JP2005340562A - Multiple patterning substrate - Google Patents

Multiple patterning substrate Download PDF

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JP2005340562A
JP2005340562A JP2004158734A JP2004158734A JP2005340562A JP 2005340562 A JP2005340562 A JP 2005340562A JP 2004158734 A JP2004158734 A JP 2004158734A JP 2004158734 A JP2004158734 A JP 2004158734A JP 2005340562 A JP2005340562 A JP 2005340562A
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wiring board
wiring
insulating layer
region
conductor
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Kazunori Kishiyoshi
和則 岸良
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Kyocera Corp
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Kyocera Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a multiple patterning substrate wherein the distance from a splitting groove to a wiring conductor is formed in a prescribed distance. <P>SOLUTION: The multiple patterning substrate 107 is provided with: a mother substrate 101 in which two or more wiring substrate regions 102 and dummy regions 103 are formed; a splitting groove 104 formed in the boundary of the wiring substrate region 102 fellows, and the boundary of the wiring substrate region 102 and the dummy regions 103; wiring conductor 105 formed so that it might extend in the direction of a center section and the direction of a rim (splitting groove 104 direction) of wiring substrate region 102, at the peripheral part in wiring substrate region 102; and an insulating layer 106 formed in the peripheral part in wiring substrate region 102. The insulating layer 106 is formed so that the end by the side of the rim of the wiring conductor 105 (splitting groove 104 side) may be covered. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、半導体素子や弾性表面波素子等の電子部品が搭載される配線基板領域が、母基板の中央部に縦横に多数個配列されて成る多数個取り配線基板に関するものである。   The present invention relates to a multi-cavity wiring board in which a plurality of wiring board regions on which electronic components such as semiconductor elements and surface acoustic wave elements are mounted are arranged vertically and horizontally at the center of a mother board.

従来、例えば半導体素子や弾性表面波素子等の電子部品を搭載するために用いられる配線基板は、酸化アルミニウム質焼結体(アルミナセラミックス)等のセラミックス材料から成る四角平板状の絶縁基体の上面に電子部品を搭載するための電子部品の搭載部を有し、この搭載部またはその周辺から絶縁基体の下面にかけてタングステン等の金属材料から成る複数の配線導体が配置形成された構造を有している。   2. Description of the Related Art Conventionally, wiring boards used for mounting electronic components such as semiconductor elements and surface acoustic wave elements have been formed on the upper surface of a square plate-like insulating base made of a ceramic material such as an aluminum oxide sintered body (alumina ceramic). It has an electronic component mounting portion for mounting an electronic component, and has a structure in which a plurality of wiring conductors made of a metal material such as tungsten are arranged and formed from the mounting portion or its periphery to the lower surface of the insulating base. .

そして、絶縁基体の搭載部に電子部品を搭載して固定するとともに電子部品の電極をボンディングワイヤや半田等の電気的接続手段を介して配線導体に電気的に接続し、必要に応じて電子部品を樹脂や蓋体で気密封止することによって電子装置となる。   Then, the electronic component is mounted and fixed on the mounting portion of the insulating base, and the electrode of the electronic component is electrically connected to the wiring conductor via an electrical connection means such as a bonding wire or solder, and the electronic component is used as necessary. Is hermetically sealed with a resin or a lid to form an electronic device.

このような配線基板は、近年の電子装置の小型化の要求に伴い、その大きさが数mm角程度の極めて小さなものとなってきており、配線基板の取り扱いを容易とするために、また配線基板および電子装置の製造を効率よく行なうために、1枚の広面積の母基板中から多数個の配線基板を同時集約的に得るようにした、いわゆる多数個取り配線基板の形態で製造されている。このような多数個取り配線基板は、一般に、四角板状のセラミック焼結体からなる絶縁層が複数積層されて成る四角形状の母基板の中央部に、配線基板となる配線基板領域が縦横に複数配列形成されるとともに、外周部にダミー領域が形成された構造を有している。なお、ダミー領域は、多数個取り配線基板の取り扱いを容易とすること等のために設けられている。   With the recent demand for downsizing of electronic devices, such wiring boards have become extremely small with a size of several millimeters square. In order to efficiently manufacture a substrate and an electronic device, it is manufactured in the form of a so-called multi-cavity wiring substrate in which a large number of wiring substrates are obtained simultaneously from a single large-area mother substrate. Yes. Such multi-cavity wiring boards generally have a wiring board area vertically and horizontally at the center of a rectangular mother board formed by laminating a plurality of insulating layers made of a square plate-shaped ceramic sintered body. A plurality of arrays are formed, and a dummy region is formed on the outer periphery. The dummy area is provided to facilitate handling of the multi-piece wiring board.

