JP2004103111A - Holder for magnetic transfer device - Google Patents

Holder for magnetic transfer device Download PDF

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Publication number
JP2004103111A
JP2004103111A JP2002263749A JP2002263749A JP2004103111A JP 2004103111 A JP2004103111 A JP 2004103111A JP 2002263749 A JP2002263749 A JP 2002263749A JP 2002263749 A JP2002263749 A JP 2002263749A JP 2004103111 A JP2004103111 A JP 2004103111A
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Japan
Prior art keywords
holder
slave medium
internal space
master carrier
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
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JP2002263749A
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Japanese (ja)
Inventor
Akihito Kamatani
鎌谷 彰人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP2002263749A priority Critical patent/JP2004103111A/en
Publication of JP2004103111A publication Critical patent/JP2004103111A/en
Abandoned legal-status Critical Current

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Abstract

<P>PROBLEM TO BE SOLVED: To provide a holder for a magnetic transfer device wherein the pressure of the internal space of the holder is efficiently reduced in order to prevent an adhesion failure caused by residual bubbles between a master carrier and a slave medium when they are bonded together for magnetic transfer. <P>SOLUTION: In the holder 10 which houses a slave medium 2 for receiving transfer and master carriers 3 and 4 carrying transfer information on one or both sides thereof in an internal space A opened/closed between one side holder 5 and the other side holder 6 moved in contact/noncontact with each other, and reduces the pressure of the internal space A to bring them into close contact with each other, before the one side holder 5 and the other side holder 6 approach each other, and an adhesive force is applied between the slave medium 2 and the master carriers 3 and 4, the internal space A is sealed, and the volume of the internal space at the time of sealing is set to 0.1cm<SP>3</SP>to 100cm<SP>3</SP>. <P>COPYRIGHT: (C)2004,JPO

Description

【0001】
【発明の属する技術分野】
本発明は、情報が担持されたマスター担体からスレーブ媒体へ磁気転写する磁気転写装置において、上記マスター担体とスレーブ媒体とを内部空間に収容し密着させるホルダーに関するものである。
【0002】
【従来の技術】
本発明の対象とする磁気転写は、少なくとも表層に磁性層を有するサーボ信号等の転写パターンが凹凸形状あるいは埋め込み構造で形成されたマスター担体(パターンドマスター)を、磁気記録部を有するスレーブ媒体と密着させた状態で、転写用磁界を印加してマスター担体に担持した情報に対応する磁化パターンをスレーブ媒体に転写記録するものである。
【0003】
上記スレーブ媒体がハードディスクまたは高密度フレキシブルディスクのような円盤状媒体の場合には、このスレーブ媒体の片面または両面に円盤状のマスター担体を密着させた状態で、その片側または両側に電磁石装置、永久磁石装置による磁界印加装置を配設して転写用磁界を印加する。
【0004】
この磁気転写における転写品質を高めるためには、スレーブ媒体とマスター担体とをいかに均一に密着させることが重要な課題である。つまり密着不良があると、磁気転写が起こらない領域が生じ、磁気転写が起こらないとスレーブ媒体に転写された磁気情報に信号抜けが発生して信号品位が低下し、記録した信号がサーボ信号の場合にはトラッキング機能が十分に得られずに信頼性が低下するという問題がある。
【0005】
その際、上記のような磁気転写では、マスター担体およびスレーブ媒体を、接離移動する片側ホルダーと他側ホルダーとを備えるホルダーの内部空間に収容して対峙密着させることが、全面で均一な密着を得る点で良好である。
【0006】
そして、磁気転写時にホルダー内でマスター担体とスレーブ媒体とを重ねた状態で、エアシリンダーやサーボモータ等の機械的駆動手段によりホルダーを介してマスター担体とスレーブ媒体とを外部から加圧することによりマスター担体とスレーブ媒体とを押圧密着させていた(例えば、特許文献1参照)。
【0007】
