JP2005506543A5 - - Google Patents

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Publication number
JP2005506543A5
JP2005506543A5 JP2003538681A JP2003538681A JP2005506543A5 JP 2005506543 A5 JP2005506543 A5 JP 2005506543A5 JP 2003538681 A JP2003538681 A JP 2003538681A JP 2003538681 A JP2003538681 A JP 2003538681A JP 2005506543 A5 JP2005506543 A5 JP 2005506543A5
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JP
Japan
Prior art keywords
fulcrum
detector
light source
measuring device
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003538681A
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English (en)
Japanese (ja)
Other versions
JP4377229B2 (ja
JP2005506543A (ja
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Publication date
Priority claimed from DE10151563A external-priority patent/DE10151563A1/de
Application filed filed Critical
Publication of JP2005506543A publication Critical patent/JP2005506543A/ja
Publication of JP2005506543A5 publication Critical patent/JP2005506543A5/ja
Application granted granted Critical
Publication of JP4377229B2 publication Critical patent/JP4377229B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003538681A 2001-10-23 2002-10-16 位置測定装置 Expired - Fee Related JP4377229B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10151563A DE10151563A1 (de) 2001-10-23 2001-10-23 Positionsmessgerät
PCT/EP2002/011544 WO2003036226A1 (de) 2001-10-23 2002-10-16 Positionsmessgerät

Publications (3)

Publication Number Publication Date
JP2005506543A JP2005506543A (ja) 2005-03-03
JP2005506543A5 true JP2005506543A5 (enExample) 2008-02-21
JP4377229B2 JP4377229B2 (ja) 2009-12-02

Family

ID=7702992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003538681A Expired - Fee Related JP4377229B2 (ja) 2001-10-23 2002-10-16 位置測定装置

Country Status (5)

Country Link
US (1) US7274464B2 (enExample)
EP (1) EP1442269B1 (enExample)
JP (1) JP4377229B2 (enExample)
DE (1) DE10151563A1 (enExample)
WO (1) WO2003036226A1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004056726B4 (de) * 2004-11-19 2014-12-24 Dr. Johannes Heidenhain Gmbh Verfahren und Vorrichtung zur Bestimmung der räumlichen Lage eines ersten Objektes bezüglich eines zweiten Objektes
JP2009540317A (ja) * 2006-06-16 2009-11-19 レニショウ パブリック リミテッド カンパニー 位置測定装置用の伸長可能な脚部アセンブリ
GB0612914D0 (en) 2006-06-16 2006-08-09 Renishaw Plc Metrology apparatus
FR2911956B1 (fr) * 2007-01-29 2009-05-08 Hispano Suiza Sa Dispositif de mesure de la position d'un piston dans un cylindre, ensemble d'un cylindre, d'un piston et d'un tel dispositif et moteur d'aeronef comprenant un tel ensemble
US20090056440A1 (en) * 2007-07-10 2009-03-05 Lynn Vendl Adjustable measuring cup
DE102008005384A1 (de) * 2008-01-22 2009-07-23 Dr. Johannes Heidenhain Gmbh Längenmesseinrichtung
US9618369B2 (en) * 2008-08-26 2017-04-11 The University Court Of The University Of Glasgow Uses of electromagnetic interference patterns
DE102010019656B4 (de) * 2010-05-03 2016-09-01 Etalon Ag Messgerät
JP2015529803A (ja) * 2012-07-20 2015-10-08 アドバンスト テスト アンド オートメーション インコーポレイテッドＡｄｖａｎｃｅｄ Ｔｅｓｔ Ａｎｄ Ａｕｔｏｍａｔｉｏｎ Ｉｎｃ． トルクを測定するためのシステムおよび方法
US10105837B2 (en) * 2013-01-25 2018-10-23 The Boeing Company Tracking enabled extended reach tool system and method
JP6284771B2 (ja) * 2013-01-29 2018-02-28 株式会社ミツトヨ パラレル機構
WO2016129191A1 (ja) * 2015-02-13 2016-08-18 日本ヴィクトリック株式会社 伸縮可撓管継手の挙動探査装置及び挙動探査方法
DE102015009393B4 (de) * 2015-07-15 2019-07-04 Gerhard Pfeifer Wegaufnehmeranordnung sowie Crashtest-Dummy
TWI585363B (zh) * 2015-12-01 2017-06-01 國立清華大學 應用於量測之雙球桿系統及其誤差補償方法
KR101860927B1 (ko) * 2017-11-09 2018-05-24 주식회사 흥찬엔지니어링 교량 재하 시험 장치
KR101864849B1 (ko) * 2017-11-09 2018-06-05 주식회사 신우기술 교량 재하 시험 장치
DE102019116280B3 (de) * 2019-06-14 2020-12-17 Etalon Ag Verfahren und Vorrichtung zum Bestimmen einer Länge
CN110487158B (zh) * 2019-09-02 2021-06-29 太原科技大学 一种联轴器对中检测装置

