JP2005523169A5 - - Google Patents
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- Publication number
- JP2005523169A5 JP2005523169A5 JP2003585934A JP2003585934A JP2005523169A5 JP 2005523169 A5 JP2005523169 A5 JP 2005523169A5 JP 2003585934 A JP2003585934 A JP 2003585934A JP 2003585934 A JP2003585934 A JP 2003585934A JP 2005523169 A5 JP2005523169 A5 JP 2005523169A5
- Authority
- JP
- Japan
- Prior art keywords
- formula
- reaction product
- major surface
- binder precursor
- backing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011230 binding agent Substances 0.000 claims 10
- 239000002243 precursor Substances 0.000 claims 7
- 150000001450 anions Chemical class 0.000 claims 6
- 239000007795 chemical reaction product Substances 0.000 claims 6
- 230000002452 interceptive effect Effects 0.000 claims 6
- 239000002245 particle Substances 0.000 claims 4
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims 3
- 125000003118 aryl group Chemical group 0.000 claims 3
- 125000004432 carbon atom Chemical group C* 0.000 claims 3
- 239000003795 chemical substances by application Substances 0.000 claims 3
- 238000012682 free radical photopolymerization Methods 0.000 claims 3
- 239000003999 initiator Substances 0.000 claims 3
- 239000000463 material Substances 0.000 claims 3
- 125000005409 triarylsulfonium group Chemical group 0.000 claims 3
- 238000000034 method Methods 0.000 claims 2
- 238000005498 polishing Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 claims 1
- 239000002002 slurry Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/125,938 US6773474B2 (en) | 2002-04-19 | 2002-04-19 | Coated abrasive article |
| PCT/US2003/007395 WO2003089194A1 (en) | 2002-04-19 | 2003-03-07 | Coated abrasive article |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005523169A JP2005523169A (ja) | 2005-08-04 |
| JP2005523169A5 true JP2005523169A5 (https=) | 2006-04-27 |
| JP4328629B2 JP4328629B2 (ja) | 2009-09-09 |
Family
ID=29248404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003585934A Expired - Fee Related JP4328629B2 (ja) | 2002-04-19 | 2003-03-07 | 被覆研磨物品 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6773474B2 (https=) |
| EP (1) | EP1497079B1 (https=) |
| JP (1) | JP4328629B2 (https=) |
| AT (1) | ATE396011T1 (https=) |
| AU (1) | AU2003220160A1 (https=) |
| BR (1) | BR0309072B1 (https=) |
| DE (1) | DE60321154D1 (https=) |
| WO (1) | WO2003089194A1 (https=) |
Families Citing this family (45)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5131888B2 (ja) * | 2002-09-25 | 2013-01-30 | 株式会社Ａｄｅｋａ | 新規な芳香族スルホニウム塩化合物、これからなる光酸発生剤およびこれを含む光重合性組成物、光学的立体造形用樹脂組成物並びに光学的立体造形法 |
| US6979713B2 (en) * | 2002-11-25 | 2005-12-27 | 3M Innovative Properties Company | Curable compositions and abrasive articles therefrom |
| US7169199B2 (en) * | 2002-11-25 | 2007-01-30 | 3M Innovative Properties Company | Curable emulsions and abrasive articles therefrom |
| US20060110600A1 (en) * | 2004-11-19 | 2006-05-25 | 3M Innovative Properties Company | Anisotropic conductive adhesive composition |
| US7591865B2 (en) * | 2005-01-28 | 2009-09-22 | Saint-Gobain Abrasives, Inc. | Method of forming structured abrasive article |
| US8287611B2 (en) * | 2005-01-28 | 2012-10-16 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods for making same |
| DE102005040126A1 (de) * | 2005-08-25 | 2007-03-01 | Altana Electrical Insulation Gmbh | Überzugsmasse |
| US7399330B2 (en) * | 2005-10-18 | 2008-07-15 | 3M Innovative Properties Company | Agglomerate abrasive grains and methods of making the same |
| US20070116961A1 (en) * | 2005-11-23 | 2007-05-24 | 3M Innovative Properties Company | Anisotropic conductive adhesive compositions |