しかし、この機械的加圧では、マスター担体とスレーブ媒体間に残留したエアが気泡状に閉じ込められる場合があり、この気泡部分でマスター担体とスレーブ媒体間に隙間が生じて密着不良となり転写不良が発生することになる。また、加圧力を高めて上記気泡を強制的に排除しようとするとマスター担体やスレーブ媒体に過大な力が作用して損傷を与える場合があった。
【0008】
この対策として、ホルダー内部にスレーブ媒体およびマスター担体を収容する内部空間を密閉し、マスター担体とスレーブ媒体とを加圧してから内部空間を減圧する、もしくは内部空間を減圧してからマスター担体とスレーブ媒体とを加圧することにより、前記気泡の閉じ込めを解消することが提案されている。
【0009】
【特許文献1】
特開平7−78337号公報
【0010】
【発明が解決しようとする課題】
上記のようなホルダーの内部空間を減圧して気泡の閉じ込めを解消する際に、内部空間の容積が大きいと、内部空間を密閉してから減圧し、真空状態としてマスター担体とスレーブ媒体との密着性を確保するためには時間がかかり、タクト時間が長くなって生産性の低下を招くことになる。
【0011】
また、磁気転写を行ったスレーブ媒体を内部空間より取り出し、次のスレーブ媒体を供給するためにホルダーを開く際には、減圧状態の内部空間を大気開放することになり、この大気開放に伴って内部空間にエア通路を通してエアが流入する。その際、流入するエアに塵埃が含まれていると、この塵埃がマスター担体やスレーブ媒体に付着して転写不良の原因となるが、減圧用のエア通路は外部の真空源(真空ポンプ)へ接続するために、ホルダーの支持軸を回転可能に支承する固定部のシール部分を通して導出されるもので、このシール部分すなわち摺動部分で発生した塵埃物質がエア通路に介在し、上記大気開放時の導入エアとともに内部空間にまで流入して前述の転写不良を引き起こす問題があった。
【0012】
本発明はこのような問題に鑑みなされたもので、マスター担体とスレーブ媒体との間に気泡が残留するのを防止するためのホルダーの内部空間の減圧を効率よく行って転写品位を高めるようにした磁気転写装置のホルダーを提供することを目的とするものである。
【0013】
【課題を解決するための手段】
本発明の磁気転写装置のホルダーは、接離移動する片側ホルダーと他側ホルダーとの間に開閉される内部空間に、転写を受けるスレーブ媒体とその片側または両側に転写情報を担持したマスター担体を収容し、内部空間を減圧して両者を対峙密着させる磁気転写装置のホルダーにおいて、
前記マスター担体およびスレーブ媒体を収容した前記片側ホルダーと他側ホルダーとが接近し、そのスレーブ媒体とマスター担体間に密着力が作用する以前に、前記内部空間が密閉され、この密閉時の内部空間の容積が0.1cm以上、100cm以下であることを特徴とするものである。
【0014】
前記内部空間の密閉時におけるマスター担体とスレーブ媒体間の距離が、0.1mm以上、5mm以下であることが望ましい。
【0015】
前記ホルダーは前記内部空間減圧用のエア通路を備え、該エア通路は内部空間に開口した部位よりホルダーの支持軸外周のシール部位間を通して外部に導出され、前記エア通路の内部空間に開口した部位から前記シール部位に至るまでの該エア通路の容積を、前記内部空間の容積より大きくすることが好ましい。
【0016】
【発明の効果】
本発明によれば、マスター担体およびスレーブ媒体を収容した片側ホルダーと他側ホルダーとが接近し、そのスレーブ媒体とマスター担体間に密着力が作用する以前に内部空間が密閉し、この密閉時の内部空間の容積を0.1cm以上、100cm以下としたことにより、マスター担体やスレーブ媒体に損傷を与えることなく確実にマスター担体をスレーブ媒体を密着させることができ、さらに内部空間の減圧時間を短縮できることによりタクトタイムが短くなり、処理効率の向上を図ることができる。
【0017】
また、内部空間減圧用のエア通路の内部空間に開口した部位から支持軸のシール部位に至るまでの容積を、内部空間の容積より大きくすると、ホルダーを開く際にエア通路より流入したエアにシール部位で発生した塵埃が内部空間へ流入するのを最小限にすることができ、マスター担体およびスレーブ媒体に付着する塵埃を低減して高品位な磁気転写が可能となる。
【0018】
【発明の実施の形態】
以下、図面に示す実施の形態に基づいて本発明を詳細に説明する。図1は一実施形態にかかる磁気転写装置のホルダーの開状態を示す概略断面図、図2は内部空間が密閉された状態の同概略断面図、図3は密着状態の同概略断面図である。なお、この図は模式図であり各部の寸法は実際とは異なる比率で示している。
【0019】
図1に示す磁気転写装置のホルダー10は、両面同時磁気転写を行うものであり、接離移動可能な左側の片側ホルダー5と右側の他側ホルダー6とを備え、両者の接近に伴い外周のシール部7により密閉形成される内部空間Aに、スレーブ媒体2、両側のマスター担体3,4を配置して中心位置を合わせた状態でスレーブ媒体2とマスター担体3,4とを対峙密着させる。ここで対峙密着とは、転写パターン部の接触密着、ごく僅かな隙間を空けて対峙することの双方の何れかを指すものとする。
【0020】
片側ホルダー5および他側ホルダー6は背面中心部にそれぞれ支持軸5a,6aを備え、両支持軸5a,6aがそれぞれ固定部8,9に回転可能に支承されている。固定部8,9には軸受け8a,9a(ベアリング)が設置されるとともに、それぞれOリングによる3つのシール材8b,9bが間隔をもって設置されている。
【0021】
前記片側ホルダー5は、その押圧内面5bにスレーブ媒体2の片面にサーボ信号等の情報を転写する一方のマスター担体3を吸着する第1の真空系統11と、押圧内面5bの中心部にスレーブ媒体2を吸着する第2の真空系統12とを備える。前記他側ホルダー6は、その押圧内面6bにスレーブ媒体2の他面にサーボ信号等の情報を転写する他方のマスター担体4を吸着する第3の真空系統13と、内部空間Aを減圧する第4の真空系統14とを備える。
【0022】
上記第1〜第4の真空系統11〜14は、それぞれの支持軸5a,6aを通して片側ホルダー5および他側ホルダー6の外部に導出される。つまり、片側ホルダー5は円盤状でマスター担体3の外径より大きい円形状の押圧内面5bに、マスター担体3の大きさに対応する範囲に第1の真空系統11の吸引穴11aが開口され、この吸引穴11aに連通する第1エア通路11bが片側ホルダー5の円盤部分から支持軸5a内の外周側部分に設置されている。また、上記マスター担体3の内径より内周側の押圧内面5bに第2の真空系統12の吸引穴12aが開口され、この吸引穴12aに連通する第2エア通路12bが片側ホルダー5の円盤部分から支持軸5a内の中心部分に設置されている。第1エア通路11bおよび第2エア通路12bは、支持軸5aの周面の異なる位置に開口し、開口部分を分離するように固定部8に3つのシール材8bが設置され、このシール材8bの間の固定部8に連通穴11c,12cが形成され、各連通穴11c,12cに接続されたエアパイプ11d,12dを通して第1および第2の真空系統11,12が導出され、外部に設置された不図示の真空源(真空ポンプ)に接続され、吸引圧の導入によりマスター担体3の裏面およびスレーブ媒体2の中心部を内面5bに吸着により保持する。
【0023】
