JP2005265885A - Optical coupling apparatus, support base for optical coupling apparatus and method of manufacturing them - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical coupling apparatus for an optical waveguide apparatus or the like, with which the positioning is easily performed at high accuracy when mounting a light emitting (or light receiving) element and an optical waveguide, to provide a support base used for the optical coupling apparatus, and to provide a method of manufacturing them. <P>SOLUTION: The optical coupling apparatus as an optical waveguide apparatus 10 has: an optical waveguide 6 which is so composed to guide light 5 via a light reflection face (45 degree tilt mirror face 4) formed on an end face; a light emitting (or a light receiving) element 3 arranged opposing to a mirror face 4; and a Si substrate 1 on which the optical waveguide 6 and the light emitting (or a light receiving) element 3 are respectively fixed. A recessed parts 2 and 14 are formed by an anisotropic etching of the substrate 1, the light emitting (or a light receiving) element 3 is fixed in the recessed part 2, and a recessed part 14 serves as a release groove of an adhesive in adhering and fixing of the optical waveguide 6. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an optical coupling device in which an optical waveguide and a light-emitting or light-receiving element are fixed to a support, a support for the same, and a manufacturing method thereof, and more particularly to a device and a manufacturing method suitable for optical communication and display. Is.

  Until now, information transmission over a relatively short distance, such as between boards in an electronic device or between chips in a board, has been carried out mainly by electrical signals, but in order to improve the performance of integrated circuits, And high-density signal wiring are required. However, in the electric signal wiring, it is difficult to increase the speed of the electric signal and increase the density of the electric signal wiring due to problems such as signal delay and noise generation due to the time constant of the wiring.

  Optical wiring (optical interconnection) that solves these problems is drawing attention. Optical wiring can be applied to various locations such as between electronic devices, between boards in electronic devices, or between chips in a board. For example, chips are used for transmission of signals over a short distance such as between chips. It is possible to construct an optical transmission and communication system in which an optical waveguide is formed on a substrate on which it is mounted, and a signal modulation laser beam or the like is used as a transmission path.

  On the other hand, it is also known to use an optical waveguide as a light source module of a display. For example, the development of a head mounted display that allows you to enjoy video software, games, computer screens, movies, etc. on your own day screen has been developed. There is a personal display that can be easily felt anywhere (see US Pat. No. 5,467,104).

  Conventionally, as a structure for coupling an optical waveguide component composed of an optical waveguide and a planar light emitting or light receiving element, as disclosed in, for example, JP-A-2002-31747, the light emitting element is aligned with the substrate surface. A configuration is disclosed in which an optical waveguide component is mounted in a guide groove on the same substrate, and an optical path conversion unit is aligned and mounted on the light emitting element. However, since the optical path conversion unit is a separate part, the number of parts is three, the number of times of alignment is large, and it is difficult to obtain alignment accuracy, so that the assembly process is complicated.

  Japanese Patent Application Laid-Open No. 2003-215371 discloses a coupling structure of an optical waveguide component having a 45-degree tilt mirror formed on an end surface and a surface light emitting element. In this structure, the light emitting element is disposed above the optical waveguide component, and is connected to the substrate only via a drum-shaped solder bump. In such a mounting form, heat generated from the light emitting element is not sufficiently dissipated, which causes a thermal problem. Further, in the optical coupling that is very severe with respect to the positional deviation, there is a problem of reliability with respect to the positional deviation of the element, but the structure does not satisfy this.

  On the other hand, as optical waveguide devices that can solve such problems to some extent, Patent Document 1 (International Publication WO 00/08505), Patent Document 2 (Japanese Patent Laid-Open No. 10-300961), and Patent Document 3 (Japanese Patent Laid-Open No. 2000-292656) discloses a structure in which a concave portion is provided in a substrate, and an optical waveguide component having an inclined mirror surface is fixed on the substrate so as to face a light emitting element mounted in the concave portion.