この母基板の配線基板領域における上面若しくは下面の少なくとも一方の面には、配線基板領域同士の境界および配線基板領域とダミー領域との境界に、そしてダミー領域におけるこれら境界の延長線上に、分割溝が縦横に形成されている。そして、分割溝に沿って母基板を分割することによって個々の配線基板を得ることができる。分割溝に沿った母基板の分割は、分割溝に沿って母基板に曲げ応力を加え、機械的強度の弱い分割溝に沿った部位で母基板を破断させることで行なわれる。   In at least one of the upper and lower surfaces of the wiring board area of the mother board, a dividing groove is formed on the boundary between the wiring board areas and on the boundary between the wiring board area and the dummy area, and on the extension line of these boundaries in the dummy area. Are formed vertically and horizontally. Individual wiring boards can be obtained by dividing the mother board along the dividing grooves. The mother substrate is divided along the dividing groove by applying a bending stress to the mother substrate along the dividing groove and breaking the mother substrate at a portion along the dividing groove having a low mechanical strength.

個々の配線基板は、電子部品が搭載されるとともに気密封止された後(電子装置とされた後)、配線導体の所定部位が外部回路基板の電気回路に半田等の接続材を介して電気的に接続されることにより、電子部品と外部の電気回路とが電気的に接続される。配線導体のうち、外部の電気回路に接続される部位は、接続時の位置合わせが容易であること等の理由から、一般に、各配線基板の下面の外周に沿った部位であり、配線基板の下面の外周に一辺が接する四角形状等の形状で複数が配列されている。
特開平11−54886号公報 特開平5−75262号公報
Each wiring board is mounted with electronic components and hermetically sealed (after being made into an electronic device), and then a predetermined portion of the wiring conductor is electrically connected to the electric circuit of the external circuit board via a connecting material such as solder. Thus, the electronic component and the external electric circuit are electrically connected. Of the wiring conductors, the part connected to the external electric circuit is generally a part along the outer periphery of the lower surface of each wiring board for reasons such as easy alignment at the time of connection. A plurality is arranged in a shape such as a quadrangle whose one side is in contact with the outer periphery of the lower surface.
JP-A-11-54886 JP-A-5-75262

しかしながら、近年、外部回路基板の多機能化のために、外部回路基板上に多くの配線基板が狭い間隔で実装されるようになってきており、従来の配線基板に見られるように、配線導体が配線基板の下面の外辺まで延伸された構造の場合、はみ出た半田等の接続材により、隣に実装された配線基板との間で電気的短絡が起こってしまうという問題が発生するおそれがでてきた。   However, in recent years, in order to increase the functionality of the external circuit board, many wiring boards have been mounted on the external circuit board at a narrow interval. In the case of a structure that extends to the outer edge of the lower surface of the wiring board, there is a risk that an electrical short circuit will occur between the wiring board mounted next to it due to the protruding connection material such as solder. It came out.

この問題に対して、配線導体(外部の電気回路に接続される部位)を、配線基板の外周から離した箇所に形成するという方法が考えられる。しかしながら、この場合、配線導体となる金属ペーストの印刷位置や、分割溝の形成位置等に位置ずれが生じ易く、分割溝の縁(分割後は個々の配線基板の外縁となる)と配線導体の位置との距離がばらついてしまい、個々の配線基板を外部回路基板に実装するときの位置合わせが困難となり、また、配線導体の一部が配線基板の外周に接してしまい、従来と同様に隣に実装された配線基板との間で電気的短絡が起こってしまうおそれがある。   In order to solve this problem, a method of forming a wiring conductor (portion connected to an external electric circuit) at a position away from the outer periphery of the wiring board is conceivable. However, in this case, misalignment is likely to occur in the printing position of the metal paste serving as the wiring conductor, the formation position of the dividing groove, etc., and the edge of the dividing groove (after the division becomes the outer edge of each wiring board) and the wiring conductor The distance to the position varies, making it difficult to align the individual wiring boards when they are mounted on the external circuit board, and part of the wiring conductor is in contact with the outer periphery of the wiring board. There is a possibility that an electrical short circuit may occur with the wiring board mounted on the board.

本発明はかかる従来の問題点に鑑み完成されたものであり、その目的は、分割溝から配線導体の露出部分までの距離が確実に確保された多数個取り配線基板を提供することにある。   The present invention has been completed in view of such conventional problems, and an object of the present invention is to provide a multi-piece wiring board in which the distance from the dividing groove to the exposed portion of the wiring conductor is ensured.

