JP2003281715A - Magnetic transfer device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To carry out good magnetic transfer wherein a slave medium and a master carrier housed in a holder during magnetic transfer are uniformly bonded on the full surface without any air stays on the bonded surface to improve transfer signal quality. <P>SOLUTION: The magnetic transfer device which houses master carriers 3, 4 carrying transfer information and a slave medium 2 to receive transfer in a holder 10, bonds them by adhesive force generated by the vacuum suction of the internal space 10a of the holder 10, and applies a transfer magnetic field by a magnetic field application device 5 in this bonded state to carry out magnetic transfer, is provided separately with an adhesion station A for housing the slave medium 2 and the master carriers 3, 4 in the holder 10 and bonding them by the application of an external pressure or the like, and a transfer station B equipped with the magnetic field application device 5 to carry out magnetic transfer by receiving the holder 10 bonded at the adhesion station A. <P>COPYRIGHT: (C)2004,JPO

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic transfer apparatus for magnetic transfer from a master carrier carrying information to a slave medium. 2. Description of the Related Art Magnetic transfer, which is the subject of the present invention, is a master carrier (patterned master) in which a transfer pattern such as a servo signal having a soft magnetic layer at least on the surface layer is formed in an uneven shape or an embedded structure. The magnetic field corresponding to the information carried on the master carrier is transferred and recorded on the slave medium by applying a transfer magnetic field in close contact with the slave medium having the magnetic recording unit. As an example of this magnetic transfer, for example, Japanese Patent Laid-Open No. 63-183623.
No. 10, JP 10-40544 A, JP 10-2695 A
66, Japanese Patent Application Laid-Open No. 2001-256644, and the like. When the slave medium is a disk-shaped medium such as a hard disk or a high-density flexible disk, the disk-shaped master carrier is brought into close contact with one or both sides of the slave medium, and the slave medium is disposed on one or both sides. A magnetic field application device using an electromagnet device or a permanent magnet device is provided to apply a magnetic field for transfer. In order to improve the transfer quality in this magnetic transfer, it is an important issue to bring the slave medium and the master carrier into close contact with each other evenly. In other words, if there is poor adhesion, there will be areas where magnetic transfer will not occur, and if magnetic transfer does not occur, signal loss will occur in the magnetic information transferred to the slave medium, the signal quality will deteriorate, and the recorded signal will be In this case, there is a problem that the tracking function cannot be sufficiently obtained and the reliability is lowered. In the conventional magnetic transfer apparatus, in order to enhance the adhesion between the slave medium and the master carrier, a pressing force is mechanically applied by the pressing means to press the slave medium against the master carrier. . Further, there is also known one that is pressed and brought into close contact with an elastic body (see JP-A-7-78337). Such a mechanical adhesion application method is suitable in that a large pressure can be obtained, but it is difficult to apply pressure with a uniform distribution to the adhesion surface between the slave medium and the master carrier. In view of the above, a vacuum suction system in which the inside of the holder containing the slave medium and the master carrier is vacuum-sucked, and the contact force between the slave medium and the master carrier is obtained by the external air pressure acting evenly from the outside. However, since pressure is applied to the entire surface of the holder, it is basically easy to obtain a uniform contact state. However, the above-described vacuum suction in the holder alone does not sufficiently discharge the air remaining on the contact surface between the master carrier and the slave medium, resulting in a spacing due to the air pool. It is difficult to ensure a good adhesion state due to the occurrence of the occurrence of a gap or the occurrence of spacing due to insufficient correction of the unevenness of the master carrier or the slave medium. In order to eliminate the above-mentioned poor adhesion, it is effective to further increase the degree of vacuum in the holder, but it is difficult due to the holder structure and the like, and it is difficult to apply mechanical pressure from the outside or external atmospheric pressure. It is required to further enhance the above-mentioned contact state by applying pressure using On the other hand, in order to perform magnetic transfer, a magnetic field applying device for applying a transfer magnetic field, a drive mechanism for rotating the holder, and the like are installed in the vicinity of the holder to improve the close contact state. Therefore, it is difficult to attach an external pressure applying mechanism as described above. For example, a device that applies mechanical pressure to the holder requires uniform pressing on the contact surface, so a flat pressing requires a large pressing surface, and a roller press requires relative movement with the holder. It is difficult to install them without interfering with the magnetic field application device. In addition, when the holder is housed in an air chamber and pressure due to external pressure is applied, or the external air pressure acting on the holder is set to atmospheric pressure or higher,