| US8435098B2 (en) * | 2006-01-27 | 2013-05-07 | Saint-Gobain Abrasives, Inc. | Abrasive article with cured backsize layer |
| CN101541479B (zh) * | 2006-07-14 | 2012-11-28 | 圣戈本磨料股份有限公司 | 无背衬研磨制品 |
| EP2044163B1 (en) * | 2006-07-24 | 2012-04-25 | 3M Innovative Properties Company | Electrically conductive pressure sensitive adhesives |
| US20080102720A1 (en) * | 2006-10-30 | 2008-05-01 | 3M Innovative Properties Company | Abrasive article and method of making and using the same |
| EP2111326A4 (en) * | 2006-12-20 | 2013-01-16 | 3M Innovative Properties Co | COATED GRINDING WHEEL AND METHOD FOR THE PRODUCTION THEREOF |
| CA2672243C (en) * | 2006-12-21 | 2012-04-03 | Saint-Gobain Abrasives, Inc. | Low corrosion abrasive articles and methods for forming same |
| BRPI0814774A2 (pt) * | 2007-08-03 | 2015-03-03 | Saint Gobain Abrasives Inc | Artigo abrasivo com camada promotora de aderência |
| MX2012007288A (es) * | 2009-12-29 | 2012-07-30 | Saint Gobain Abrasifs Sa | Metodo para limpiar una superficie domestica. |
| JP5767325B2 (ja) | 2010-07-02 | 2015-08-19 | スリーエム イノベイティブ プロパティズ カンパニー | 被覆研磨材物品 |
| BR112014016237A8 (pt) | 2011-12-29 | 2017-07-04 | 3M Innovative Properties Co | artigo abrasivo revestido e método para fabricação do mesmo |
| RU2620846C2 (ru) | 2012-07-06 | 2017-05-30 | 3М Инновейтив Пропертиз Компани | Абразивное изделие с покрытием |
| US9873180B2 (en) | 2014-10-17 | 2018-01-23 | Applied Materials, Inc. | CMP pad construction with composite material properties using additive manufacturing processes |
| US10875153B2 (en) | 2014-10-17 | 2020-12-29 | Applied Materials, Inc. | Advanced polishing pad materials and formulations |
| KR20240015167A (ko) | 2014-10-17 | 2024-02-02 | 어플라이드 머티어리얼스, 인코포레이티드 | 애디티브 제조 프로세스들을 이용한 복합 재료 특성들을 갖는 ｃｍｐ 패드 구성 |
| US11745302B2 (en) | 2014-10-17 | 2023-09-05 | Applied Materials, Inc. | Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process |
| US9776361B2 (en) | 2014-10-17 | 2017-10-03 | Applied Materials, Inc. | Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles |
| US10086498B2 (en) | 2014-12-31 | 2018-10-02 | Saint-Gobain Abrasives, Inc. | Coated abrasives having a supersize layer including an active filler |
| JP6940495B2 (ja) | 2015-10-30 | 2021-09-29 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 所望のゼータ電位を有する研磨用物品を形成するための装置及び方法 |
| US10593574B2 (en) | 2015-11-06 | 2020-03-17 | Applied Materials, Inc. | Techniques for combining CMP process tracking data with 3D printed CMP consumables |
| JP6157578B2 (ja) * | 2015-12-24 | 2017-07-05 | スリーエム イノベイティブ プロパティズ カンパニー | 研磨用構造体及びその製造方法 |
| CN108472786B (zh) | 2015-12-30 | 2021-07-27 | 3M创新有限公司 | 磨料制品 |
| EP3397426B1 (en) | 2015-12-30 | 2021-06-23 | 3M Innovative Properties Company | Abrasive articles and related methods |
| EP3397711B1 (en) | 2015-12-30 | 2023-02-15 | 3M Innovative Properties Company | Dual stage structural bonding adhesive |
| US10391605B2 (en) | 2016-01-19 | 2019-08-27 | Applied Materials, Inc. | Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process |
| WO2017180468A1 (en) | 2016-04-13 | 2017-10-19 | 3M Innovative Properties Company | Abrasive article |
| US20200331118A1 (en) | 2016-04-13 | 2020-10-22 | 3M Innovative Properties Company | Supersize composition, abrasive article and method of making an abrasive article |
| EP3442748A1 (en) | 2016-04-13 | 2019-02-20 | 3M Innovative Properties Company | Abrasive article |
| CN110023419A (zh) * | 2016-10-05 | 2019-07-16 | Afi特许有限责任公司 | 包括金刚石和阳离子固化树脂系统或硫醇-烯固化系统的涂料组合物 |
| CN110869166B (zh) * | 2017-07-11 | 2023-01-20 | 3M创新有限公司 | 包括适形涂层的磨料制品和由其形成的抛光系统 |
| US11471999B2 (en) | 2017-07-26 | 2022-10-18 | Applied Materials, Inc. | Integrated abrasive polishing pads and manufacturing methods |
