JP2005306699A - Glass composition for silver paste, photosensitive silver paste using the same and electrode pattern - Google Patents

Glass composition for silver paste, photosensitive silver paste using the same and electrode pattern Download PDF

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JP2005306699A
JP2005306699A JP2004129764A JP2004129764A JP2005306699A JP 2005306699 A JP2005306699 A JP 2005306699A JP 2004129764 A JP2004129764 A JP 2004129764A JP 2004129764 A JP2004129764 A JP 2004129764A JP 2005306699 A JP2005306699 A JP 2005306699A
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silver paste
glass composition
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paste
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JP4789426B2 (en
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Nobuyuki Suzuki
信之 鈴木
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Taiyo Holdings Co Ltd
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Taiyo Ink Mfg Co Ltd
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Priority to CN2005100678025A priority patent/CN1690852B/en
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C8/00Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
    • C03C8/02Frit compositions, i.e. in a powdered or comminuted form
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C8/00Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
    • C03C8/02Frit compositions, i.e. in a powdered or comminuted form
    • C03C8/04Frit compositions, i.e. in a powdered or comminuted form containing zinc
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0047Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/06Silver salts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/20Constructional details
    • H01J11/22Electrodes, e.g. special shape, material or configuration
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/20Constructional details
    • H01J11/34Vessels, containers or parts thereof, e.g. substrates

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Ceramic Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Conductive Materials (AREA)
  • Glass Compositions (AREA)
  • Compositions Of Macromolecular Compounds (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a highly fine electric conductor pattern excellent in long term reliability with low migration by using a photosensitive silver paste which uses a glass composition developed for an electric conductive paste capable of preventing the induction of electrode migration even if used for the highly fine electric conductor pattern. <P>SOLUTION: The glass composition for a silver paste contains boron of 10 mass% or less in terms of B<SB>2</SB>O<SB>3</SB>and silica as essential components. The following equation (I) relating to a compositional ratio in terms of oxides is approved to the glass composition for the silver paste and the photosensitive silver paste involving the glass composition : B<SB>2</SB>O<SB>3</SB>mass%+ZnO mass% (including 0 mass%)≤SiO<SB>2</SB>mass% (I). <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、銀ペースト用ガラス組成物及び該ガラス組成物を用いた感光性銀ペーストに関わり、詳しくは、スクリーン印刷法、フォトリソグラフィー法にて形成されるパターン塗膜の焼成により得られる電極材料として好適に用いることができる銀ペースト用ガラス組成物及び該ガラス組成物を用いて形成した感光性銀ペーストに関するものである。   The present invention relates to a glass composition for silver paste and a photosensitive silver paste using the glass composition, and more specifically, an electrode material obtained by firing a pattern coating film formed by a screen printing method or a photolithography method. The present invention relates to a glass composition for silver paste that can be suitably used as a photosensitive silver paste and a photosensitive silver paste formed using the glass composition.

従来、プラズマディスプレイパネルやCCDセンサ、イメージセンサ等の部品において、無アルカリガラスやその他の各種ガラス基板上の電極は、蒸着法によって形成されていた。しかしながら、この蒸着法は、真空容器内に電極形成部材を収納して金属膜を蒸着するものであり、装置が大がかりで高価であるばかりでなく、部材の出し入れがわずらわしく、真空引きに時間を要するなど作業性が悪いという欠点があった。また、蒸着法では電極の厚膜化は困難であり、ラインの低抵抗化には不向きであった。   Conventionally, in parts such as plasma display panels, CCD sensors, and image sensors, electrodes on non-alkali glass and other various glass substrates have been formed by vapor deposition. However, in this vapor deposition method, an electrode forming member is housed in a vacuum vessel to deposit a metal film, and not only the apparatus is large and expensive, but the loading and unloading of the member is cumbersome and time is required for evacuation. There was a fault that workability was bad. Further, it is difficult to increase the thickness of the electrode by vapor deposition, and it is not suitable for reducing the resistance of the line.

これに対し、基板上に電極パターン層を形成する他の方法として、非感光性の有機バインダーに導電粉末を混合したペースト材料、例えば乾燥型や熱硬化型の導電性ペーストを、スクリーン印刷等の印刷技術を用いて基板上にパターン化させる方法や、感光性導電ペーストを用いフォトリソグラフィー技術を利用した導電体パターンの形成方法が提案されている(例えば、特許文献1、2参照。)。かかる技術は複雑な工程を経ることなく導電体パターンを形成し得る点で優れるものの、電極ライン間のスペースが狭い高精細パターン形成に利用した場合、マイグレーションを誘発させ、長期信頼性が得られないという状況にあった。
特開平10−269848号公報 特開平11−224531号公報
On the other hand, as another method for forming the electrode pattern layer on the substrate, a paste material in which a conductive powder is mixed with a non-photosensitive organic binder, for example, a dry type or thermosetting type conductive paste is used for screen printing or the like. A method of patterning on a substrate using a printing technique and a method of forming a conductor pattern using a photosensitive conductive paste and utilizing a photolithography technique have been proposed (see, for example, Patent Documents 1 and 2). Although this technique is excellent in that a conductor pattern can be formed without going through a complicated process, migration is induced and long-term reliability cannot be obtained when it is used for forming a high-definition pattern in which the space between electrode lines is narrow. It was in the situation.
Japanese Patent Laid-Open No. 10-269848 JP-A-11-224531

本発明は、上記従来技術が抱える問題点に鑑み開発されたものであり、その主たる目的は、高精細な導電体パターンに用いた場合にも電極マイグレーションの誘発を抑制し得る導電性ペースト用ガラス組成物を開発し、該ガラス組成物を用いた感光性銀ペーストを使用することにより、低マイグレーション性による長期信頼性に優れる高精細導電体パターンを提供することにある。   The present invention was developed in view of the above-mentioned problems of the prior art, and its main purpose is a glass for conductive paste capable of suppressing the induction of electrode migration even when used for a high-definition conductor pattern. By developing a composition and using a photosensitive silver paste using the glass composition, an object is to provide a high-definition conductor pattern having excellent long-term reliability due to low migration.

本発明者等は、上記目的の実現に向け鋭意研究した結果、導電性ペーストを用いて形成された高精細パターンにおけるマイグレーションの誘発には、導電性ペーストに含有される低融点ガラスフリットの組成が重要な関わりを有することを知見した。更に、その組成比を特定の範囲に限定することにより、低マイグレーション性による導電性と高精細パターン形成性に優れる導電体パターンを複雑な工程を経ることなく容易に得られることを見出し、本発明を完成するに至った。   As a result of intensive research aimed at realizing the above object, the present inventors have found that the composition of the low-melting-point glass frit contained in the conductive paste is used to induce migration in a high-definition pattern formed using the conductive paste. It was found to have an important relationship. Further, by limiting the composition ratio to a specific range, it has been found that a conductive pattern excellent in conductivity and low-definition pattern forming property due to low migration properties can be easily obtained without going through complicated steps. It came to complete.

すなわち、本発明により、ホウ素及びシリカを必須成分とし、かつ、ホウ素がB換算でガラス組成物中に10質量%以下含まれる銀ペースト用ガラス組成物であって、その組成比に関し酸化物換算で下式(I)が成り立つことを特徴とする銀ペースト用ガラス組成物が提供される。 That is, according to the present invention, a glass composition for silver paste containing boron and silica as essential components and containing 10% by mass or less of boron in a glass composition in terms of B 2 O 3 , and oxidizing the composition ratio thereof. There is provided a glass composition for silver paste characterized in that the following formula (I) is established in terms of physical properties.

