shaft 5d or 6d of the holder 10.
[0032]
At least one of the one-side holder 5 and the other-side holder 6 is supported so as to be movable in the axial direction (left-right direction in the figure), and both the holders 5 and 6 are movable toward and away from each other, as shown in FIG. With the approaching movement from the end portion, the end surface sealing material 7b of the seal portion 7 is pressed against the inner surface 5a of the one-side holder 5 to close the inner space. After this sealing, the internal space is decompressed by the vacuum suction means, and the other side holder 6 is further pressed. Accordingly, the buffer material 8 is deformed, and the master carriers 3 and 4 are brought into close contact with both surfaces of the slave medium 2 with a predetermined pressure.
[0033]
The material, thickness, and the like are set so that the amount of deformation in the pressurizing direction of the buffer material 8 due to the applied pressure during the press contact is in the range of 5 μm to 500 μm.
[0034]
The cushioning material 8 is for applying pressure evenly, and is formed into a disk sheet shape from a material having elastic characteristics. As a material having elastic characteristics, urethane rubber, NBR (nitrile butadiene rubber), or the like can be used. When this elastic material is impregnated with fluorine or the like, the surface friction coefficient is reduced, and dust generation can be further suppressed. The buffer material 8 is processed into a desired shape by injection molding, water jet processing, cold processing, or the like.
[0035]
The elastic modulus (Young's modulus) of the buffer material 8 is 5 MPa to 200 MPa. Moreover, the thickness dispersion | variation of the part which presses the master support | carrier 4 of the buffer material 8 is 100 micrometers or less. That is, it is formed in a uniform thickness so that the difference between the thick part and the thin part is 100 μm or less.
[0036]
The optimal amount of deformation of the cushioning material 8 is set to be equal to or greater than the sum of the flatness of the inner surface 6 a that holds the cushioning material 8 of the other holder 6 and the flatness of the inner surface 5 a of the one-side holder 5. The optimum elastic modulus of the cushioning material 8 corresponds to the amount of deformation described above, and is determined by factors such as the thickness of the elastic material to be used, variation in thickness, manufacturing accuracy of the holder, and pressure applied during transfer.
[0037]
On the other hand, for positioning the master carriers 3 and 4 with respect to the one-side holder 5 and the other-side holder 6, a method of aligning positioning marks by image processing photographed by a CCD or the like, a method of aligning by positioning members, and the like can be appropriately employed.
[0038]
The cushioning material 8 may be installed on the inner surface 5 a of the one-side holder 5 in addition to the other-side holder 6. These are set so as to obtain higher adhesion depending on the relationship between the thickness of the slave medium 2 and the master carriers 3 and 4, rigidity, etc., and there are cases where it is sufficient on one side and cases where it is better to install on both sides. is there. In the case where both master carriers 3 and 4 are adsorbed and held on both sides, a suction hole is formed in each.
[0039]
As the slave medium 2, a disk-shaped magnetic recording medium such as a hard disk having a magnetic recording portion (magnetic layer) formed on both sides or one side, a high-density flexible disk, or the like is used. The magnetic recording part is composed of a coating type magnetic recording layer or a metal thin film type magnetic recording layer.
[0040]
The master carriers 3 and 4 are formed in a disk-shaped disk. The master carrier 3 is a transfer information carrying surface on which a fine concavo-convex pattern formed on a substrate is coated with a magnetic material, and this surface is formed with a transfer pattern in close contact with the slave medium 2. The opposite surface is sucked and held by both holders 5 and 6. As the substrates of the master carriers 3 and 4, nickel, silicon, quartz plate, glass, aluminum, alloy, ceramics, synthetic resin or the like is used. The formation of the concavo-convex pattern is performed by a stamper method or the like. The magnetic material is formed by depositing a magnetic material by a vacuum film forming means such as a vacuum deposition method, a sputtering method or an ion plating method, a plating method or the like. Almost the same master carriers 3 and 4 are used for in-plane recording and perpendicular recording.
[0041]
In the case of in-plane recording, a magnetic field application device (not shown) that applies a transfer magnetic field and, if necessary, an initial magnetic field is, for example, a ring in which a coil is wound around a core having a gap extending in the radial direction of the slave medium 2 The mold head electromagnet is disposed on both sides of the holder 10 and applies a transfer magnetic field generated in parallel to the track direction in the same direction on both sides. The holder 10 is rotated to apply a transfer magnetic field to the entire surface of the slave medium 2 and the master carriers 3 and 4. You may provide so that a magnetic field application apparatus may be rotationally moved. The magnetic field application device may be disposed only on one side, or the permanent magnet device may be disposed on both sides or one side. In the case of perpendicular recording, the magnetic field application apparatus arranges electromagnets or permanent magnets having different polarities on both sides of the holder 10 to generate and apply a transfer magnetic field in the vertical direction. In the case of applying a magnetic field partially, the entire surface is magnetically transferred by moving the holder 10 or moving the magnetic field.
