JP2005508569A - 薄膜赤外線透過性導体 - Google Patents
薄膜赤外線透過性導体Info
- Publication number
- JP2005508569A JP2005508569A JP2002580415A JP2002580415A JP2005508569A JP 2005508569 A JP2005508569 A JP 2005508569A JP 2002580415 A JP2002580415 A JP 2002580415A JP 2002580415 A JP2002580415 A JP 2002580415A JP 2005508569 A JP2005508569 A JP 2005508569A
- Authority
- JP
- Japan
- Prior art keywords
- film
- cdo
- doped
- films
- transmittance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010409 thin film Substances 0.000 title description 6
- 239000004020 conductor Substances 0.000 title 1
- 239000002019 doping agent Substances 0.000 claims abstract description 12
- 229910052738 indium Inorganic materials 0.000 claims abstract description 9
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 8
- 230000005855 radiation Effects 0.000 claims abstract description 8
- 229910052733 gallium Inorganic materials 0.000 claims abstract description 5
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 4
- 229910052796 boron Inorganic materials 0.000 claims abstract description 4
- 229910052716 thallium Inorganic materials 0.000 claims abstract description 4
- 238000002834 transmittance Methods 0.000 claims description 28
- 239000012528 membrane Substances 0.000 claims description 20
- 230000005540 biological transmission Effects 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 16
- 230000035699 permeability Effects 0.000 claims description 7
- 229910052731 fluorine Inorganic materials 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 239000011737 fluorine Substances 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 238000002329 infrared spectrum Methods 0.000 claims description 2
- 230000005693 optoelectronics Effects 0.000 claims 2
- CXKCTMHTOKXKQT-UHFFFAOYSA-N cadmium oxide Inorganic materials [Cd]=O CXKCTMHTOKXKQT-UHFFFAOYSA-N 0.000 abstract description 59
- CFEAAQFZALKQPA-UHFFFAOYSA-N cadmium(2+);oxygen(2-) Chemical compound [O-2].[Cd+2] CFEAAQFZALKQPA-UHFFFAOYSA-N 0.000 abstract description 59
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 abstract description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 3
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 78
- 239000000758 substrate Substances 0.000 description 19
- 239000000463 material Substances 0.000 description 12
- 239000000203 mixture Substances 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 9
- 238000004891 communication Methods 0.000 description 8
- 238000004549 pulsed laser deposition Methods 0.000 description 8
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 239000002131 composite material Substances 0.000 description 4
- 210000002858 crystal cell Anatomy 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 238000005118 spray pyrolysis Methods 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 210000004027 cell Anatomy 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000001988 toxicity Effects 0.000 description 2
- 231100000419 toxicity Toxicity 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 239000011149 active material Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000000498 ball milling Methods 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010549 co-Evaporation Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000003955 hot wall epitaxy Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000382 optic material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000000391 spectroscopic ellipsometry Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
- H10F77/244—Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/138—Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/83—Electrodes
- H10H20/832—Electrodes characterised by their material
- H10H20/833—Transparent materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Non-Insulated Conductors (AREA)
- Physical Vapour Deposition (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Semiconductor Lasers (AREA)
- Liquid Crystal (AREA)
- Conductive Materials (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US28233701P | 2001-04-06 | 2001-04-06 | |
| US10/112,465 US6761986B2 (en) | 2001-04-06 | 2002-03-29 | Thin film infrared transparent conductor |
| PCT/US2002/010651 WO2002082557A1 (en) | 2001-04-06 | 2002-04-03 | Thin film infrared transparent conductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005508569A true JP2005508569A (ja) | 2005-03-31 |
| JP2005508569A5 JP2005508569A5 (enExample) | 2005-12-22 |
Family
ID=26809973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002580415A Withdrawn JP2005508569A (ja) | 2001-04-06 | 2002-04-03 | 薄膜赤外線透過性導体 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US6761986B2 (enExample) |
| EP (1) | EP1374316A1 (enExample) |
| JP (1) | JP2005508569A (enExample) |