質量%+ZnO質量%(0質量%を含む)≦SiO質量% (I)
本発明の一態様において、銀ペースト用ガラス組成物中のSiO含有率は8〜30質量%であることが好ましい。
B 2 O 3 mass% + ZnO mass% (including 0 mass%) ≦ SiO 2 mass% (I)
In one aspect of the present invention, SiO 2 content of the silver paste glass composition is preferably 8 to 30 wt%.

また、本発明により、銀粉末、感光性有機成分、および前記ガラス組成物を含有する感光性銀ペーストであって、該ガラス組成物の含有率が銀粉末100質量部に対して2〜15質量部の範囲である感光性銀ペーストが提供される。   According to the present invention, there is also provided a photosensitive silver paste containing silver powder, a photosensitive organic component, and the glass composition, wherein the content of the glass composition is 2 to 15 masses per 100 mass parts of the silver powder. A photosensitive silver paste that is part of the range is provided.

更に、本発明により、前記感光性銀ペーストを焼成してなる電極パターンが提供される。   Furthermore, the present invention provides an electrode pattern formed by firing the photosensitive silver paste.

本発明により、高精細な電極パターンに用いた場合にもマイグレーション特性(マイグレーション抑制効果)に優れた感光性銀ペーストの提供が可能となった。   According to the present invention, it is possible to provide a photosensitive silver paste excellent in migration characteristics (migration suppression effect) even when used for a high-definition electrode pattern.

ガラス基板上に形成される電極用導電性ペーストとして、好ましくは空気雰囲気下、620℃以下の温度における焼成で優れた導電性を得るためには、導電粉末の選択が重要であり、その中で酸化の影響を受けず貴金属の中でも比較的安価な銀粉を使用することが一般的である。スクリーン印刷法やフォトリソグラフィー法を用いることにより、例えばライン/スペース=40/40(μm)程度の高精細なパターニングは可能であるが、このような高精細パターンにおいては従来用いられている銀ペーストではマイグレーションの問題が発生してしまい、高精細化に限界があったことは上述の通りである。   As a conductive paste for electrodes formed on a glass substrate, in order to obtain excellent conductivity by firing at a temperature of 620 ° C. or less, preferably in an air atmosphere, selection of conductive powder is important. It is common to use silver powder which is not affected by oxidation and is relatively inexpensive among precious metals. By using a screen printing method or a photolithography method, for example, high-definition patterning of about line / space = 40/40 (μm) is possible. In such a high-definition pattern, a silver paste that is conventionally used Then, as mentioned above, there is a problem of migration and there is a limit to high definition.

銀ペーストに使用される低融点ガラスフリットは、その軟化点(以下、「SP値」と称する。)や添加量が銀ペースト等の導電性ペーストの密着性及び抵抗値に大きな影響を及ぼすことは知られているが、本発明者等は低マイグレーション化の観点から低融点ガラスフリットに着目し鋭意検討した結果、マイグレーションの抑制には以下に述べる3成分の影響が大きいことが判明した。即ち、SiOは構成成分比(質量部)を増加させることがマイグレーションの抑制に効果があり、一方B及びZnOは構成成分比を増加させるとマイグレーションを顕著に悪化させる。更に、本発明者等は、これら成分の構成比率を検証した結果、下式(I)を満たす構成比率においてマイグレーション特性が最も良好となることを見出し、本発明を完成するに至った。 The low melting point glass frit used for the silver paste has a softening point (hereinafter referred to as “SP value”) and the amount of addition greatly affecting the adhesion and resistance value of the conductive paste such as the silver paste. As is known, the present inventors focused on the low melting point glass frit from the viewpoint of low migration, and as a result, it was found that the influence of the three components described below is large in suppressing migration. That is, increasing the component ratio (parts by mass) of SiO 2 is effective in suppressing migration, while B 2 O 3 and ZnO significantly deteriorate migration when the component ratio is increased. Further, as a result of verifying the composition ratios of these components, the present inventors have found that the migration characteristics are the best at the composition ratio satisfying the following formula (I), and have completed the present invention.

質量%+ZnO質量%(0質量%を含む)≦SiO質量% (I)
但し、Bは10質量%以下である。
B 2 O 3 mass% + ZnO mass% (including 0 mass%) ≦ SiO 2 mass% (I)
However, B 2 O 3 is 10 wt% or less.

以下、本発明の銀ペースト用ガラス組成物及び該ガラス組成物を用いた感光性銀ペースト及び電極パターンについて詳細に説明する。   Hereinafter, the glass composition for silver paste of the present invention, and the photosensitive silver paste and electrode pattern using the glass composition will be described in detail.

本発明の銀ペースト用ガラス組成物は、ホウ素及びシリカを必須成分とし、更にその組成比に関し酸化物換算で下式(I)が成り立つことを特徴とする。   The glass composition for silver paste of the present invention is characterized in that boron and silica are essential components, and further, the following formula (I) is established in terms of oxide with respect to the composition ratio.

質量%+ZnO質量%(0質量%を含む)≦SiO質量% (I)
SiO成分は銀ペーストにおけるマイグレーションに対する抑制効果を有し、式(I)を満たす限りその含有率は特に限定されるものではないが、8〜30質量%の範囲で配合することが好ましい。8質量%未満ではマイグレーション特性が低下し、一方30質量%を超えると軟化点が高くなりすぎ、例えば620℃以下の温度におけるガラス基板上への焼き付けが困難となる場合がある。
B 2 O 3 mass% + ZnO mass% (including 0 mass%) ≦ SiO 2 mass% (I)
The SiO 2 component has an inhibitory effect on migration in the silver paste, and its content is not particularly limited as long as it satisfies the formula (I), but it is preferably blended in the range of 8 to 30% by mass. If it is less than 8% by mass, the migration characteristics deteriorate, while if it exceeds 30% by mass, the softening point becomes too high, and for example, baking onto a glass substrate at a temperature of 620 ° C. or less may be difficult.

及びZnOは、その含有率が増加するとマイグレーション特性に悪影響を及ぼす成分であり、その含有率については式(I)を満たすことが必要である。 B 2 O 3 and ZnO are adversely affect components in the migration characteristics when the content rate increases, it is necessary to satisfy the formula (I) for that content.

はガラス組成物の軟化点を下げるために本発明において必須成分として用いられる。本発明のガラス組成物として好ましい軟化点は400〜590℃であり、軟化点がかかる範囲内となるようBの添加量を調整することが好ましい。但し、B含有率が10質量%を超えるとマイグレーション特性の低下の程度が大きくなるため、その含有率は10質量%を超えるものではない。Bの好ましい含有率は1〜8質量%、より好ましくは2〜6質量%未満である。 B 2 O 3 is used as an essential component in the present invention in order to lower the softening point of the glass composition. The preferred softening point for the glass composition of the present invention is 400 to 590 ° C., and it is preferable to adjust the amount of B 2 O 3 added so that the softening point falls within this range. However, if the B 2 O 3 content exceeds 10% by mass, the degree of deterioration of the migration characteristics increases, and therefore the content does not exceed 10% by mass. B 2 O A preferred content of 3 to 8 wt%, more preferably less than 2-6% by weight.

