JP2006003370A5 - - Google Patents

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Publication number
JP2006003370A5
JP2006003370A5 JP2005238300A JP2005238300A JP2006003370A5 JP 2006003370 A5 JP2006003370 A5 JP 2006003370A5 JP 2005238300 A JP2005238300 A JP 2005238300A JP 2005238300 A JP2005238300 A JP 2005238300A JP 2006003370 A5 JP2006003370 A5 JP 2006003370A5
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JP
Japan
Prior art keywords
electron beam
sample
beam apparatus
electron
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005238300A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006003370A (ja
JP4147233B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005238300A priority Critical patent/JP4147233B2/ja
Priority claimed from JP2005238300A external-priority patent/JP4147233B2/ja
Publication of JP2006003370A publication Critical patent/JP2006003370A/ja
Publication of JP2006003370A5 publication Critical patent/JP2006003370A5/ja
Application granted granted Critical
Publication of JP4147233B2 publication Critical patent/JP4147233B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2005238300A 2005-08-19 2005-08-19 電子線装置 Expired - Fee Related JP4147233B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005238300A JP4147233B2 (ja) 2005-08-19 2005-08-19 電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005238300A JP4147233B2 (ja) 2005-08-19 2005-08-19 電子線装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001084232A Division JP3973372B2 (ja) 2001-03-23 2001-03-23 荷電粒子線を用いた基板検査装置および基板検査方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008055956A Division JP4728361B2 (ja) 2008-03-06 2008-03-06 荷電粒子線を用いた基板検査装置および基板検査方法

Publications (3)

Publication Number Publication Date
JP2006003370A JP2006003370A (ja) 2006-01-05
JP2006003370A5 true JP2006003370A5 (fr) 2006-05-11
JP4147233B2 JP4147233B2 (ja) 2008-09-10

Family

ID=35771851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005238300A Expired - Fee Related JP4147233B2 (ja) 2005-08-19 2005-08-19 電子線装置

Country Status (1)

Country Link
JP (1) JP4147233B2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101487359B1 (ko) * 2006-01-25 2015-01-29 가부시키가이샤 에바라 세이사꾸쇼 시료 표면 검사방법 및 검사장치
JP5117080B2 (ja) 2007-03-07 2013-01-09 株式会社日立ハイテクノロジーズ 試料観察条件設定方法及び装置、並びに試料観察方法及び装置
KR101958209B1 (ko) 2015-01-28 2019-05-22 가부시키가이샤 히다치 하이테크놀로지즈 하전입자선 장치

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