  For example, as shown in FIG. 8, a recess 52 is provided on the main surface of the mounting substrate 50, and the light emitting element 54 is placed in the recess 52. An optical waveguide 56 is attached on the main surface of the mounting substrate 50, and an end 58 of the optical waveguide 56 is an inclined mirror surface and is located on the light emitting element 54. The light 60 emitted from the light emitting element 54 is reflected by the end portion 58 and enters the core 62 of the optical waveguide 56. The light 60 travels in the direction of the arrow in the core 62 and is transmitted to an optical fiber or the like.

International Publication WO 00/08505 (Page 4, Lines 10-17, FIG. 3) JP-A-10-300961 (Column 28, lines 25-47, FIGS. 14-17) JP 2000-292656 (6th column, 8th to 19th line, 8th column, 2nd to 16th line, FIGS. 4 and 12)

  However, in the conventional structure described above, for example, in FIG. 8, the processing accuracy when the recess 52 is formed on the substrate 50, the displacement when the light emitting element 54 is bonded and fixed, and the optical waveguide 56 is bonded to the substrate 40. A positional shift when fixing and a positional shift between the light emitting element 44 cannot be sufficiently prevented.

  An object of the present invention is to provide an optical coupling device such as an optical waveguide device that can easily and accurately align a light-emitting (or light-receiving) element and an optical waveguide during mounting, a support used therefor, and a method for manufacturing the same. It is to provide.

  That is, the present invention provides an optical waveguide (for example, described later) configured to guide light to the inside or the outside through a light reflecting surface (for example, a 45-degree inclined mirror surface described below) formed on the end face. Optical waveguide: the same applies hereinafter), a light emitting or receiving element (for example, a light emitting element such as an LD or LED described later: the same applies hereinafter) disposed opposite to the end face, the optical waveguide and the light emitting or receiving light. A support (e.g., a Si substrate described below), which is fixed to each element, and a recess (e.g., a relatively deep recess described below) is formed by anisotropic etching of the support. An optical coupling device (hereinafter referred to as a first optical coupling device of the present invention) in which the light emitting or light receiving element is fixed at a predetermined position in the recess, and a first optical coupling device of the present invention. The support to be used (hereinafter referred to as “No. Those of the called support.).

  The present invention also provides an air ridge type optical waveguide portion configured to guide light to the inside or the outside through a light reflecting surface formed on the end face, and light emission or light reception arranged to face the end face. An element, and a support body to which the optical waveguide section and the light emitting or light receiving element are respectively fixed, and the light emitting or light receiving element is fixed at a predetermined position in a recess formed in the support body. Is in a position where the core of the optical waveguide is not in contact with the support at a different position (particularly, a recess formed so as to have a space between the optical waveguide and the like (hereinafter the same)) And an optical coupling device (hereinafter referred to as a second optical coupling device of the present invention) in which the optical waveguide section is fixed to the support in a region other than the core. The support used for the second optical coupling device of the present invention (hereinafter referred to as the present invention). It referred to as a second support bright.) To also relate.

  The present invention also includes a step of forming a recess in the support by anisotropic etching, a step of fixing a light emitting or receiving element at a predetermined position in the recess, and light through a light reflecting surface formed on the end face. An optical waveguide configured to guide the light inward or outward to the support so that the light-emitting or light-receiving element is disposed facing the end face. A manufacturing method (hereinafter referred to as a first manufacturing method of the present invention) and a method for manufacturing the support (hereinafter referred to as a second manufacturing method of the present invention), which includes the step of forming the recesses by anisotropic etching. Also provided).

  According to the first optical coupling device of the present invention, the first support of the present invention, and the first and second manufacturing methods of the present invention, a recess is formed in the support by anisotropic etching. The light-emitting or light-receiving element is fixed at a predetermined position inside, and the light-emitting or light-receiving element is disposed so as to face the end face of the optical waveguide portion. The element can be mounted in contact with the support, and the optical waveguide can be disposed on the light emitting or receiving part of the element, not only can the heat dissipation efficiency of the light emitting or receiving element be increased, The anisotropic etching can easily and precisely form the concave portion, and the gap between the light emitting or receiving element and the optical waveguide portion can be easily and precisely controlled. To get It can be.

