JP2005338540A - Inspection substrate for active matrix type liquid crystal display - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection substrate for an active matrix type liquid crystal display that facilitates defect detection of various modes by inspection using an array tester. <P>SOLUTION: The inspection substrate for the active matrix type liquid crystal display has a plurality of scanning lines 11 and a plurality of signal lines 13 which are arranged on a main surface while crossing each other, a plurality of storage capacity lines 15 which are arranged in parallel to the scanning lines 11, a storage capacity element 21 which includes some of the storage capacity lines 15 as one electrode, a storage capacity upper electrode 17 which is formed in the same layer with the signal lines 13 and electrically connected to the storage capacity element 21, a switching element 23 which is arranged at each intersection of a signal line 13 and a scanning line 11 and electrically connected to the storage capacity element 21, and a dummy wire 25a and a dummy wire 25b which are formed by using at least one of two kinds of metal constituting the switching element 23 and electrically connected to one of the signal line 13, storage capacity line 15, and storage capacity upper electrode 17. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an inspection substrate for an active matrix type liquid crystal display device, and more specifically, a scanning line, a signal line, a storage capacitor line, a storage capacitor element, substantially the same as an array substrate used in an active matrix type liquid crystal display device, The switching elements etc. are formed using the same manufacturing process as the actual manufacturing process, and an actual array substrate is simulated for each manufacturing line by applying special wiring and devices for inspection. The present invention relates to an inspection substrate for an active matrix type liquid crystal display device used for predicting defects or defective portions of wirings in a production line or the like by inspecting using a product.

  In recent years, liquid crystal display devices capable of performing high-functionality and high-definition display with high density and large capacity have been put into practical use. Among such liquid crystal display devices, a plurality of scanning lines intersecting with each other for reasons such as low crosstalk between adjacent pixels, high contrast display, transmissive display and easy area enlargement. An active matrix type liquid crystal display device having an array substrate in which pixel electrodes having TFTs as switching elements are arranged in a matrix in a plurality of regions partitioned by a plurality of signal lines is often used.

In such an active matrix type liquid crystal display device, fine processing of wiring and contact holes is required with high definition, and it is required to maintain a high process level. For this reason, in recent years, a process level (PL) chip in which various lines and spaces (L / S) are arranged is adopted, and a method of managing the line state by electrical measurement by a tester and optical evaluation by a defect inspection apparatus. It is used. Moreover, even in actual devices, an electrical defect inspection is performed using an array tester, thereby performing failure analysis, and managing and improving the process level.
Japanese Patent Laid-Open No. 11-145237

  In the conventional management method described above, the defect detected in the PL chip is not necessarily a defect in the actual device, and conversely, a defect in the actual device is not detected by the PL chip. There is a problem that it is difficult to determine and operate a necessary management value.

  In addition, in the conventional method, the detectable defects are limited to only those having a planar pattern or anomalous appearance, and the device characteristics including the characteristics of switching elements and contact holes are used in conjunction with the evaluation of the actual device. There is a problem that must be done.

  Furthermore, even in array inspection using actual devices, defect detection capability is not sufficient, and depending on the type of defect, the location or position where the defect occurs, that is, the address may not be specified, and process level management and improvement There is a problem that it is insufficient for use.

  This point will be described with reference to FIGS. 8 and 9 are plan views of a conventional open PL chip, respectively, and are plan views of a conventional contact chain PL chip.

  First, in FIG. 8, the serpentine wiring 181 is arranged with a metal film, and electrode pads 183 a and 183 b are connected to both ends of the serpentine wiring 181. In order to detect disconnection, that is, open of the meandering wiring 181 arranged in this way, a voltage is applied between the electrode pads 183a and 183b to monitor whether or not current flows, and when current does not flow Can detect the open of the meandering wire 181 as it is disconnected.

  In FIG. 9, the meander wiring 191 is configured by alternately arranging the first metal 193 and the second metal 195 and electrically connecting the end portions of the respective metals through the contact holes 197. Are formed in a contact chain structure, and electrode pads 199a and 199b are connected to both ends of the contact chain structure. In order to detect the opening of the meandering wiring 191 having the contact chain structure configured as described above, a voltage is applied between the electrode pads 199a and 199b to monitor whether or not a current flows. On the other hand, it is possible to detect the open of the meandering wiring 191 because it is disconnected.

