JP2006031113A5 - - Google Patents

Download PDF

Info

Publication number
JP2006031113A5
JP2006031113A5 JP2004205061A JP2004205061A JP2006031113A5 JP 2006031113 A5 JP2006031113 A5 JP 2006031113A5 JP 2004205061 A JP2004205061 A JP 2004205061A JP 2004205061 A JP2004205061 A JP 2004205061A JP 2006031113 A5 JP2006031113 A5 JP 2006031113A5
Authority
JP
Japan
Prior art keywords
temperature
medium
heat exchanger
flow rate
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004205061A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006031113A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004205061A priority Critical patent/JP2006031113A/ja
Priority claimed from JP2004205061A external-priority patent/JP2006031113A/ja
Priority to US11/177,323 priority patent/US7565926B2/en
Publication of JP2006031113A publication Critical patent/JP2006031113A/ja
Publication of JP2006031113A5 publication Critical patent/JP2006031113A5/ja
Withdrawn legal-status Critical Current

Links

JP2004205061A 2004-07-12 2004-07-12 熱交換方法及び熱交換装置、露光装置、デバイスの製造方法 Withdrawn JP2006031113A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004205061A JP2006031113A (ja) 2004-07-12 2004-07-12 熱交換方法及び熱交換装置、露光装置、デバイスの製造方法
US11/177,323 US7565926B2 (en) 2004-07-12 2005-07-11 Heat exchange method and heat exchange apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004205061A JP2006031113A (ja) 2004-07-12 2004-07-12 熱交換方法及び熱交換装置、露光装置、デバイスの製造方法

Publications (2)

Publication Number Publication Date
JP2006031113A JP2006031113A (ja) 2006-02-02
JP2006031113A5 true JP2006031113A5 (https=) 2007-08-23

Family

ID=35539879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004205061A Withdrawn JP2006031113A (ja) 2004-07-12 2004-07-12 熱交換方法及び熱交換装置、露光装置、デバイスの製造方法

Country Status (2)

Country Link
US (1) US7565926B2 (https=)
JP (1) JP2006031113A (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009094163A (ja) 2007-10-04 2009-04-30 Canon Inc 温度制御装置、露光装置およびデバイス製造方法
JP2009212244A (ja) 2008-03-03 2009-09-17 Canon Inc 調整装置、露光装置及びデバイス製造方法
KR101208033B1 (ko) 2010-07-29 2012-12-04 한국전력공사 열교환기의 온도제어 방법 및 장치
JP2013024493A (ja) * 2011-07-22 2013-02-04 Seiko Epson Corp 熱交換装置および熱交換方法
ES2584409T3 (es) * 2011-07-29 2016-09-27 Carrier Corporation Sistemas de HVAC
JP6270310B2 (ja) 2011-12-12 2018-01-31 ギガフォトン株式会社 冷却水温度制御装置
CH706736A1 (de) * 2012-07-09 2014-01-15 Belimo Holding Ag Verfahren zum Betrieb eines Wärmetauschers sowie HVAC-Anlage zur Durchführung des Verfahrens.
GB2510654B (en) * 2013-05-15 2016-09-07 Rolls Royce Plc Method and system for monitoring the performance of a heat exchanger
CN105378575B (zh) 2013-05-16 2018-09-07 贝利莫控股公司 用于控制hvac系统中的阀的开度的装置及方法
EP3193094B1 (en) * 2013-12-20 2020-09-02 Belimo Holding AG Valve control in an hvac system with sensors
CN111174527B (zh) * 2019-12-23 2020-12-22 珠海格力电器股份有限公司 冷库的控制方法及装置、模块冷库
WO2022047576A1 (en) * 2020-09-04 2022-03-10 Jdi Design Inc. System and method for transferring thermal energy from integrated circuits
CN116242013A (zh) * 2023-01-09 2023-06-09 青岛海尔空调器有限总公司 用于空调的控制方法、装置、空调、存储介质

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3651370B2 (ja) 2000-07-31 2005-05-25 ダイキン工業株式会社 冷凍装置
US7735744B2 (en) * 2004-03-11 2010-06-15 Nissan Technical Center North America, Inc. Control of coolant flow rate for vehicle heating

Similar Documents

Publication Publication Date Title
JP2006031113A5 (https=)
CN102369398B (zh) 用于分散平衡液体循环加热或冷却网络的系统和方法
CN103221750B (zh) 在流体传导设备里进行自动液压调准的方法
JP5613748B2 (ja) フローモニタリングおよび制御のためのシステムおよび方法
RU2707487C1 (ru) Способ управления потоком текучей среды через клапан
RU2573378C2 (ru) Устройство и способ управления открытием клапана в системе hvac
RU2613474C2 (ru) Способ регулирования для насосного агрегата
JP2007500449A5 (https=)
TW200819942A (en) Multi-mode control algorithm
KR101308915B1 (ko) 난방시스템 제어방법
JPH11224128A (ja) フィードフォーワードとフィードバック制御を有する室温制御装置および方法
JP2009224806A5 (https=)
WO2008020966A2 (en) Systems and methods for fluid flow control in an immersion lithograthy system
US20080257495A1 (en) Temperature setting method for thermal processing plate, temperature setting apparatus for thermal processing plate, and computer-readable storage medium
JP2008300702A5 (https=)
KR101672831B1 (ko) 환수의 온도를 이용한 난방 제어시스템 및 난방 제어방법
JP5424721B2 (ja) 真空容器のシミュレーション装置
JP2021523460A5 (https=)
WO2018105080A1 (ja) 貯湯式給湯装置
JP2009117491A5 (https=)
JPH118194A5 (https=)
US20040144488A1 (en) Semiconductor wafer processing apparatus
CN111023421B (zh) 静压自调节控制方法、装置及空调器
JP2006261607A5 (https=)
JP2008292761A5 (https=)