It is difficult to install air chamber equipment. Further, when a magnetic field for transfer is applied to the contact surface between the master carrier and the slave medium housed in the holder, the head portion of the magnetic field applying device for applying the transfer magnetic field is brought close to the contact surface. It is good in that the magnetic field strength is high and the magnetic transfer can be performed with the optimum magnetic field distribution. However, when the external pressure application mechanism as described above is attached, the approach of the head part is limited, and the transfer signal quality is high. May decrease. To the above point, in the magnetic transfer station,
A close contact means and a magnetic transfer means for improving the close contact can be switched and moved, and the close contact means and the magnetic transfer means can be switched in the order of the process to a holder containing the slave medium and the master carrier. I think,
In such a case, there is a problem that the equipment becomes complicated due to the switching operation and it is difficult to shorten the tact time. The present invention has been made in view of the above points, and without requiring a switching facility, the slave medium and the master carrier in magnetic transfer are made to adhere evenly over the entire surface by eliminating air accumulation and improving the transfer signal quality. It is an object of the present invention to provide a magnetic transfer apparatus. A magnetic transfer apparatus according to the present invention accommodates a master carrier carrying transfer information and a slave medium receiving the transfer in a holder, and tightly adheres the internal space of the holder by vacuum suction. In the magnetic transfer apparatus for performing magnetic transfer by applying a magnetic field for transfer by a magnetic field applying device in this tightly contacted state, the master carrier and the slave medium are accommodated in the holder. And a transfer station that includes the magnetic field application device and receives a holder that has been subjected to close contact processing at the contact station and performs magnetic transfer. As an external pressure application method at the contact station, a mechanical flat plate press method in which a flat plate press is pressed with a cylinder, a spring, etc., a roller press method using a press roller, an air press method using an air chamber, etc. are adopted. Is possible. At that time, it is preferable to use vacuum suction in the holder in combination. Further, in order to maintain the contact state of the holder brought into contact with the contact station, a mechanism for maintaining the degree of vacuum such as a closing valve and a check valve is installed in the vacuum suction system. After maintaining the close contact state, the applied external pressure is released and transferred to a transfer station for magnetic transfer. It should be noted that the holder is configured such that the holder wall of the external pressure application portion is flexible so that the external pressure applied as described above acts on the contact surface, or the pressing surfaces on both sides of the slave medium and the master carrier. Is configured in a cylinder structure that can move toward and away. According to the present invention as described above, there are provided a contact station for accommodating a master carrier and a slave medium in a holder, and a holder provided with a magnetic field applying device and subjected to contact processing at the contact station. With a separate transfer station that receives and performs magnetic transfer,
The degree of freedom in handling the holder is increased, and installation of equipment that can apply the desired external pressure evenly at the contact station can be performed freely, and the slave medium and master carrier can be evenly distributed without external air accumulation on the contact surface. In the transfer station, the transfer station can apply a magnetic field for transfer having the optimum magnetic field characteristics to the holder that maintains the close contact state. It can be implemented and does not require switching equipment, simplifying equipment and shortening tact time. If the holder is provided with a mechanism for maintaining the degree of vacuum in the internal space, such as a shut-off valve and a check valve, the good contact state obtained at the contact station can be easily and reliably maintained. Transfer and application of a magnetic field for transfer can be easily performed. DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below based on embodiments shown in the drawings. FIG. 1 is an explanatory view showing a transfer process of a magnetic transfer apparatus according to an embodiment, and FIG.
FIG. 3 is a schematic perspective view showing an embodiment of the transfer station of FIG. 1. 4 and 5 are schematic sectional views showing other embodiments of the contact station. Each figure is a schematic diagram, and the dimensions of each part are shown in proportions different from actual ones. The magnetic transfer apparatus shown in FIG. 1 includes a contact station A and a transfer station B separately. In the contact station A, the slave medium 2 that receives the transfer and the master carriers 3 and 4 carrying the transfer information are accommodated in the holder 10, and the internal space 10 a of the holder 10 is vacuumed and the external pressure is applied by the external pressure applying mechanism 6. Thus, the adhesion force is increased, and the master carriers 3 and 4 are adhered to both sides of the slave medium 2. Further, in the transfer station B, the holder 1 which is transferred from the contact station A and keeps the contact state.