  However, in any case, for example, when there is no abnormality in the appearance, there is a problem in that it is not possible to specify the open defective portion that indicates where or where the above-described opening occurs. is there.

  The present invention has been made in view of the above, and an object of the present invention is to provide an inspection substrate for an active matrix liquid crystal display device that facilitates defect detection in various modes by inspection with an array tester.

  In order to achieve the above object, an inspection substrate for an active matrix type liquid crystal display device according to claim 1 of the present invention comprises a plurality of scanning lines and a plurality of signal lines arranged on a main surface so as to cross each other, and A plurality of storage capacitor lines arranged in parallel to the scanning lines; a storage capacitor element having one electrode of a part of the storage capacitor line; and the same layer as the signal line and electrically connected to the storage capacitor element A storage capacitor upper electrode connected to the switching capacitor, a switching element disposed at each intersection of the signal line and the scanning line and electrically connected to the storage capacitor element, and a gate electrode and a source or drain electrode of the switching element A dummy arrangement formed using at least one of the two types of metals constituting the electrode and electrically connected to any one of the scanning line, the storage capacitor line, the signal line, and the storage capacitor upper electrode. And summarized in that a and.

  According to a second aspect of the present invention, there is provided an inspection substrate for an active matrix type liquid crystal display device in which any wiring region is formed of the signal line, scanning line, storage capacitor line, storage capacitor upper electrode, switching element and dummy wiring. The gist is that it is larger than the non-wiring area.

  According to a third aspect of the present invention, there is provided the inspection substrate for an active matrix type liquid crystal display device according to the present invention, wherein the scanning line is formed between the scanning line composed of a lower electrode of the two kinds of metals constituting the switching element and the storage capacitor line. The gist is to arrange a dummy wiring of the same metal layer as the line and the storage capacitor line.

  According to a fourth aspect of the present invention, there is provided an inspection substrate for an active matrix type liquid crystal display device, wherein the dummy wiring is electrically connected to the signal line.

  6. The inspection substrate for an active matrix type liquid crystal display device according to claim 5 of the present invention comprises a signal line comprising an upper electrode of the two types of metals constituting the switching element, the storage capacitor upper electrode, and the storage capacitor. The gist is to provide a dummy wiring extending from the upper electrode and to dispose them in close proximity to each other.

  The inspection substrate for an active matrix type liquid crystal display device according to claim 6 of the present invention includes the signal line including the upper electrode of the two kinds of metals constituting the switching element, the storage capacitor upper electrode, and the storage The gist is to provide a dummy wiring extending from the capacitor upper electrode and a dummy electrode, and to arrange them close to each other.

  A gist of an inspection substrate for an active matrix type liquid crystal display device according to a seventh aspect of the present invention is that the dummy electrode is electrically connected to the scanning line.

  9. The inspection substrate for an active matrix type liquid crystal display device according to claim 8, wherein the dummy electrode and the storage capacitor upper electrode have a predetermined size or more and a predetermined width at a part of the signal line. The gist is to provide the above regions.

  The inspection substrate for an active matrix type liquid crystal display device according to the present invention according to claim 9 is arranged in parallel with the plurality of scanning lines and the plurality of signal lines arranged on the main surface so as to cross each other, and in parallel with the scanning lines. A plurality of storage capacitor lines, a storage capacitor element having a part of the storage capacitor line as one electrode, and an upper part of the storage capacitor formed in the same layer as the signal line and electrically connected to the storage capacitor element In an inspection substrate for an active matrix liquid crystal display device, comprising: an electrode; and a switching element that is disposed at each intersection of the signal line and the scanning line and is electrically connected to the storage capacitor element. The gist is that at least one of the lines meanders.

  According to a tenth aspect of the present invention, there is provided an inspection substrate for an active matrix type liquid crystal display device, wherein the signal line meanders on the storage capacitor line.

  12. The inspection substrate for an active matrix type liquid crystal display device according to claim 11, wherein at least one of the signal line and the scanning line alternately comprises two kinds of metals constituting the gate electrode and the source or drain electrode of the switching element. And a contact chain structure that is electrically connected via a contact hole at each end.

  13. The inspection substrate for an active matrix liquid crystal display device according to claim 12, wherein the predetermined size of the dummy electrode and the storage capacitor upper electrode is 10 μm or more, and a predetermined width of a part of the signal line Is 10 μm or more.