  Further, according to the second optical coupling device of the present invention and the second support of the present invention, the light emitting or light receiving element is fixed at a predetermined position in the recess formed in the support, and the predetermined position The core of the air ridge type optical waveguide section is disposed in the concave portion in a non-contact state with the support at a position different from the position of the optical waveguide section, and the optical waveguide section is disposed in the region other than the core. It is fixed to. Therefore, the optical waveguide that requires high-precision alignment with respect to the light emitting or receiving element fixed at a predetermined position in the concave portion is an air ridge type, and the core is in a non-contact state with the support. It may be arranged and fixed to the support in an area other than the core (especially the clad). For this purpose, it is easy to determine the position of the core with respect to the light emitting or receiving element, and even if it is sufficiently fixed to the support. It can always be aligned in a normal state, and its fixed area is small, and the amount of adhesive used for fixing is reduced, so that stable bonding (that is, stable alignment) can be performed. In addition, since the optical waveguide portion is an air ridge type and the core is not in contact with the support, the light propagation performance by total reflection between the core and air is improved, and leakage light (cladding mode) is also reduced.

  From the above effects, a low-cost and high-performance optical coupling structure can be realized by the support and the optical coupling structure of the present invention.

  In the first optical coupling device of the present invention, the first support of the present invention, and the first and second manufacturing methods of the present invention, the optical waveguide section is fixed to the support by bonding, and this adhesive fixing The concave portion is formed at a position outside the region, and the concave portion includes a first concave portion (for example, a relatively deep concave portion to be described later; the same applies hereinafter) for fixing the light emitting or light receiving element, and the optical waveguide portion. It comprises a second recess (for example, a relatively shallow adhesive release groove, which will be described later) for receiving the adhesive that protrudes outside the adhesive fixing region, and these first and second recesses are the anisotropic. It is desirable that each is formed by etching.

  That is, due to the presence of the second concave portion, even if the adhesive used for bonding and fixing the optical waveguide portion to the support protrudes, it can be received (released), and the amount of adhesive applied changes slightly. However, since the thickness of the adhesive can be made constant at all times, it is possible to improve the reliability of bonding, and thus the alignment accuracy between the optical waveguide and the light emitting or receiving element. Furthermore, since it is possible to prevent the adhesive from protruding to the outer periphery of the support body, it is possible to prevent defects in which the support body and the optical waveguide section adhere to an assembly jig (such as a vacuum chuck) during assembly. The yield of assembly such as handling is improved.

  Also in the second optical coupling device of the present invention and the second support of the present invention, the optical waveguide section may be fixed to the support by bonding, but the light emission is performed at an inner position of the bonding fixing region. Alternatively, the recess for arranging the light receiving element and the core is preferably formed, and in particular, the cladding of the optical waveguide is preferably fixed to the support at a position outside the recess. Accordingly, the core can be reliably arranged in a non-contact state with respect to the support body, and the light emitting or light receiving element and the optical waveguide portion can be easily aligned.

  Such a recess may be formed by a fixed piece fixed to the main body of the support.

  In any of the optical coupling devices, supports, and manufacturing methods of the present invention, the support is made of a semiconductor (particularly silicon), has a specific resistance of 0.05 Ω-cm, and the optical waveguide section with respect to the support When an electrode is provided on the support surface opposite to the fixed surface of the light emitting or light receiving element, and this electrode and the electrode of the light emitting or light receiving element are electrically connected through the support, Semiconductors have high thermal conductivity and excellent heat dissipation characteristics, and by forming the support with low resistance Si or the like, it becomes possible to make the entire support an electrical ground (ground electrode) and to the signal line. Noise can be reduced, and high-frequency operation becomes possible.