The magnetic field applying device 5 applies a transfer magnetic field to the holder 10 to perform magnetic transfer. FIG. 2 shows an example of a contact station A provided with an external pressure applying mechanism 6 of a mechanical flat plate press system. The holder 10 includes a lower base chamber 11 and an upper pressing chamber 12, and an internal space 10a formed therein.
In addition, the slave medium 2 and the master carriers 3 and 4 on both sides are disposed, and the internal space 10a is vacuum-sucked so that the slave medium 2 and the master carriers 3 and 4 are in close contact with each other with their center positions aligned. The base chamber 11 has a disc shape and has a concave inner surface larger than the outer diameters of the slave medium 2 and the master carriers 3 and 4, and holds the lower surface of one master carrier 4 by suction or the like with the center position aligned. . The outer peripheral portion is provided with an annular flange portion 11a. Press chamber 1
Reference numeral 2 denotes a disk shape, and the pressing surface portion is flexible, and the upper surface opening of the base chamber 11, that is, the internal space 10a
Can be elastically deformed during vacuum suction. The outer peripheral portion of the pressing chamber 12 abuts on the upper end surface of the flange portion 11a of the base chamber 11, and a sealing material 13 such as an O-ring is installed on the end surface of the flange portion 11a to perform sealing with the pressing chamber 12, The internal space 10a is sealed. Due to its flexibility, the pressing chamber 12 is deformed by receiving the external pressure on the back surface during vacuum suction, or deformed by receiving the pressure of the external pressure applying mechanism 6, and the slave medium 2 and the master carrier. An adhesion force is applied uniformly to 3 and 4. The pressing surface portion of the base chamber 11 may be made of a highly rigid material or a flexible member. The means for vacuum-sucking the internal space 10a of the holder 10 includes, for example, an exhaust port 14 penetrating the flange portion 11a of the base chamber 11 in the outer peripheral direction.
The air passage 15 connected to the exhaust port 14 is provided with a stop valve 16 (or a check valve), and the vacuum state of the internal space 10a can be maintained when the valve is closed. A suction pipe from a vacuum pump (not shown) is detachably connected to the air passage 15, and the air in the internal space 10 a is discharged and controlled to a predetermined degree of vacuum by the vacuum suction. As a result, air on the contact surface between the slave medium 2 and the master carriers 3 and 4 is discharged, and a part of the contact force is obtained. Further, in the contact station A, an external pressure applying mechanism 6 by a mechanical flat plate press system is installed to apply a further contact force to the holder 10. The external pressure applying mechanism 6 includes a flat plate press 61 having a pressing cylinder 62 attached to the upper portion and a surface plate 63 on the lower portion. The holder 10 is placed on the surface plate 63, accommodates the slave medium 2 and the master carriers 3 and 4, and operates the upper pressing cylinder 62 while operating the upper pressing cylinder 62 while evacuating the inside to discharge air.
The lower surface of 1 is brought into contact with the upper surface of the pressing chamber 12 of the holder 10 and pressed against the surface plate 63 with a predetermined pressure to apply an external pressure to further enhance the adhesion between the slave medium 2 and the master carriers 3 and 4. Then, air remaining on the contact surfaces of both is discharged to eliminate air accumulation, and the unevenness of the master carriers 3 and 4 or the slave medium 2 is corrected and flattened, and the adhesion is improved without generating spacing. The pressing cylinder 62 is pressed by a force generated by fluid pressure or spring force. The pressing surface of the flat plate press 61 is at least wider than the contact surface between the slave medium 2 and the master carriers 3 and 4. preferable. Before releasing the pressing force by the external pressure applying mechanism 6, the closing valve 16 of the holder 10 is closed, the vacuum state of the internal space 10 a is maintained, and the slave medium 2 and the master carriers 3 and 4 are in close contact with each other. Hold. Thereafter, the plate press 61 is moved up to release the pressing force by the external pressure applying mechanism 6, and the holder 10 is transferred to the next magnetic transfer station B. When the degree of vacuum of vacuum suction for exhausting the internal space 10a of the holder 10 is high, the vacuum suction is performed to close the shutoff valve 16, and then the pressure applied by the external pressure applying mechanism 6 is applied. However, if the external pressure application mechanism 6 is pressed first, the slave medium 2 and the master carriers 3 and 4 may be performed simultaneously.