  According to the present invention, a plurality of scanning lines, signal lines, storage capacitor lines, storage capacitor elements, storage capacitor upper electrodes, switching elements, and dummy wirings are arranged, and the dummy wirings are scanned lines, signal lines, storage capacitor lines. In addition, it is possible to increase the probability of occurrence of a short circuit between wirings in the inspection substrate for an active matrix type liquid crystal display device, that is, a short-circuit defect. It is possible to easily detect a defect in the failure mode, and it is possible to predict which part or which wiring is likely to have a short-circuit defect from the short-circuit defect that has occurred. As a result, the ability of the process can be grasped, and the yield can be reduced by feeding back the result to the production line. That is, a process level check function can be provided, and device characteristics and process level can be evaluated simultaneously using an array tester.

  According to the present invention, the wiring area composed of the signal line, the scanning line, the storage capacitor line, the storage capacitor upper electrode, the switching element, and the dummy wiring is formed so as to be larger than the non-wiring area where no wiring exists. The density can be increased, the probability of occurrence of a short circuit between wirings, that is, a short-circuit failure, can be increased, and defects in various failure modes can be easily detected by an array tester.

  According to the present invention, since the dummy wiring is disposed between the scanning line and the storage capacitor line in the same metal layer as the scanning line and the storage capacitor line, the same layer short circuit can be inspected.

  According to the present invention, the dummy wiring is disposed between the scanning line and the storage capacitor line in the same metal layer as the scanning line and the storage capacitor line, and the dummy wiring is connected to the signal line. Can be inspected, and a defective portion which is a short portion can be identified. Specifically, when the scanning line and the storage capacitor line arranged in parallel with the scanning line are short-circuited, the array tester can detect only as a line defect, but short-circuits at any part of the wiring. However, in the present invention, by arranging a dummy wiring and connecting it to the signal line, the same-layer short circuit becomes a cross short circuit through the dummy wiring and the signal line. The shorted portion can be identified as a defective portion from the position of the signal line.

  According to the present invention, the dummy wiring formed by extending the storage capacitor upper electrode is provided, and the dummy electrode is further provided so as to be arranged close to the signal line and the storage capacitor upper electrode. This makes it easy to cause short-circuits in the same layer and easily detect defects in various failure modes in the array tester. This causes short-circuit defects in any part or wiring due to short-circuit defects that occur. Can be expected to occur.

  According to the present invention, the dummy electrode and the dummy wiring are provided, and the dummy electrode is connected to the scanning line in addition to the signal line and the storage capacitor upper electrode being arranged close to each other. In addition to the above, it is possible to identify a defective portion that is a short portion.

  According to the present invention, the size of the dummy electrode and the storage capacitor upper electrode is set to a predetermined size or more, for example, about 10 μm or more, and the dummy electrode having a width of, for example, 10 μm or more is provided on the scanning line. The electrode, the storage capacitor upper electrode, and the scanning line can be used as a contact pad for applying a probe such as an array tester, so that an inspection by the array tester or the like can be performed accurately and efficiently.

  According to the present invention, since at least one of the scanning line and the signal line is meandered, the wiring length of at least one of the scanning line and the signal line can be increased, the disconnection of the scanning line and the signal line, In other words, it is possible to increase the probability of occurrence of an open and predict which part or which wire is likely to have a disconnection failure from the open system failure caused by this.

  According to the present invention, since the signal line is arranged to meander on the storage capacitor line, the signal line tends to be thin, but it can be confirmed how much the signal line is thin and how thin the wiring is. It is possible to confirm how much a defect such as disconnection occurs or is likely to occur when a signal line is provided. That is, in general, when there is a wiring or layer such as a storage capacitor line on the lower side, the wiring tends to be thinner than when there is no such layer, so the signal line is placed on the storage capacitor line. By meandering, it can be confirmed how thin the signal line is and whether or not the signal line is easily broken can be confirmed.

  According to the present invention, at least one of the signal line and the scanning line is alternately arranged by two kinds of metals constituting the switching element, and each end is connected by the contact hole to constitute the contact chain structure. With the contact chain structure, it is possible to check the incidence rate of contact hole defects, and it is possible to detect defects in the open failure mode in which, for example, an array tester can detect contact hole opening in the contact chain structure. In this detection, it is possible to detect which part of the contact hole is open in the appearance of the contact hole, but if there is no abnormality in the appearance of the contact hole, the part from the position of the signal line to which part It is possible to identify whether an open defect has occurred.

