JP2006054383A - ワイヤボンディング方法 - Google Patents
ワイヤボンディング方法 Download PDFInfo
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- JP2006054383A JP2006054383A JP2004236405A JP2004236405A JP2006054383A JP 2006054383 A JP2006054383 A JP 2006054383A JP 2004236405 A JP2004236405 A JP 2004236405A JP 2004236405 A JP2004236405 A JP 2004236405A JP 2006054383 A JP2006054383 A JP 2006054383A
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- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
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Abstract
【解決手段】 第1ボンディング12工程前に該第1ボンディング12工程直前の第2ボンディング15工程におけるワイヤ切断工程によって、キャピラリ6の先端部より突出したワイヤ10を横方向に折り曲げて曲げ部11を形成する。前記第1ボンディング12工程は、曲げ部11をパッド2にボンディングして下部第1ボンディング部12を形成する工程と、キャピラリ6を上昇及び配線4側に移動させ、その後キャピラリ6を下降させてワイヤ10を下部第1ボンディング部12上に重ねて接続して上部第1ボンディング部14を形成する工程とからなる。
【選択図】 図1
Description
2 パッド
3 ダイ
4 配線
5 クランパ
6 キャピラリ
10 ワイヤ
11 曲げ部
12 下部第1ボンディング部
14 上部第1ボンディング部
15 第2ボンディング部
20 バンプ
21 ボール
Claims (5)
- 第1ボンド点であるダイのパッドに第1ボンディングを行った後、第2ボンド点である配線上に第2ボンディングを行い、前記パッドと前記配線間をワイヤで接続するワイヤボンディング方法において、前記第1ボンディング工程前に該第1ボンディング工程直前の第2ボンディング工程におけるワイヤ切断工程によって、キャピラリの先端部より突出したワイヤを横方向に折り曲げて曲げ部を形成することを特徴とするワイヤボンディング方法。
- 第1ボンド点であるダイのパッドに第1ボンディングを行った後、第2ボンド点である配線上に第2ボンディングを行い、前記パッドと前記配線間をワイヤで接続するワイヤボンディング方法において、前記配線上に予めバンプを形成し、このバンプ形成工程におけるワイヤ切断工程によって、キャピラリの先端部より突出したワイヤを横方向に折り曲げて曲げ部を形成し、その後前記曲げ部を前記パッドにボンディングして前記第1ボンディング工程を行うことを特徴とするワイヤボンディング方法。
- 前記第1ボンディング工程は、前記曲げ部をパッドにボンディングして下部第1ボンディング部を形成する工程と、キャピラリを上昇及び前記配線側に移動させ、その後キャピラリを下降させてワイヤを前記下部第1ボンディング部上に重ねて接続して上部第1ボンディング部を形成する工程とからなることを特徴とする請求項1又は2記載のワイヤボンディング方法。
- 前記第2ボンディング工程におけるワイヤ切断工程は、クランパでワイヤをクランプし、次にボンディングするパッドと配線を結ぶ方向に平行で、かつパッド側又は配線側にキャピラリを移動させてワイヤを切断して前記曲げ部を形成することを特徴とする請求項1記載のワイヤボンディング方法。
- 前記バンプ形成工程におけるワイヤ切断工程は、クランパでワイヤをクランプし、次にボンディングするパッドと配線を結ぶ方向に平行で、かつパッド側又は配線側にキャピラリを移動させてワイヤを切断して前記曲げ部を形成することを特徴とする請求項2記載のワイヤボンディング方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004236405A JP4215693B2 (ja) | 2004-08-16 | 2004-08-16 | ワイヤボンディング方法 |
TW094122130A TW200608501A (en) | 2004-08-16 | 2005-06-30 | Wire bonding method |
KR20050065072A KR100660821B1 (ko) | 2004-08-16 | 2005-07-19 | 와이어본딩 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004236405A JP4215693B2 (ja) | 2004-08-16 | 2004-08-16 | ワイヤボンディング方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006054383A true JP2006054383A (ja) | 2006-02-23 |
JP4215693B2 JP4215693B2 (ja) | 2009-01-28 |
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ID=36031645
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Application Number | Title | Priority Date | Filing Date |
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JP2004236405A Expired - Fee Related JP4215693B2 (ja) | 2004-08-16 | 2004-08-16 | ワイヤボンディング方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4215693B2 (ja) |
KR (1) | KR100660821B1 (ja) |
TW (1) | TW200608501A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007273991A (ja) * | 2006-03-30 | 2007-10-18 | Oerlikon Assembly Equipment Ltd Steinhausen | ウェッジウェッジワイヤーループの製造方法 |
US20160351535A1 (en) * | 2014-02-10 | 2016-12-01 | Shinkawa Ltd. | Method of manufacturing semiconductor device and wire bonding apparatus |
-
2004
- 2004-08-16 JP JP2004236405A patent/JP4215693B2/ja not_active Expired - Fee Related
-
2005
- 2005-06-30 TW TW094122130A patent/TW200608501A/zh not_active IP Right Cessation
- 2005-07-19 KR KR20050065072A patent/KR100660821B1/ko active IP Right Grant
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007273991A (ja) * | 2006-03-30 | 2007-10-18 | Oerlikon Assembly Equipment Ltd Steinhausen | ウェッジウェッジワイヤーループの製造方法 |
US20160351535A1 (en) * | 2014-02-10 | 2016-12-01 | Shinkawa Ltd. | Method of manufacturing semiconductor device and wire bonding apparatus |
US9978713B2 (en) * | 2014-02-10 | 2018-05-22 | Shinkawa Ltd. | Method of manufacturing semiconductor device and wire bonding apparatus |
Also Published As
Publication number | Publication date |
---|---|
TW200608501A (en) | 2006-03-01 |
JP4215693B2 (ja) | 2009-01-28 |
KR100660821B1 (ko) | 2006-12-26 |
KR20060053871A (ko) | 2006-05-22 |
TWI366240B (ja) | 2012-06-11 |
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