JP2005523823A - 微小電気機械システムの製造方法 - Google Patents

微小電気機械システムの製造方法 Download PDF

Info

Publication number
JP2005523823A
JP2005523823A JP2004500321A JP2004500321A JP2005523823A JP 2005523823 A JP2005523823 A JP 2005523823A JP 2004500321 A JP2004500321 A JP 2004500321A JP 2004500321 A JP2004500321 A JP 2004500321A JP 2005523823 A JP2005523823 A JP 2005523823A
Authority
JP
Japan
Prior art keywords
conductive
printed wiring
wiring board
trace
disposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004500321A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005523823A5 (enExample
Inventor
エリアシン、メインズ
リアン、ケリン
リュウ、チュンフア
ビー． レンプコウスキー、ロバート
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of JP2005523823A publication Critical patent/JP2005523823A/ja
Publication of JP2005523823A5 publication Critical patent/JP2005523823A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0073—Solutions for avoiding the use of expensive silicon technologies in micromechanical switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0054—Rocking contacts or actuating members

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
JP2004500321A 2002-04-26 2003-03-17 微小電気機械システムの製造方法 Pending JP2005523823A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/133,913 US6714105B2 (en) 2002-04-26 2002-04-26 Micro electro-mechanical system method
PCT/US2003/008255 WO2003092048A2 (en) 2002-04-26 2003-03-17 Micro electro-mechanical system method

Publications (2)

Publication Number Publication Date
JP2005523823A true JP2005523823A (ja) 2005-08-11
JP2005523823A5 JP2005523823A5 (enExample) 2008-05-15

Family

ID=29249098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004500321A Pending JP2005523823A (ja) 2002-04-26 2003-03-17 微小電気機械システムの製造方法

Country Status (7)

Country Link
US (1) US6714105B2 (enExample)
EP (1) EP1502282A4 (enExample)
JP (1) JP2005523823A (enExample)
CN (1) CN1326200C (enExample)
AU (1) AU2003224701A1 (enExample)
TW (1) TW586339B (enExample)
WO (1) WO2003092048A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009154288A (ja) * 2007-12-27 2009-07-16 Honeywell Internatl Inc Ｍｅｍｓ装置のための機械的分離

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6972882B2 (en) * 2002-04-30 2005-12-06 Hewlett-Packard Development Company, L.P. Micro-mirror device with light angle amplification
US20030202264A1 (en) * 2002-04-30 2003-10-30 Weber Timothy L. Micro-mirror device
EP1394555B1 (en) * 2002-08-30 2012-04-25 STMicroelectronics S.r.l. Threshold acceleration sensor
ATE434839T1 (de) * 2002-12-13 2009-07-15 Wispry Inc Varactorvorrichtungen und verfahren
KR100513696B1 (ko) * 2003-06-10 2005-09-09 삼성전자주식회사 시이소오형 ｒｆ용 ｍｅｍｓ 스위치 및 그 제조방법
JP2005099678A (ja) * 2003-08-20 2005-04-14 Olympus Corp 光遮断装置および光スイッチ装置
JP4109182B2 (ja) * 2003-11-10 2008-07-02 株式会社日立メディアエレクトロニクス 高周波ｍｅｍｓスイッチ
US20050134141A1 (en) 2003-12-23 2005-06-23 Jovica Savic Meso-microelectromechanical system having a glass beam and method for its fabrication
EP1585219A1 (en) * 2004-04-06 2005-10-12 Seiko Epson Corporation A micro-flap type nano/micro mechanical device and fabrication method thereof
US7602261B2 (en) * 2005-12-22 2009-10-13 Intel Corporation Micro-electromechanical system (MEMS) switch
WO2007072407A2 (en) * 2005-12-22 2007-06-28 Nxp B.V. Arrangement of mems devices having series coupled capacitors
US7463113B2 (en) * 2006-02-28 2008-12-09 Motorla, Inc. Apparatus and methods relating to electrically conductive path interfaces disposed within capacitor plate openings
US7554421B2 (en) * 2006-05-16 2009-06-30 Intel Corporation Micro-electromechanical system (MEMS) trampoline switch/varactor
US7605675B2 (en) * 2006-06-20 2009-10-20 Intel Corporation Electromechanical switch with partially rigidified electrode
US20080029372A1 (en) * 2006-08-01 2008-02-07 Timothy Beerling Microfluidic switching devices having reduced control inputs
JP4247254B2 (ja) * 2006-08-08 2009-04-02 マイクロプレシジョン株式会社 電磁駆動型光偏向素子
US7782594B2 (en) * 2006-08-18 2010-08-24 Imec MEMS variable capacitor and method for producing the same
US7583169B1 (en) 2007-03-22 2009-09-01 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration MEMS switches having non-metallic crossbeams
US7499257B2 (en) * 2007-06-22 2009-03-03 Motorola, Inc. Micro-electro-mechanical system varactor
EP2345052A2 (en) * 2008-10-01 2011-07-20 Joseph F. Pinkerton Nanoelectromechanical tunneling current switch
JP4816762B2 (ja) * 2009-05-20 2011-11-16 オムロン株式会社 バネの構造および当該バネを用いたアクチュエータ
TWI444323B (zh) 2010-02-03 2014-07-11 Prime View Int Co Ltd 驅動元件及驅動元件陣列排列
US8581679B2 (en) * 2010-02-26 2013-11-12 Stmicroelectronics Asia Pacific Pte. Ltd. Switch with increased magnetic sensitivity
CN102211752A (zh) * 2010-04-08 2011-10-12 元太科技工业股份有限公司 驱动元件、驱动元件阵列模组及其结构
US8635765B2 (en) 2011-06-15 2014-01-28 International Business Machines Corporation Method of forming micro-electrical-mechanical structure (MEMS)
CN102486972B (zh) * 2011-09-01 2014-10-22 中国科学院上海微系统与信息技术研究所 双通道射频mems开关及其制造方法
CN106904565B (zh) * 2015-12-22 2019-06-28 中芯国际集成电路制造(上海)有限公司 一种mems器件及其制备方法、电子装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11260233A (ja) * 1998-01-12 1999-09-24 Tdk Corp 静電リレ―
JP2000188049A (ja) * 1998-12-22 2000-07-04 Nec Corp マイクロマシンスイッチおよびその製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5619061A (en) * 1993-07-27 1997-04-08 Texas Instruments Incorporated Micromechanical microwave switching
US5638946A (en) * 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
US6188301B1 (en) * 1998-11-13 2001-02-13 General Electric Company Switching structure and method of fabrication
US6410360B1 (en) * 1999-01-26 2002-06-25 Teledyne Industries, Inc. Laminate-based apparatus and method of fabrication
US6307452B1 (en) * 1999-09-16 2001-10-23 Motorola, Inc. Folded spring based micro electromechanical (MEM) RF switch