一方、前記他側ホルダー6も円盤状でマスター担体4の外径より大きい円形状の押圧内面6bに、マスター担体4の大きさに対応する範囲に第3の真空系統13の吸引穴13aが開口され、この吸引穴13aに連通する第3エア通路13bが他側ホルダー6の円盤部分から支持軸6a内の外周側部分に設置されている。また、上記マスター担体4の内径より内周側の押圧内面6bには凹部が形成され、この凹部の中心に第4の真空系統14の吸引穴14aが開口され、この吸引穴14aに連通する第4エア通路14bが他側ホルダー6の円盤部分から支持軸6a内の中心部分に設置されている。第3エア通路13bおよび第4エア通路14bは、支持軸6aの周面の異なる位置に開口し、開口部分を分離するように固定部9に3つのシール材9bが設置され、このシール材9bの間の固定部9に連通穴13c,14cが形成され、各連通穴13c,14cに接続されたエアパイプ13d,14dを通して第3および第4の真空系統13,14が導出され、外部に設置された不図示の真空源(真空ポンプ)に接続され、吸引圧の導入によりマスター担体4の裏面を吸着により保持するとともに内部空間Aを減圧して密着力を得ると同時に、密着面のエア抜きを行って密着性を高める。
【0024】
前記固定部8,9に設置するシール材8b,9bとしては、固定部8,9の内周または支持軸5a,6aの外周に装着するOリング、磁性流体シール、Oリングと磁性流体シールとを併用して構成してもよい。磁性流体シールは摺動において発塵性がなく、シール部分からの発塵が抑えられる。
【0025】
また、他側ホルダー6の外周に設置されたシール部7はリング状であり、他側ホルダー6の外周面に突設されたフランジ6cに装着されて、弾性部材7aを介して軸方向(接離方向)にその変形量だけ移動可能である。このシール部7の端面にはOリングによる端面シール材7bを備え、片側ホルダー5の内面5bに圧接して内部空間Aの開閉シールを行う。また、シール部7の内周面にはOリングによる周面シール材7cを備え、他側ホルダー6の外周面との間の摺動シールを行う。
【0026】
片側ホルダー5および他側ホルダー6は図示しない回転機構に連係されて磁気転写時に支持軸5a,6aを中心に一体に回転駆動される。なお、図示していないが、磁気転写装置はホルダー10を回転させつつ転写用磁界を印加する磁界印加装置を備える。
【0027】
また、前記片側ホルダー5および他側ホルダー6の少なくとも一方が軸方向(図で左右方向)に移動可能に支持され、両ホルダー5,6が互いに接離移動可能であり、図1に示すような分離状態からの接近移動に伴い、図2のように、シール部7の端面シール材7bが片側ホルダー5の内面5bに圧接して内部空間Aを閉じる。この密閉後に、内部空間Aを第4の真空系統14により減圧すると共に、他側ホルダー6を閉方向へ移動させる。これに伴い図3のように、スレーブ媒体2の両面にマスター担体3,4を所定の加圧力で密着させる。
【0028】
そして、前記図2のように、内部空間Aが密閉されたときの内部空間Aの容積は、0.1cm以上、100cm以下(好ましくは50cm以下)であるように設定している。さらに、内部空間Aの密閉時のマスター担体3,4とスレーブ媒体2間の距離dは、0.1mm以上、5mm以下である。
【0029】
上記により、マスター担体3,4やスレーブ媒体2に損傷を与えることなく確実にマスター担体3,4とスレーブ媒体2を密着させることができ、さらに減圧時間が短いことにより、1枚のスレーブ媒体2への磁気転写に要するタクトタイムを短縮でき、処理効率の向上を図ることができる。
【0030】
つまり、上記容積が100cm(距離dが5mm)より大きくなると、所定の真空度まで減圧するために要する時間が長くなり、処理能力の低下を招く。減圧時間を短くするために、排気速度を上げると、内部空間Aに強い気流が発生し、発塵の原因となる。また、距離dが5mmより大きくなると、減圧後の加圧時に、片側ホルダー5および/または他側ホルダー6の移動ストロークが大きくなるためにOリング等のシール材7cからの摺動に伴う発塵が多くなるとともに、ホルダー10を両側から挟んで転写用磁界を印加する磁界印加装置の設置間隔が大きくなり問題が生じる。
【0031】
一方、上記容積が0.1cm(距離dが0.1mm)より狭いと、各部の機械的精度誤差の点で、内部空間Aが密閉される前にスレーブ媒体2とマスター担体4とが接触する可能性があり、圧力が過大に作用したり、エア抜きが良好に行えないなどの問題がある。つまり、加圧前の両ホルダー5,6の平行度は、その構造から0.05mm程度以下にすることは加工精度上困難であり、加圧前密閉時の上記距離dは0.1mm以上であることが必要である。
【0032】
また、内部空間減圧用のエア通路14bの内部空間Aに開口した部位つまり吸引穴14aから支持軸6aのシール材9b(シール部位)に至るまでの容積を、内部空間Aの容積より大きくすると、減圧状態にある内部空間Aを大気開放する際に、ホルダー10の回転に伴う摺動でシール部位で発生した塵埃が、エア通路14bより内部空間Aへ流入するのを防止することができ、マスター担体3,4およびスレーブ媒体2に付着する塵埃を低減して転写品位を高めている。
【0033】
なお、上記密着力の印加のために、第4の真空系統14に加えて、ホルダー10を外部から機械的に加圧する押圧手段を備える。この押圧手段は加圧シリンダを備え、その押圧ロッドの先端がホルダー10の支持軸5aまたは6aに所定の押圧荷重を印加するように構成すればよい。
【0034】
また、他側ホルダー6の内面にはマスター担体4の背面を吸着保持する緩衝材を備えてもよい。この緩衝材は均等に圧力を加えるためのもので、弾性特性を有する材料により円盤シート状に形成される。
【0035】
片側ホルダー5および他側ホルダー6に対するマスター担体3,4およびスレーブ媒体2の位置決めは、例えば、測定顕微鏡またはCCDカメラ等の位置観察手段を使用し、位置決めマーク等を基準としてマスター担体3,4またはスレーブ媒体2をXY方向へ微調整することにより行うか、位置決め部材をホルダー5,6に設置してマスター担体3,4またはスレーブ媒体2の内径を装着して行う。
【0036】
前記スレーブ媒体2は、両面または片面に磁気記録部(磁性層)が形成されたハードディスク、高密度フレキシブルディスクなどの円盤状磁気記録媒体が使用される。その磁気記録部は塗布型磁気記録層あるいは金属薄膜型磁気記録層で構成される。
【0037】
マスター担体3,4は円盤状ディスクに形成されている。このマスター担体3は、基板上に形成された微細凹凸パターンに磁性体が被覆されてなり、この面がスレーブ媒体2に密着される転写パターンが形成された転写情報担持面となる。これと反対側の面が両ホルダー5,6に吸着保持される。マスター担体3,4の基板としては、ニッケル、シリコン、石英板、ガラス、アルミニウム、合金、セラミックス、合成樹脂等を使用する。凹凸パターンの形成は、スタンパー法等によって行われる。磁性体の形成は、磁性材料を真空蒸着法、スパッタリング法、イオンプレーティング法等の真空成膜手段、メッキ法などにより成膜する。面内記録と垂直記録とで、ほぼ同様のマスター担体3,4が使用される。
