JP2005274155A5 - - Google Patents

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Publication number
JP2005274155A5
JP2005274155A5 JP2004083568A JP2004083568A JP2005274155A5 JP 2005274155 A5 JP2005274155 A5 JP 2005274155A5 JP 2004083568 A JP2004083568 A JP 2004083568A JP 2004083568 A JP2004083568 A JP 2004083568A JP 2005274155 A5 JP2005274155 A5 JP 2005274155A5
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JP
Japan
Prior art keywords
imaging
inspection apparatus
subject
defect inspection
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004083568A
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English (en)
Japanese (ja)
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JP2005274155A (ja
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Publication date
Application filed filed Critical
Priority to JP2004083568A priority Critical patent/JP2005274155A/ja
Priority claimed from JP2004083568A external-priority patent/JP2005274155A/ja
Publication of JP2005274155A publication Critical patent/JP2005274155A/ja
Publication of JP2005274155A5 publication Critical patent/JP2005274155A5/ja
Pending legal-status Critical Current

Links

JP2004083568A 2004-03-22 2004-03-22 欠陥検査装置 Pending JP2005274155A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004083568A JP2005274155A (ja) 2004-03-22 2004-03-22 欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004083568A JP2005274155A (ja) 2004-03-22 2004-03-22 欠陥検査装置

Publications (2)

Publication Number Publication Date
JP2005274155A JP2005274155A (ja) 2005-10-06
JP2005274155A5 true JP2005274155A5 (enExample) 2007-05-10

Family

ID=35174007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004083568A Pending JP2005274155A (ja) 2004-03-22 2004-03-22 欠陥検査装置

Country Status (1)

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JP (1) JP2005274155A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5680731B2 (ja) * 2013-11-06 2015-03-04 株式会社Ｓｃｒｅｅｎセミコンダクターソリューションズ 基板処理装置および検査周辺露光システム
DE102014009142A1 (de) 2014-06-20 2015-12-24 Carl Zeiss Microscopy Gmbh Verfahren und Vorrichtung zur Ansteuerung eines akustooptischen Bauteils
KR102292209B1 (ko) * 2014-07-28 2021-08-25 삼성전자주식회사 반도체 계측 시스템 및 이를 이용한 반도체 소자의 계측 방법
JPWO2020152866A1 (enExample) * 2019-01-25 2020-07-30
JP7704609B2 (ja) * 2021-08-05 2025-07-08 株式会社ディスコ 検査装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06105168B2 (ja) * 1988-03-30 1994-12-21 大日本スクリーン製造株式会社 薄膜パターンの検出装置
JP2947513B1 (ja) * 1998-07-30 1999-09-13 株式会社ニデック パターン検査装置
JP4331454B2 (ja) * 2001-10-03 2009-09-16 オリンパス株式会社 走査型レーザ顕微鏡
JP3861666B2 (ja) * 2001-11-15 2006-12-20 セイコーエプソン株式会社 形状測定方法及び装置

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