[0042]
Next, the magnetic transfer process will be described. The holder 10 of the magnetic transfer device performs magnetic transfer to the plurality of slave media 2 by the same master carrier 3, 4. First, the master carrier 3, 4 is aligned with the one side holder 5 and the other side holder 6. Keep it.
[0043]
In the open state in which the other side holder 6 and the one side holder 5 are separated, the slave medium 2 that has been initially magnetized in advance in one of the in-plane direction and the vertical direction is set with the center position aligned, and then the other side holder 6 is set to the one side holder. Move close to 5.
[0044]
Then, after closing the inner space of the holder 10, the air is discharged from the inner space by the vacuum suction means to reduce the pressure so that the inside has a predetermined degree of vacuum and the other side holder 6 is further operated. The master carrier 4 comes into contact with the slave medium 2 and is applied to the slave medium 2 and the master carriers 3 and 4 through the buffer material 8 toward the one-side holder 5 by pressure due to an external force (atmospheric pressure) acting according to the degree of vacuum. Apply a close contact force evenly and in parallel, and close contact with a predetermined contact pressure.
[0045]
Thereafter, a magnetic field application device is brought close to both sides of the holder 10, and a magnetic field for transfer is applied in a direction almost opposite to the initial magnetization by the magnetic field application device while rotating the holder 10, and a magnetization pattern corresponding to the transfer pattern of the master carrier 3 is formed. Transfer recording is performed on the magnetic recording portion of the slave medium 2.
[0046]
The magnetic field for transfer applied during the magnetic transfer is sucked into the convex pattern of the magnetic material in close contact with the slave medium 2 in the transfer pattern of the master carriers 3 and 4, and in the case of in-plane recording, the initial magnetization of this portion is The initial magnetization of the other part is reversed without being reversed, and in the case of perpendicular recording, the initial magnetization of this part is reversed and the initial magnetization of the other part is not reversed. A magnetization pattern corresponding to the pattern is transferred and recorded.
[0047]
According to the present embodiment, when the master carriers 3 and 4 are brought into close contact with both surfaces of the slave medium 2, the one master carrier 4 is uniformly pressed through the cushioning material 8 with a close contact force with a deformation amount of 5 to 500 μm. Then, the contact surfaces of the master carriers 3 and 4 and the slave medium 2 are brought into close contact with each other by deformation of the buffer material 8, and the slave media 2 and the master carriers 3 and 4 are adhered evenly over the entire surface without a gap. Thus, a magnetization pattern accurately corresponding to the transfer pattern formed on the master carriers 3 and 4 can be transferred and recorded on the slave medium 2. Further, the buffer material 8 is not excessively deformed and the deviation in the surface direction of the master carrier 4 is small, the positional deviation of the transfer recording signal is within the range of the allowable misalignment, the transfer quality by the uniform contact is good, and the reliability is high. High performance magnetic transfer. Furthermore, even when the positioning member is used, the amount of deformation of the cushioning material 8 is small, so the amount of movement of the master carrier 4 in the pressurizing direction is small, and dust generation and durability deterioration due to rubbing with the positioning member can be suppressed. .
[0048]
FIG. 2 is a cross-sectional view of the holder 20 according to another embodiment in an open state. In this embodiment, the master carrier 3 is brought into close contact with one side of the slave medium 2 to perform one-sided sequential transfer.
[0049]
The holder 20 of the present embodiment includes a one-side holder 15 and an other-side holder 16 that can move toward and away from each other, and the slave medium 2 and the master carrier are formed in an internal space that is hermetically sealed by the outer peripheral seal portion 7 as they approach each other. The slave medium 2 and the master carrier 3 are brought into close contact with each other in a state in which the center position is adjusted by arranging 3.
[0050]
The one-side holder 15 has the same configuration as the one-side holder 5 of the previous embodiment, and the master carrier 3 and the slave medium 2 that transfer information such as a servo signal to one side of the slave medium 2 are provided on the pressing inner surface 15a serving as a reference. Hold. The pressing inner surface 16 a of the other side holder 16 is provided with a sheet-like buffer material 18 made of an elastic material, and the buffer material 18 presses the back surface of the slave medium 2.
[0051]
That is, the one-side holder 15 has a disk shape, and a suction hole 15b is opened in the center of the circular pressing inner surface 15a larger than the outer diameter of the master carrier 3 in a range corresponding to the size of the master carrier 3. An air passage 15c communicating with 15b is installed in the one-side holder 15 and connected to a vacuum pump (not shown) installed outside through a support shaft 15d, and the back surface of the master carrier 3 is held by suction by introducing suction pressure.
[0052]
On the other hand, the other side holder 16 is also disk-shaped, and a concave portion having a depth corresponding to the thickness of the buffer material 18 is formed on the pressing inner surface 16a larger than the outer diameter of the slave medium 2, and a suction hole 16b is opened on the concave surface. An air passage 16c communicating with the suction hole 16b is installed in the other holder 16 and connected to a vacuum pump (not shown) installed outside through the support shaft 16d. The buffer material 18 is not formed with a suction hole, and the buffer material 18 is sucked and held on the inner surface 16a by the vacuum pressure introduced into the air passage 16c. The mounting of the cushioning material 18 on the other side holder 16 may be fixed to the inner surface 16a with an adhesive instead of sucking and holding.