本発明の多数個取り配線基板は、中央部に複数の配線基板領域が縦横に配置形成されているとともに外周部にダミー領域が形成された四角形状の母基板と、前記配線基板領域同士の境界および前記配線基板領域と前記ダミー領域との境界に形成された分割溝と、前記配線基板領域内の外周部に、該配線基板領域の中央部方向および外縁方向に延在するように形成された配線導体と、前記配線導体の前記外縁側の一端を覆うように形成された絶縁層とを備えたことを特徴とするものである。   The multi-cavity wiring board of the present invention includes a rectangular mother board in which a plurality of wiring board areas are arranged vertically and horizontally in the central part and a dummy area is formed in the outer peripheral part, and a boundary between the wiring board areas. And a dividing groove formed at a boundary between the wiring board area and the dummy area, and an outer peripheral portion in the wiring board area so as to extend in a central direction and an outer edge direction of the wiring board area. A wiring conductor and an insulating layer formed so as to cover one end of the wiring conductor on the outer edge side are provided.

また、本発明の多数個取り配線基板は、好ましくは、前記絶縁層は、前記分割溝に沿って、前記分割溝から所定距離離れた部位から前記配線導体の前記外縁側の一端までを覆うように形成されていることを特徴とするものである。   In the multi-cavity wiring board of the present invention, it is preferable that the insulating layer covers the part from the part separated from the parting groove to one end on the outer edge side of the wiring conductor along the parting groove. It is characterized by being formed.

また、本発明の多数個取り配線基板は、好ましくは、前記配線基板領域は四角形状であり、前記配線導体は前記配線基板領域の各辺に形成され、前記絶縁層は前記配線基板領域内の前記外周部の全周にわたって形成されていることを特徴とするものである。   Further, in the multi-piece wiring board of the present invention, preferably, the wiring board region has a quadrangular shape, the wiring conductor is formed on each side of the wiring board region, and the insulating layer is in the wiring board region. It is formed over the entire circumference of the outer peripheral portion.

また、本願発明の多数個取り配線基板は、好ましくは、前記絶縁層は、前記配線基板領域の前記中央部側の厚みより前記外縁側の厚みが薄いことを特徴とするものである。   In the multi-piece wiring board according to the present invention, preferably, the insulating layer has a thickness on the outer edge side that is thinner than a thickness on the central part side of the wiring board region.

本発明の多数個取り配線基板によれば、配線導体の外縁側の一端を覆うように形成された絶縁層を具備していることから、分割溝と配線導体の露出部分との間の距離を、絶縁層の分だけ確実に確保することができ、外部回路基板に配線基板が実装されても、隣に実装された配線基板との間で半田等の接続材を介した電気的短絡の発生を防止することができる。   According to the multi-cavity wiring board of the present invention, since the insulating layer is formed so as to cover one end on the outer edge side of the wiring conductor, the distance between the dividing groove and the exposed portion of the wiring conductor is increased. The insulation layer can be secured as much as possible, and even if the wiring board is mounted on the external circuit board, an electrical short circuit occurs between the wiring board mounted next to it via a connecting material such as solder. Can be prevented.

また、本発明の多数個取り配線基板は、好ましくは、分割溝に沿って、分割溝から所定距離離れた部位から配線導体の外縁側の一端までを覆うように形成されていることから、分割溝と配線導体の露出部分との間の距離を、各配線導体間で等しい距離に揃えることができ、配線基板外辺での電気的短絡をより一層効果的に防ぐことができる。また、絶縁層の形成幅を一定にすることができるので、配線導体の形成位置にかかわらず絶縁層を帯状に形成すればよく、多数個取り配線基板の生産性を向上させることも可能となる。   Further, the multi-cavity wiring board of the present invention is preferably formed so as to cover from the part separated from the dividing groove to one end on the outer edge side of the wiring conductor along the dividing groove. The distance between the groove and the exposed portion of the wiring conductor can be equalized between the wiring conductors, and an electrical short circuit at the outer periphery of the wiring board can be more effectively prevented. Moreover, since the formation width of the insulating layer can be made constant, the insulating layer may be formed in a strip shape regardless of the formation position of the wiring conductor, and the productivity of the multi-piece wiring board can be improved. .

また、本発明の多数個取り配線基板は、好ましくは、配線基板領域内の外周部の全周にわたって絶縁層が形成されていることにより、外部回路基板に配線基板が実装された際に、周囲に実装された他の配線基板等との電気的短絡を防止することができる。   Further, the multi-cavity wiring board of the present invention preferably has an insulating layer formed over the entire circumference of the outer peripheral portion in the wiring board region, so that when the wiring board is mounted on the external circuit board, It is possible to prevent an electrical short circuit with another wiring board or the like mounted on the board.