  Hereinafter, the best mode for carrying out the present invention (hereinafter referred to as an embodiment) will be described with reference to the drawings.

  FIG. 1 is a plan view of an inspection substrate for an active matrix liquid crystal display device according to the first embodiment of the present invention.

  The inspection substrate for an active matrix type liquid crystal display device of the present embodiment shown in the figure is a glass substrate made of the same material as an array substrate (hereinafter referred to as an actual array substrate) used in an actual active matrix type liquid crystal display device. In the same manufacturing process as the actual array substrate, it is manufactured so as to have the same electrical characteristics as the actual array substrate, but the various wirings provided on the substrate are actual lines such as scanning lines and signal lines. In addition to the wiring existing on the array substrate, a special pattern wiring is provided to increase the probability of occurrence of defects such as short-circuit defects and open-circuit defects, and to verify where defects are likely to occur. For example, dummy wirings, meandering wirings, etc., and electrical connection by contact holes for identifying defective portions are additionally provided. Note that the inspection substrate for the active matrix type liquid crystal display device of the present embodiment (hereinafter simply referred to as an inspection substrate for simplification) does not have to be the same size and shape as the actual array substrate. It has been changed as appropriate.

  FIG. 2 is a diagram showing only the scanning lines and storage capacitor lines that flow in the horizontal direction in FIG. 1 among the many wirings arranged on the inspection substrate shown in FIG. FIG. 2 is a diagram showing only the signal lines flowing in the vertical direction in FIG. 1 and the storage capacitor upper electrode among the numerous wirings wired on the inspection board shown in FIG. In the inspection substrate shown in FIG. 1, rectangular boxes with a side of about several millimeters on which x marks or / marks are written indicate contact holes 27 a to 27 g.

  Various wirings arranged on the inspection board of the first embodiment shown in FIG. 1 will be described with reference to FIGS. 2 and 3 in addition to FIG. 1 and mainly related to the first embodiment. To do. As can be seen with reference to FIGS. 1 to 3, the inspection substrate of the present embodiment includes a plurality of scanning lines 11 (only one is clearly shown in the figure but actually exists). Are provided in parallel with each other while meandering, and a plurality of signal lines (only two are shown in the figure but actually exist) so as to intersect the plurality of scanning lines 11. 13 are arranged in parallel with each other while meandering. The plurality of scanning lines 11 are provided with a plurality of storage capacitor lines 15 (only two are shown in the figure but actually exist) in almost parallel.

  A plurality of storage capacitor upper electrodes 17 formed in the same layer as the plurality of signal lines 13 and formed substantially in parallel with the plurality of signal lines 13 are arranged. A part of the storage capacitor line 15 is a storage capacitor lower electrode 19 which is one electrode, and a storage capacitor element 21 comprising the storage capacitor lower electrode 19 and the storage capacitor upper electrode 17 is provided. At each intersection of the scanning line 11 and the signal line 13, a switching element 23 made of a TFT using a P channel type polysilicon layer electrically connected to the storage capacitor element 21 via contact holes 27c and 27d is arranged. It is installed.

  In regions other than the above-described scanning line 11, signal line 13, storage capacitor line 15, storage capacitor upper electrode 17, storage capacitor lower electrode 19, storage capacitor element 21, and switching element 23, the switching element 23 is provided. Dummy wirings 25a and 25b formed by using at least one of two kinds of metals constituting the gate electrode and the source or drain electrode are provided. These dummy wirings 25a and 25b are connected to the scanning lines 11 and the signal lines. Any one of the line 13, the storage capacitor line 15 and the storage capacitor upper electrode 17 is electrically connected by a contact hole 27 (contact holes 27a to 27g are collectively referred to as a contact hole 27).

  More specifically, the dummy wiring 25a is electrically connected to the signal line 13 through the contact hole 27b, and the dummy wiring 25b is electrically connected to the signal line 13 through the contact holes 27g and 27a.

  Further, the inspection substrate of the first embodiment includes the scanning line 11, the signal line 13, the storage capacitor line 15, the storage capacitor upper electrode 17, and the dummy wiring 25 (the dummy wirings 25a and 25b are collectively referred to as a dummy wiring 25). The wiring area made up of the wiring is formed to be larger than the non-wiring area where no wiring exists.