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11260233A (ja) * 1998-01-12 1999-09-24 Tdk Corp 静電リレ―
JP2000188049A (ja) * 1998-12-22 2000-07-04 Nec Corp マイクロマシンスイッチおよびその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009154288A (ja) * 2007-12-27 2009-07-16 Honeywell Internatl Inc Ｍｅｍｓ装置のための機械的分離

Also Published As

Publication number Publication date
CN1656643A (zh) 2005-08-17
EP1502282A2 (en) 2005-02-02
WO2003092048A3 (en) 2004-01-22
WO2003092048B1 (en) 2004-10-07
EP1502282A4 (en) 2007-06-13
TW200308190A (en) 2003-12-16
WO2003092048A2 (en) 2003-11-06
AU2003224701A1 (en) 2003-11-10
TW586339B (en) 2004-05-01
AU2003224701A8 (en) 2003-11-10
US20030201852A1 (en) 2003-10-30
CN1326200C (zh) 2007-07-11
US6714105B2 (en) 2004-03-30

Similar Documents

Publication Publication Date Title
JP2005523823A (ja) 微小電気機械システムの製造方法
JP2005523823A5 (enExample)
US6649852B2 (en) Micro-electro mechanical system
US6777629B2 (en) Micro electro-mechanical system with one or more moving parts method and apparatus
KR950009641B1 (ko) 압전 스위치
KR100485787B1 (ko) 마이크로 스위치
JP4879760B2 (ja) マイクロスイッチング素子およびマイクロスイッチング素子製造方法
KR100659298B1 (ko) Ｍｅｍｓ 스위치 및 그 제조 방법
US20100015744A1 (en) Micro-Electromechanical Device and Method of Making the Same
US9767966B2 (en) Electric equipment having movable portion, and its manufacture
KR100619110B1 (ko) 미세전자기계적 스위치 및 그 제조 방법
JP4386767B2 (ja) 高分子アクチュエータを用いた電気素子
WO2003015128A2 (en) An electromechanical switch and method of fabrication
US20060131147A1 (en) MEMS switch and method of fabricating the same
US7102480B2 (en) Printed circuit board integrated switch
CN100521030C (zh) 微机电装置和模块及其驱动方法
WO2006033271A1 (ja) 高周波回路装置
KR20070078996A (ko) 마이크로 스위칭 소자 및 마이크로 스위칭 소자 제조 방법
KR20050065885A (ko) 자기유지 중앙지지대를 갖는 미세 전자기계적 스위치 및그의 제조방법
CN116034517B (zh) 射频微电子机械开关、射频装置
JP2006252956A (ja) マイクロマシンスイッチ及び電子機器
RU2541439C1 (ru) Электростатический мэмс ключ
JP2007026726A (ja) Ｍｅｍｓスイッチ
JP2010042500A (ja) マイクロ電子機械的部品の製造方法
KR20140003228A (ko) 커패시터 및 이의 제조방법

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20071002

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20071226

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20080108

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20080201

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20080208

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20080303

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20080310

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20080319

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080402

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090630

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090916

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20100330