また、本発明の多数個取り配線基板は、好ましくは、絶縁層における配線基板領域の中央部側の厚みより外縁側の厚みが薄いことにより、絶縁層の周縁部分からの剥がれを抑制することが可能となる。   Further, the multi-cavity wiring board of the present invention preferably suppresses peeling from the peripheral portion of the insulating layer by having a thickness on the outer edge side smaller than a thickness on the central side of the wiring board region in the insulating layer. It becomes possible.

本発明の多数個取り配線基板について、図面を参照して詳細に説明する。図1(a)は、本発明の多数個取り配線基板の実施の形態の一例を示す下面図であり、図1(b)は、図1(a)に示した多数個取り配線基板のX−X’線における断面図である。本発明の多数個取り配線基板は、複数の配線基板領域102とダミー領域103とが形成された母基板101と、配線基板領域102同士の境界および配線基板領域102とダミー領域103との間に形成された分割溝104と、配線基板領域102に形成された配線導体105と、配線基板領域102の外周部に形成された絶縁層106とを備える。   The multi-piece wiring board of the present invention will be described in detail with reference to the drawings. FIG. 1A is a bottom view showing an example of an embodiment of a multi-cavity wiring board according to the present invention, and FIG. 1B is an X of the multi-cavity wiring board shown in FIG. It is sectional drawing in the -X 'line. The multi-piece wiring board of the present invention includes a mother board 101 in which a plurality of wiring board areas 102 and dummy areas 103 are formed, a boundary between the wiring board areas 102, and between the wiring board area 102 and the dummy area 103. The formed dividing groove 104, the wiring conductor 105 formed in the wiring substrate region 102, and the insulating layer 106 formed on the outer peripheral portion of the wiring substrate region 102 are provided.

母基板101は、平板状等の四角形状であり、電子部品が搭載される搭載面となる主面(上面)と主面に対向する裏面(下面)とを有する。母基板101の中央部には、複数の配線基板領域102が縦横に配置形成されている。この配線基板領域102は四角形状である。また、母基板101の外周部には、ダミー領域103が形成されている。   The mother board 101 has a quadrangular shape such as a flat plate shape, and has a main surface (upper surface) serving as a mounting surface on which electronic components are mounted and a back surface (lower surface) facing the main surface. In the central portion of the mother board 101, a plurality of wiring board regions 102 are arranged vertically and horizontally. The wiring board region 102 has a quadrangular shape. A dummy region 103 is formed on the outer periphery of the mother substrate 101.

母基板101は、平板状のガラスセラミックス焼結体,酸化アルミニウム質焼結体,窒化アルミニウム質焼結体,ムライト質焼結体,窒化珪素質焼結体,炭化珪素質焼結体等の電気絶縁材料から成る。母基板101は、四角形状である。この母基板101は、例えば、ガラスセラミックス焼結体から成る場合、ホウ珪酸系ガラス等のガラスや酸化アルミニウム,酸化珪素等の原料粉末に適当な有機バインダ,溶剤を添加混合して泥漿状のセラミックスラリーとなし、このセラミックスラリーをドクターブレード法やカレンダーロール法等のシート成形技術を採用しシート状となすことによってセラミックグリーンシート(セラミック生シート)を得て、しかる後、このセラミックグリーンシートを切断加工や打ち抜き加工により適当な形状とするとともに必要に応じてこれを複数枚積層し、最後にセラミックグリーンシートを還元雰囲気中にて約1000℃の温度で焼成することによって製造される。   The mother substrate 101 is made of a flat glass ceramic sintered body, an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, a silicon nitride sintered body, a silicon carbide sintered body or the like. Made of insulating material. The mother board 101 has a quadrangular shape. When the mother substrate 101 is made of, for example, a glass ceramic sintered body, an appropriate organic binder and solvent are added to and mixed with glass such as borosilicate glass or raw material powder such as aluminum oxide and silicon oxide, and a slurry-like ceramic. A ceramic green sheet (ceramic green sheet) is obtained by using a sheet forming technique such as a doctor blade method or a calender roll method to obtain a ceramic green sheet, and then the ceramic green sheet is cut. It is manufactured by forming a suitable shape by processing or punching, laminating a plurality of sheets as necessary, and finally firing the ceramic green sheet at a temperature of about 1000 ° C. in a reducing atmosphere.

各配線基板領域102は、それぞれが個々の配線基板となる領域であり、その上面(主面)の中央部に電子部品(図示せず)が搭載される搭載部を有している。   Each wiring board region 102 is a region that becomes an individual wiring board, and has a mounting portion on which an electronic component (not shown) is mounted at the center of the upper surface (main surface).