  As described above, in the first embodiment, the plurality of scanning lines 11, the signal lines 13, the storage capacitor lines 15, the storage capacitor upper electrode 17, the storage capacitor lower electrode 19, the storage capacitor element 21, and the switching element 23 are provided. Dummy wirings 25 a and 25 b are provided in regions other than the region where these are provided, and the dummy wirings 25 a and 25 b are connected to the scanning line 11, the signal line 13, the storage capacitor line 15, and the storage capacitor upper electrode 17. The wiring is electrically connected to any one of the contact holes 27, and adjacent wirings are connected to wirings having different potentials. Further, the scanning line 11, signal line 13, storage capacitor line 15, storage capacitor upper electrode 17, switching By forming the wiring area composed of the element 23 and the dummy wiring 25 so as to be larger than the non-wiring area where none of the wirings exist, the inspection base of this embodiment is formed. The probability of occurrence of short-circuit defects between wires, i.e., short-circuit defects, can be increased, and various defect mode defects can be easily detected by the array tester. It can be predicted which short-circuit defect is likely to occur in which wiring. As a result, the ability of the process can be grasped, and the yield can be reduced by feeding back the result to the production line.

  That is, the inspection substrate of this embodiment can have a process level check function, and can simultaneously evaluate the device characteristics and the process level using an array tester. For example, the inspection substrate of this embodiment is operated under the same conditions as when an image is actually displayed by an active matrix liquid crystal display device, and a portion corresponding to a pixel is charged. Then, after being charged once, it is opened once, and then the gate electrode of the switching element 23 is turned on again via the scanning line 11 to determine how the potential of the signal line 13 depends on the amount of charge previously charged. By checking the amount of accumulated pixel potential and checking the operation for all pixels, the pixel potential is larger or smaller than normal. It is possible to determine that there is a leak defect.

  Next, an inspection substrate for an active matrix liquid crystal display device according to a second embodiment of the present invention will be described.

  The drawings referred to in the inspection substrate of the second embodiment are the same as FIGS. 1 to 3 as in the first embodiment, and are already illustrated in these drawings, but are not described in the first embodiment. A new configuration unique to the second embodiment, its operation, and effects will be described.

  The first feature of the inspection substrate of the second embodiment is that, in the first embodiment described above, the dummy wiring 25a is formed from a gate electrode which is a lower electrode of the two kinds of metals constituting the switching element 23. Between the scanning line 11 connected to the gate electrode and the storage capacitor line 15 by the same metal layer as the scanning line 11 and the storage capacitor line 15, and the dummy wiring 25 a serves as a contact hole 27 b. It is connected to the signal line 13 via

  As described above, the dummy wiring 25a is disposed between the scanning line 11 and the storage capacitor line 15 in the same metal layer as the scanning line 11 and the storage capacitor line 15, and the dummy wiring 25a is connected to the signal line 13. As a result, it is possible to inspect a short in the same layer and to identify a defective portion which is a short portion. More specifically, when the scanning line 11 and the storage capacitor line 15 arranged in parallel to the scanning line 11 are short-circuited, the array tester can simply detect it as a line defect, but at any part of the wiring It is not possible to determine whether a short circuit has occurred. On the other hand, in the inspection substrate of the second embodiment, as described above, the dummy wiring 25a is provided and connected to the signal line 13, so that the same layer short circuit is caused to pass through the dummy wiring 25a and the signal line 13. Therefore, the shorted portion can be identified as a defective portion from the position of the signal line 13.

  The second feature of the inspection substrate of the second embodiment is that the signal line 13 is composed of a source or drain electrode which is an upper electrode of the two types of metals constituting the switching element 23 and is connected to the electrode. The storage capacitor upper electrode 17 and the dummy wiring 34 extending from the storage capacitor upper electrode 17 are provided and are arranged close to each other.

  The third feature of the inspection substrate of the second embodiment is that, in addition to the above feature, a dummy wiring 34 extending from the storage capacitor upper electrode 17 and a dummy electrode 31 are provided, and they are close to each other. It is to arrange. More specifically, of the two types of metals constituting the switching element 23, the signal line 13 is composed of a source or drain electrode which is an upper electrode and is connected to the electrode, a storage capacitor upper electrode 17, and the storage capacitor. A dummy wiring 34 extending from the upper electrode 17 and a dummy electrode 31 are provided and are arranged close to each other.

