JP2005268451A5 - - Google Patents

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Publication number
JP2005268451A5
JP2005268451A5 JP2004077044A JP2004077044A JP2005268451A5 JP 2005268451 A5 JP2005268451 A5 JP 2005268451A5 JP 2004077044 A JP2004077044 A JP 2004077044A JP 2004077044 A JP2004077044 A JP 2004077044A JP 2005268451 A5 JP2005268451 A5 JP 2005268451A5
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JP
Japan
Prior art keywords
amount
optical system
value
optical element
drive mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004077044A
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English (en)
Japanese (ja)
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JP2005268451A (ja
JP4574198B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2004077044A priority Critical patent/JP4574198B2/ja
Priority claimed from JP2004077044A external-priority patent/JP4574198B2/ja
Priority to US11/080,407 priority patent/US7230692B2/en
Publication of JP2005268451A publication Critical patent/JP2005268451A/ja
Priority to US11/627,125 priority patent/US7301615B2/en
Publication of JP2005268451A5 publication Critical patent/JP2005268451A5/ja
Application granted granted Critical
Publication of JP4574198B2 publication Critical patent/JP4574198B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004077044A 2004-03-17 2004-03-17 露光装置、その調整方法及びデバイス製造方法 Expired - Fee Related JP4574198B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004077044A JP4574198B2 (ja) 2004-03-17 2004-03-17 露光装置、その調整方法及びデバイス製造方法
US11/080,407 US7230692B2 (en) 2004-03-17 2005-03-16 Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method
US11/627,125 US7301615B2 (en) 2004-03-17 2007-01-25 Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004077044A JP4574198B2 (ja) 2004-03-17 2004-03-17 露光装置、その調整方法及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2005268451A JP2005268451A (ja) 2005-09-29
JP2005268451A5 true JP2005268451A5 (enExample) 2007-05-10
JP4574198B2 JP4574198B2 (ja) 2010-11-04

Family

ID=34985874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004077044A Expired - Fee Related JP4574198B2 (ja) 2004-03-17 2004-03-17 露光装置、その調整方法及びデバイス製造方法

Country Status (2)

Country Link
US (2) US7230692B2 (enExample)
JP (1) JP4574198B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4789194B2 (ja) * 2006-05-01 2011-10-12 国立大学法人東京農工大学 露光装置および方法ならびにデバイス製造方法
JP5105474B2 (ja) 2007-10-19 2012-12-26 国立大学法人東京農工大学 露光装置及びデバイス製造方法
US7991713B2 (en) 2007-11-07 2011-08-02 Trifon Triantafillidis Method for solving minimax and linear programming problems
DE102008042356A1 (de) 2008-09-25 2010-04-08 Carl Zeiss Smt Ag Projektionsbelichtungsanlage mit optimierter Justagemöglichkeit
JP2010278034A (ja) 2009-05-26 2010-12-09 Canon Inc 露光装置及びデバイス製造方法
JP5418768B2 (ja) * 2009-06-26 2014-02-19 キヤノン株式会社 露光装置、調整方法及びデバイスの製造方法
JP5969848B2 (ja) 2012-07-19 2016-08-17 キヤノン株式会社 露光装置、調整対象の調整量を求める方法、プログラム及びデバイスの製造方法
US9671673B2 (en) * 2014-11-17 2017-06-06 Singapore University Of Technology And Design Optical device for dispersion compensation
CN111492316B (zh) 2017-12-19 2024-06-28 Asml荷兰有限公司 光刻方法和设备

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1022190A (ja) * 1996-06-28 1998-01-23 Nikon Corp 露光装置における位置合わせ誤差補正方法および該方法を用いた露光装置
US6330052B1 (en) 1997-06-13 2001-12-11 Canon Kabushiki Kaisha Exposure apparatus and its control method, stage apparatus, and device manufacturing method
JP3673633B2 (ja) 1997-12-16 2005-07-20 キヤノン株式会社 投影光学系の組立調整方法
JP3347692B2 (ja) * 1998-10-06 2002-11-20 キヤノン株式会社 光学特性調整方法及びデバイス製造方法
JP2000121491A (ja) * 1998-10-20 2000-04-28 Nikon Corp 光学系の評価方法
US6924937B2 (en) 1998-11-16 2005-08-02 Canon Kabushiki Kaisha Aberration correcting optical system
US6924884B2 (en) * 1999-03-08 2005-08-02 Asml Netherlands B.V. Off-axis leveling in lithographic projection apparatus
JP4436029B2 (ja) * 2001-02-13 2010-03-24 株式会社ニコン 投影光学系の製造方法及び調整方法、露光装置及びその製造方法、デバイス製造方法、並びにコンピュータシステム
JP4689081B2 (ja) 2001-06-06 2011-05-25 キヤノン株式会社 露光装置、調整方法、およびデバイス製造方法

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