| WO2019032286A1 (en) | 2017-08-07 | 2019-02-14 | Applied Materials, Inc. | ABRASIVE DISTRIBUTION POLISHING PADS AND METHODS OF MAKING SAME |
| WO2020050932A1 (en) | 2018-09-04 | 2020-03-12 | Applied Materials, Inc. | Formulations for advanced polishing pads |
| CN112126883B (zh) * | 2020-08-20 | 2021-11-19 | 西安交通大学 | 一种尖角朝外的超平整叶尖切削涂层及其制备方法 |
| US11878389B2 (en) | 2021-02-10 | 2024-01-23 | Applied Materials, Inc. | Structures formed using an additive manufacturing process for regenerating surface texture in situ |
| EP4141036A1 (en) * | 2021-08-27 | 2023-03-01 | General Electric Company | Binders comprising a monomer and an initiator for use in additive manufacturing |
| EP4594050A1 (en) | 2022-09-29 | 2025-08-06 | 3M Innovative Properties Company | Supersize coating composition, abrasive article, and method of making abrasive article |
Family Cites Families (70)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4047903A (en) | 1972-09-26 | 1977-09-13 | Hoechst Aktiengesellschaft | Process for the production of abrasives |
| NL7300007A (https=) | 1973-01-02 | 1974-07-04 | ||
| US4256828A (en) | 1975-09-02 | 1981-03-17 | Minnesota Mining And Manufacturing Company | Photocopolymerizable compositions based on epoxy and hydroxyl-containing organic materials |
| US4250053A (en) | 1979-05-21 | 1981-02-10 | Minnesota Mining And Manufacturing Company | Sensitized aromatic iodonium or aromatic sulfonium salt photoinitiator systems |
| US4518397A (en) | 1979-06-29 | 1985-05-21 | Minnesota Mining And Manufacturing Company | Articles containing non-fused aluminum oxide-based abrasive mineral |
| US4314827A (en) | 1979-06-29 | 1982-02-09 | Minnesota Mining And Manufacturing Company | Non-fused aluminum oxide-based abrasive mineral |
| US5191101A (en) | 1982-11-22 | 1993-03-02 | Minnesota Mining And Manufacturing Company | Energy polymerizable compositions containing organometallic initiators |
| US4623364A (en) | 1984-03-23 | 1986-11-18 | Norton Company | Abrasive material and method for preparing the same |
| US5227104A (en) | 1984-06-14 | 1993-07-13 | Norton Company | High solids content gels and a process for producing them |
| US4642126A (en) | 1985-02-11 | 1987-02-10 | Norton Company | Coated abrasives with rapidly curable adhesives and controllable curvature |
| CA1254238A (en) | 1985-04-30 | 1989-05-16 | Alvin P. Gerk | Process for durable sol-gel produced alumina-based ceramics, abrasive grain and abrasive products |
| US4652275A (en) | 1985-08-07 | 1987-03-24 | Minnesota Mining And Manufacturing Company | Erodable agglomerates and abrasive products containing the same |
| US4652274A (en) | 1985-08-07 | 1987-03-24 | Minnesota Mining And Manufacturing Company | Coated abrasive product having radiation curable binder |
| US4770671A (en) | 1985-12-30 | 1988-09-13 | Minnesota Mining And Manufacturing Company | Abrasive grits formed of ceramic containing oxides of aluminum and yttrium, method of making and using the same and products made therewith |
| US4836832A (en) | 1986-08-11 | 1989-06-06 | Minnesota Mining And Manufacturing Company | Method of preparing coated abrasive having radiation curable binder |
| US4751138A (en) | 1986-08-11 | 1988-06-14 | Minnesota Mining And Manufacturing Company | Coated abrasive having radiation curable binder |
| EP0278914B1 (de) | 1987-02-13 | 1993-09-22 | Ciba-Geigy Ag | Verfahren zur Herstellung von tert.-Alkylestern der Bernsteinsäure |
| US4799939A (en) | 1987-02-26 | 1989-01-24 | Minnesota Mining And Manufacturing Company | Erodable agglomerates and abrasive products containing the same |
| CA1339978C (en) | 1987-03-24 | 1998-08-04 | Sumitomo Electric Industries, Ltd. | Ceramic oxide superconductive composite material |
| US4997717A (en) | 1987-03-27 | 1991-03-05 | Ciba-Geigy Corporation | Photocurable abrasives |