ダミー領域103は、母基板101の複数の配線基板領域102が形成されている中央部の外側に設けられる。このダミー領域103は、多数個取り配線基板の取扱いを容易なものとするためのものである。また、ダミー領域103は、配線導体105の引き回し(例えばめっき層を配線導体105に電解めっき法で被着させる際に必要なめっき用の電流を供給するための引き回し等)を容易とするためのものである。   The dummy area 103 is provided outside the central portion of the mother board 101 where the plurality of wiring board areas 102 are formed. This dummy region 103 is for facilitating handling of the multi-piece wiring board. In addition, the dummy region 103 is used for facilitating the routing of the wiring conductor 105 (for example, routing for supplying a plating current necessary for depositing the plating layer on the wiring conductor 105 by an electrolytic plating method). Is.

分割溝104は、母基板101を分割し、ダミー領域103を分離するとともに、個々の四角形状の配線基板領域102に分割するためのものである。この分割溝104に沿って母基板101に曲げ応力を加えることにより、機械的強度の弱い分割溝104に沿って母基板101が破断され、分割される。このような分割溝104は、例えば、母基板101となるグリーンシートの積層体の裏面に所定の断面形状を有するブレード(金属製の刃)を押圧し、所定深さに侵入させることによって形成される。ブレードの押圧は、例えば、このような複数のブレードが、金型本体の上方に突出するように設けられて成る金型を用いて行うことができる。まず、縦横の分割溝のうち、縦または横いずれか一つの方向のものに対応して複数のカッター刃を金型本体の先端に配列取着してなる第1の金型を、セラミックグリーンシートの裏面に位置決めして所定の圧力で押圧して一方向の分割溝104を形成し、同様に、他の方向の分割溝104に対応して複数のカッター刃を金型本体の先端に配列取着してなる第2の金型を、セラミックグリーンシートの裏面に位置決めして所定の圧力で押圧して他の方向の分割溝104を形成することにより、縦横に分割溝104が形成される。   The dividing groove 104 is used to divide the mother board 101, separate the dummy area 103, and divide the wiring board area 102 into individual rectangular shapes. By applying a bending stress to the mother substrate 101 along the dividing grooves 104, the mother substrate 101 is broken and divided along the dividing grooves 104 having a low mechanical strength. Such a dividing groove 104 is formed, for example, by pressing a blade (metal blade) having a predetermined cross-sectional shape against the back surface of the green sheet laminate to be the mother substrate 101 and intruding to a predetermined depth. The The pressing of the blade can be performed, for example, using a mold in which such a plurality of blades are provided so as to protrude above the mold body. First, a first mold formed by arranging and attaching a plurality of cutter blades to the tip of the mold body corresponding to one of the vertical and horizontal divided grooves in either the vertical or horizontal direction is designated as a ceramic green sheet. Is positioned on the back surface of the mold and pressed with a predetermined pressure to form the split grooves 104 in one direction. Similarly, a plurality of cutter blades are arranged at the tip of the mold body corresponding to the split grooves 104 in the other direction. The second mold formed is positioned on the back surface of the ceramic green sheet and pressed with a predetermined pressure to form the divided grooves 104 in other directions, whereby the divided grooves 104 are formed vertically and horizontally.

配線導体105は、配線基板領域102内の外周部の各辺に形成されている。この配線導体105は、配線基板領域102の中央部方向および外縁方向(分割溝104方向)に延在して形成されている。配線導体105は、搭載部に搭載される電子部品の電極と電気的に接続され、電子部品の電極からの電気的経路を個々の配線基板領域102の下面(裏面)等の外部に導出する機能をなす。例えば、搭載部に半導体集積回路素子や光半導体素子等の半導体素子や弾性表面波素子,水晶振動子等の圧電振動子、容量素子、抵抗器等の電子部品が搭載され、電子部品の各電極を配線導体105のうち搭載部やその周辺に露出した部位にボンディングワイヤや半田バンプ等の電気的接続手段(図示せず)を介して電気的に接続することにより、電子部品の各電極は配線導体105を介して配線基板領域102(分割後には個々の配線基板)の下面に導出される。この配線導体105の導出部分が外部回路基板の電気回路に半田等の接続材を介して電気的、機械的に接続することにより、電子部品の電極が外部の電気回路と電気的に接続される。なお、配線導体105のうち、外部の電気回路と接続される部位は、各配線基板領域102の下面の外周部に、分割溝104と隣接するようにして形成される。この、配線導体105のうち分割溝104と隣接するようにして形成されている部分が、分割後の配線基板において外部の電気回路に接続される外部接続用のパッドとして機能する。   The wiring conductor 105 is formed on each side of the outer peripheral portion in the wiring board region 102. The wiring conductor 105 is formed to extend in the central portion direction and the outer edge direction (in the direction of the dividing grooves 104) of the wiring board region 102. The wiring conductor 105 is electrically connected to an electrode of an electronic component mounted on the mounting portion, and has a function of deriving an electrical path from the electrode of the electronic component to the outside such as the lower surface (back surface) of each wiring board region 102. Make. For example, a semiconductor element such as a semiconductor integrated circuit element or an optical semiconductor element, a surface acoustic wave element, a piezoelectric vibrator such as a crystal vibrator, a capacitive element, a resistor, or the like is mounted on the mounting portion. Is electrically connected to a portion of the wiring conductor 105 exposed to the mounting portion or its periphery via an electrical connection means (not shown) such as a bonding wire or a solder bump, whereby each electrode of the electronic component is wired. It is led out to the lower surface of the wiring board region 102 (each wiring board after the division) via the conductor 105. The lead portion of the wiring conductor 105 is electrically and mechanically connected to the electric circuit of the external circuit board via a connecting material such as solder, so that the electrode of the electronic component is electrically connected to the external electric circuit. . A portion of the wiring conductor 105 that is connected to an external electric circuit is formed on the outer peripheral portion of the lower surface of each wiring board region 102 so as to be adjacent to the dividing groove 104. A portion of the wiring conductor 105 formed so as to be adjacent to the dividing groove 104 functions as an external connection pad connected to an external electric circuit in the divided wiring board.