There is a risk that the air in between will be difficult to be discharged. Next, as shown in FIG. 3, the transfer station B includes a magnetic field applying device 5 that receives a holder 10 that is kept in close contact and applies a transfer magnetic field while rotating the holder 10. The holder 10 is rotated and linked to a rotation mechanism (not shown). When applying the transfer magnetic field by the magnetic field applying device 5, the magnetization of the slave medium 2 is previously recorded in the in-plane track direction for in-plane recording and perpendicular in the vertical recording before being accommodated in the holder 10. Initial DC magnetization is performed in the direction, the slave medium 2 is brought into close contact with the master carriers 3 and 4, and a magnetic field for transfer is applied in a track direction or a vertical direction substantially opposite to the initial DC magnetization direction to perform magnetic transfer. A magnetic field applying device 5 for applying a transfer magnetic field is:
In the case of in-plane recording, for example, the coil 5c is connected to the core 5b having the gap 5a extending in the radial direction of the slave medium 2.
Ring-type head electromagnet wound with
A transfer magnetic field generated in parallel with the track direction is applied in the same direction on both sides. By rotating the holder 10, the slave medium 2 and the master carrier 3,
A transfer magnetic field is applied to the entire surface of 4. The magnetic field applying device 5, that is, the magnetic field may be provided so as to rotate. The magnetic field applying device 5 may be disposed only on one side, or the permanent magnet device may be disposed on both sides or one side. Further, a magnetic field applying device 5 for perpendicular recording.
The holder 10 is an electromagnet or permanent magnet of different polarity.
The magnetic field for transfer is generated and applied in the vertical direction. In the case of applying a magnetic field partially, holder 1
The entire surface is magnetically transferred by moving 0 or moving the magnetic field. Next, FIG. 4 is a schematic sectional view showing an example of a contact station A provided with an external pressure applying mechanism 7 of a roller press type. The holder 10 is configured in the same manner as in FIG. The external pressure applying mechanism 7 includes a pair of an upper press roller 71 and a lower press roller 72 on the upper and lower sides,
The slave medium 2 and the master carriers 3 and 4 are accommodated, and an adhesion force is further applied to the holder 10 in which the internal space 10a is vacuumed. The upper press roller 71 and the lower press roller 72 can move toward and away from each other. The holder 10 is sandwiched between the press rollers 71 and 72, and the holder 10 or the press rollers 71 and 72 are moved while applying pressure. Apply a predetermined pressure to the whole. By applying this external pressure, the adhesion force between the slave medium 2 and the master carriers 3 and 4 is further increased, the air on the adhesion surface is pushed out from one side to the other, and the air remaining on both adhesion surfaces is discharged to collect air. In this way, the unevenness of the master carrier 3 or 4 or the slave medium 2 is corrected and flattened, and the adhesion is improved without generating spacing. The upper press roller 71 and the lower press roller 72 apply a pressing force to at least one shaft portion and apply an external pressure to the holder 10 while rolling. Is preferably at least larger than the diameter of the contact surface between the slave medium 2 and the master carriers 3 and 4. The external pressure application by the press rollers 71 and 72 is preferably performed while vacuuming the inside of the holder 10, but it may be performed after the vacuum valve is closed by closing the shutoff valve 16. Next, FIG. 5 is a schematic sectional view showing an example of the contact station A provided with an air press type external pressure applying mechanism 8. The holder 10 is configured in the same manner as in FIG. The external pressure applying mechanism 8 is composed of an air chamber that accommodates the entire holder 10, and includes a chamber container 81 and a chamber lid 82. A sealing material 83 for sealing the chamber lid 82 is installed at the upper end of the side wall of the chamber container 81 to seal the inside. The chamber lid 82 is formed with a pressing portion 82a having a large thickness projecting downward at the center, and its outer peripheral portion is flexible. Then, the internal air is sucked and discharged from the communication hole 81a opened in the chamber container 81, and the chamber lid 8 is discharged with an external pressure acting on the chamber lid 82.