| US4828583A (en) | 1987-04-02 | 1989-05-09 | Minnesota Mining And Manufacturing Company | Coated abrasive binder containing ternary photoinitiator system |
| US4881951A (en) | 1987-05-27 | 1989-11-21 | Minnesota Mining And Manufacturing Co. | Abrasive grits formed of ceramic containing oxides of aluminum and rare earth metal, method of making and products made therewith |
| US4980492A (en) | 1988-02-05 | 1990-12-25 | International Business Machines Corporation | Synthesis of triarylsulfonium salts |
| US5070161A (en) | 1988-05-27 | 1991-12-03 | Nippon Paint Co., Ltd. | Heat-latent, cationic polymerization initiator and resin compositions containing same |
| US5011508A (en) | 1988-10-14 | 1991-04-30 | Minnesota Mining And Manufacturing Company | Shelling-resistant abrasive grain, a method of making the same, and abrasive products |
| US5134191A (en) | 1989-02-17 | 1992-07-28 | Shin-Etsu Chemical Co., Ltd. | Hard coating compositions and plastic optical articles |
| US5132377A (en) | 1989-06-05 | 1992-07-21 | Nippon Paint Company, Limited | Heat-latent, cationic polymerization initiator and resin compositions containing the same |
| US5108463B1 (en) | 1989-08-21 | 1996-08-13 | Minnesota Mining & Mfg | Conductive coated abrasives |
| US5124417A (en) | 1990-02-12 | 1992-06-23 | Minnesota Mining And Manufacturing Company | Initiators for cationic polymerization |
| US5139978A (en) | 1990-07-16 | 1992-08-18 | Minnesota Mining And Manufacturing Company | Impregnation method for transformation of transition alumina to a alpha alumina |
| US5137542A (en) | 1990-08-08 | 1992-08-11 | Minnesota Mining And Manufacturing Company | Abrasive printed with an electrically conductive ink |
| US5059701A (en) | 1990-09-20 | 1991-10-22 | Minnesota Mining And Manufacturing Company | Methods for preparation of cyclopentadienyliron (II) arenes |
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| CA2054554A1 (en) | 1990-11-14 | 1992-05-15 | Chong Soo Lee | Coated abrasive having an overcoating of an epoxy resin coatable from water and a grinding aid |
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| US5378251A (en) | 1991-02-06 | 1995-01-03 | Minnesota Mining And Manufacturing Company | Abrasive articles and methods of making and using same |
| JP3197907B2 (ja) | 1991-02-15 | 2001-08-13 | 旭電化工業株式会社 | エネルギー線を用いた注型成型方法 |
| US5316812A (en) | 1991-12-20 | 1994-05-31 | Minnesota Mining And Manufacturing Company | Coated abrasive backing |
| CA2116686A1 (en) | 1991-12-20 | 1993-07-08 | Harold Wayne Benedict | A coated abrasive belt with an endless, seamless backing and method of preparation |
| US5252694A (en) | 1992-01-22 | 1993-10-12 | Minnesota Mining And Manufacturing Company | Energy-polymerization adhesive, coating, film and process for making the same |
| EP0630310A1 (en) | 1992-02-12 | 1994-12-28 | Minnesota Mining And Manufacturing Company | A coated abrasive article containing an electrically conductive backing |
| US5203884A (en) | 1992-06-04 | 1993-04-20 | Minnesota Mining And Manufacturing Company | Abrasive article having vanadium oxide incorporated therein |
| US5366523A (en) | 1992-07-23 | 1994-11-22 | Minnesota Mining And Manufacturing Company | Abrasive article containing shaped abrasive particles |
| US5201916A (en) | 1992-07-23 | 1993-04-13 | Minnesota Mining And Manufacturing Company | Shaped abrasive particles and method of making same |
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| CA2142466A1 (en) | 1992-09-25 | 1994-04-14 | Henry A. Larmie | Abrasive grain including rare earth oxide therin |
| CA2142465A1 (en) | 1992-09-25 | 1994-04-14 | Henry A. Larmie | Method for making abrasive grain containing alumina and ceria |