  Further, when the light reflecting surface is an optical mirror surface inclined at about 45 degrees, the light propagation area (light condensing or emitting area) is expanded and the amount of light incident or emitted is increased. In order to increase the light propagation performance and the conversion efficiency, it is desirable that the planar light emitting or light receiving element is disposed facing the mirror surface.

  In addition, if a positioning marker is provided for each of the optical waveguide section and the light emitting or light receiving element, positioning during mounting can be performed more easily and accurately by optical detection of the marker.

  Further, the optical waveguide section may have a plurality of cores, and the light emitting or light receiving sections of the light emitting or light receiving elements may be arranged to face the end faces of these cores. When the wave area is enlarged at the end face and gradually reduced toward the light emitting end, and a plurality of light emitting or receiving portions of the light emitting or receiving element are arranged to face the end face enlarged in area. In addition to improving the light propagation performance due to the inclined surface, the amount of light condensing or emitting is further increased, and the alignment of the light emitting or light receiving element with respect to the optical waveguide is further facilitated.

  In this case, the present invention is suitable for an optical coupling device configured for optical communication or display. For example, optical communication configured such that signal light emitted after being efficiently incident on the optical waveguide portion is incident on a light receiving element (such as an optical wiring or a photodetector) in the next-stage circuit, or the signal light is scanned by a scanning unit. It can be effectively used for an optical information processing apparatus such as a display configured to project.

  In the first and second manufacturing methods of the present invention, the first recess and the second recess may be formed at the same time using a common mask for the anisotropic etching. In this mask, when the width of the opening for the second recess is made smaller than the width of the opening for the first recess, the anisotropic etching of the support is relatively deep and wide in the former opening. A wide concave portion is formed to be suitable for fixing the light emitting or light receiving element, and anisotropic etching is stopped early in the latter opening portion to form a relatively shallow and narrow concave portion to form the adhesive. The agent escape groove can be formed simultaneously.

  Next, a preferred embodiment of the present invention will be specifically described with reference to the drawings.

First Embodiment FIGS. 1 to 4 show a first embodiment of the present invention.

  The optical waveguide device as the optical coupling device according to the present embodiment is shown in FIG. 1A, which is a plan view thereof, FIG. 1B, which is a sectional view taken along line IB-IB, and a sectional view taken along IC-IC line. As shown in FIG. 1C, a relatively deep and wide cross-section having a substantially inverted trapezoidal shape is formed on one end side of, for example, a Si (silicon) substrate 1 having a low resistance (≦ 0.05 Ω-cm) as a support. A concave portion 2 is formed by anisotropic etching described later, a laser diode (LD) 3 as a light emitting or receiving element is mounted in the concave portion 2, and a light reflecting surface (optical) inclined at, for example, 45 degrees formed on the end surface. An optical waveguide 6 serving as an optical waveguide configured to guide the light 5 from the light emitting element 3 to the inside through the mirror surface 4 and to emit the light 5 as the outgoing light 18 from the outgoing surface 17 is the substrate 1 (actually, Bonded and fixed with adhesive 15 on insulating layer 21) It has been.

  In this optical waveguide device 10, the optical waveguide 6 is composed of a sheet-like laminate in which a plurality of cores 9 juxtaposed between a lower clad 7 and an upper clad 8, and these layers are formed on the substrate 1. Are formed by sequentially laminating known polymer materials having different refractive indexes and patterning the core material. The refractive index of the core 9 is larger than the refractive indexes of the clads 7 and 8. Each core 9 is formed to have a width of 40 to 50 μm, for example, and is opposed to the light reflecting surface 4 of each core 9 at a normal position below the mirror surface 4 of the optical waveguide 6 having a sheet thickness of 100 μm, for example. Each light emitting portion 11 (light emitting area is, for example, 10 μm) of the light emitting element 3 is arranged, and markers 12 and 13 are provided on the optical waveguide 6 and the light emitting element 3 for alignment of both at the time of mounting. ing.