ZnOは必須成分ではないが上記の通り式(I)の構成要素であり、含有される場合には該式を満たすことを要する。また、その含有率が12質量%を超えるとガラスが結晶化により不安定となり得、更にはマイグレーション特性を低下させると共に高温で焼成した際に黄変を引き起こすため、好ましい含有率は0〜12質量%である。   Although ZnO is not an essential component, it is a constituent element of the formula (I) as described above. Further, if the content exceeds 12% by mass, the glass may become unstable due to crystallization, and further, the migration characteristics are deteriorated and yellowing is caused when baked at a high temperature. %.

上記本発明のガラス組成物は、鉛系又はビスマス系ガラス組成物であり得、Pb又はBi換算で各々40〜90質量%の範囲で配合することが好ましい。40質量%未満では、銀ペーストをガラス基板上に焼き付けする際の基板に対する導体膜の接着強度が十分でなく、一方90質量%を超えるとガラスフリットの軟化点が低くなりすぎてペーストの脱バインダ性が悪化するために導体膜の焼結性が低下し、また基板との接着強度が低下する場合がある。銀ペースト用材料として用いられる本発明のガラス組成物において、銀ペーストの密着性及び抵抗値の観点から、その好ましい軟化点は400〜590℃であり、また銀ペースト中におけるその好ましい配合率はペースト中の銀粉100質量部に対し2〜15質量部である。 The glass composition of the present invention may be a lead-based or bismuth-based glass composition, and is preferably blended in the range of 40 to 90% by mass in terms of Pb 2 O 3 or Bi 2 O 3 . If the amount is less than 40% by mass, the adhesive strength of the conductor film to the substrate is not sufficient when the silver paste is baked on the glass substrate, whereas if it exceeds 90% by mass, the softening point of the glass frit becomes too low and the paste debinding is performed. As a result, the sinterability of the conductor film is lowered, and the adhesive strength with the substrate may be lowered. In the glass composition of the present invention used as a material for silver paste, the preferred softening point is 400 to 590 ° C. from the viewpoint of the adhesiveness and resistance value of the silver paste, and the preferred compounding ratio in the silver paste is the paste. It is 2-15 mass parts with respect to 100 mass parts of silver powder in.

本発明のガラス組成物は、更にBaO、Alを含有していてもよく、好ましい含有率はBaOが0〜20質量%、Alが0〜5質量%、より好ましくは0.5〜2.5質量%である。BaO含有率が20質量%を超えるとガラス組成物の膨張係数が大きくなりすぎる場合があるため好ましくなく、またAl含有率が5質量%を超えるとガラス組成物の軟化点が高くなり、銀ペーストをガラス基板上に焼き付けする際に、基板に対する導体膜の接着強度が不足する場合があるため好ましくない。 The glass composition of the present invention may further contain BaO and Al 2 O 3 , and preferable contents are 0 to 20% by mass of BaO, 0 to 5% by mass of Al 2 O 3 , more preferably 0. .5 to 2.5% by mass. If the BaO content exceeds 20% by mass, the glass composition may have an excessively large expansion coefficient, which is not preferable. If the Al 2 O 3 content exceeds 5% by mass, the softening point of the glass composition increases. When the silver paste is baked on the glass substrate, the adhesive strength of the conductor film to the substrate may be insufficient, which is not preferable.

また、本発明者等による検証により、上記成分以外にNaO、LiO、KOなどのアルカリ金属酸化物もまた、高精細パターンにおけるマイグレーションの誘発に関与し得ることが明らかとなり、故にアルカリ金属酸化物は本発明のガラス組成物に含有されないことが好ましく、含有される場合においてもその含有率は低い方が好ましい。また、アルカリ成分は銀ペースト中の銀粉末と反応し得、ガラス基板が黄色化することもあるため、黄色化を抑制する観点からも含有されないことが好ましい。 In addition, verification by the present inventors revealed that alkali metal oxides such as Na 2 O, Li 2 O, and K 2 O other than the above components can also be involved in inducing migration in a high-definition pattern, Therefore, it is preferable that an alkali metal oxide is not contained in the glass composition of the present invention, and even when it is contained, it is preferable that the content is low. Moreover, since an alkali component can react with the silver powder in a silver paste and a glass substrate may yellow, it is preferable not to contain from a viewpoint of suppressing yellowing.

本発明のガラス組成物の粉末粒子径としては、解像性の観点から、マイクロトラックなどのレーザー回折散乱式粒度分布測定装置またはレーザードップラー法を利用した粒度分布測定装置を用いて測定される平均粒子径において好ましくは10μm以下であり、また結晶性及び非結晶性のいずれであってもよい。   As the powder particle diameter of the glass composition of the present invention, from the viewpoint of resolution, an average measured using a laser diffraction scattering type particle size distribution measuring device such as Microtrac or a particle size distribution measuring device using a laser Doppler method. The particle diameter is preferably 10 μm or less, and may be crystalline or non-crystalline.

本発明のガラス組成物は、銀ペースト用材料として銀粉末、有機成分と共に用いられ、スクリーン印刷法やフォトリソグラフィー法を用いて形成される高精細な電極パターンにおいてマイグレーションの発生を抑制することを可能とするものである。   The glass composition of the present invention is used together with silver powder and an organic component as a silver paste material, and can suppress the occurrence of migration in a high-definition electrode pattern formed by using a screen printing method or a photolithography method. It is what.

有機成分には有機バインダーが含まれ、該有機バインダーは焼成前における各成分の結合材、または組成物に対する光硬化性や現像性付与材として機能する。この有機バインダーは、感光性及び非感光性のいずれでもよくカルボキシル基を有する樹脂が含まれる。具体的にはそれ自体がエチレン性不飽和二重結合を有するカルボキシル基含有感光性樹脂及びエチレン性不飽和二重結合を有さないカルボキシル基含有樹脂のいずれも使用可能である。好適に使用できる樹脂(オリゴマー及びポリマーのいずれでもよい)としては、以下のようなものが挙げられる。   The organic component includes an organic binder, and the organic binder functions as a binder for each component before firing, or as a material for imparting photocurability and developability to the composition. This organic binder may be either photosensitive or non-photosensitive and includes a resin having a carboxyl group. Specifically, any of a carboxyl group-containing photosensitive resin itself having an ethylenically unsaturated double bond and a carboxyl group-containing resin not having an ethylenically unsaturated double bond can be used. Examples of the resin (which may be either an oligomer or a polymer) that can be suitably used include the following.

