JP2005512151A5 - - Google Patents

Download PDF

Info

Publication number
JP2005512151A5
JP2005512151A5 JP2003551585A JP2003551585A JP2005512151A5 JP 2005512151 A5 JP2005512151 A5 JP 2005512151A5 JP 2003551585 A JP2003551585 A JP 2003551585A JP 2003551585 A JP2003551585 A JP 2003551585A JP 2005512151 A5 JP2005512151 A5 JP 2005512151A5
Authority
JP
Japan
Prior art keywords
lens
region
aspherical shape
shape
projection objective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003551585A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005512151A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/EP2002/008037 external-priority patent/WO2003050587A2/de
Publication of JP2005512151A publication Critical patent/JP2005512151A/ja
Publication of JP2005512151A5 publication Critical patent/JP2005512151A5/ja
Pending legal-status Critical Current

Links

JP2003551585A 2001-12-10 2002-07-19 カタジオプトリック縮小対物レンズ Pending JP2005512151A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US33927501P 2001-12-10 2001-12-10
PCT/EP2002/008037 WO2003050587A2 (de) 2001-12-10 2002-07-19 Katadioptrisches reduktionsobjektiv

Publications (2)

Publication Number Publication Date
JP2005512151A JP2005512151A (ja) 2005-04-28
JP2005512151A5 true JP2005512151A5 (de) 2006-01-05

Family

ID=23328263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003551585A Pending JP2005512151A (ja) 2001-12-10 2002-07-19 カタジオプトリック縮小対物レンズ

Country Status (4)

Country Link
EP (1) EP1456705A2 (de)
JP (1) JP2005512151A (de)
AU (1) AU2002317875A1 (de)
WO (1) WO2003050587A2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6995930B2 (en) 1999-12-29 2006-02-07 Carl Zeiss Smt Ag Catadioptric projection objective with geometric beam splitting
DE602004019142D1 (de) 2003-12-02 2009-03-05 Zeiss Carl Smt Ag Optisches projektionssystem
DE602005003665T2 (de) * 2004-05-17 2008-11-20 Carl Zeiss Smt Ag Katadioptrisches projektionsobjektiv mit zwischenbildern
US7218453B2 (en) 2005-02-04 2007-05-15 Carl Zeiss Smt Ag Projection system, in particular for a microlithographic projection exposure apparatus
EP1746463A2 (de) * 2005-07-01 2007-01-24 Carl Zeiss SMT AG Verfahren zum Korrigieren eines lithographischen Projektionsobjektivs und derartiges Projektionsobjektiv
DE102005030839A1 (de) * 2005-07-01 2007-01-11 Carl Zeiss Smt Ag Projektionsbelichtungsanlage mit einer Mehrzahl von Projektionsobjektiven
DE102009037077B3 (de) 2009-08-13 2011-02-17 Carl Zeiss Smt Ag Katadioptrisches Projektionsobjektiv

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5581379A (en) * 1993-02-15 1996-12-03 Omron Corporation Rectangular based convex microlenses surrounded within a frame and method of making
JP3747951B2 (ja) * 1994-11-07 2006-02-22 株式会社ニコン 反射屈折光学系
KR0179138B1 (ko) * 1995-12-01 1999-04-15 구자홍 대물렌즈
US6061324A (en) * 1996-10-23 2000-05-09 Konica Corporation Method for recording/reproducing optical information recording medium, optical pickup apparatus, objective lens and design method of objective lens
DE69933973T2 (de) * 1998-07-29 2007-06-28 Carl Zeiss Smt Ag Katadioptrisches optisches system und damit ausgestattete belichtungsvorrichtung
JP3967851B2 (ja) * 1999-08-11 2007-08-29 フジノン株式会社 フライアイレンズの位置決め構造
US7301605B2 (en) * 2000-03-03 2007-11-27 Nikon Corporation Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices
JP4116224B2 (ja) * 2000-03-23 2008-07-09 ローム株式会社 レンズアレイの製造方法

Similar Documents

Publication Publication Date Title
ATE428127T1 (de) Festkatadioptriklinse mit einem einzigen sichtpunkt
CN106556914B (zh) 光学成像系统
CN106483631A (zh) 光学成像系统
CN108427172A (zh) 光学成像系统
CN108279472A (zh) 光学成像系统
CN107085281A (zh) 光学成像系统
JP2007264636A5 (de)
TWI537630B (zh) 可攜式電子裝置及其光學成像鏡頭
JP2005326682A5 (de)
WO2006124198A8 (en) Aspherical diffractive ophthalmic lens
JP2005519332A5 (de)
CN107045178A (zh) 光学成像系统
CN107045181A (zh) 光学成像系统
CN106483630A (zh) 光学成像系统
CN106468820A (zh) 光学成像系统
CN107203028A (zh) 光学成像系统
ATE496574T1 (de) Ophthalmische einweglinse
CN107085277A (zh) 光学成像系统
CN107203029A (zh) 光学成像系统
JP2005512151A5 (de)
JP2004252312A5 (de)
JP2002006210A5 (de)
CN206863320U (zh) 光学成像系统
TWI773677B (zh) 廣角投影鏡頭
TWI418873B (zh) 廣角鏡頭