JP2005285941A5 - - Google Patents

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Publication number
JP2005285941A5
JP2005285941A5 JP2004095126A JP2004095126A JP2005285941A5 JP 2005285941 A5 JP2005285941 A5 JP 2005285941A5 JP 2004095126 A JP2004095126 A JP 2004095126A JP 2004095126 A JP2004095126 A JP 2004095126A JP 2005285941 A5 JP2005285941 A5 JP 2005285941A5
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JP
Japan
Prior art keywords
heating element
heater unit
processing chamber
substrate
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004095126A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005285941A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004095126A priority Critical patent/JP2005285941A/ja
Priority claimed from JP2004095126A external-priority patent/JP2005285941A/ja
Publication of JP2005285941A publication Critical patent/JP2005285941A/ja
Publication of JP2005285941A5 publication Critical patent/JP2005285941A5/ja
Pending legal-status Critical Current

Links

JP2004095126A 2004-03-29 2004-03-29 基板処理装置 Pending JP2005285941A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004095126A JP2005285941A (ja) 2004-03-29 2004-03-29 基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004095126A JP2005285941A (ja) 2004-03-29 2004-03-29 基板処理装置

Publications (2)

Publication Number Publication Date
JP2005285941A JP2005285941A (ja) 2005-10-13
JP2005285941A5 true JP2005285941A5 (enExample) 2007-10-25

Family

ID=35184021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004095126A Pending JP2005285941A (ja) 2004-03-29 2004-03-29 基板処理装置

Country Status (1)

Country Link
JP (1) JP2005285941A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007063363B4 (de) 2007-05-21 2016-05-12 Centrotherm Photovoltaics Ag Vorrichtung zur Dotierung und Beschichtung von Halbleitermaterial bei niedrigem Druck

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