(1)(a)不飽和カルボン酸と(b)不飽和二重結合を有する化合物とを共重合させることによって得られるカルボキシル基含有樹脂;
(2)(a)不飽和カルボン酸と(b)不飽和二重結合を有する化合物との共重合体に、エチレン性不飽和基をペンダントとして付加させることによって得られるカルボキシル基含有感光性樹脂;
(3)(c)エポキシ基と不飽和二重結合を有する化合物と(b)不飽和二重結合を有する化合物との共重合体に、(a′)飽和又は不飽和カルボン酸を反応させ、生成した2級の水酸基に(d)多塩基酸無水物を反応させて得られるカルボキシル基含有樹脂;
(4)(e)不飽和二重結合を有する酸無水物と(b)不飽和二重結合を有する化合物との共重合体に、(f)水酸基を有する化合物を反応させて得られるカルボキシル基含有樹脂;
(5)(e)不飽和二重結合を有する酸無水物と(b)不飽和二重結合を有する化合物との共重合体に、(f′)水酸基と不飽和二重結合を有する化合物を反応させて得られるカルボキシル基含有感光性樹脂;
(6)(g)エポキシ化合物と(h)不飽和モノカルボン酸とを反応させ、生成した2級の水酸基に(d)多塩基酸無水物を反応させて得られるカルボキシル基含有感光性樹脂;
(7)(b)不飽和二重結合を有する化合物とグリシジル(メタ)アクリレートとの共重合体のエポキシ基に、(i)1分子中に1つのカルボキシル基を有し、エチレン性不飽和結合を持たない有機酸を反応させ、生成した2級の水酸基に(d)多塩基酸無水物を反応させて得られるカルボキシル基含有樹脂;
(8)(j)水酸基含有ポリマーに(d)多塩基酸無水物を反応させて得られるカルボキシル基含有樹脂;
(9)(j)水酸基含有ポリマーに(d)多塩基酸無水物を反応させて得られるカルボキシル基含有樹脂に、(c)エポキシ基と不飽和二重結合を有する化合物をさらに反応させて得られるカルボキシル基含有感光性樹脂。
(1) a carboxyl group-containing resin obtained by copolymerizing (a) an unsaturated carboxylic acid and (b) a compound having an unsaturated double bond;
(2) A carboxyl group-containing photosensitive resin obtained by adding an ethylenically unsaturated group as a pendant to a copolymer of (a) an unsaturated carboxylic acid and (b) a compound having an unsaturated double bond;
(3) (a) a saturated or unsaturated carboxylic acid is reacted with a copolymer of (c) a compound having an epoxy group and an unsaturated double bond and (b) a compound having an unsaturated double bond; A carboxyl group-containing resin obtained by reacting the generated secondary hydroxyl group with (d) a polybasic acid anhydride;
(4) A carboxyl group obtained by reacting (f) a compound having a hydroxyl group with a copolymer of (e) an acid anhydride having an unsaturated double bond and (b) a compound having an unsaturated double bond Containing resin;
(F) a compound having a hydroxyl group and an unsaturated double bond is added to a copolymer of (e) an acid anhydride having an unsaturated double bond and (b) a compound having an unsaturated double bond. Carboxyl group-containing photosensitive resin obtained by reaction;
(6) A carboxyl group-containing photosensitive resin obtained by reacting (g) an epoxy compound and (h) an unsaturated monocarboxylic acid and reacting the resulting secondary hydroxyl group with (d) a polybasic acid anhydride;
(7) (b) An epoxy group of a copolymer of a compound having an unsaturated double bond and glycidyl (meth) acrylate, (i) having one carboxyl group in one molecule, and an ethylenically unsaturated bond A carboxyl group-containing resin obtained by reacting an organic acid not having a hydrogen atom and reacting the resulting secondary hydroxyl group with (d) a polybasic acid anhydride;
(8) (j) a carboxyl group-containing resin obtained by reacting a hydroxyl group-containing polymer with (d) a polybasic acid anhydride;
(9) Obtained by further reacting (c) a compound having an unsaturated double bond with a carboxyl group-containing resin obtained by reacting (j) a hydroxyl group-containing polymer with (d) a polybasic acid anhydride. Carboxyl group-containing photosensitive resin.

また、有機成分として印刷タイプの樹脂も使用することができ、該樹脂としては、例えばニトロセルロース、エチルセルロース、ヒドロキシエチルセルロース等のセルロース系樹脂;ポリブチルアクリレート、ポリメタクリレート等のアクリル系樹脂;アクリル系共重合体;ポリビニルアルコール;ポリビニルブチラール等が挙げられ、これらを単独で、あるいは2種以上を混合して用いることができる。   In addition, a printing type resin can be used as the organic component. Examples of the resin include cellulose resins such as nitrocellulose, ethyl cellulose, and hydroxyethyl cellulose; acrylic resins such as polybutyl acrylate and polymethacrylate; Polymers; polyvinyl alcohol; polyvinyl butyral and the like can be mentioned, and these can be used alone or in admixture of two or more.

前記したようなカルボキシル基含有感光性樹脂を含む感光性有機成分、及びカルボキシル基含有樹脂、あるいは印刷タイプの樹脂を含む非感光性有機成分は、単独で又は混合して用いてもよいが、いずれの場合でもこれらを含む有機バインダーは合計で組成物全量の5〜50質量%の割合で配合することが好ましい。これらの樹脂の配合量が上記範囲よりも少ない場合、形成される塗膜中の上記樹脂の分布が不均一になり易く、充分な光硬化性及び光硬化深度が得られ難くなるために、選択的露光、現像によるパターニングが困難となる。一方、上記範囲よりも多くなると、焼成時のパターンのよれや線幅収縮を生じ易くなるので好ましくない。   The photosensitive organic component including the carboxyl group-containing photosensitive resin as described above, and the non-photosensitive organic component including the carboxyl group-containing resin or the printing type resin may be used alone or in combination. Even in this case, it is preferable that the organic binder containing them is blended in a proportion of 5 to 50% by mass of the total amount of the composition. When the blending amount of these resins is less than the above range, the distribution of the resin in the formed coating film is likely to be non-uniform, and it is difficult to obtain sufficient photocurability and photocuring depth. Patterning by mechanical exposure and development becomes difficult. On the other hand, if the amount is larger than the above range, it is not preferable because the pattern is liable to be distorted or the line width is reduced during firing.

また、上記カルボキシル基含有感光性樹脂及びカルボキシル基含有樹脂としては、それぞれ重量平均分子量1,000〜100,000、より好ましくは5,000〜70,000、及び酸価30〜250mgKOH/gであるものを好適に用いることができ、更にカルボキシル基含有感光性樹脂の場合、その二重結合当量が350〜2,000、より好ましくは400〜1,500のものを好適に用いることができる。上記樹脂の分子量が1,000より低い場合、現像時の皮膜の密着性に悪影響を与えることがあり、一方、100,000よりも高い場合、現像不良を生じ易いので好ましくない。また、酸価が30mgKOH/gより低い場合、アルカリ水溶液に対する溶解性が不充分で現像不良を生じ易く、一方、250mgKOH/gより高い場合、現像時に皮膜の密着性の劣化や光硬化部(露光部)の溶解が生じ得るので好ましくない。さらに、カルボキシル基含有感光性樹脂の場合、感光性樹脂の二重結合当量が350よりも小さいと、焼成時に残渣が残り易くなり、一方、2,000よりも大きいと、現像時の作業余裕度が狭く、また光硬化時に高露光量を必要とする場合があるので好ましくない。   The carboxyl group-containing photosensitive resin and the carboxyl group-containing resin have a weight average molecular weight of 1,000 to 100,000, more preferably 5,000 to 70,000, and an acid value of 30 to 250 mgKOH / g. In the case of a carboxyl group-containing photosensitive resin, those having a double bond equivalent of 350 to 2,000, more preferably 400 to 1,500 can be suitably used. When the molecular weight of the resin is lower than 1,000, the adhesion of the film during development may be adversely affected. On the other hand, when the molecular weight is higher than 100,000, poor development is likely to occur, which is not preferable. On the other hand, when the acid value is lower than 30 mgKOH / g, the solubility in an alkaline aqueous solution is insufficient, and development failure tends to occur. Part) may occur, which is not preferable. Further, in the case of a carboxyl group-containing photosensitive resin, if the double bond equivalent of the photosensitive resin is less than 350, a residue is likely to remain at the time of baking, whereas if it is greater than 2,000, a work margin at the time of development. Is narrow, and a high exposure amount may be required at the time of photocuring.