【0038】
転写用磁界および必要に応じて初期磁界を印加する不図示の磁界印加装置は、面内記録の場合には、例えば、スレーブ媒体2の半径方向に延びるギャップを有するコアにコイルが巻き付けられたリング型ヘッド電磁石がホルダー10の両側に配設されてなり、両側で同じ方向にトラック方向と平行に発生させた転写用磁界を印加する。ホルダー10を回転させて、スレーブ媒体2とマスター担体3,4の全面に転写用磁界を印加する。磁界印加装置を回転移動させるように設けてもよい。磁界印加装置は、片側にのみ配設するようにしてもよく、永久磁石装置を両側または片側に配設してもよい。また、垂直記録の場合の磁界印加装置は、極性の異なる電磁石または永久磁石をホルダー10の両側に配置し、垂直方向に転写用磁界を発生させて印加する。部分的に磁界を印加するものでは、ホルダー10を移動させるか磁界を移動させて全面の磁気転写を行う。
【0039】
次に、磁気転写工程を説明する。上記磁気転写装置のホルダー10では、同じマスター担体3,4により複数のスレーブ媒体2に対する磁気転写を行うものであり、まず片側ホルダー5に第1の真空系統11によってマスター担体3を、他側ホルダー6に第3の真空系統13によってマスター担体4を、それぞれ位置を合わせて吸着保持させておく。
【0040】
この他側ホルダー6と片側ホルダー5とを離間した開状態で、予め面内方向または垂直方向の一方に初期磁化したスレーブ媒体2を中心位置を合わせてセットし第2の真空系統12によって吸着した後、他側ホルダー6を片側ホルダー5に接近移動させる。
【0041】
そして、図2のように、ホルダー10の内部空間Aを閉じた後に、第4の真空系統14により内部空間Aのエア排出を行って減圧し、所定の真空度とすると共に、さらに他側ホルダー6を接近移動させる。スレーブ媒体2にマスター担体4が接触し、真空度に応じて作用する外力(大気圧)による圧力および印加圧力で、片側ホルダー5に向けてスレーブ媒体2とマスター担体3,4とに均一かつ平行に密着力を加え、所定の密着圧力で密着させる。
【0042】
その後、ホルダー10の両側に磁界印加装置を接近させ、ホルダー10を回転させつつ磁界印加装置によって初期磁化とほぼ反対方向に転写用磁界を印加し、マスター担体3,4の転写パターンに応じた磁化パターンをスレーブ媒体2の磁気記録部に転写記録する。
【0043】
上記磁気転写時に印加された転写用磁界は、マスター担体3,4の転写パターンにおけるスレーブ媒体2と密着した磁性体による凸部パターンに吸い込まれ、面内記録の場合にはこの部分の初期磁化は反転せずその他の部分の初期磁化が反転し、垂直記録の場合にはこの部分の初期磁化が反転しその他の部分の初期磁化は反転しない結果、スレーブ媒体2にはマスター担体3,4の転写パターンに応じた磁化パターンが転写記録される。
【0044】
本実施形態によれば、第4の真空系統14により内部空間Aの減圧を行うについて、密閉時の内部空間Aの容積を0.1〜100cmに狭く設定して減圧時間を短縮するとともに、大気開放時に支持軸6aのシール部位で発生した塵埃がエア通路14bより内部空間Aに流入しないようにしているため、均一密着の確保により、転写品質が良好で信頼性の高い磁気転写が、高い処理効率で行える。
【0045】
また、上記密閉時のマスター担体とスレーブ媒体間の距離dが0.1mm以上、5mm以下としたことにより、スレーブ媒体への傷の発生がなく、異物の付着も少い。この距離dと転写後のスレーブ媒体の表面性状との関係を求めた実験結果を、下記表1に示す。
【0046】
この実験は、上記距離dを0.02mm〜7mmに変更し、磁気転写後のスレーブ媒体の表面性状を、ハロゲンランプを用いて目視観察により検査したものである。各距離dにおいて1枚のスレーブ媒体を使用し、それぞれの条件で連続10回の磁気転写を行った後に、検査した。傷・異物の付着がなく良好なものが○、特に良好なものが◎、傷・異物の付着が許容以上の不良なものを×として評価している。
【0047】
表1の結果、距離dが0.05mm以下では、外周部に傷が確認された。また、距離dを大きくしていくと開閉ストロークが大きくなるのに伴い、徐々に異物の付着が増加し、距離dが6mm以上では、異物(塵埃)の付着が多く許容範囲を超えた。以上の結果より、距離dは0.1〜5mmの範囲で良好であった。特に、異物の付着および傷の発生が極めて少ない0.1mm以上、1mm以下の範囲が好ましい。
【0048】
【表1】

Figure 2004103111

【図面の簡単な説明】
【図1】本発明の一つの実施形態にかかる磁気転写装置のホルダーの開状態を示す概略断面図
【図2】図1の磁気転写装置のホルダーの内部空間の密閉状態を示す概略断面図
【図3】図1の磁気転写装置のホルダーの密着状態を示す概略断面図
【符号の説明】
10  ホルダー
2  スレーブ媒体
3,4   マスター担体
5  片側ホルダー
5a  支持軸
5b  内面
6  他側ホルダー
6a  支持軸
6b  内面
7  シール部
8,9   固定部
8b,9b   シール材(シール部位)
11〜14  真空系統
11a〜14a  吸引穴
11b〜14b  エア通路
11d〜14d  エアパイプ
A  内部空間[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a holder for accommodating and closely contacting the master carrier and the slave medium in an internal space in a magnetic transfer apparatus for magnetic transfer from a master carrier carrying information to a slave medium.
[0002]
[Prior art]
The magnetic transfer that is the subject of the present invention includes a master carrier (patterned master) in which a transfer pattern such as a servo signal having a magnetic layer at least on the surface layer is formed in a concavo-convex shape or an embedded structure, and a slave medium having a magnetic recording unit. In a state of being in close contact, a magnetic field for transfer is applied to transfer and record a magnetization pattern corresponding to information carried on the master carrier onto the slave medium.
