JP2005308743A - ギャップ及び誘電媒体の非接触測定のための容量性センサ及び方法 - Google Patents
ギャップ及び誘電媒体の非接触測定のための容量性センサ及び方法 Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
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Abstract
【解決手段】 表面(12)と、互いに電気的に絶縁された2つの重ね合わされた導電性プレート(16、18、19)及びプレートに結合されたセンサ回路から構成される容量性センサ(10)との間の変位を非接触測定する方法は、変位が表面とプレートの1つとの間のギャップ(14)の距離であるように表面(12)に近接して容量性センサ(10)を位置付けし、プレートに高周波信号(24)を加える段階と、高周波信号とセンサプレート(18)を加え、回路の増幅器(20)の電圧利得を制御し、センサの静電容量がセンサと表面との間の変位を示すようにし、増幅器の出力と高周波信号とを区別し(34)と、増幅器の出力と高周波信号との間の差に基づいて変位の値(42)を決定する。
【選択図】 図1
Description
Vinは非反転入力28に加えられる高周波信号であり、C(measurement)はセンサプレート18と表面12との間の静電容量であり、C(feedback)52はop−ampの出力32とop−ampの反転入力30との間の静電容量であり、C(measurement)は測定されるべき静電容量値23であって、ギャップ14の距離を示す。
12 表面
14 ギャップ
Claims (10)
- 表面(12)と、互いに電気的に絶縁された少なくとも2つの重ね合わされた導電性プレート及び前記プレートに結合されたセンサ回路から構成される容量性センサ(10)との間の変位を非接触測定する方法であって、
(a)前記変位が前記表面と前記プレートの1つとの間のギャップ(14)の距離であるように前記表面(12)に近接して前記容量性センサ(10)を位置付ける段階と、
(b)前記プレートに高周波信号(24)を加える段階と、
(c)前記高周波信号と、前記センサ及び前記表面間の変位を表す前記導電性プレートのセンサプレート(18)からの信号とを加えて、前記回路の増幅器(20)の電圧利得を制御する段階と、
(d)前記増幅器の出力と前記高周波信号とを区別化する段階(34)と、
(e)前記増幅器の出力と前記高周波信号の間の差に基づいて前記変位の値(42)を決定する段階と、
を含む方法。 - 前記区別化する段階は、前記増幅器の出力のピークと前記高周波信号のピークとの間の差(38)を感知する段階を更に含む請求項1に記載の方法。
- 前記利得を制御する段階は、演算増幅器(20)への入力(30、28)として前記センサプレートからの信号と前記高周波信号を加える段階を更に含むことを特徴とする請求項1に記載の方法。
- 前記利得を制御する段階は、演算増幅器(20)への入力(30、28)として前記センサプレートからの信号と前記高周波信号とを加える段階と、前記センサプレートからの信号に対するフィードバック(22)として前記増幅器の出力を加える段階を更に含む請求項1に記載の方法。
- 前記区別する段階は、前記増幅器の出力と前記高周波信号との間の差を線形化する段階(40)を更に含むことを特徴とする請求項1に記載の方法。
- 前記利得を制御する段階は、演算増幅器(20)への入力(30、28)として前記センサプレートからの信号と前記高周波信号とを加える段階を更に含み、前記区別する段階は、前記ギャップを示す周期的な差分信号を発生する差動増幅器(34)への入力として前記演算増幅器の出力(32)と前記高周波信号(24)とを加える段階と、前記周期的な信号のピーク値を示す信号を発生するピーク検出器(38)に前記周期的な差分信号を加える段階とを更に含み、前記ピーク値は前記ギャップを示すことを特徴とする請求項1に記載の方法。
- 前記少なくとも2つの重ね合わされた導電性プレートは、前記センサプレート(18)、アクティブシールドプレート(16)、及びパッシブシールドプレート(19)を更に含み、前記高周波信号は、前記センサプレート及び前記アクティブシールドプレートに加えられ、前記パッシブシールドプレートは、前記アクティブシールドプレート及び前記センサプレートから絶縁され、前記方法は更に、前記パッシブシールドプレートを抵抗性接続を介してアースに接続する段階を含む請求項1に記載の方法。
- 該少なくとも2つの重ね合わされた導電性プレートは、前記センサプレート(18)、アクティブシールドプレート(16)、及びパッシブシールドプレート(19)を更に含み、前記高周波信号は、前記センサプレート及び前記アクティブシールドプレートに加えられ、前記パッシブシールドプレートは、前記アクティブシールドプレート及び前記センサプレートから絶縁され、前記方法は更に、前記パッシブシールドプレートを接地する段階と、前記パッシブシールドプレートを抵抗性導電経路を介して前記高周波信号に結合する段階とを含む請求項1に記載の方法。
- 前記パッシブシールドプレートの結合によって誘起される直流(DC)信号の高周波信号を監視する段階(36)と、DC信号検出時に前記変位の値の決定を抑制する段階とを更に含む請求項8に記載の方法。
- 互いに電気的に絶縁された少なくとも3つの重ね合わされた導電性プレート(16、18、19)と前記プレートに結合されたセンサ回路とから構成される容量性センサ(10)の近接する媒体(14)の特性を測定する方法であって、前記プレートは、センサプレート(18)と、パッシブシールドプレート(19)と、該センサプレート及びパッシブシールドプレート間に挟まれたアクティブシールドプレート(16)とを含み、前記方法は、
(a)前記媒体が前記センサプレートに容量的に結合されるよう前記媒体に近接して前記容量性センサを位置付ける段階と、
(b)前記センサプレート及び前記アクティブシールドプレートに高周波信号(24)を加える段階であって、前記媒体は前記高周波信号に対する前記センサプレートの応答に影響を与える段階と、
(c)前記高周波信号及び前記センサプレートによって前記センサ回路上に誘起された前記媒体を示す信号を加えて、前記回路の増幅器(20)の電圧利得を制御する段階と、
(d)前記増幅器の出力と前記高周波信号を区別する段階(34)と、
(e)前記加えられた信号と前記高周波信号との間の差に基づいて前記媒体を示す値(42)を決定する段階と、
を含む方法。
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US10/825,185 US7256588B2 (en) | 2004-04-16 | 2004-04-16 | Capacitive sensor and method for non-contacting gap and dielectric medium measurement |
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- 2005-04-15 JP JP2005117633A patent/JP4713205B2/ja not_active Expired - Fee Related
- 2005-04-15 CN CNB2005100652735A patent/CN100460804C/zh not_active Expired - Fee Related
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2006
- 2006-01-25 US US11/338,744 patent/US7084643B2/en not_active Expired - Lifetime
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JP2012173293A (ja) * | 2011-02-23 | 2012-09-10 | General Electric Co <Ge> | 速度に依存する動的自動利得制御機能を有するセンサインタフェースの方法及びシステム |
Also Published As
Publication number | Publication date |
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US20050231214A1 (en) | 2005-10-20 |
JP4713205B2 (ja) | 2011-06-29 |
CN100460804C (zh) | 2009-02-11 |
EP1586853A1 (en) | 2005-10-19 |
US20060139035A1 (en) | 2006-06-29 |
US7084643B2 (en) | 2006-08-01 |
US7256588B2 (en) | 2007-08-14 |
EP1586853B1 (en) | 2015-12-09 |
CN1683901A (zh) | 2005-10-19 |
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