本発明に係るガラス組成物と共に銀粉末及び感光性有機成分を含有してなる感光性銀ペーストには、組成物の光硬化性の付与促進及び現像性向上のために光重合性モノマーが含有される。該光重合性モノマーとしては、例えば、2−ヒドロキシエチルアクリレート、2−ヒドロキシプロピルアクリレート、ジエチレングリコールジアクリレート、トリエチレングリコールジアクリレート、ポリエチレングリコールジアクリレート、ポリウレタンジアクリレート、トリメチロールプロパントリアクリレート、ペンタエリスリトールトリアクリレート、ペンタエリスリトールテトラアクリレート、トリメチロールプロパンエチレンオキサイド変性トリアクリレート、トリメチロールプロパンプロピレンオキサイド変性トリアクリレート、ジペンタエリスリトールペンタアクリレート、ジペンタエリスリトールヘキサアクリレート及び上記アクリレートに対応する各メタクリレート類;フタル酸、アジピン酸、マレイン酸、イタコン酸、コハク酸、トリメリット酸、テレフタル酸等の多塩基酸とヒドロキシアルキル(メタ)アクリレートとのモノ−、ジ−、トリ−又はそれ以上のポリエステルなどが挙げられるが、特定のものに限定されるものではなく、またこれらを単独で又は2種以上を組み合わせて用いることができる。これらの光重合性モノマーの中でも、1分子中に2個以上のアクリロイル基又はメタクリロイル基を有する多官能モノマーが好ましい。   The photosensitive silver paste comprising silver powder and a photosensitive organic component together with the glass composition according to the present invention contains a photopolymerizable monomer in order to promote the imparting of photocurability of the composition and improve the developability. The Examples of the photopolymerizable monomer include 2-hydroxyethyl acrylate, 2-hydroxypropyl acrylate, diethylene glycol diacrylate, triethylene glycol diacrylate, polyethylene glycol diacrylate, polyurethane diacrylate, trimethylolpropane triacrylate, and pentaerythritol triacrylate. Acrylate, pentaerythritol tetraacrylate, trimethylolpropane ethylene oxide modified triacrylate, trimethylolpropane propylene oxide modified triacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, and methacrylates corresponding to the above acrylates; phthalic acid, adipine Acid, maleic acid, itaconic acid Examples include mono-, di-, tri- or higher polyesters of polybasic acids such as succinic acid, trimellitic acid, terephthalic acid, and hydroxyalkyl (meth) acrylate, but are limited to specific ones However, these can be used alone or in combination of two or more. Among these photopolymerizable monomers, polyfunctional monomers having two or more acryloyl groups or methacryloyl groups in one molecule are preferable.

この光重合性モノマーの配合率は、前記有機バインダー100質量部当り20〜100質量部が適当である。光重合性モノマーの配合量が上記範囲よりも少ない場合、組成物の充分な光硬化性が得られ難くなり、一方、上記範囲を超えて多量になると、皮膜の深部に比べて表層部の光硬化が早くなるため硬化むらを生じ易くなる。   The blending ratio of the photopolymerizable monomer is suitably 20 to 100 parts by mass per 100 parts by mass of the organic binder. When the amount of the photopolymerizable monomer is less than the above range, it is difficult to obtain sufficient photocurability of the composition. On the other hand, when the amount exceeds the above range, the amount of light in the surface layer portion is larger than that in the deep portion of the film. Since curing becomes faster, uneven curing tends to occur.

本発明の感光性銀ペーストは、光反応を開始させる成分として光重合開始剤を含有する。主に紫外線を吸収しラジカルを発生させる光重合開始剤の具体例としては、ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテル等のベンゾインとベンゾインアルキルエーテル類;アセトフェノン、2,2−ジメトキシー2−フェニルアセトフェノン、2,2−ジエトキシー2−フェニルアセトフェノン、1,1−ジクロロアセトフェノン等のアセトフェノン類;2−メチル−1−[4−(メチルチオ)フェニル]−2−モルフォリノプロパン−1−オン、2−ベンジル−2−ジメチルアミノ−1−(4−モルフォリノフェニル)−ブタノン−1等のアミノアセトフェノン類;2−メチルアントラキノン、2−エチルアントラキノン、2−t−ブチルアントラキノン、1−クロロアントラキノン等のアントラキノン類;2,4−ジメチルチオキサントン、2,4−ジエチルチオキサントン、2−クロロチオキサントン、2,4−ジイソプロピルチオキサントン等のチオキサントン類;アセトフェノンジメチルケタール、ベンジルジメチルケタール等のケタール類;ベンゾフェノン等のベンゾフェノン類;又はキサントン類;(2,6−ジメトキシベンゾイル)−2,4,4−ペンチルホスフィンオキサイド、ビス(2,4,6−トリメチルベンゾイル)−フェニルフォスフィンオキサイド、2,4,6−トリメチルベンゾイルジフェニルフォスフィンオキサイド、エチル−2,4,6−トリメチルベンゾイルフェニルフォスフィネイト等のフォスフィンオキサイド類;各種パーオキサイド類などが挙げられるが、特定のものに限定されるものではなく、またこれらを単独あるいは2種類以上組み合わせて使用することができる。   The photosensitive silver paste of the present invention contains a photopolymerization initiator as a component for initiating a photoreaction. Specific examples of photopolymerization initiators that mainly absorb ultraviolet rays and generate radicals include benzoin and benzoin alkyl ethers such as benzoin, benzoin methyl ether, benzoin ethyl ether, and benzoin isopropyl ether; acetophenone, 2,2-dimethoxy-2 -Acetophenones such as phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone; 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropan-1-one, Aminoacetophenones such as 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1; 2-methylanthraquinone, 2-ethylanthraquinone, 2-t-butylanthraquinone, 1-chloroanthraquinone Anthraquinones such as 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, thioxanthones such as 2,4-diisopropylthioxanthone; ketals such as acetophenone dimethyl ketal and benzyl dimethyl ketal; benzophenone Benzophenones; or xanthones; (2,6-dimethoxybenzoyl) -2,4,4-pentylphosphine oxide, bis (2,4,6-trimethylbenzoyl) -phenylphosphine oxide, 2,4,6- Examples include phosphine oxides such as trimethylbenzoyldiphenylphosphine oxide and ethyl-2,4,6-trimethylbenzoylphenyl phosphinate; various peroxides, but are limited to specific ones Not be, and may be used in combination singly or two or more kinds.