  Also, recesses (grooves) 14 having a comparatively shallow and narrow linear cross-section, which are provided continuously with the recesses 4, are formed on both sides of the substrate 1, respectively, and these recesses 14-14. A space between the lower clad 7 of the optical waveguide 6 is bonded to the substrate 1 with an adhesive 15. The concave portion 14 functions as a groove for receiving (releasing) the adhesive 15 when it protrudes outward when the optical waveguide 6 is bonded and fixed. However, the protruding part 2 for fixing the light emitting element can also partially accept the protruding adhesive.

  The light-emitting element 3 is mounted in the recess 2 while being electrically connected to the substrate 1 via, for example, an electrode 19 having a laminated structure of Ti / Pt / Au, for example, Ti / Pt provided on the back surface of the substrate 1. A terminal electrode in which a back electrode 20 for grounding (grounding) having a Pt / Au laminated structure is electrically connected through the substrate 1 and a top electrode pad 22 is formed on an insulating film 21 on the substrate 1. For example, a metal wire 24 is electrically connected to 23. However, this metal wire 24 is not shown in FIG.

  FIG. 2A clearly shows the above-described marker (here, the waveguide-side marker 12) in the cross section taken along the line II-II in FIG. 1A, and this is reflected by reflection of the detection light 25 at the time of mounting. The state to detect is shown. In order to form this marker 12, as shown in FIG. 2 (B), after forming the lower clad 7 on the support 26, a plurality of cores 9 are formed on the lower clad 7, and between the cores 9-9. A marker 12 is formed on the lower clad 7 by patterning of metal or the like. Further, after the upper clad 8 is attached, the optical waveguide 6 is peeled off from the support 26. The waveguide 6 is held and fixed to a predetermined position on the substrate 1 by the above-described adhesive 15 while being held by a vacuum chuck or the like.

  Next, the manufacturing method of the substrate 1 used for the optical waveguide 6 according to the present embodiment is shown in FIG. 3 (corresponding to the section taken along line IB-IB in FIG. 1A) and FIG. 4 (IC-IC line in FIG. 1A). Will be described.

  First, as shown in FIGS. 3 (1) and 4 (1), a low-resistance Si substrate 1 (≦ 0.05 Ω-cm, crystal orientation <100>) having a thermal oxide film 21 on the surface is used, and a light-emitting element is used. The photoresist 27 is patterned so that the positions for forming the recesses for mounting the recesses and the recesses for the adhesive escape (flow stop) grooves are opened. Thereafter, the thermal oxide film 21 in the opening portion of the photoresist is removed by reactive ion etching (RIE) using fluorine gas. The masked photoresist 27 is removed by ashing with oxygen plasma.

  Next, as shown in FIGS. 3 (2) and 4 (2), the Si substrate 1 is anisotropically etched by dipping in a KOH aqueous solution (concentration: 20 wt%) at 70 ° C. to connect the recesses 2 and 14 together. To form. Since the groove 14 for preventing the flow of the adhesive is made narrower in the width of the mask opening, the etching is almost stopped when the <111> plane comes out. The shallow groove 14 can be formed simultaneously with the recess 2. By this anisotropic etching, the recess 2 is formed with an inclined side wall surface, but the depth can be controlled with high accuracy by the etching time.

  Next, as shown in FIGS. 3 (3) and 4 (3), electrodes 19 and 23 are formed by a conventional method on the recess 2 for mounting the light emitting element and the upper surface of the substrate. Here, these electrodes have a three-layer structure of Ti / Pt / Au from the bottom, vapor deposition is used for forming these metal films, and electrode patterns are formed using a lift-off process using a photoresist for pattern formation. To do. Other methods for forming this film may include plating, sputtering, and the like, and pattern formation may be employed by etching.

  Next, as shown in FIGS. 3 (4) and 4 (4), the oxide film 21 on the back surface of the substrate is removed by RIE similar to the above.