配線導体105は、銅や銀,パラジウム,金,タングステン,モリブデン,マンガン等の金属材料から成り、例えば銅から成る場合、銅粉末に適当な有機バインダ,溶剤を添加混合して得た金属ペーストを、母基板1となるグリーンシートの表面に予めスクリーン印刷法等により所定パターンに印刷塗布しておくことによって形成される。なお、配線導体105の露出部分には、ニッケル,銅,金等からなるめっき層が被着されており、配線導体105の酸化腐食を防止するとともに、配線導体105に対するボンディングワイヤのボンディング性や半田バンプの濡れ性等をより良好なものとしている。   The wiring conductor 105 is made of a metal material such as copper, silver, palladium, gold, tungsten, molybdenum, or manganese. For example, when it is made of copper, a metal paste obtained by adding an appropriate organic binder and solvent to the copper powder is mixed. It is formed by printing and applying a predetermined pattern on the surface of the green sheet to be the mother substrate 1 in advance by a screen printing method or the like. The exposed portion of the wiring conductor 105 is coated with a plating layer made of nickel, copper, gold or the like to prevent oxidative corrosion of the wiring conductor 105 and to bond the bonding wire to the wiring conductor 105 or to solder. Bump wettability is improved.

絶縁層106は、配線基板領域102の外周部の全周にわたって形成されている。この絶縁層106は、配線導体105の外縁側(分割溝104側)の一端を覆うように形成されている。本発明の多数個取り配線基板107において、絶縁層106は、母基板101の主面の分割溝104の周囲から分割溝104に隣接する配線導体105の一部までを覆うよう形成されている。この構成により、分割溝104と、分割溝104に隣接する配線導体105の露出部分との間に、絶縁層106の分だけ距離を確実に確保することができ、外部回路基板に配線基板が実装され、例えば接続材が部分的に外側にはみ出したような場合であっても、隣に実装された配線基板との間で半田等の接続材を介して電気的短絡が起きることは効果的に防止される。   The insulating layer 106 is formed over the entire outer periphery of the wiring board region 102. The insulating layer 106 is formed so as to cover one end on the outer edge side (dividing groove 104 side) of the wiring conductor 105. In the multi-piece wiring board 107 of the present invention, the insulating layer 106 is formed so as to cover from the periphery of the dividing groove 104 on the main surface of the mother board 101 to a part of the wiring conductor 105 adjacent to the dividing groove 104. With this configuration, it is possible to reliably secure a distance corresponding to the insulating layer 106 between the dividing groove 104 and the exposed portion of the wiring conductor 105 adjacent to the dividing groove 104, and the wiring board is mounted on the external circuit board. For example, even when the connecting material partially protrudes to the outside, it is effective that an electrical short circuit occurs between the adjacent wiring board via the connecting material such as solder. Is prevented.