この光重合開始剤のペースト中の配合率は、前記有機バインダー100質量部当り1〜30質量部が適当であり、好ましくは5〜20質量部である。上記範囲より少ない場合、ペーストの充分な光硬化性が得られ難くなり、一方、上記範囲を超えて多量になると、光の透過が阻害され深部の光硬化性が得られ難くなる。   The blending ratio of the photopolymerization initiator in the paste is suitably 1 to 30 parts by mass, preferably 5 to 20 parts by mass per 100 parts by mass of the organic binder. When the amount is less than the above range, it is difficult to obtain sufficient photocurability of the paste. On the other hand, when the amount exceeds the above range, light transmission is inhibited and it is difficult to obtain deep photocurability.

また、より深い光硬化深度を要求される場合、必要に応じて、可視領域でラジカル重合を開始するチバ・スペシャルティー・ケミカルズ社製イルガキュア784等のチタノセン系光重合開始剤、ロイコ染料等を硬化助剤として組み合わせて用いることができる。   In addition, when a deeper photocuring depth is required, a titanocene photopolymerization initiator such as Irgacure 784 manufactured by Ciba Specialty Chemicals, which starts radical polymerization in the visible region, and leuco dye are cured as necessary. It can be used in combination as an auxiliary agent.

本発明の感光性銀ペーストに含有される銀粉末は、酸化の影響を受けず、450〜620℃における焼成によりペーストに優れた導電性を付与し得るものとして本発明において選択された導電粉末である。粒子の形状としては、球状、フレーク状、デントライト状など種々のものを用いることができるが、特に光特性や分散性を考慮すると球状のものを用いることが好ましい。銀粉末の平均粒子径としてはマイクロトラックなどのレーザ回折散乱式粒度分布測定装置またはレーザードップラー法を利用した粒度分布測定装置による測定で0.5〜5.0μmの粉末を用いることができる。平均粒子径が0.1μm以下の場合、光の透過性が悪くなり高精細のパターンが描き難くなり好ましくない。一方、平均粒子径が5μmを超えて大きい場合、ラインエッジの直線性が得られ難くなるので好ましくない。比表面積としては0.1〜2.0m/gのものを好適に用いることができる。比表面積が0.1m/g未満の場合、保存時に沈降を起こすなどの問題があるため好ましくなく、一方2.0m/gを超えた場合、吸油量が大きくなりペーストの流動性が損なわれるため好ましくない。 The silver powder contained in the photosensitive silver paste of the present invention is a conductive powder selected in the present invention that is not affected by oxidation and can impart excellent conductivity to the paste by baking at 450 to 620 ° C. is there. Various shapes such as a spherical shape, a flake shape, and a dentrite shape can be used as the particle shape, but it is particularly preferable to use a spherical shape in consideration of optical characteristics and dispersibility. As an average particle diameter of the silver powder, a powder of 0.5 to 5.0 μm can be used as measured by a laser diffraction scattering type particle size distribution measuring device such as Microtrac or a particle size distribution measuring device using a laser Doppler method. When the average particle diameter is 0.1 μm or less, the light transmittance is deteriorated and it is difficult to draw a high-definition pattern, which is not preferable. On the other hand, when the average particle diameter is larger than 5 μm, it is difficult to obtain line edge linearity, which is not preferable. A specific surface area of 0.1 to 2.0 m 2 / g can be preferably used. If the specific surface area is less than 0.1 m 2 / g, there is a problem such as sedimentation during storage, which is not preferable. On the other hand, if it exceeds 2.0 m 2 / g, the oil absorption increases and the fluidity of the paste is impaired. Therefore, it is not preferable.

この銀粉末の配合率は、感光性銀ペースト100質量部に対して45〜90質量部が適当である。導電性粉末の配合率が上記範囲よりも少ない場合、かかるペーストを用いて形成される導電体パターンにおいて充分な導電性が得られず、一方、上記範囲を超えて多量になると、基材との密着性が悪くなるので好ましくない。   The mixing ratio of the silver powder is suitably 45 to 90 parts by mass with respect to 100 parts by mass of the photosensitive silver paste. When the blending ratio of the conductive powder is less than the above range, sufficient conductivity cannot be obtained in the conductor pattern formed using such a paste. On the other hand, when the amount exceeds the above range, This is not preferable because the adhesiveness deteriorates.

また、色調を調整する目的で、Fe、Co、Cu、Cr、Mn、Al、Ru、Niの1種又は2種類以上を主成分として含む金属酸化物又は複合金属酸化物からなる黒色顔料、四三酸化コバルト(Co)、酸化ルテニウム、ランタン複合酸化物等の黒色材料を添加することもできる。 Further, for the purpose of adjusting the color tone, a black pigment made of a metal oxide or a composite metal oxide containing one or more of Fe, Co, Cu, Cr, Mn, Al, Ru, Ni as a main component, four Black materials such as cobalt trioxide (Co 3 0 4 ), ruthenium oxide, and lanthanum composite oxide can also be added.

さらに、本発明の感光性銀ペーストには、必要に応じて保存安定性を確保するためのリン酸、リン酸エステル、カルボン酸含有化合物等の酸性化合物、シリコーン系、アクリル系等の消泡・レベリング剤、流動性を調整するためのチクソ性付与剤、皮膜の密着性向上のためのシランカップリング剤、等の他の添加剤を配合することもできる。さらにまた、必要に応じて、導電性金属粉の酸化を防止するための公知慣用の酸化防止剤や、保存時の熱的安定性を向上させるための熱重合禁止剤、焼成時における基板との結合成分としての金属酸化物、ケイ素酸化物、ホウ素酸化物、低融点ガラスなどの微粒子を添加することもできる。また、焼成収縮を調整する目的でシリカ、酸化ビスマス、酸化アルミニウム、酸化チタン等の無機粉末、有機金属化合物、金属有機酸塩、金属アルコキシド等を添加することもできる。   Furthermore, the photosensitive silver paste of the present invention includes an acid compound such as phosphoric acid, phosphate ester, carboxylic acid-containing compound, silicone-based, acrylic-based defoaming, etc. to ensure storage stability as necessary. Other additives such as a leveling agent, a thixotropy imparting agent for adjusting fluidity, and a silane coupling agent for improving the adhesion of the film can also be blended. Furthermore, if necessary, a known and commonly used antioxidant for preventing oxidation of the conductive metal powder, a thermal polymerization inhibitor for improving the thermal stability during storage, and a substrate during firing. Fine particles such as metal oxide, silicon oxide, boron oxide, and low-melting glass as a binding component can also be added. In addition, inorganic powders such as silica, bismuth oxide, aluminum oxide, and titanium oxide, organic metal compounds, metal organic acid salts, metal alkoxides, and the like can be added for the purpose of adjusting firing shrinkage.

本発明の感光性銀ペーストは、上述したような必須成分と任意成分を所定の割合で配合し、三本ロールやブレンダー等の混練機にて均一分散して得られる。こうして得られた本発明の感光性銀ペーストは、例えば、以下のような工程を経て基材上の導電体パターンとして形成される。かかる導電体パターンは、プラズマディスプレイパネルの前面基板及び/又は背面基板などにおける電極パターンとして好適に用いることができる。   The photosensitive silver paste of the present invention is obtained by blending the above-described essential components and optional components in a predetermined ratio and uniformly dispersing them in a kneader such as a three roll or blender. The photosensitive silver paste of the present invention thus obtained is formed as a conductor pattern on the substrate through the following steps, for example. Such a conductor pattern can be suitably used as an electrode pattern on a front substrate and / or a rear substrate of a plasma display panel.