[0053]
Further, the seal portion 7 installed on the outer periphery of the other side holder 16 is the same as that of the previous embodiment, and is attached to the flange 16e protruding from the outer peripheral surface of the other side holder 16, and the end surface sealing material 7b and the peripheral portion are sealed. A surface sealing material 7 c is provided, and an open / close seal with the inner surface 15 a of the one-side holder 15 and a sliding seal with the outer peripheral surface of the other-side holder 16 are performed.
[0054]
Support shafts 15d and 16d project from the center positions of the back surfaces of the one-side holder 15 and the other-side holder 16, and are supported by an apparatus body (not shown), and are linked to a rotation mechanism (not shown) to be rotated during magnetic transfer. The
[0055]
At least one of the one-side holder 15 and the other-side holder 16 can move toward and away from each other, and the internal space is vacuum-sucked after the internal space is closed and closed with the approaching movement from the separated state as shown in FIG. In addition, the master carrier 3 is brought into close contact with one surface of the slave medium 2 with a predetermined pressure while the buffer material 18 is deformed.
[0056]
The material, thickness, and the like are set so that the amount of deformation in the pressurizing direction of the buffer material 18 by the applied pressure during the press-contact is in the range of 5 μm to 500 μm. This buffer material 18 is the same as that of the previous embodiment.
[0057]
The buffer material 18 may be installed on the inner surface 15a of the one-side holder 15 in addition to the other-side holder 16. However, as described above, the inner surface 15a of the one-side holder 15 is used as a reference surface, and the master is directed toward this reference surface. It is preferable to install the buffer material 18 on the pressing inner surface 16a of the other side holder 16 that presses the carrier 3 and the slave medium 2.
[0058]
The rest is the same as that of the above-described embodiment, and this holder 20 performs magnetic transfer to the plurality of slave media 2 by the same master carrier 3. First, the master carrier 3 is held in a single-side holder 15 in alignment. deep. In the open state in which the other-side holder 16 and the one-side holder 15 are separated, the slave medium 2 that has been initially magnetized in advance in one of the in-plane direction and the vertical direction is set with the center position aligned, and then the other-side holder 16 is set to the one-side holder 15 Move closer to.
[0059]
After the inner space of the holder 10 is closed and sealed, air is discharged from the inner space by the vacuum suction means to reduce the pressure, the inside is set to a predetermined degree of vacuum, and the other side holder 16 is further operated. The buffer medium 18 comes into contact with the slave medium 2 and is uniformly applied to the slave medium 2 and the master carrier 3 toward the one-side holder 15 through the buffer material 18 by pressure due to an external force (atmospheric pressure) acting according to the degree of vacuum. In addition, a close contact force is applied in parallel, and contact is made with a predetermined contact pressure. Thereafter, similarly, a magnetic field for transfer is applied in a direction almost opposite to the initial magnetization by the magnetic field application device, and magnetic transfer is performed.
[0060]
According to the above embodiment, since the deformation amount of the buffer material 18 at the time of contact pressure is 5 to 500 μm, the elastic characteristic necessary for uniform contact is obtained, while the displacement in the surface direction of the slave medium 2 due to excessive deformation. Is small, the positional deviation of the transfer recording signal is within the range of the allowable misalignment amount, the transfer quality by uniform contact is good, and the magnetic transfer with high reliability can be performed.
[Brief description of the drawings]
FIG. 1 is a schematic cross-sectional view showing an open state of a holder of a magnetic transfer apparatus according to an embodiment of the present invention. FIG. 2 is a schematic cross-sectional view showing an open state of a holder of a magnetic transfer apparatus according to another embodiment. Explanation of symbols]
10, 20 Holder 2 Slave medium 3, 4 Master carrier 5, 15 One side holder 5 a, 15 a Press inner surface 6, 16 Other side holder 6 a, 16 a Press inner surface 7 Seal portion 8, 18 Buffer material 8 a Suction hole

Claims (4)

In the holder of the magnetic transfer device that accommodates the master carrier carrying the transfer information and the slave medium that receives the transfer in an internal space opened and closed between the one-side holder that moves toward and away from the other side holder,
A magnetic material characterized in that at least one pressing inner surface of the one side holder and the other side holder is provided with a buffer material having an elastic property, and the amount of deformation of the buffer material in the pressurizing direction at the time of close contact is 5 μm to 500 μm. Transfer device holder. The holder of the magnetic transfer device according to claim 1, wherein an elastic modulus of the buffer material is 5 MPa to 200 MPa. The holder of the magnetic transfer device according to claim 1, wherein the buffer material has a thickness variation of a pressing portion of 100 μm or less. The holder of the magnetic transfer apparatus according to claim 1, wherein the cushioning material includes a suction hole.

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