絶縁層106は、母基板101と同様の組成の絶縁材料等の電気絶縁材料により形成される。例えば、母基板101が酸化アルミニウム質焼結体からなる場合、母基板101となるセラミックグリーンシートと同様の組成のアルミナやガラス等の原料粉末に有機溶剤,樹脂バインダ等を添加し混練してペースト状とすることにより作製されたセラミックペーストを、セラミックグリーンシートの裏面のうち分割溝104の周囲となる部位から、分割溝104の隣接する配線導体105となる導体ペーストの一部を覆うように印刷することにより形成される。この場合、まず配線導体105となる導体ペーストを印刷した後に、各セラミックグリーンシートを積層し、その後分割溝104を形成し、最後にセラミックペーストを印刷することが望ましい。配線導体105を先に印刷してセラミックグリーンシートを積層し、その後に絶縁層106を印刷すると、積層時にセラミックグリーンシートが伸張するなど位置合わせの精度を低減させるおそれがある。これに対し、上述のような順序で加工すると、積層時にセラミックグリーンシートが歪んで伸びたりしたとしても、配線導体105となる導体ペーストに対して所望の範囲で覆うようにしてセラミックペーストを印刷することができる。   The insulating layer 106 is formed using an electrically insulating material such as an insulating material having the same composition as the mother substrate 101. For example, when the base substrate 101 is made of an aluminum oxide sintered body, an organic solvent, a resin binder or the like is added to a raw material powder such as alumina or glass having the same composition as the ceramic green sheet used as the base substrate 101, and the paste is kneaded. The ceramic paste produced by forming the shape is printed so as to cover a part of the conductor paste that becomes the wiring conductor 105 adjacent to the dividing groove 104 from the portion around the dividing groove 104 on the back surface of the ceramic green sheet. It is formed by doing. In this case, it is desirable to first print the conductor paste to be the wiring conductor 105, then laminate each ceramic green sheet, and then form the divided grooves 104, and finally print the ceramic paste. If the wiring conductor 105 is printed first and the ceramic green sheets are laminated, and then the insulating layer 106 is printed, the ceramic green sheets may be stretched during lamination, which may reduce the alignment accuracy. On the other hand, if the processing is performed in the above-described order, even if the ceramic green sheet is distorted and stretched during lamination, the ceramic paste is printed so as to cover the conductor paste that becomes the wiring conductor 105 in a desired range. be able to.

絶縁層106は、分割溝104の縁から5μm〜50μmの範囲で配線導体105を覆うようにして形成することが好ましい。これにより、多数個取り配線基板107を個片の配線基板(電子装置)に分割した後、外部回路基板に実装する際、接続材を介する隣り合う配線基板間の電気的短絡等の不具合をより確実に防止できるとともに、配線導体105を外側から確認しやすいので配線導体105外部の電気回路に位置合わせすること等の実装の作業がより確実にかつ容易に行なえる。また、絶縁層106は、その厚みが10〜35μmの範囲が好ましい。厚みが10μm未満では、配線導体105を効果的に覆うことが難しくなる傾向がある。また、厚みが35μmを超えると、多数個取り配線基板107を分割して得られた配線基板を半田等を介して外部回路基板に実装する際、接続用の半田を配線導体105に形成しづらくなる。   The insulating layer 106 is preferably formed so as to cover the wiring conductor 105 in the range of 5 μm to 50 μm from the edge of the dividing groove 104. As a result, when the multi-piece wiring board 107 is divided into individual wiring boards (electronic devices) and then mounted on the external circuit board, problems such as an electrical short circuit between the adjacent wiring boards via the connecting material are further reduced. This can be surely prevented, and the wiring conductor 105 can be easily confirmed from the outside, so that the mounting operation such as alignment with the electric circuit outside the wiring conductor 105 can be performed more reliably and easily. The insulating layer 106 preferably has a thickness in the range of 10 to 35 μm. If the thickness is less than 10 μm, it tends to be difficult to effectively cover the wiring conductor 105. If the thickness exceeds 35 μm, it is difficult to form connection solder on the wiring conductor 105 when the wiring board obtained by dividing the multi-piece wiring board 107 is mounted on the external circuit board via solder or the like. Become.

また、本発明の多数個取り配線基板107において、絶縁層106は、分割溝104に沿って裏面の分割溝104の縁から所定距離離れた部位から分割溝104に隣接する配線導体105の一部までを覆うように形成されていることが好ましい。これにより、分割溝104と、分割溝104に隣接する配線導体105の露出部分との間の距離を、各配線導体105間で同じ距離に揃えることができ、個片の配線基板(電子装置)外辺での電気的短絡を一層効果的に防ぐことができる。また、絶縁層106の形成幅を一定にすることができるので、配線導体105の形成位置にかかわらず、絶縁層106を帯状に形成すればよく、多数個取り配線基板107の生産性を向上させることができる。   In addition, in the multi-piece wiring board 107 of the present invention, the insulating layer 106 is a part of the wiring conductor 105 adjacent to the dividing groove 104 from a part separated from the edge of the dividing groove 104 on the back surface along the dividing groove 104. It is preferable to be formed so as to cover. Thereby, the distance between the division | segmentation groove | channel 104 and the exposed part of the wiring conductor 105 adjacent to the division | segmentation groove | channel 104 can be arrange | equalized with the same distance between each wiring conductor 105, and an individual wiring board (electronic device) An electrical short circuit at the outer side can be prevented more effectively. Further, since the formation width of the insulating layer 106 can be made constant, the insulating layer 106 may be formed in a strip shape regardless of the position where the wiring conductor 105 is formed, and the productivity of the multi-piece wiring board 107 is improved. be able to.