  Finally, as shown in FIGS. 3 (5) and 4 (5), an electrode 20 is formed on the back surface of the substrate. The electrode 20 has the same structure as the electrode 19 described above.

  In order to reduce the contact resistance between the electrode 19 and the back electrode 20 and the Si substrate 1, alloying (heating) may be performed at about 300 to 400 ° C. for several seconds to several minutes.

  Further, when a substrate is manufactured in a wafer state, it is completed by dicing into the form of the mounting substrate 1.

  As shown in FIG. 1, the surface light emitting element 3 and the optical waveguide 6 are mounted on the mounting substrate 1 manufactured in this way. For example, a VCSEL 8ch array is used as the surface light emitting element 3, and an optical waveguide sheet made of an organic material is used as the optical waveguide 6. An alignment marker 13 is formed on the surface of the VCSEL array, and an alignment metal marker 12 is also embedded in the optical waveguide 6. In mounting, the marker positions of the VCSEL 3 and the optical waveguide 6 are specified by image recognition, and the positions of the optical waveguide 6 and the light emitting element 3 on the mounting substrate 1 are adjusted so that the relative positions of the respective markers become determined values. Then, the optical waveguide sheet is bonded to the mounting substrate 1. For this bonding, a UV (ultraviolet) curable adhesive is used, and after alignment, UV irradiation is performed to bond the optical waveguide sheet to the mounting substrate 1.

  In this example, the alignment marker is used, but the pattern of the light emitting portion 11 of the light emitting element 3 is used as a marker, or the core 9 of the optical waveguide 6 and the edge of the 45 ° C. cut surface 4 are on the optical waveguide sheet side. It may be used as a marker. In addition, the light emitting element 3 may be actually operated to perform alignment by active alignment. Then, in order to increase the coupling efficiency between the light emitting element 3 and the optical waveguide 6, the concave portion 4 may be filled with a transparent resin substantially equal to the optical waveguide 6.

  As is apparent from the above description, the optical waveguide device 10 using the Si substrate 1 according to the present embodiment has the remarkable operational effects shown in the following (1) to (5).

  (1) The concave portion 2 is formed in the substrate 1 by anisotropic etching of the Si substrate 1, the light emitting element 3 is fixed at a predetermined position in the concave portion, and the light emitting element 3 is opposed to the mirror surface 4 of the optical waveguide 6. Since the light-emitting element 3 is mounted in a state where the entire back surface of the light-emitting element 3 is in contact with the substrate 1, the optical waveguide 2 can be disposed on the light-emitting portion of the element. The heat dissipation efficiency can be increased. The Si substrate 1 has high thermal conductivity and excellent heat dissipation characteristics.

  (2) The recess 2 can be easily and accurately formed by anisotropic etching, the gap between the light emitting element 3 and the optical waveguide 6 can be controlled easily and precisely, and good optical coupling can be achieved. Can be obtained.

  (3) The adhesive relief groove 14 can be formed simultaneously with the recess 2 by anisotropic etching, and the process can be simplified, and by providing the groove 14, even if the adhesive protrudes, it is received (relieved). The thickness of the adhesive 15 can always be kept constant even if the amount of adhesive applied changes slightly, so that the reliability of the adhesion and thus the alignment accuracy between the optical waveguide 6 and the light emitting element 3 can be maintained. Can be improved. Furthermore, since it is possible to prevent the adhesive from protruding to the outer peripheral portion of the substrate 1, it is possible to prevent defects in which the substrate 1 and the optical waveguide 6 adhere to an assembly jig (vacuum chuck or the like) during assembly. This improves the assembly yield of handling.

  (4) By using a low-resistance Si substrate 1 as the substrate, the entire substrate can be made into an electrical ground electrode (ground electrode), noise to the signal line can be reduced, and high-frequency operation is possible. Become.

  (5) Because of the above effects, a low-cost and high-performance optical coupling structure can be realized by using the mounting substrate and the optical coupling mode according to the present embodiment. In particular, a device suitable for optical communication can be provided.