  As in the second and third features, the dummy electrode 31 and the dummy wiring 34 are provided, and the signal line 13 and the storage capacitor upper electrode 17 are arranged close to each other, thereby forming a high-density wiring and increasing the defect density. This makes it easy to cause short-circuits in the same layer and easily detect defects in various failure modes in the array tester. This causes short-circuit defects in any part or in any wiring due to short-circuit defects. Can be expected to be easy.

  Furthermore, the fourth feature of the inspection substrate of the second embodiment is that, in addition to the above feature, the dummy electrode 31 is electrically connected to the scanning line 11 through the contact hole 27e.

  As described above, the dummy electrode 31 and the dummy wiring 34 are provided and arranged close to the signal line 13 and the storage capacitor upper electrode 17. In addition to being able to inspect, it is possible to identify a defective portion that is a short portion. Specifically, for example, when the signal line 13 is disconnected, the array tester can detect it as a disconnection, but cannot determine which part of the wiring is disconnected. In the inspection board according to the embodiment, the dummy electrode 31 and the dummy wiring 34 are provided as described above, and the dummy electrode 31 is connected to the scanning line 11 in addition to the proximity to the signal line 13 and the storage capacitor upper electrode 17. As a result, it is possible to specify the disconnected portion from the position of the signal line 13 as a defective portion.

  Furthermore, the fifth feature of the inspection substrate of the second embodiment is that, in addition to the above feature, a dummy electrode 33 having a predetermined width, for example, about 10 μm or more is provided in a part of the signal line 13, Assume that the storage capacitor upper electrode 17 has a predetermined size, for example, about 10 μm or more, and the dummy electrode 31 has a predetermined size, for example, about 10 μm. 27e is connected to the scanning line 11.

  In this way, the dummy electrode 33 having a width of 10 μm or more is provided on the signal line 13, the storage capacitor upper electrode 17 is set to be about 10 μm or more, and the dummy electrode 31 is set to be 10 μm or more to be connected to the scanning line 11. Thus, the dummy electrode 33, the storage capacitor upper electrode 17, and the dummy electrode 31 can be used as contact pads for applying a probe such as an array tester. That is, by manually or automatically applying the probe of the array tester to the dummy electrode 33, the storage capacitor upper electrode 17, and the dummy electrode 31, the array tester can perform electrical inspection between these and others. For example, the characteristics of a single TFT element constituting the switching element 23 can be measured.

  Next, an inspection substrate for an active matrix liquid crystal display device according to a third embodiment of the present invention will be described.

  The drawings referred to in the inspection board of the third embodiment are substantially the same FIG. 4 as the same FIG. 1 to FIG. 3 described in the first embodiment, and more specifically, to the drawings shown in FIG. The third feature of the third embodiment differs only in that a later-described contact chain structure 41 is provided. The first and second features described below of the third embodiment are the same as the first feature. 1 and 2 which have not been described in detail in the second embodiment are already shown in FIGS. Therefore, the first and second features of the third embodiment should be understood with reference to FIGS.

  The first feature of the inspection board of the third embodiment is that the scanning lines 11 and the signal lines 13 meander as shown in FIGS. 1 to 4 in the first and second embodiments described above. It is. More specifically, the scanning line 11 meanders so as to avoid the same layer wiring and the region of the switching element 23, and the signal line 13 meanders so as to avoid the same layer wiring and the region of the storage capacitor upper electrode 17. ing.

  Thus, by arranging the scanning lines 11 and the signal lines 13 in a meandering manner, it is possible to increase the wiring length of the scanning lines 11 and the signal lines 13, thereby disconnecting the scanning lines 11 and the signal lines 13, that is, It is possible to increase the probability of occurrence of an open and predict which part or which wire is likely to have a disconnection failure from the open system failure caused by this. 1 to 4 illustrate the case where both the scanning line 11 and the signal line 13 meander, the present invention is not limited to this, and the scanning line 11 and the signal line 13 are not limited thereto. It is sufficient that at least one of the meanders meanders.

  The second feature of the inspection substrate of the third embodiment is that, in addition to the above, the meandering signal line 13 meanders on the storage capacitor line 15 as shown in FIGS. It is.