[0003]
When the slave medium is a disk-like medium such as a hard disk or a high-density flexible disk, an electromagnet device, a permanent magnet is attached to one or both sides of the slave medium in a state where a disk-like master carrier is in close contact with one or both sides. A magnetic field applying device using a magnet device is provided to apply a transfer magnetic field.
[0004]
In order to improve the transfer quality in this magnetic transfer, it is an important issue how the slave medium and the master carrier are in close contact with each other. In other words, if there is poor adhesion, there will be areas where magnetic transfer will not occur, and if magnetic transfer does not occur, signal loss will occur in the magnetic information transferred to the slave medium, the signal quality will deteriorate, and the recorded signal will be In this case, there is a problem that the tracking function cannot be sufficiently obtained and the reliability is lowered.
[0005]
At that time, in the magnetic transfer as described above, the master carrier and the slave medium are accommodated in the inner space of the holder including the one-side holder and the other-side holder that move toward and away from each other, and are in close contact with each other. It is good at the point to obtain.
[0006]
Then, the master carrier and the slave medium are overlapped in the holder during magnetic transfer, and the master carrier and the slave medium are externally pressurized via the holder by a mechanical drive means such as an air cylinder or a servo motor. The carrier and the slave medium are pressed and adhered (see, for example, Patent Document 1).
[0007]
However, in this mechanical pressurization, air remaining between the master carrier and the slave medium may be trapped in a bubble shape, and a gap is formed between the master carrier and the slave medium at this bubble portion, resulting in poor adhesion and poor transfer. Will occur. In addition, when the pressure is increased to forcibly eliminate the bubbles, an excessive force may act on the master carrier or the slave medium to cause damage.
[0008]
As a countermeasure, the inner space for accommodating the slave medium and the master carrier is sealed in the holder, and the master carrier and the slave medium are pressurized and then the inner space is decompressed, or the inner space is decompressed and the master carrier and the slave are then decompressed. It has been proposed to eliminate the trapping of the bubbles by pressurizing the medium.
[0009]
[Patent Document 1]
Japanese Patent Laid-Open No. 7-78337
[Problems to be solved by the invention]
When the internal space of the holder is depressurized to eliminate the trapping of bubbles, if the volume of the internal space is large, the internal space is sealed and then depressurized, and the master carrier and the slave medium are brought into close contact with each other as a vacuum state. It takes time to ensure the performance, and the tact time becomes longer, leading to a decrease in productivity.
[0011]
In addition, when the slave medium that has been magnetically transferred is taken out of the internal space and the holder is opened to supply the next slave medium, the internal space in a depressurized state is opened to the atmosphere. Air flows into the internal space through the air passage. At that time, if dust is contained in the inflowing air, the dust adheres to the master carrier or the slave medium and causes transfer failure. However, the air passage for decompression is connected to an external vacuum source (vacuum pump). In order to connect, it is led out through the seal part of the fixed part that rotatably supports the support shaft of the holder, and the dust material generated in this seal part, that is, the sliding part is interposed in the air passage, Inflow of air into the internal space along with the introduced air causes the above-mentioned transfer failure.
[0012]
The present invention has been made in view of such a problem, and is intended to improve the transfer quality by efficiently reducing the pressure in the inner space of the holder for preventing bubbles from remaining between the master carrier and the slave medium. It is an object of the present invention to provide a holder for a magnetic transfer apparatus.
[0013]
[Means for Solving the Problems]
The holder of the magnetic transfer device of the present invention has a slave medium that receives a transfer and a master carrier carrying transfer information on one side or both sides in an internal space that is opened and closed between the one-side holder that moves toward and away from the other-side holder. In the holder of the magnetic transfer device that accommodates and depressurizes the internal space to make both faces in close contact,
Before the one-side holder and the other-side holder accommodating the master carrier and the slave medium come close to each other and the adhesion force acts between the slave medium and the master carrier, the inner space is sealed, and the inner space when sealed The volume is 0.1 cm 3 or more and 100 cm 3 or less.
[0014]
The distance between the master carrier and the slave medium when the internal space is sealed is preferably 0.1 mm or more and 5 mm or less.
[0015]
The holder includes an air passage for decompressing the internal space, and the air passage is led to the outside through a seal portion on the outer periphery of the support shaft of the holder from a portion opened to the internal space, and a portion opened to the internal space of the air passage It is preferable that the volume of the air passage from the space to the seal site is larger than the volume of the internal space.
[0016]
【The invention's effect】
According to the present invention, the one side holder containing the master carrier and the slave medium approaches the other side holder, and the internal space is sealed before the close contact force acts between the slave medium and the master carrier. By setting the volume of the internal space to 0.1 cm 3 or more and 100 cm 3 or less, the master carrier can be brought into close contact with the master carrier without damaging the master carrier or the slave medium. Since the tact time can be shortened, the processing efficiency can be improved.
[0017]
In addition, if the volume from the part opened to the internal space of the air passage for decompressing the internal space to the seal part of the support shaft is made larger than the volume of the internal space, it seals against the air flowing in from the air passage when the holder is opened. It is possible to minimize the dust generated in the part from flowing into the internal space, and it is possible to reduce the dust adhering to the master carrier and the slave medium and to perform high-quality magnetic transfer.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in detail based on embodiments shown in the drawings. FIG. 1 is a schematic cross-sectional view showing an open state of a holder of a magnetic transfer apparatus according to an embodiment, FIG. 2 is a schematic cross-sectional view in a state where an internal space is sealed, and FIG. 3 is a schematic cross-sectional view in a close contact state. . In addition, this figure is a schematic diagram, and the dimension of each part is shown in the ratio different from actual.
[0019]
A holder 10 of the magnetic transfer apparatus shown in FIG. 1 performs double-sided simultaneous magnetic transfer, and includes a left-side holder 5 and a right-side other holder 6 that can move toward and away from each other. The slave medium 2 and the master carriers 3 and 4 are brought into close contact with each other in a state in which the slave medium 2 and the master carriers 3 and 4 on both sides are arranged in the inner space A hermetically formed by the seal portion 7 and the center positions are aligned. Here, facing contact refers to either contact contact of the transfer pattern portion or facing with a very small gap.