Second Embodiment FIGS. 5 to 7 show a second embodiment of the present invention.

  In this embodiment mode, FIG. 5A is a plan view, FIG. 5B is a left side view thereof, FIG. 5C is a sectional view taken along line XX, and a sectional view taken along line YY. As shown in FIG. 5D and FIG. 6 which is a perspective view, an air ridge type optical waveguide 36 is used as an optical waveguide, and R (red), G (green), B ( Three-color light emitting diodes LED (R), LED (G), and LED (B) that emit each color of blue) are used.

  The air ridge type optical waveguide 36 has a shape in which the core width on the end face 34 side where the 45 ° mirror is formed is wide, and the core width gradually decreases linearly toward the light emitting side. R, G, and B light 35 (R), 35 (G), and 35 (B) incident on the core 39 from each other are combined to be a point light source and output from the exit surface 49 as the exit light 48. It has become. A portion where the core 39 does not exist is provided on both sides of the optical waveguide 36, and this portion, that is, the clad 38 is bonded and fixed to the mounting substrate 31 by the adhesive 49. The clad 38 is provided on a support plate 30 made of, for example, Si and having a high refractive index, and the clad 38 including the support plate is fixed on the ridge portion 40 provided on the substrate 31.

  The mounting substrate 31 is provided with a recess 44 so that the core 39 of the air ridge type optical waveguide 36 does not contact the mounting substrate 31. The depth of the recess 44 is set so that the air ridge core 39 does not contact the LED. Further, a wiring electrode 33 for taking out the LED electrode 32 with, for example, a metal wire 37 is formed on the mounting substrate 31 via an insulating film (not shown).

  In the present embodiment, since the incident surface 34 of the core 39 is wide in the coupling between the optical waveguide 36 and the LED, the alignment of the coupling is not severe, and the alignment accuracy may be loose. Therefore, the mounting substrate is formed by attaching a Si piece (the protruding ridges 40 on both sides of the recess 44) to be bonded to the optical waveguide 36 and a Si piece 41 patterned on the wiring electrode 33 to the flat substrate (main body) 31. In addition, it can be manufactured as a mounting substrate having a recess 44. The flat substrate 31 may be formed of Si. In this case, the heat dissipation from the light emitting element is good.

  As described above, according to the present embodiment, the light emitting element LED is fixed at a predetermined position in the recess 44 formed in the substrate 31, and the core 39 of the air ridge type optical waveguide 36 is formed at a position different from the predetermined position. The optical waveguide 36 is fixed to the substrate 31 in a region other than the core 39 (that is, the clad 38) while being disposed in the recess 44 in a non-contact state with the substrate 31. Therefore, the optical waveguide 36 that requires highly accurate alignment with respect to the light emitting element LED fixed at a predetermined position in the recess 44 is an air ridge type, and its core 39 is arranged in a non-contact state with the substrate 31. The substrate 31 is fixed in a region other than the core (especially the clad 38), and the width of the incident side of the core 39 is increased, so that the position of the core 39 with respect to the light emitting element LED can be easily determined, and even the substrate 31 is fixed. If it is sufficiently performed, it can always be aligned in a normal state, and the fixed area is small, and the amount of the adhesive 49 used for fixing is reduced, so that stable bonding (that is, stable alignment) can be performed. it can. In addition, since the optical waveguide 36 is an air ridge type and the core 39 is not in contact with the substrate 31, the light propagation performance due to total reflection between the core and air is improved, and leakage light (cladding mode) is reduced. Since the light incident surface 39 is widened, the amount of incident light from an LED having a large divergence angle of emitted light is increased, and the alignment accuracy with the LED may be moderate.

  Therefore, also in this embodiment, a low-cost and high-performance optical coupling structure can be realized. In particular, an apparatus suitable for a display can be provided.

  Another effect obtained by increasing the width of the core 39 at the incident surface 34 and gradually decreasing the width toward the light emitting side will be described with reference to FIG.