  If the signal line 13 is arranged to meander on the storage capacitor line 15 in this way, the signal line 13 tends to be thinned. Thus, how thin the signal line 13 is and how easily the signal line 13 is cut off. In addition, it is possible to confirm how much a defect such as disconnection is likely to occur when the signal line 13 is arranged with a thin wiring. That is, in general, when there is a wiring or layer such as the storage capacitor line 15 or the like on the lower side, the wiring tends to be thinner than when there is no such wiring, so the signal line 13 is stored. By meandering on the capacitor line 15, it can be confirmed how thin the signal line 13 is, and whether or not the signal line 13 is easily broken can be confirmed.

  Further, the third feature of the inspection board of the third embodiment is shown in FIG. 4, but in addition to the above, as shown in FIG. 4, at least one of the scanning line 11 and the signal line 13, FIG. 4, the signal line 13 has a contact chain structure 41 in which two kinds of metals constituting the switching element 23 are alternately arranged and electrically connected to each other through a contact hole.

  As shown in detail in FIG. 5 in detail, the contact chain structure 41 includes an upper electrode 23a that constitutes one source or drain electrode of the two kinds of metals in which the signal line 13 constitutes the switching element 23. The lower electrodes 23b constituting the other gate electrode are alternately arranged, and the respective ends of the upper electrode 23a and the lower electrode 23b are electrically connected through the contact hole 27a and the contact hole 27g. The 4 and 5, it seems that only one upper electrode 23 a and lower electrode 23 b constituting the contact chain structure 41 are representatively illustrated, but in actuality, each signal line 13 and each signal line are shown. 13 is also provided each time a plurality of scanning lines 11 are crossed. When only the portion of this alternate arrangement and connection by contact holes is shown together, for example, it is not accurate, but as shown in FIG. It is provided.

  In this way, the signal line 13 is configured by alternately arranging the upper electrodes 23 a and the lower electrodes 23 b constituting the switching element 23, and the contact chain structure configured by connecting the respective end portions with the contact holes 27. 41 can confirm the occurrence rate of contact hole defects, and can detect defects in the open failure mode in which the contact chain structure 41 can detect the opening of the contact hole 27 with an array tester, for example. In this detection, it is possible to detect which part of the contact hole 27 is opened by the appearance of the contact hole 27. However, when no abnormality is seen in the appearance of the contact hole 27, the position of the signal line 13 is used. To identify where the open defect occurred Kill.

  In the second embodiment shown in FIG. 4, the contact chain structure 41 is provided only for the signal line 13, but the present invention is not limited to this, and is provided for the scanning line 11. Is also good.

  6 and 7 each measure the resistance between a plurality of pads 51 and 53 used in a general PL chip, and determine the presence or absence of disconnection (open) and short-circuit (short) and the approximate defective portion. It is explanatory drawing for. 6 is a diagram showing the same-layer short pattern, and FIG. 7 is a diagram showing the same-layer open pattern.

  As shown in the enlarged view of the connection function of the plurality of pads 51 shown in FIG. 6A in FIG. 6B, the plurality of pads 51 are connected to each other, and both ends of the plurality of pads 51 connected to each other are connected. A disconnection between a plurality of pads can be detected by checking with a tester or the like.

  Further, as shown in the enlarged view of the connection relationship of the plurality of pads 51 shown in FIG. 7 (a) in FIG. 7 (b), the plurality of pads 53 are separated from each other, and the space between them is checked with a tester or the like. Thus, a short circuit between the pads can be detected.

  In the above embodiment, the inspection substrate for an active matrix liquid crystal display device using a P channel type polysilicon layer as a semiconductor layer has been described. However, the present invention is not limited to this, and the N channel type polysilicon is used. The same applies when using layers. The same effect can be obtained even if another semiconductor layer such as an amorphous silicon layer is used as the semiconductor layer.

It is a top view of the test | inspection board | substrate for active matrix type liquid crystal display devices concerning the 1st, 2nd embodiment of this invention. FIG. 2 is a diagram showing, in an easy-to-understand manner, only the scanning lines and storage capacitor lines that flow in the horizontal direction in FIG. 1 among a large number of wirings arranged on the inspection substrate shown in FIG. FIG. 2 is a diagram showing, in an easy-to-understand manner, only the scanning lines that flow in the vertical direction in FIG. 1, the storage capacitor upper electrode, and the like are taken out from a large number of wirings arranged on the inspection substrate shown in FIG. 1. It is a top view of the test | inspection board | substrate for active matrix type liquid crystal display devices concerning the 3rd Embodiment of this invention. It is a figure which shows in detail the contact chain structure provided in the test | inspection board | substrate for active matrix type liquid crystal display devices of 3rd Embodiment shown in FIG. It is a figure which shows an example of the same layer short pattern in PL chip | tip. It is a figure which shows an example of the same layer open pattern in PL chip | tip. It is a top view of the conventional open PL chip. It is a top view of the conventional contact chain PL chip.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Scan line 13 Signal line 15 Storage capacity line 17 Storage capacity upper electrode 19 Storage capacity lower electrode 21 Storage capacity element 23 Switching element 23a Upper electrode 23b Lower electrode 25a, 25b Dummy wiring 27a-27g Contact hole 31, 33 Dummy electrode 34 Dummy Wiring 41 Contact chain structure 51, 53 Pad