| WO (1) | WO2002082557A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008143232A1 (ja) * | 2007-05-22 | 2008-11-27 | Nippon Electric Glass Co., Ltd. | 透明電極 |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6761986B2 (en) * | 2001-04-06 | 2004-07-13 | Rockwell Scientific Licensing, Llc | Thin film infrared transparent conductor |
| JP2004356623A (ja) * | 2003-05-08 | 2004-12-16 | Canon Inc | 積層型光起電力素子及びその製造方法 |
| US6979582B2 (en) * | 2003-09-22 | 2005-12-27 | National Chung-Hsing University | Vertical-cavity surface emitting laser diode and method for producing the same |
| US7531239B2 (en) * | 2005-04-06 | 2009-05-12 | Eclipse Energy Systems Inc | Transparent electrode |
| US20080003422A1 (en) * | 2005-07-27 | 2008-01-03 | Sumitomo Chemical Company, Limited | Polymer Compound, Polymer Thin Film and Polymer Thin Film Device Using the Same |
| WO2007025209A2 (en) * | 2005-08-25 | 2007-03-01 | Andreas Eriksson | Systems and methods of implementing a single-number follow me service for videoconferencing |
| EP1944807A1 (en) * | 2007-01-12 | 2008-07-16 | STMicroelectronics (Research & Development) Limited | Electromagnetic interference shielding for image sensor |
| US7917255B1 (en) | 2007-09-18 | 2011-03-29 | Rockwell Colllins, Inc. | System and method for on-board adaptive characterization of aircraft turbulence susceptibility as a function of radar observables |
| EP2133921B8 (en) * | 2008-06-10 | 2011-10-05 | Institut de Ciències Fotòniques, Fundació Privada | method to prepare a stable transparent electrode |
| ATE537277T1 (de) * | 2008-08-25 | 2011-12-15 | Solmates Bv | Verfahren zur abscheidung eines materials |
| HK1197314A1 (en) * | 2011-05-13 | 2015-01-09 | The Regents Of The University Of Michigan | Focusing luminescent and thermal radiation concentrators |
| US20140053895A1 (en) * | 2012-08-24 | 2014-02-27 | Rosestreet Labs, Llc | Intentionally-doped cadmium oxide layer for solar cells |
| KR102268462B1 (ko) * | 2013-11-27 | 2021-06-22 | 매직 립, 인코포레이티드 | 가상 및 증강 현실 시스템들 및 방법들 |
| US10444409B2 (en) * | 2017-08-18 | 2019-10-15 | Goodrich Corporation | MWIR/LWIR transparent, conductive coatings |
| CN108616031A (zh) * | 2018-04-20 | 2018-10-02 | 长春理工大学 | 一种含取向膜的单偏振可调谐半导体激光器及其制备方法 |
| WO2021236198A1 (en) * | 2020-05-20 | 2021-11-25 | Hrl Laboratories, Llc | Solid state electrically variable-focal length lens |
| US11988907B1 (en) | 2020-05-20 | 2024-05-21 | Hrl Laboratories, Llc | Electric field-tunable IR devices with very large modulation of refractive index and methods to fabricate them |
| WO2021236224A1 (en) | 2020-05-20 | 2021-11-25 | Hrl Laboratories, Llc | Method of growing crystalline optical films on si substrates which may optionally have an extremely small optical loss in the infra-red spectrum with hydrogenation of the crystalline optical films |
| CN112968133A (zh) * | 2021-01-31 | 2021-06-15 | 国家电网有限公司 | 太阳电池用CdO电子传输层的制备方法和薄膜太阳电池 |
| US11422429B1 (en) * | 2021-04-21 | 2022-08-23 | Ii-Vi Delaware, Inc. | Tunable optical wedge for beam steering |
| CN113233870B (zh) * | 2021-04-25 | 2023-01-13 | 先导薄膜材料(广东)有限公司 | 一种掺杂氧化镉靶材及其制备方法与应用 |
| CN114496353B (zh) * | 2022-01-20 | 2024-03-26 | 汕头大学 | 高电导率、高透射率的透明导电薄膜及其制备方法和应用 |
| CN118522782A (zh) * | 2023-05-15 | 2024-08-20 | 隆基绿能科技股份有限公司 | 背面的透明导电薄膜及其制备方法和光伏器件 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5397920A (en) | 1994-03-24 | 1995-03-14 | Minnesota Mining And Manufacturing Company | Light transmissive, electrically-conductive, oxide film and methods of production |
| EP0793277B1 (en) * | 1996-02-27 | 2001-08-22 | Canon Kabushiki Kaisha | Photovoltaic device provided with an opaque substrate having a specific irregular surface structure |
| EP0963146B1 (en) * | 1997-12-24 | 2006-06-07 | Gunze Limited | Transparent member for shielding electromagnetic waves and method of producing the same |
| US6761986B2 (en) * | 2001-04-06 | 2004-07-13 | Rockwell Scientific Licensing, Llc | Thin film infrared transparent conductor |
-
2002
- 2002-03-29 US US10/112,465 patent/US6761986B2/en not_active Expired - Lifetime
- 2002-04-03 EP EP02728675A patent/EP1374316A1/en not_active Withdrawn
- 2002-04-03 JP JP2002580415A patent/JP2005508569A/ja not_active Withdrawn
- 2002-04-03 WO PCT/US2002/010651 patent/WO2002082557A1/en not_active Ceased
-
2004
- 2004-07-12 US US10/889,686 patent/US7314673B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008143232A1 (ja) * | 2007-05-22 | 2008-11-27 | Nippon Electric Glass Co., Ltd. | 透明電極 |
| JP2009003440A (ja) * | 2007-05-22 | 2009-01-08 | Nippon Electric Glass Co Ltd | 透明電極 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20050014033A1 (en) | 2005-01-20 |
| US7314673B2 (en) | 2008-01-01 |
| US20020146599A1 (en) | 2002-10-10 |
| US6761986B2 (en) | 2004-07-13 |
| WO2002082557A1 (en) | 2002-10-17 |
| WO2002082557B1 (en) | 2004-04-08 |
| EP1374316A1 (en) | 2004-01-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20070420 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070530 |