JP2006031113A - 熱交換方法及び熱交換装置、露光装置、デバイスの製造方法 - Google Patents

熱交換方法及び熱交換装置、露光装置、デバイスの製造方法 Download PDF

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Publication number
JP2006031113A
JP2006031113A JP2004205061A JP2004205061A JP2006031113A JP 2006031113 A JP2006031113 A JP 2006031113A JP 2004205061 A JP2004205061 A JP 2004205061A JP 2004205061 A JP2004205061 A JP 2004205061A JP 2006031113 A JP2006031113 A JP 2006031113A
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JP
Japan
Prior art keywords
temperature
medium
flow rate
heat
heat exchange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004205061A
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English (en)
Japanese (ja)
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JP2006031113A5 (https=
Inventor
Yoshiyuki Okada
芳幸 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2004205061A priority Critical patent/JP2006031113A/ja
Priority to US11/177,323 priority patent/US7565926B2/en
Publication of JP2006031113A publication Critical patent/JP2006031113A/ja
Publication of JP2006031113A5 publication Critical patent/JP2006031113A5/ja
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1919—Control of temperature characterised by the use of electric means characterised by the type of controller
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/70—Control systems characterised by their outputs; Constructional details thereof
    • F24F11/80—Control systems characterised by their outputs; Constructional details thereof for controlling the temperature of the supplied air
    • F24F11/83—Control systems characterised by their outputs; Constructional details thereof for controlling the temperature of the supplied air by controlling the supply of heat-exchange fluids to heat-exchangers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/70—Control systems characterised by their outputs; Constructional details thereof
    • F24F11/80—Control systems characterised by their outputs; Constructional details thereof for controlling the temperature of the supplied air
    • F24F11/83—Control systems characterised by their outputs; Constructional details thereof for controlling the temperature of the supplied air by controlling the supply of heat-exchange fluids to heat-exchangers
    • F24F11/84—Control systems characterised by their outputs; Constructional details thereof for controlling the temperature of the supplied air by controlling the supply of heat-exchange fluids to heat-exchangers using valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D17/00—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
    • F25D17/02—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating liquids, e.g. brine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F27/00—Control arrangements or safety devices specially adapted for heat-exchange or heat-transfer apparatus
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Temperature (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2004205061A 2004-07-12 2004-07-12 熱交換方法及び熱交換装置、露光装置、デバイスの製造方法 Withdrawn JP2006031113A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004205061A JP2006031113A (ja) 2004-07-12 2004-07-12 熱交換方法及び熱交換装置、露光装置、デバイスの製造方法
US11/177,323 US7565926B2 (en) 2004-07-12 2005-07-11 Heat exchange method and heat exchange apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004205061A JP2006031113A (ja) 2004-07-12 2004-07-12 熱交換方法及び熱交換装置、露光装置、デバイスの製造方法

Publications (2)

Publication Number Publication Date
JP2006031113A true JP2006031113A (ja) 2006-02-02
JP2006031113A5 JP2006031113A5 (https=) 2007-08-23

Family

ID=35539879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004205061A Withdrawn JP2006031113A (ja) 2004-07-12 2004-07-12 熱交換方法及び熱交換装置、露光装置、デバイスの製造方法

Country Status (2)

Country Link
US (1) US7565926B2 (https=)
JP (1) JP2006031113A (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8164735B2 (en) 2008-03-03 2012-04-24 Canon Kabushiki Kaisha Regulating device, exposure apparatus and device manufacturing method
US8199313B2 (en) 2007-10-04 2012-06-12 Canon Kabushiki Kaisha Temperature regulating apparatus, exposure apparatus, and device manufacturing method
KR101208033B1 (ko) 2010-07-29 2012-12-04 한국전력공사 열교환기의 온도제어 방법 및 장치
JP2013024493A (ja) * 2011-07-22 2013-02-04 Seiko Epson Corp 熱交換装置および熱交換方法

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2584409T3 (es) * 2011-07-29 2016-09-27 Carrier Corporation Sistemas de HVAC
JP6270310B2 (ja) 2011-12-12 2018-01-31 ギガフォトン株式会社 冷却水温度制御装置
CH706736A1 (de) * 2012-07-09 2014-01-15 Belimo Holding Ag Verfahren zum Betrieb eines Wärmetauschers sowie HVAC-Anlage zur Durchführung des Verfahrens.
GB2510654B (en) * 2013-05-15 2016-09-07 Rolls Royce Plc Method and system for monitoring the performance of a heat exchanger
CN105378575B (zh) 2013-05-16 2018-09-07 贝利莫控股公司 用于控制hvac系统中的阀的开度的装置及方法
EP3193094B1 (en) * 2013-12-20 2020-09-02 Belimo Holding AG Valve control in an hvac system with sensors
CN111174527B (zh) * 2019-12-23 2020-12-22 珠海格力电器股份有限公司 冷库的控制方法及装置、模块冷库
WO2022047576A1 (en) * 2020-09-04 2022-03-10 Jdi Design Inc. System and method for transferring thermal energy from integrated circuits
CN116242013A (zh) * 2023-01-09 2023-06-09 青岛海尔空调器有限总公司 用于空调的控制方法、装置、空调、存储介质

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3651370B2 (ja) 2000-07-31 2005-05-25 ダイキン工業株式会社 冷凍装置
US7735744B2 (en) * 2004-03-11 2010-06-15 Nissan Technical Center North America, Inc. Control of coolant flow rate for vehicle heating

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8199313B2 (en) 2007-10-04 2012-06-12 Canon Kabushiki Kaisha Temperature regulating apparatus, exposure apparatus, and device manufacturing method
US8164735B2 (en) 2008-03-03 2012-04-24 Canon Kabushiki Kaisha Regulating device, exposure apparatus and device manufacturing method
KR101208033B1 (ko) 2010-07-29 2012-12-04 한국전력공사 열교환기의 온도제어 방법 및 장치
JP2013024493A (ja) * 2011-07-22 2013-02-04 Seiko Epson Corp 熱交換装置および熱交換方法

Also Published As

Publication number Publication date
US7565926B2 (en) 2009-07-28
US20060005554A1 (en) 2006-01-12

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