JP2005317800A5 - - Google Patents
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- Publication number
- JP2005317800A5 JP2005317800A5 JP2004134443A JP2004134443A JP2005317800A5 JP 2005317800 A5 JP2005317800 A5 JP 2005317800A5 JP 2004134443 A JP2004134443 A JP 2004134443A JP 2004134443 A JP2004134443 A JP 2004134443A JP 2005317800 A5 JP2005317800 A5 JP 2005317800A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004134443A JP4253708B2 (ja) | 2004-04-28 | 2004-04-28 | 露光装置 |
| CN2010102005923A CN101846889B (zh) | 2004-04-28 | 2005-04-28 | 曝光装置 |
| TW094113749A TWI347450B (en) | 2004-04-28 | 2005-04-28 | Exposing apparatus |
| KR1020067022508A KR101103155B1 (ko) | 2004-04-28 | 2005-04-28 | 노광 장치 |
| PCT/JP2005/008117 WO2005106596A1 (ja) | 2004-04-28 | 2005-04-28 | 露光装置 |
| CN2005800133483A CN1947069B (zh) | 2004-04-28 | 2005-04-28 | 曝光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004134443A JP4253708B2 (ja) | 2004-04-28 | 2004-04-28 | 露光装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005317800A JP2005317800A (ja) | 2005-11-10 |
| JP2005317800A5 true JP2005317800A5 (enExample) | 2007-05-24 |
| JP4253708B2 JP4253708B2 (ja) | 2009-04-15 |
Family
ID=35241832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004134443A Expired - Fee Related JP4253708B2 (ja) | 2004-04-28 | 2004-04-28 | 露光装置 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4253708B2 (enExample) |
| KR (1) | KR101103155B1 (enExample) |
| CN (2) | CN101846889B (enExample) |
| TW (1) | TWI347450B (enExample) |
| WO (1) | WO2005106596A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101002156B1 (ko) | 2008-03-31 | 2010-12-17 | 다이니폰 스크린 세이조우 가부시키가이샤 | 패턴 묘화 장치 및 패턴 묘화 방법 |
| KR102065012B1 (ko) * | 2016-07-26 | 2020-01-10 | 에이피시스템 주식회사 | 레이저 처리장치 및 레이저 처리방법 |
| JP6917727B2 (ja) * | 2017-02-15 | 2021-08-11 | 株式会社ディスコ | レーザー加工装置 |
| JP7211627B2 (ja) * | 2020-04-10 | 2023-01-24 | Ａｌｉｔｅｃｓ株式会社 | パターン測定装置、方法及びプログラム、並びに、パターン検査装置、方法及びプログラム |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6010730A (ja) * | 1983-06-30 | 1985-01-19 | Toshiba Corp | 半導体ウエハの位置合わせ方法 |
| JP2551049B2 (ja) * | 1987-11-10 | 1996-11-06 | 株式会社ニコン | アライメント装置 |
| JP2797506B2 (ja) * | 1989-08-31 | 1998-09-17 | 凸版印刷株式会社 | 露光装置 |
| JPH03201454A (ja) * | 1989-12-28 | 1991-09-03 | Fujitsu Ltd | 半導体装置の位置合わせ方法 |
| JP2004012903A (ja) * | 2002-06-07 | 2004-01-15 | Fuji Photo Film Co Ltd | 露光装置 |
-
2004
- 2004-04-28 JP JP2004134443A patent/JP4253708B2/ja not_active Expired - Fee Related
-
2005
- 2005-04-28 WO PCT/JP2005/008117 patent/WO2005106596A1/ja not_active Ceased
- 2005-04-28 KR KR1020067022508A patent/KR101103155B1/ko not_active Expired - Fee Related
- 2005-04-28 CN CN2010102005923A patent/CN101846889B/zh not_active Expired - Fee Related
- 2005-04-28 CN CN2005800133483A patent/CN1947069B/zh not_active Expired - Fee Related
- 2005-04-28 TW TW094113749A patent/TWI347450B/zh not_active IP Right Cessation