JP2006031113A5 - - Google Patents

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Publication number
JP2006031113A5
JP2006031113A5 JP2004205061A JP2004205061A JP2006031113A5 JP 2006031113 A5 JP2006031113 A5 JP 2006031113A5 JP 2004205061 A JP2004205061 A JP 2004205061A JP 2004205061 A JP2004205061 A JP 2004205061A JP 2006031113 A5 JP2006031113 A5 JP 2006031113A5
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JP
Japan
Prior art keywords
temperature
medium
heat exchanger
flow rate
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004205061A
Other languages
English (en)
Japanese (ja)
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JP2006031113A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004205061A priority Critical patent/JP2006031113A/ja
Priority claimed from JP2004205061A external-priority patent/JP2006031113A/ja
Priority to US11/177,323 priority patent/US7565926B2/en
Publication of JP2006031113A publication Critical patent/JP2006031113A/ja
Publication of JP2006031113A5 publication Critical patent/JP2006031113A5/ja
Withdrawn legal-status Critical Current

Links

JP2004205061A 2004-07-12 2004-07-12 熱交換方法及び熱交換装置、露光装置、デバイスの製造方法 Withdrawn JP2006031113A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004205061A JP2006031113A (ja) 2004-07-12 2004-07-12 熱交換方法及び熱交換装置、露光装置、デバイスの製造方法
US11/177,323 US7565926B2 (en) 2004-07-12 2005-07-11 Heat exchange method and heat exchange apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004205061A JP2006031113A (ja) 2004-07-12 2004-07-12 熱交換方法及び熱交換装置、露光装置、デバイスの製造方法

Publications (2)

Publication Number Publication Date
JP2006031113A JP2006031113A (ja) 2006-02-02
JP2006031113A5 true JP2006031113A5 (https=) 2007-08-23

Family

ID=35539879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004205061A Withdrawn JP2006031113A (ja) 2004-07-12 2004-07-12 熱交換方法及び熱交換装置、露光装置、デバイスの製造方法

Country Status (2)

Country Link
US (1) US7565926B2 (https=)
JP (1) JP2006031113A (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009094163A (ja) 2007-10-04 2009-04-30 Canon Inc 温度制御装置、露光装置およびデバイス製造方法
JP2009212244A (ja) 2008-03-03 2009-09-17 Canon Inc 調整装置、露光装置及びデバイス製造方法
KR101208033B1 (ko) 2010-07-29 2012-12-04 한국전력공사 열교환기의 온도제어 방법 및 장치
JP2013024493A (ja) * 2011-07-22 2013-02-04 Seiko Epson Corp 熱交換装置および熱交換方法
WO2013019537A2 (en) * 2011-07-29 2013-02-07 Carrier Corporation Hvac systems
JP6270310B2 (ja) 2011-12-12 2018-01-31 ギガフォトン株式会社 冷却水温度制御装置
CH706736A1 (de) 2012-07-09 2014-01-15 Belimo Holding Ag Verfahren zum Betrieb eines Wärmetauschers sowie HVAC-Anlage zur Durchführung des Verfahrens.
GB2510654B (en) * 2013-05-15 2016-09-07 Rolls Royce Plc Method and system for monitoring the performance of a heat exchanger
US9874880B2 (en) 2013-05-16 2018-01-23 Belimo Holding Ag Device and method for controlling opening of a valve in an HVAC system
EP3770518A3 (en) 2013-12-20 2021-06-23 Belimo Holding AG Valve control in an hvac system with sensors
CN111174527B (zh) * 2019-12-23 2020-12-22 珠海格力电器股份有限公司 冷库的控制方法及装置、模块冷库
WO2022047576A1 (en) * 2020-09-04 2022-03-10 Jdi Design Inc. System and method for transferring thermal energy from integrated circuits
CN116242013A (zh) * 2023-01-09 2023-06-09 青岛海尔空调器有限总公司 用于空调的控制方法、装置、空调、存储介质

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3651370B2 (ja) 2000-07-31 2005-05-25 ダイキン工業株式会社 冷凍装置
US7735744B2 (en) * 2004-03-11 2010-06-15 Nissan Technical Center North America, Inc. Control of coolant flow rate for vehicle heating

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