| KR960702420A (ko) | 1992-09-25 | 1996-04-27 | 워렌 리처드 보비 | 알루미나 및 지르코니아를 함유하는 연마 입자(abrasive grain containing alumina and zirconia) |
| US5436063A (en) | 1993-04-15 | 1995-07-25 | Minnesota Mining And Manufacturing Company | Coated abrasive article incorporating an energy cured hot melt make coat |
| US5362421A (en) | 1993-06-16 | 1994-11-08 | Minnesota Mining And Manufacturing Company | Electrically conductive adhesive compositions |
| US5453450A (en) | 1993-06-16 | 1995-09-26 | Minnesota Mining And Manufacturing Company | Stabilized curable adhesives |
| US5494943A (en) | 1993-06-16 | 1996-02-27 | Minnesota Mining And Manufacturing Company | Stabilized cationically-curable compositions |
| US5549962A (en) | 1993-06-30 | 1996-08-27 | Minnesota Mining And Manufacturing Company | Precisely shaped particles and method of making the same |
| EP0724502B1 (en) | 1993-10-19 | 2001-04-11 | Minnesota Mining And Manufacturing Company | Abrasive articles comprising a make coat transferred by lamination |
| US5505747A (en) | 1994-01-13 | 1996-04-09 | Minnesota Mining And Manufacturing Company | Method of making an abrasive article |
| WO1995024992A1 (en) | 1994-03-16 | 1995-09-21 | Minnesota Mining And Manufacturing Company | Abrasive articles and method of making abrasive articles |
| JP2875479B2 (ja) | 1994-09-08 | 1999-03-31 | 日本ペルノックス株式会社 | 半導体の封止方法 |
| US5582625A (en) | 1995-06-01 | 1996-12-10 | Norton Company | Curl-resistant coated abrasives |
| US5709948A (en) | 1995-09-20 | 1998-01-20 | Minnesota Mining And Manufacturing Company | Semi-interpenetrating polymer networks of epoxy and polyolefin resins, methods therefor, and uses thereof |
| DE69735937T2 (de) | 1996-02-26 | 2006-11-23 | Norton Co., Worcester | Strahlenhärtbare überschicht |
| US5700302A (en) | 1996-03-15 | 1997-12-23 | Minnesota Mining And Manufacturing Company | Radiation curable abrasive article with tie coat and method |
| WO1998010896A1 (en) | 1996-09-11 | 1998-03-19 | Minnesota Mining And Manufacturing Company | Abrasive article and method of making |
| US5766277A (en) | 1996-09-20 | 1998-06-16 | Minnesota Mining And Manufacturing Company | Coated abrasive article and method of making same |
| US5730764A (en) | 1997-01-24 | 1998-03-24 | Williamson; Sue Ellen | Coated abrasive systems employing ionizing irradiation cured epoxy resins as binder |
| US5942015A (en) | 1997-09-16 | 1999-08-24 | 3M Innovative Properties Company | Abrasive slurries and abrasive articles comprising multiple abrasive particle grades |
| US6077601A (en) | 1998-05-01 | 2000-06-20 | 3M Innovative Properties Company | Coated abrasive article |
| US6672952B1 (en) | 1998-12-23 | 2004-01-06 | 3M Innovative Properties Company | Tearable abrasive article |
| US6133335A (en) | 1998-12-31 | 2000-10-17 | 3M Innovative Properties Company | Photo-polymerizable compositions and articles made therefrom |
| JP3982958B2 (ja) | 1999-08-30 | 2007-09-26 | 富士フイルム株式会社 | ポジ型感光性組成物 |
| JP2001089639A (ja) | 1999-09-24 | 2001-04-03 | Mitsubishi Heavy Ind Ltd | エネルギー線硬化樹脂組成物 |
-
2002
- 2002-04-19 US US10/125,938 patent/US6773474B2/en not_active Expired - Lifetime
-
2003
- 2003-03-07 JP JP2003585934A patent/JP4328629B2/ja not_active Expired - Fee Related
- 2003-03-07 AT AT03716455T patent/ATE396011T1/de not_active IP Right Cessation
- 2003-03-07 WO PCT/US2003/007395 patent/WO2003089194A1/en not_active Ceased
- 2003-03-07 EP EP03716455A patent/EP1497079B1/en not_active Expired - Lifetime
- 2003-03-07 AU AU2003220160A patent/AU2003220160A1/en not_active Abandoned
- 2003-03-07 DE DE60321154T patent/DE60321154D1/de not_active Expired - Lifetime
- 2003-03-07 BR BRPI0309072-8A patent/BR0309072B1/pt not_active IP Right Cessation
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