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2240968A1 (de) * 1972-08-21 1974-03-07 Leitz Ernst Gmbh Optisches verfahren zur messung der relativen verschiebung eines beugungsgitters sowie einrichtungen zu seiner durchfuehrung
DE2549218A1 (de) * 1974-11-05 1976-05-06 Secretary Industry Brit Optisches geraet zum bestimmen von achsen
US4373804A (en) * 1979-04-30 1983-02-15 Diffracto Ltd. Method and apparatus for electro-optically determining the dimension, location and attitude of objects
DE3504464C1 (de) 1985-02-09 1986-04-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Transportables Meßgerät zur Überprüfung der Positioniergenauigkeit eines programmgesteuerten Gerätearmes
NO164946C (no) * 1988-04-12 1990-11-28 Metronor As Opto-elektronisk system for punktvis oppmaaling av en flates geometri.
JP2862417B2 (ja) * 1990-11-16 1999-03-03 キヤノン株式会社 変位測定装置及び方法
US5198663A (en) * 1991-04-03 1993-03-30 Mitutoyo Corporation Angular velocity sensor with displacement scale and sensor means
GB9315843D0 (en) * 1993-07-30 1993-09-15 Litton Uk Ltd Improved machine tool
US5616917A (en) * 1995-05-16 1997-04-01 Brown & Sharpe Manufacturing Company Device for measuring an angle between pivotally-connected members
US5741113A (en) * 1995-07-10 1998-04-21 Kensington Laboratories, Inc. Continuously rotatable multiple link robot arm mechanism
US6098484A (en) * 1995-07-10 2000-08-08 Kensington Laboratories, Inc. High torque, low hysteresis, multiple link robot arm mechanism
US5765444A (en) * 1995-07-10 1998-06-16 Kensington Laboratories, Inc. Dual end effector, multiple link robot arm system with corner reacharound and extended reach capabilities
DE19534535C2 (de) 1995-09-18 2000-05-31 Leitz Mestechnik Gmbh Koordinatenmeßmaschine
DE19621195C1 (de) * 1996-05-25 1997-08-21 Leica Ag Verfahren und Vorrichtung zur Richtungsbestimmung zu einem Objekt
DE19703735C2 (de) 1997-01-31 2002-02-07 Leitz Brown & Sharpe Mestechni Längenveränderliches Element
US5944476A (en) * 1997-03-26 1999-08-31 Kensington Laboratories, Inc. Unitary specimen prealigner and continuously rotatable multiple link robot arm mechanism
US6126381A (en) * 1997-04-01 2000-10-03 Kensington Laboratories, Inc. Unitary specimen prealigner and continuously rotatable four link robot arm mechanism
US6155768A (en) * 1998-01-30 2000-12-05 Kensington Laboratories, Inc. Multiple link robot arm system implemented with offset end effectors to provide extended reach and enhanced throughput
US20060249491A1 (en) * 1999-09-01 2006-11-09 Hell Gravure Systems Gmbh Laser radiation source
DE19956912A1 (de) 1999-11-26 2001-08-09 Heidenhain Gmbh Dr Johannes Winkelmeßsystem und Winkelmeßverfahren zur berührungslosen Winkelmessung
JP4531965B2 (ja) * 2000-12-04 2010-08-25 株式会社トプコン 振れ検出装置、振れ検出装置付き回転レーザ装置及び振れ検出補正装置付き位置測定設定システム

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