[0020]
The one-side holder 5 and the other-side holder 6 have support shafts 5a and 6a at the center of the back surface, respectively, and both support shafts 5a and 6a are rotatably supported by the fixing portions 8 and 9, respectively. Bearings 8a and 9a (bearings) are installed on the fixed portions 8 and 9, and three seal members 8b and 9b using O-rings are installed at intervals.
[0021]
The one-side holder 5 includes a first vacuum system 11 for adsorbing one master carrier 3 for transferring information such as a servo signal to one side of the slave medium 2 on the pressing inner surface 5b, and a slave medium at the center of the pressing inner surface 5b. And a second vacuum system 12 that adsorbs 2. The other side holder 6 has a third vacuum system 13 for adsorbing the other master carrier 4 for transferring information such as servo signals to the other side of the slave medium 2 on the pressing inner surface 6b, and a first vacuum for reducing the internal space A. 4 vacuum systems 14.
[0022]
The first to fourth vacuum systems 11 to 14 are led out of the one-side holder 5 and the other-side holder 6 through the support shafts 5a and 6a. That is, the suction hole 11a of the first vacuum system 11 is opened in a range corresponding to the size of the master carrier 3 on the pressing inner surface 5b having a disk shape and a circular shape larger than the outer diameter of the master carrier 3, A first air passage 11b communicating with the suction hole 11a is provided from the disk portion of the one-side holder 5 to the outer peripheral side portion in the support shaft 5a. Further, a suction hole 12a of the second vacuum system 12 is opened on the inner surface of the pressing surface 5b on the inner peripheral side from the inner diameter of the master carrier 3, and the second air passage 12b communicating with the suction hole 12a is a disk portion of the one-side holder 5. To the support shaft 5a. The first air passage 11b and the second air passage 12b open at different positions on the peripheral surface of the support shaft 5a, and three sealing members 8b are installed in the fixed portion 8 so as to separate the opening portions. Communication holes 11c and 12c are formed in the fixed portion 8 between the first and second vacuum systems 11 and 12 through the air pipes 11d and 12d connected to the communication holes 11c and 12c, and are installed outside. It is connected to a vacuum source (vacuum pump) not shown, and the back surface of the master carrier 3 and the central portion of the slave medium 2 are held on the inner surface 5b by suction by introducing suction pressure.
[0023]
On the other hand, the suction hole 13a of the third vacuum system 13 is opened in a range corresponding to the size of the master carrier 4 on the pressing inner surface 6b having a disk shape and a circular shape larger than the outer diameter of the master carrier 4 on the other side holder 6. A third air passage 13b that communicates with the suction hole 13a is installed from the disk portion of the other holder 6 to the outer peripheral side portion in the support shaft 6a. Further, a concave portion is formed in the inner pressing surface 6b on the inner peripheral side with respect to the inner diameter of the master carrier 4, and a suction hole 14a of the fourth vacuum system 14 is opened at the center of the concave portion, and a second communicating with the suction hole 14a. The 4 air passage 14b is installed from the disk part of the other side holder 6 to the center part in the support shaft 6a. The third air passage 13b and the fourth air passage 14b open at different positions on the peripheral surface of the support shaft 6a, and three sealing members 9b are installed in the fixed portion 9 so as to separate the opening portions. The sealing member 9b Communication holes 13c and 14c are formed in the fixing portion 9 between the third and fourth vacuum systems 13 and 14 through the air pipes 13d and 14d connected to the communication holes 13c and 14c, and are installed outside. Connected to a vacuum source (vacuum pump) not shown in the figure, and by sucking pressure, the back surface of the master carrier 4 is held by suction and the inner space A is decompressed to obtain a close contact force. Go to increase adhesion.
[0024]
Sealing materials 8b and 9b installed in the fixing portions 8 and 9 include O-rings, magnetic fluid seals, O-rings and magnetic fluid seals attached to the inner periphery of the fixing portions 8 and 9 or the outer periphery of the support shafts 5a and 6a May be used in combination. The magnetic fluid seal does not generate dust during sliding, and dust generation from the seal portion is suppressed.
[0025]
Further, the seal portion 7 installed on the outer periphery of the other holder 6 has a ring shape, is attached to a flange 6c protruding from the outer peripheral surface of the other holder 6, and is axially (contacted) via the elastic member 7a. It is possible to move in that direction by the amount of deformation. An end face sealing material 7b made of an O-ring is provided on the end face of the seal portion 7, and the inner space A is opened and closed by being pressed against the inner face 5b of the one-side holder 5. Further, the inner peripheral surface of the seal portion 7 is provided with a peripheral surface sealing material 7 c using an O-ring, and performs a sliding seal with the outer peripheral surface of the other holder 6.
[0026]
The one-side holder 5 and the other-side holder 6 are linked to a rotation mechanism (not shown) and are integrally rotated around the support shafts 5a and 6a during magnetic transfer. Although not shown, the magnetic transfer device includes a magnetic field applying device that applies a transfer magnetic field while rotating the holder 10.
[0027]
Further, at least one of the one-side holder 5 and the other-side holder 6 is supported so as to be movable in the axial direction (left-right direction in the figure), and both the holders 5 and 6 are movable toward and away from each other, as shown in FIG. With the approaching movement from the separated state, the end surface sealing material 7b of the seal portion 7 is pressed against the inner surface 5b of the one-side holder 5 to close the inner space A as shown in FIG. After this sealing, the internal space A is depressurized by the fourth vacuum system 14 and the other side holder 6 is moved in the closing direction. Accordingly, as shown in FIG. 3, the master carriers 3 and 4 are brought into close contact with both surfaces of the slave medium 2 with a predetermined pressure.
[0028]
As shown in FIG. 2, the volume of the internal space A when the internal space A is sealed is set to be 0.1 cm 3 or more and 100 cm 3 or less (preferably 50 cm 3 or less). Furthermore, the distance d between the master carriers 3 and 4 and the slave medium 2 when the internal space A is sealed is 0.1 mm or more and 5 mm or less.
[0029]
As described above, the master carriers 3 and 4 and the slave medium 2 can be reliably brought into close contact with each other without damaging the master carriers 3 and 4 and the slave medium 2, and the decompression time is short. The tact time required for magnetic transfer to the substrate can be shortened, and the processing efficiency can be improved.