(1)まず、本発明の感光性銀ペーストは、スクリーン印刷法、バーコーター、ブレードコーターなど適宜の塗布方法にて、基材、例えばプラズマディスプレイパネル(PDP)の前面基板となるガラス基板等に塗布し、次いで指触乾燥性を得るために、熱風循環式乾燥炉や遠赤外線乾燥炉などで例えば約60〜120℃で5〜40分程度乾燥させて有機溶剤を蒸発させ、タックフリーの塗膜を得る。   (1) First, the photosensitive silver paste of the present invention is applied to a substrate, for example, a glass substrate serving as a front substrate of a plasma display panel (PDP), by an appropriate coating method such as a screen printing method, a bar coater, or a blade coater. In order to obtain a touch-drying property, the organic solvent is evaporated by drying at about 60 to 120 ° C. for about 5 to 40 minutes in a hot air circulating drying furnace or a far infrared drying furnace, and a tack-free coating is applied. Get a membrane.

ここで、基材としては、特定のものに限定されるものではないが、例えば、ガラス基板やセラミック基板などの耐熱性基板を用いることができる。   Here, the base material is not limited to a specific one, but for example, a heat resistant substrate such as a glass substrate or a ceramic substrate can be used.

なお、ペーストを予めフィルム状に成膜することもでき、この場合には基材上にフィルムをラミネートすればよい。   Note that the paste can be formed into a film in advance. In this case, the film may be laminated on the substrate.

(2)次に、基材上に形成した乾燥塗膜をパターン露光して現像する。露光工程としては、所定の露光パターンを有するネガマスクを用いた接触露光又は非接触露光が可能である。露光光源としては、ハロゲンランプ、高圧水銀灯、レーザー光、メタルハライドランプ、ブラックランプ、無電極ランプなどが使用される。露光量としては50〜1000mJ/cm2程度が好ましい。 (2) Next, the dry coating film formed on the substrate is subjected to pattern exposure and developed. As the exposure step, contact exposure or non-contact exposure using a negative mask having a predetermined exposure pattern is possible. As the exposure light source, a halogen lamp, a high-pressure mercury lamp, a laser beam, a metal halide lamp, a black lamp, an electrodeless lamp, or the like is used. The exposure amount is preferably about 50 to 1000 mJ / cm 2 .

現像工程としてはスプレー法、浸漬法等が用いられる。現像液としては、水酸化ナトリウム、水酸化カリウム、炭酸ナトリウム、炭酸カリウム、珪酸ナトリウムなどの金属アルカリ水溶液や、モノエタノールアミン、ジエタノールアミン、トリエタノールアミンなどのアミン水溶液、特に約1.5質量%以下の濃度の希アルカリ水溶液が好適に用いられるが、組成物中のカルボキシル基含有樹脂のカルボキシル基がケン化され、未硬化部(未露光部)が除去されればよく、上記のような現像液に限定されるものではない。また、現像後に不要な現像液の除去のため、水洗や酸中和を行うことが好ましい。   As the development process, a spray method, an immersion method, or the like is used. Developers include aqueous alkali metal solutions such as sodium hydroxide, potassium hydroxide, sodium carbonate, potassium carbonate and sodium silicate, and aqueous amine solutions such as monoethanolamine, diethanolamine and triethanolamine, especially about 1.5% by mass or less. A dilute alkaline aqueous solution having a concentration of 1 is preferably used, as long as the carboxyl group of the carboxyl group-containing resin in the composition is saponified and the uncured part (unexposed part) is removed. It is not limited to. Moreover, it is preferable to perform washing with water and acid neutralization in order to remove an unnecessary developer after development.

(3)そして、得られた感光性銀ペーストのパターンを焼成してペースト中に含まれる有機分を脱バインダーすることにより、所定の導電体パターンを得る。   (3) A predetermined conductor pattern is obtained by baking the pattern of the obtained photosensitive silver paste to remove the organic component contained in the paste.

以下、本発明を実施例に基づいて具体的に説明するが、本発明が下記実施例に限定されるものでないことはもとよりである。なお、以下において「部」は、特に断りのない限りすべて質量部であるものとする。   EXAMPLES Hereinafter, although this invention is demonstrated concretely based on an Example, it cannot be overemphasized that this invention is not limited to the following Example. In the following, “parts” are all parts by mass unless otherwise specified.

(有機バインダーの合成例)
温度計、撹拌機、滴下ロート、及び還流冷却器を備えたフラスコに、溶媒としてジエチレングリコールモノエチルエーテルアセテート、触媒としてアゾビスイソブチロニトリルを入れ、窒素雰囲気下、80℃に加熱し、メタクリル酸及びメチルメタアクリレートを、メタクリル酸:0.4mol、メチルメタアクリレート:0.6molのモル比で混合したモノマーを約2時間かけて滴下し、さらに1時間撹拌後、温度を115℃まで上げて失活させ、樹脂溶液を得た。
(Synthesis example of organic binder)
A flask equipped with a thermometer, a stirrer, a dropping funnel, and a reflux condenser is charged with diethylene glycol monoethyl ether acetate as a solvent and azobisisobutyronitrile as a catalyst, heated to 80 ° C. in a nitrogen atmosphere, and methacrylic acid. And a monomer prepared by mixing methyl methacrylate with a molar ratio of methacrylic acid: 0.4 mol and methyl methacrylate: 0.6 mol over about 2 hours, and after stirring for another hour, the temperature was raised to 115 ° C. and the mixture was lost. A resin solution was obtained.

この樹脂溶液を冷却後、触媒として臭化テトラブチルアンモニウムを用い、95〜105℃、30時間の条件で、ブチルグリシジルエーテル:0.4molを、得られた樹脂のカルボキシル基の等量と付加反応させ、冷却した。   After cooling this resin solution, tetrabutylammonium bromide was used as a catalyst, 95-105 ° C., 30 hours, butyl glycidyl ether: 0.4 mol, addition reaction with the equivalent amount of carboxyl group of the obtained resin And cooled.

さらに、得られた樹脂のOH基に対して、95〜105℃、8時間の条件で、無水テトラヒドロフタル酸0.26molを付加反応させ、冷却後取り出して固形分55%の有機バインダーAを得た。   Further, 0.26 mol of tetrahydrophthalic anhydride was added to the OH group of the obtained resin under the conditions of 95 to 105 ° C. and 8 hours, cooled, and taken out to obtain an organic binder A having a solid content of 55%. It was.