また、絶縁層106について、周縁部分での厚さを中央部分での厚さよりも薄くし、周縁部分から剥がれ等の不具合が発生することを抑制するようにしてもよい。   In addition, the insulating layer 106 may be configured such that the thickness at the peripheral portion is made thinner than the thickness at the central portion to suppress the occurrence of problems such as peeling from the peripheral portion.

(a)は本発明の多数個取り配線基板の実施の形態の一例を示す下面図であり、(b)は(a)に示した多数個取り配線基板のX−X’線における断面図である。(A) is a bottom view showing an example of an embodiment of a multi-cavity wiring board of the present invention, and (b) is a cross-sectional view taken along line XX ′ of the multi-cavity wiring board shown in (a). is there.

符号の説明Explanation of symbols

101・・・母基板
102・・・配線基板領域
103・・・ダミー領域
104・・・分割溝
105・・・配線導体
106・・・絶縁層
107・・・多数個取り配線基板
101 ... Mother board 102 ... Wiring board area 103 ... Dummy area 104 ... Dividing groove 105 ... Wiring conductor 106 ... Insulating layer 107 ... Multi-cavity wiring board

Claims (4)

中央部に複数の配線基板領域が縦横に配置形成されているとともに外周部にダミー領域が形成された四角形状の母基板と、前記配線基板領域同士の境界および前記配線基板領域と前記ダミー領域との境界に形成された分割溝と、前記配線基板領域内の外周部に、該配線基板領域の中央部方向および外縁方向に延在するように形成された配線導体と、前記配線導体の前記外縁側の一端を覆うように形成された絶縁層とを備えたことを特徴とする多数個取り配線基板。 A plurality of wiring board regions arranged vertically and horizontally in the center portion and a rectangular mother board in which dummy regions are formed on the outer periphery; a boundary between the wiring board regions; and the wiring board region and the dummy region A dividing groove formed at the boundary of the wiring board, a wiring conductor formed on the outer periphery of the wiring board area so as to extend in a central direction and an outer edge direction of the wiring board area, and the outer side of the wiring conductor. A multi-piece wiring board comprising: an insulating layer formed to cover one end of the edge side. 前記絶縁層は、前記分割溝に沿って、前記分割溝から所定距離離れた部位から前記配線導体の前記外縁側の一端までを覆うように形成されていることを特徴とする請求項1記載の多数個取り配線基板。 2. The insulating layer according to claim 1, wherein the insulating layer is formed so as to cover from the part separated from the dividing groove to one end on the outer edge side of the wiring conductor along the dividing groove. Multi-piece wiring board. 前記配線基板領域は四角形状であり、前記配線導体は前記配線基板領域の各辺に形成され、前記絶縁層は前記配線基板領域内の前記外周部の全周にわたって形成されていることを特徴とする請求項1または請求項2記載の多数個取り配線基板。 The wiring board region has a quadrangular shape, the wiring conductor is formed on each side of the wiring board region, and the insulating layer is formed over the entire outer periphery of the wiring board region. The multi-cavity wiring board according to claim 1 or 2. 前記絶縁層は、前記配線基板領域の前記中央部側の厚みより前記外縁側の厚みが薄いことを特徴とする請求項1乃至請求項3のいずれかに記載の多数個取り配線基板。 4. The multi-piece wiring board according to claim 1, wherein the insulating layer has a thickness on the outer edge side thinner than a thickness on the central part side of the wiring board region. 5.
JP2004158734A 2004-05-28 2004-05-28 Multiple patterning substrate Pending JP2005340562A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006057205A1 (en) * 2004-11-25 2006-06-01 Tokuyama Corporation Element mounting substrate and method for manufacturing same
JP2007293800A (en) * 2006-03-31 2007-11-08 Toshiba Corp Semiconductor device and memory card using the same
JP2013098507A (en) * 2011-11-07 2013-05-20 Murata Mfg Co Ltd High frequency electronic component

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006057205A1 (en) * 2004-11-25 2006-06-01 Tokuyama Corporation Element mounting substrate and method for manufacturing same
US7888187B2 (en) 2004-11-25 2011-02-15 Tokuyama Corporation Element mounting substrate and method for manufacturing same
JP2007293800A (en) * 2006-03-31 2007-11-08 Toshiba Corp Semiconductor device and memory card using the same
JP2013098507A (en) * 2011-11-07 2013-05-20 Murata Mfg Co Ltd High frequency electronic component

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