[0030]
That is, when the volume is larger than 100 cm 3 (distance d is 5 mm), the time required for reducing the pressure to a predetermined degree of vacuum becomes longer, resulting in a reduction in processing capacity. If the exhaust speed is increased in order to shorten the decompression time, a strong air current is generated in the internal space A, causing dust generation. Further, if the distance d is greater than 5 mm, the moving stroke of the one-side holder 5 and / or the other-side holder 6 increases during pressurization after depressurization, and therefore dust generation accompanying sliding from the sealing material 7c such as an O-ring. And the installation interval of the magnetic field application device for applying the magnetic field for transfer with the holder 10 sandwiched from both sides is increased, which causes a problem.
[0031]
On the other hand, if the volume is smaller than 0.1 cm 3 (distance d is 0.1 mm), the slave medium 2 and the master carrier 4 come into contact with each other before the internal space A is sealed in terms of mechanical accuracy errors of each part. There is a problem that the pressure is excessively applied and the air cannot be removed well. In other words, the parallelism of both holders 5 and 6 before pressurization is difficult to make about 0.05 mm or less because of the structure, and the distance d when sealed before pressurization is 0.1 mm or more. It is necessary to be.
[0032]
Further, if the volume from the portion opened to the internal space A of the air passage 14b for decompressing the internal space, that is, the suction hole 14a to the seal member 9b (seal portion) of the support shaft 6a is larger than the volume of the internal space A, When the internal space A in the decompressed state is opened to the atmosphere, dust generated at the seal portion due to sliding accompanying the rotation of the holder 10 can be prevented from flowing into the internal space A from the air passage 14b. The transfer quality is improved by reducing dust adhering to the carriers 3 and 4 and the slave medium 2.
[0033]
In addition to the fourth vacuum system 14, in order to apply the adhesion force, a pressing unit that mechanically pressurizes the holder 10 from the outside is provided. The pressing means may include a pressure cylinder, and the tip of the pressing rod may be configured to apply a predetermined pressing load to the support shaft 5a or 6a of the holder 10.
[0034]
Further, the inner surface of the other holder 6 may be provided with a cushioning material that holds the back surface of the master carrier 4 by suction. This cushioning material is used to apply pressure evenly, and is formed into a disk sheet shape from a material having elastic characteristics.
[0035]
The positioning of the master carriers 3 and 4 and the slave medium 2 with respect to the one-side holder 5 and the other-side holder 6 uses, for example, a position observation means such as a measurement microscope or a CCD camera, and the master carriers 3 and 4 or This is performed by finely adjusting the slave medium 2 in the X and Y directions, or by placing positioning members on the holders 5 and 6 and mounting the inner diameters of the master carriers 3 and 4 or the slave medium 2.
[0036]
The slave medium 2 is a disk-shaped magnetic recording medium such as a hard disk or a high-density flexible disk having a magnetic recording portion (magnetic layer) formed on both sides or one side. The magnetic recording part is composed of a coating type magnetic recording layer or a metal thin film type magnetic recording layer.
[0037]
The master carriers 3 and 4 are formed in a disk-shaped disk. The master carrier 3 is a transfer information carrying surface on which a fine concavo-convex pattern formed on a substrate is coated with a magnetic material, and this surface is formed with a transfer pattern in close contact with the slave medium 2. The opposite surface is sucked and held by both holders 5 and 6. As the substrates of the master carriers 3 and 4, nickel, silicon, quartz plate, glass, aluminum, alloy, ceramics, synthetic resin or the like is used. The formation of the concavo-convex pattern is performed by a stamper method or the like. The magnetic material is formed by depositing a magnetic material by a vacuum film forming means such as a vacuum deposition method, a sputtering method or an ion plating method, a plating method or the like. Almost the same master carriers 3 and 4 are used for in-plane recording and perpendicular recording.
[0038]
In the case of in-plane recording, a magnetic field application device (not shown) that applies a transfer magnetic field and, if necessary, an initial magnetic field is, for example, a ring in which a coil is wound around a core having a gap extending in the radial direction of the slave medium 2 The mold head electromagnet is disposed on both sides of the holder 10 and applies a transfer magnetic field generated in parallel to the track direction in the same direction on both sides. The holder 10 is rotated to apply a transfer magnetic field to the entire surface of the slave medium 2 and the master carriers 3 and 4. You may provide so that a magnetic field application apparatus may be rotationally moved. The magnetic field application device may be disposed only on one side, or the permanent magnet device may be disposed on both sides or one side. In the case of perpendicular recording, the magnetic field application apparatus arranges electromagnets or permanent magnets having different polarities on both sides of the holder 10 to generate and apply a transfer magnetic field in the vertical direction. In the case of applying a magnetic field partially, the entire surface is magnetically transferred by moving the holder 10 or moving the magnetic field.
[0039]
Next, the magnetic transfer process will be described. The holder 10 of the magnetic transfer device performs magnetic transfer to the plurality of slave media 2 by the same master carrier 3, 4. First, the master carrier 3 is transferred to the one side holder 5 by the first vacuum system 11, and the other side holder 6, the master carrier 4 is adsorbed and held in position by the third vacuum system 13.
[0040]
In the open state in which the other side holder 6 and the one side holder 5 are separated from each other, the slave medium 2 initially magnetized in advance in one of the in-plane direction and the vertical direction is set with the center position aligned and adsorbed by the second vacuum system 12. Thereafter, the other side holder 6 is moved closer to the one side holder 5.
[0041]
Then, as shown in FIG. 2, after the internal space A of the holder 10 is closed, the fourth vacuum system 14 discharges the air from the internal space A to reduce the pressure to a predetermined degree of vacuum. Move 6 closer. The master carrier 4 comes into contact with the slave medium 2 and is uniform and parallel to the slave medium 2 and the master carriers 3 and 4 toward the one-side holder 5 at a pressure and an applied pressure due to an external force (atmospheric pressure) acting according to the degree of vacuum. A close contact force is applied to the contact surface with a predetermined contact pressure.