(組成物例1〜5、比較組成物例1〜4)
上記のようにして得られた有機バインダーAを用い、ガラス組成物として表1に示すガラス粉末Aと共に以下に示す組成比にて配合し、攪拌機により攪拌後、3本ロールミルにより練肉してペースト化を行い、感光性銀ペースト(組成物例1)を作製した。更に、ガラス粉末Aに替えて表1に示すガラス粉末B〜Hを22〜55部の範囲で用いて組成物例2〜5、比較組成物例1〜4を作成した。なお、これらガラス粉末A〜Hはレーザ回折散乱式粒度分布測定装置:LMS−30((株)セイシン企業製)で測定した平均粒子径が1.2〜3.4μmの範囲にあるものを使用した。

Figure 2005306699
(Composition Examples 1-5, Comparative Composition Examples 1-4)
Using the organic binder A obtained as described above, the glass composition shown in Table 1 was blended at the composition ratio shown below as a glass composition, stirred with a stirrer, and then kneaded with a three-roll mill to obtain a paste. Then, a photosensitive silver paste (Composition Example 1) was produced. Further, composition examples 2 to 5 and comparative composition examples 1 to 4 were prepared using glass powders B to H shown in Table 1 in the range of 22 to 55 parts in place of glass powder A. These glass powders A to H are those having an average particle diameter in the range of 1.2 to 3.4 μm measured with a laser diffraction / scattering particle size distribution analyzer: LMS-30 (manufactured by Seishin Enterprise Co., Ltd.). did.
Figure 2005306699

(組成物例1)
有機バインダーA 180.0部
トリメチロールプロパントリアクリレート 45.0部
2−ベンジル−2−ジメチルアミノ−1−
(4−モルフォリノフェニル)−ブタノン−1 10.0部
イソプロピルチオキサントン 1.0部
ジプロピレングリコールモノメチルエーテル 90.0部
銀粉A 550.0部
ガラス粉末A 38.5部
リン酸エステル 2.0部
消泡剤(BYK-354:ビックケミー・ジャパン(株)) 1.0部
*平均粒子径(レーザ回折散乱式粒度分布測定装置:マイクロトラックHRAにて測定):2.0μm、比表面積(BET1点法により測定):0.42m/gのものを使用した。
(Composition Example 1)
Organic binder A 180.0 parts Trimethylolpropane triacrylate 45.0 parts 2-Benzyl-2-dimethylamino-1-
(4-morpholinophenyl) -butanone 10.0 parts isopropylthioxanthone 1.0 part dipropylene glycol monomethyl ether 90.0 parts silver powder A * 550.0 parts glass powder A 38.5 parts phosphate ester 2.0 Part Defoamer (BYK-354: Big Chemie Japan Co., Ltd.) 1.0 part * Average particle diameter (laser diffraction scattering type particle size distribution analyzer: measured with Microtrac HRA): 2.0 μm, specific surface area (BET1 (Measured by the dot method): 0.42 m 2 / g was used.

このようにして得られた組成物例1〜5、比較組成物例1〜4の各感光性導電ペーストについて、絶縁抵抗値、デントライト発生の有無を検出することによりマイグレーション特性を評価した。その評価方法は以下のとおりである。   With respect to each of the photosensitive conductive pastes of Composition Examples 1 to 5 and Comparative Composition Examples 1 to 4 thus obtained, the migration characteristics were evaluated by detecting the insulation resistance value and the presence or absence of dentlite generation. The evaluation method is as follows.

試験片作成:
ガラス基板上に、評価用の各感光性銀ペーストを180メッシュのポリエステルスクリーンを用いて全面に塗布し、次いで、熱風循環式乾燥炉にて90℃で20分間乾燥して指触乾燥性の良好な塗膜を形成した。次に、光源としてメタルハライドランプを用い、ネガマスクを介して、乾燥塗膜上の積算光量が300mJ/cm2となるようにパターン露光した後、液温30℃の0.5質量%Na2CO3水溶液を用いて現像を行い、水洗した。次いで、このようにして塗膜パターンが形成された基板を、空気雰囲気下にて5℃/分で570℃まで昇温して570℃で30分間焼成し、導電体パターンを形成した試験片を作成した。
Specimen creation:
Each photosensitive silver paste for evaluation was applied on the entire surface of a glass substrate using a 180 mesh polyester screen, and then dried at 90 ° C. for 20 minutes in a hot air circulation drying oven to provide good touch drying properties. A good coating was formed. Next, using a metal halide lamp as a light source, pattern exposure was performed through a negative mask so that the integrated light amount on the dried coating film was 300 mJ / cm 2, and then 0.5 mass% Na 2 CO 3 at a liquid temperature of 30 ° C. Development was performed using an aqueous solution and washed with water. Next, the substrate on which the coating film pattern was formed in this manner was heated to 570 ° C. at 5 ° C./min in an air atmosphere and baked at 570 ° C. for 30 minutes to obtain a test piece on which a conductor pattern was formed. Created.

(絶縁抵抗値)
L/S=120/80μmのくし型パターンにて露光・現像しパターニングを行い、焼成まで実施し、そのパターンにUV硬化型の防湿剤を塗布・硬化して評価片を作成した。その後、65℃、95%RHの恒温高湿槽内にてDC80V印加しながら144時間処理し、処理後の絶縁抵抗値を測定して絶縁性の劣化を評価した。その絶縁抵抗値は、印加電圧500Vで1分後の測定値である。
(Insulation resistance value)
Exposure / development was performed with a comb pattern of L / S = 120/80 μm, patterning was performed, and the process was performed until baking. A UV curable moisture-proofing agent was applied to the pattern and cured to prepare an evaluation piece. Then, it processed for 144 hours, applying DC80V in a 65 degreeC, 95% RH constant temperature high humidity tank, the insulation resistance value after a process was measured, and insulation deterioration was evaluated. The insulation resistance value is a measured value after 1 minute at an applied voltage of 500V.

(デントライト評価)
絶縁性劣化の評価を実施した試験片の評価後のくし型電極間の銀デントライトの発生の有無を確認した。
(Dent light evaluation)
The presence or absence of the occurrence of silver dentlite between the comb-shaped electrodes after the evaluation of the test piece for which the insulation deterioration was evaluated was confirmed.

これらの評価結果を表2に示す。

Figure 2005306699
These evaluation results are shown in Table 2.
Figure 2005306699

表2より、本発明に係る銀ペーストは高精細な導電体パターンに用いた場合にもマイグレーション特性に優れていることがわかった。   From Table 2, it was found that the silver paste according to the present invention is excellent in migration characteristics even when used in a high-definition conductor pattern.

Claims (4)

ホウ素及びシリカを必須成分とし、かつ、ホウ素がB換算でガラス組成物中に10質量%以下含まれる銀ペースト用ガラス組成物であって、その組成比に関し酸化物換算で下式(I)が成り立つことを特徴とする銀ペースト用ガラス組成物。
質量%+ZnO質量%(0質量%を含む)≦SiO質量% (I)
A glass composition for silver paste containing boron and silica as essential components and containing 10% by mass or less of boron in a glass composition in terms of B 2 O 3 , and the following formula ( A glass composition for silver paste, wherein I) is satisfied.
B 2 O 3 mass% + ZnO mass% (including 0 mass%) ≦ SiO 2 mass% (I)
SiO含有率が8〜30質量%である、請求項1に記載の銀ペースト用ガラス組成物。 SiO 2 content is 8-30 wt%, the silver paste glass composition according to claim 1. 銀粉末、感光性有機成分、および請求項1又は2に記載のガラス組成物を含有する感光性銀ペーストであって、該ガラス組成物の含有率が銀粉末100質量部に対して2〜15質量部の範囲である感光性銀ペースト。   A photosensitive silver paste comprising silver powder, a photosensitive organic component, and the glass composition according to claim 1, wherein the content of the glass composition is 2 to 15 parts by mass with respect to 100 parts by mass of the silver powder. Photosensitive silver paste in the range of parts by mass. 請求項3に記載の感光性銀ペーストを焼成してなる電極パターン。   The electrode pattern formed by baking the photosensitive silver paste of Claim 3.
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