Claims (12)

  A plurality of scanning lines and a plurality of signal lines arranged so as to cross each other on the main surface, a plurality of storage capacitor lines arranged in parallel to the scan lines, and a part of the storage capacitor line as one electrode The storage capacitor element, the storage capacitor upper electrode formed in the same layer as the signal line and electrically connected to the storage capacitor element, and the storage capacitor element disposed at each intersection of the signal line and the scanning line A switching element that is electrically connected to the capacitor element, and is formed using at least one of two kinds of metals constituting the gate electrode and the source or drain electrode of the switching element, and the scanning line, the storage capacitor line, An inspection substrate for an active matrix liquid crystal display device, comprising: a dummy wiring electrically connected to either the signal line or the storage capacitor upper electrode.   2. The active matrix according to claim 1, wherein a wiring region composed of the signal line, the scanning line, the storage capacitor line, the storage capacitor upper electrode, the switching element, and the dummy wiring is larger than a non-wiring region in which no wiring exists. Inspection substrate for LCD.   A dummy wiring of the same metal layer as the scanning line and the storage capacitor line is arranged between the scanning line made of a lower electrode and the storage capacitor line among the two kinds of metals constituting the switching element. The inspection substrate for an active matrix type liquid crystal display device according to claim 1, wherein:   4. The inspection substrate for an active matrix liquid crystal display device according to claim 3, wherein the dummy wiring is electrically connected to the signal line.   Of the two types of metals constituting the switching element, a signal line made of an upper electrode, the storage capacitor upper electrode, and a dummy wiring extending from the storage capacitor upper electrode are provided, and these are arranged close to each other The inspection substrate for an active matrix type liquid crystal display device according to claim 3.   Providing the signal line consisting of the upper electrode of the two types of metals constituting the switching element, the storage capacitor upper electrode, a dummy wiring extending the storage capacitor upper electrode, and a dummy electrode; 4. The inspection substrate for an active matrix type liquid crystal display device according to claim 3, wherein each of them is arranged close to each other.   7. The inspection substrate for an active matrix liquid crystal display device according to claim 6, wherein the dummy electrode is electrically connected to the scanning line.   8. The active matrix type liquid crystal according to claim 7, wherein the dummy electrode and the storage capacitor upper electrode have a predetermined size or more, and a region having a predetermined width or more is provided in a part of the signal line. Inspection board for display devices.   A plurality of scanning lines and a plurality of signal lines arranged so as to cross each other on the main surface, a plurality of storage capacitor lines arranged in parallel to the scan lines, and a part of the storage capacitor line as one electrode The storage capacitor element, the storage capacitor upper electrode formed in the same layer as the signal line and electrically connected to the storage capacitor element, and the storage capacitor element disposed at each intersection of the signal line and the scanning line An inspection substrate for an active matrix liquid crystal display device having a switching element electrically connected to a capacitor element, wherein at least one of the signal line and the scanning line meanders. Inspection board for equipment.   10. The inspection substrate for an active matrix liquid crystal display device according to claim 9, wherein the signal line meanders on the storage capacitor line.   At least one of the signal line and the scanning line is configured by alternately arranging two kinds of metals constituting the gate electrode and the source or drain electrode of the switching element, and is electrically connected to each end portion via a contact hole. The inspection substrate for an active matrix type liquid crystal display device according to claim 9, wherein the inspection substrate has a contact chain structure connected to each other.   9. The active matrix type according to claim 8, wherein a predetermined size of the dummy electrode and the storage capacitor upper electrode is 10 μm or more, and a predetermined width of a part of the signal line is 10 μm or more. Inspection board for liquid crystal display devices.

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