[0042]
Thereafter, a magnetic field applying device is brought close to both sides of the holder 10, and a magnetic field for transfer is applied in a direction almost opposite to the initial magnetization by the magnetic field applying device while rotating the holder 10, and magnetization corresponding to the transfer pattern of the master carriers 3 and 4 is performed. The pattern is transferred and recorded on the magnetic recording portion of the slave medium 2.
[0043]
The magnetic field for transfer applied during the magnetic transfer is sucked into the convex pattern of the magnetic material in close contact with the slave medium 2 in the transfer pattern of the master carriers 3 and 4, and in the case of in-plane recording, the initial magnetization of this portion is The initial magnetization of the other part is reversed without being reversed, and in the case of perpendicular recording, the initial magnetization of this part is reversed and the initial magnetization of the other part is not reversed. A magnetization pattern corresponding to the pattern is transferred and recorded.
[0044]
According to the present embodiment, for reducing the pressure of the internal space A by the fourth vacuum system 14, the volume of the internal space A at the time of sealing is set narrow to 0.1 to 100 cm 3 to shorten the pressure reducing time, Since dust generated at the seal portion of the support shaft 6a does not flow into the internal space A from the air passage 14b when the atmosphere is released, the magnetic transfer with good transfer quality and high reliability is ensured by ensuring uniform contact. It can be done with processing efficiency.
[0045]
In addition, since the distance d between the master carrier and the slave medium at the time of sealing is set to 0.1 mm or more and 5 mm or less, the slave medium is not damaged and the adhesion of foreign matters is small. Table 1 below shows the experimental results for determining the relationship between the distance d and the surface property of the slave medium after transfer.
[0046]
In this experiment, the distance d was changed to 0.02 mm to 7 mm, and the surface property of the slave medium after magnetic transfer was examined by visual observation using a halogen lamp. One slave medium was used at each distance d, and after 10 consecutive magnetic transfers under the respective conditions, inspection was performed. A good product with no flaws / foreign matter attached is evaluated as “Good”, a particularly good product is evaluated as “A”, and a flaw / adherent foreign matter is evaluated as “Poor”.
[0047]
As a result of Table 1, when the distance d was 0.05 mm or less, scratches were confirmed on the outer peripheral portion. Further, as the distance d is increased, the adhesion of foreign matters gradually increases as the opening / closing stroke increases, and when the distance d is 6 mm or more, foreign matter (dust) is often adhered and exceeds the allowable range. From the above results, the distance d was good in the range of 0.1 to 5 mm. In particular, the range of 0.1 mm or more and 1 mm or less is preferable in which the adhesion of foreign substances and the generation of scratches are extremely small.
[0048]
[Table 1]
Figure 2004103111

[Brief description of the drawings]
1 is a schematic cross-sectional view showing an open state of a holder of a magnetic transfer apparatus according to one embodiment of the present invention. FIG. 2 is a schematic cross-sectional view showing a sealed state of an internal space of the holder of the magnetic transfer apparatus of FIG. FIG. 3 is a schematic cross-sectional view showing a close contact state of the holder of the magnetic transfer apparatus of FIG.
DESCRIPTION OF SYMBOLS 10 Holder 2 Slave medium 3 and 4 Master carrier 5 One side holder 5a Support shaft 5b Inner surface 6 Other side holder 6a Support shaft 6b Inner surface 7 Seal part 8, 9 Fixed part 8b, 9b Seal material (seal part)
11-14 Vacuum system 11a-14a Suction hole 11b-14b Air passage 11d-14d Air pipe A Internal space

Claims (3)

接離移動する片側ホルダーと他側ホルダーとの間に開閉される内部空間に、転写を受けるスレーブ媒体とその片側または両側に転写情報を担持したマスター担体を収容し、内部空間を減圧して両者を対峙密着させる磁気転写装置のホルダーにおいて、
前記マスター担体およびスレーブ媒体を収容した前記片側ホルダーと他側ホルダーとが接近し、そのスレーブ媒体とマスター担体間に密着力が作用する以前に、前記内部空間が密閉され、この密閉時の内部空間の容積が0.1cm以上、100cm以下であることを特徴とする磁気転写装置のホルダー。
A slave medium that receives the transfer and a master carrier carrying transfer information on one or both sides are accommodated in an internal space that is opened and closed between the one-side holder and the other-side holder that move toward and away from each other. In the holder of the magnetic transfer device that closely contacts
Before the one-side holder and the other-side holder accommodating the master carrier and the slave medium come close to each other and the adhesion force acts between the slave medium and the master carrier, the inner space is sealed, and the inner space when sealed The holder of the magnetic transfer device is characterized by having a volume of 0.1 cm 3 or more and 100 cm 3 or less.
前記内部空間の密閉時におけるマスター担体とスレーブ媒体間の距離が、0.1mm以上、5mm以下であることを特徴とする請求項1に記載の磁気転写装置のホルダー。The holder of the magnetic transfer device according to claim 1, wherein the distance between the master carrier and the slave medium when the internal space is sealed is 0.1 mm or more and 5 mm or less. 前記ホルダーは前記内部空間減圧用のエア通路を備え、該エア通路は内部空間に開口した部位よりホルダーの支持軸外周のシール部位間を通して外部に導出され、前記エア通路の内部空間に開口した部位から前記シール部位に至るまでの該エア通路の容積が、前記内部空間の容積より大きいことを特徴とする請求項1または2に記載の磁気転写装置のホルダー。The holder includes an air passage for decompressing the inner space, and the air passage is led out to the outside through a seal portion on the outer periphery of the support shaft of the holder from a portion opened to the inner space, and a portion opened to the inner space of the air passage 3. The magnetic transfer apparatus holder according to claim 1, wherein a volume of the air passage from the first to the seal portion is larger than a volume of the internal space.
JP2002263749A 2002-09-10 2002-09-10 Holder for magnetic transfer device Abandoned JP2004103111A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8004781B2 (en) 2007-12-14 2011-08-23 Fujifilm Corporation Magnetic transfer apparatus, magnetic transfer method and magnetic recording medium with magnetic information transferred thereto

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8004781B2 (en) 2007-12-14 2011-08-23 Fujifilm Corporation Magnetic transfer apparatus, magnetic transfer method and magnetic recording medium with magnetic information transferred thereto

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