2 is deformed and the pressing portion 82a comes into contact with the holder 10, and the slave medium 2 and the master carriers 3 and 4 are accommodated, and an external pressure is further applied to the holder 10 in which the internal space 10a is vacuumed. By applying this external pressure, the adhesion between the slave medium 2 and the master carriers 3 and 4 is further increased, and the air remaining on the adhesion surfaces of the both is discharged to eliminate the accumulation of air. The unevenness of the medium 2 is corrected and flattened, and the adhesion is improved without generating spacing. When the holder 10 is accommodated in the external pressure applying mechanism 8 (air chamber) and the internal air is vacuumed and discharged, the external pressure due to the vacuum suction of the internal space 10a of the holder 10 decreases, Although the adhesion force is reduced, the area of the chamber lid 82 is larger than the area of the pressing chamber 12 of the holder 10, so that a large adhesion force acts on the adhesion surfaces of the slave medium 2 and the master carriers 3 and 4. The area of the pressing portion 82a of the chamber lid 82 has a size corresponding to the contact surface between the slave medium 2 and the master carriers 3 and 4, and the external pressure received by the large area of the chamber lid 82 is applied to the pressing portion 82a. By concentrating on, the pressure is increased. Further, the pressure in the external pressure applying mechanism 8 (air chamber) is increased to the atmospheric pressure or more, and the pressure difference between the internal pressure and the external pressure in the internal space 10a of the holder 10 that is sucked in vacuum is increased, thereby improving the adhesion. You may make it raise. As the slave medium 2, a disk-shaped magnetic recording medium such as a hard disk having a magnetic recording part (magnetic layer) formed on both sides or one side, a high-density flexible disk, or the like is used. The magnetic recording part is composed of a coating type magnetic recording layer or a metal thin film type magnetic recording layer. Both master carriers 3 and 4 are formed on a disk-like disk, and have a transfer pattern in which a fine magnetic pattern formed on a substrate is coated with a soft magnetic material on one side. It is in close contact with the medium 2. As the substrates of the master carriers 3 and 4, nickel, silicon, quartz plate, glass, aluminum, alloy, ceramics, synthetic resin or the like is used. The formation of the concavo-convex pattern
The stamper method is used. The formation of soft magnetic material
The magnetic material is deposited by vacuum deposition means such as vacuum deposition, sputtering, ion plating, plating, or the like. Almost the same master carrier is used for in-plane recording and perpendicular recording. In the above magnetic transfer apparatus, magnetic transfer is performed on a plurality of slave media 2 by the same master carrier 3, 4. First, one master carrier 4 is held in the base chamber 11 of the holder 10 in alignment. Let me. Then, the slave medium 2 and the other master carrier 3 that have been initially magnetized in one of the in-plane direction and the vertical direction in advance in the base chamber 11 in which the pressing chamber 12 is opened in the contact station A or in the previous process. After the center position is set, the pressing chamber 12 is overlaid on the base chamber 11 to close the internal space 10a. The other master carrier 3 may also be held in alignment with the inner surface of the pressing chamber 12. Next, air is discharged from the inner space 10a of the holder 10 by the vacuum suction means at the contact station A to reduce the pressure to a predetermined degree of vacuum, and by the external pressure applying mechanisms 6 to 8 as described above. Apply external pressure. As a result, the pressing chamber 12 uniformly applies a close contact force to the slave medium 2 and the master carriers 3 and 4 toward the base chamber 11, and discharges air from the close contact surface in a uniform and good condition with a predetermined close contact pressure. Adhere closely. The closing valve 16 of the holder 10 is closed before and after the application of the external pressure, and the contact state is maintained. Thereafter, the holder 10 is taken out from the contact station A and transferred to the transfer station B. A magnetic field applying device 5 is brought close to both sides of the holder 10, and a magnetic field for transfer is applied in a direction almost opposite to the initial magnetization by the magnetic field applying device 5 while rotating the holder 10, according to the transfer pattern of the master carriers 3 and 4. The magnetization pattern is transferred and recorded on the magnetic recording portion of the slave medium 2. The magnetic field for transfer applied at the time of the magnetic transfer is sucked into the convex pattern of the soft magnetic material in close contact with the slave medium 2 in the transfer pattern of the master carriers 3 and 4, and in the case of in-plane recording, the initial magnetization of this portion Is not reversed and the initial magnetization of the other part is reversed. In the case of perpendicular recording, the initial magnetization of this part is reversed and the initial magnetization of the other part is not reversed. A magnetized pattern corresponding to the transfer pattern is transferred and recorded on both sides simultaneously. It is preferable from the standpoint of improving transfer efficiency that a plurality of sets of the holder 10 and the master carriers 3 and 4 are prepared, and are sequentially circulated and transferred to the contact station A and the transfer station B to repeat magnetic transfer. The illustrated holder 10 has master carriers 3 and 4 on both sides of a slave medium 2 arranged in the horizontal direction.
