JP2005512151A5 - - Google Patents
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- Publication number
- JP2005512151A5 JP2005512151A5 JP2003551585A JP2003551585A JP2005512151A5 JP 2005512151 A5 JP2005512151 A5 JP 2005512151A5 JP 2003551585 A JP2003551585 A JP 2003551585A JP 2003551585 A JP2003551585 A JP 2003551585A JP 2005512151 A5 JP2005512151 A5 JP 2005512151A5
- Authority
- JP
- Japan
- Prior art keywords
- lens
- region
- aspherical shape
- shape
- projection objective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003384 imaging method Methods 0.000 claims 1
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US33927501P | 2001-12-10 | 2001-12-10 | |
PCT/EP2002/008037 WO2003050587A2 (de) | 2001-12-10 | 2002-07-19 | Katadioptrisches reduktionsobjektiv |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005512151A JP2005512151A (ja) | 2005-04-28 |
JP2005512151A5 true JP2005512151A5 (de) | 2006-01-05 |
Family
ID=23328263
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003551585A Pending JP2005512151A (ja) | 2001-12-10 | 2002-07-19 | カタジオプトリック縮小対物レンズ |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1456705A2 (de) |
JP (1) | JP2005512151A (de) |
AU (1) | AU2002317875A1 (de) |
WO (1) | WO2003050587A2 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6995930B2 (en) | 1999-12-29 | 2006-02-07 | Carl Zeiss Smt Ag | Catadioptric projection objective with geometric beam splitting |
DE602004019142D1 (de) | 2003-12-02 | 2009-03-05 | Zeiss Carl Smt Ag | Optisches projektionssystem |
DE602005003665T2 (de) * | 2004-05-17 | 2008-11-20 | Carl Zeiss Smt Ag | Katadioptrisches projektionsobjektiv mit zwischenbildern |
US7218453B2 (en) | 2005-02-04 | 2007-05-15 | Carl Zeiss Smt Ag | Projection system, in particular for a microlithographic projection exposure apparatus |
EP1746463A2 (de) * | 2005-07-01 | 2007-01-24 | Carl Zeiss SMT AG | Verfahren zum Korrigieren eines lithographischen Projektionsobjektivs und derartiges Projektionsobjektiv |
DE102005030839A1 (de) * | 2005-07-01 | 2007-01-11 | Carl Zeiss Smt Ag | Projektionsbelichtungsanlage mit einer Mehrzahl von Projektionsobjektiven |
DE102009037077B3 (de) | 2009-08-13 | 2011-02-17 | Carl Zeiss Smt Ag | Katadioptrisches Projektionsobjektiv |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5581379A (en) * | 1993-02-15 | 1996-12-03 | Omron Corporation | Rectangular based convex microlenses surrounded within a frame and method of making |
JP3747951B2 (ja) * | 1994-11-07 | 2006-02-22 | 株式会社ニコン | 反射屈折光学系 |
KR0179138B1 (ko) * | 1995-12-01 | 1999-04-15 | 구자홍 | 대물렌즈 |
US6061324A (en) * | 1996-10-23 | 2000-05-09 | Konica Corporation | Method for recording/reproducing optical information recording medium, optical pickup apparatus, objective lens and design method of objective lens |
DE69933973T2 (de) * | 1998-07-29 | 2007-06-28 | Carl Zeiss Smt Ag | Katadioptrisches optisches system und damit ausgestattete belichtungsvorrichtung |
JP3967851B2 (ja) * | 1999-08-11 | 2007-08-29 | フジノン株式会社 | フライアイレンズの位置決め構造 |
US7301605B2 (en) * | 2000-03-03 | 2007-11-27 | Nikon Corporation | Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices |
JP4116224B2 (ja) * | 2000-03-23 | 2008-07-09 | ローム株式会社 | レンズアレイの製造方法 |
-
2002
- 2002-07-19 WO PCT/EP2002/008037 patent/WO2003050587A2/de not_active Application Discontinuation
- 2002-07-19 JP JP2003551585A patent/JP2005512151A/ja active Pending
- 2002-07-19 EP EP02747468A patent/EP1456705A2/de not_active Withdrawn
- 2002-07-19 AU AU2002317875A patent/AU2002317875A1/en not_active Abandoned
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