Although the two-sided simultaneous magnetic transfer is shown in which both sides are placed in close contact with each other, the master carrier 4 may be placed in close contact with one side of the slave medium 2 to perform one-sided sequential magnetic transfer. Alternatively, magnetic transfer may be performed with the holder 10 in the vertical orientation. Here, the close contact is
It shall refer to either of contact close contact or both of them facing each other with a very small gap. The holder 10 may have a base chamber 11 and a pressing chamber 12 having a cylinder structure instead of making the pressing wall portion flexible. For example, the pressing chamber 12 can move toward and away from the base chamber 11 in the axial direction (vertical direction in the figure), and a flange that protrudes upward on the outer periphery of the base chamber 11 is downward on the outer periphery of the pressing chamber 12. Each of the ridges is provided with a protrusion. And on the inner peripheral side of the collar portion of the base chamber 11,
A flange portion of the pressing chamber 12 is provided so as to be insertable, and a sealing material by an O-ring is attached to the outer periphery of the flange portion of the pressing chamber 12, and a seal between surfaces parallel to the contact / separation movement direction (axial direction) is provided by this sealing material. Perform both chambers 1
What is necessary is just to comprise so that the internal space 10a between 1 and 12 may be sealed. According to the above embodiment, the slave medium 2 and the master carriers 3 and 4 are accommodated in the holder 10 and the internal space 10a is vacuum-sucked to a predetermined degree of vacuum.
A contact station A that applies external pressure by an external pressure application mechanism 6 and a holder 10 that is in close contact by a magnetic field application device 5.
And a transfer station B for performing magnetic transfer by applying a magnetic field for transfer to the master carrier 3, 4.
And the slave medium 2 can be pressed evenly over the entire surface with an optimal pressure, ensuring good adhesion, and having a high magnetic field strength and applying a magnetic field for transfer with the optimal magnetic field distribution characteristics, thereby preventing transfer defects. Thus, good magnetic transfer with high transfer signal quality can be performed.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory view showing a transfer process of a magnetic transfer apparatus according to an embodiment of the present invention. FIG. 2 is a schematic cross section showing an external pressure application mechanism of an embodiment of a contact station in FIG. FIG. 3 is a schematic perspective view showing an embodiment of the transfer station of FIG. 1. FIG. 4 is a schematic cross-sectional view showing an external pressure application mechanism of another embodiment. FIG. 5 shows an external pressure application mechanism of still another embodiment. Schematic sectional view shown [Explanation of Symbols] 1 Magnetic transfer device A Adhering station B Transfer station 2 Slave media 3, 4 Master carrier 5 Magnetic field applying device 6-8 External pressure applying mechanism 10 Holder 10a Internal space 11 Base chamber 12 Press chamber 14 Exhaust Port 15 Air passage 16 Shut-off valve 61 Flat plate press 62 Press cylinder 63 Surface plate 71, 72 Press roller 81 Chamber container 82 Chamber lid

Claims (1)

What is claimed is: 1. A master carrier carrying transfer information and a slave medium receiving the transfer are accommodated in a holder, and the slave medium and the master carrier In a magnetic transfer apparatus for performing magnetic transfer by applying a magnetic field for transfer by a magnetic field applying apparatus in this tightly contacted state, a close contact station for accommodating a master carrier and a slave medium in the holder, and the magnetic field applying apparatus And a transfer station for receiving a holder subjected to close contact processing at the close contact station and performing magnetic transfer.