  FIG. 7A shows a state in which light from the LEDs (R), (G), and (B) is simultaneously incident on the core 39 of the optical waveguide 36 from the incident surface 34 and is emitted from the light emitting surface 47. Is shown. At this time, the width of the entrance surface 34 is A (μm), the width of the exit surface 47 is B (μm), and the distance from the entrance surface 34 to the exit surface 47 is d (mm). The width of the core 39 is linearly reduced from the light incident surface 34 to the light emitting surface 47 by the linear inclined surface 46, and total reflection at the interface between the core 39 and the clad 38 is reduced by the linear inclined surface 46. The optical waveguide within the core 39 can be efficiently performed.

  FIG. 7B shows a correlation characteristic between the length d (mm) from the entrance surface 34 to the exit surface 47 and the optical loss (dB). According to this, when the width B of the emission surface 47 is fixed to 50 μm and the allowable loss of the optical waveguide 36 is set to 2 dB or less indicated by a broken line in the graph, the condition a in which the width A of the incident surface 34 is 200 μm Then, in order to reduce the optical loss to 2 dB or less, the lower limit of the length d from the incident surface 34 to the output surface 47 is about 0.7 mm, and under the condition b in which the width A of the incident surface 34 is 300 μm, the optical loss is reduced. In order to become 2 dB or less, the lower limit of the length d from the entrance surface 34 to the exit surface 47 is about 1.5 mm. Similarly, when the width A of the incident surface 34 is increased as in the conditions c, d, and e, the lower limit of the length d from the incident surface 34 to the exit surface 47 is about 3 to reduce the optical loss to 2 dB or less. There is a tendency to increase to 0 mm, about 6.8 mm, and about 15.0 mm.

  From this result, when the width B of the exit surface 47 is made constant, if the width A of the entrance surface 34 is narrowed to reduce the tilt angle of the linear inclined surface 46, the optical loss can be suppressed to 2 dB or less and The length d from the surface 34 to the light emitting surface 47 can be made relatively short. Accordingly, it can be seen that it is desirable to define the width A in order to reliably improve the optical waveguide efficiency by the linear inclined surface 46.

  The embodiment described above can be variously modified based on the technical idea of the present invention.

  For example, the pattern of the concave portion for fixing the light emitting element and the adhesive relief groove and the formation method thereof are not limited to those described above, and may not be connected to each other, or may be formed separately. Also good.

  The anisotropic etching described above is a very effective method because it is only necessary to change the width of the mask opening so that the degree of progress of etching differs between the recesses. In the case of wet etching, the etching is not limited to the KOH described above, and TMAH (tetramethylammonium hydroxide) or the like may be used. Such anisotropic etching may be applied to the formation of the recess 44 in the second embodiment described above.

  Further, as in the first embodiment described above, also in the second embodiment described above, the substrate may be a semiconductor substrate such as Si, and the electrode of the light emitting element may be installed through the substrate.

  In addition, the constituent material and the layer configuration of the optical waveguide described above may be variously changed. For example, an inorganic material such as lithium niobate is used, and this is formed as a core material on a substrate by CVD (chemical vapor deposition), and etched into a predetermined pattern using a resist mask. A core equivalent to the above can be formed. The core shape of the optical waveguide is not limited to the type having a linear inclined surface at the end surface in the width direction, but may be a core having a curved inclined surface at the end surface in the width direction. The core may be produced by molding with a mold.

  In addition, the configuration of the optical system including the above-described optical waveguide may be changed as appropriate. In addition to optical communication such as optical wiring, a micromirror device or a polygon mirror is used as a scanning unit, and projection is performed on a screen. The present invention may be applied to a wearable display such as a head mounted display.

  Moreover, although the above-mentioned embodiment demonstrated light emitting elements, such as LD and LED, it can be set as the structure which radiate | emits the light from an optical waveguide from a mirror surface, and light-receives with light receiving elements, such as a photodiode. Also in this case, the same effect as described above can be obtained.

1A is a plan view of an optical waveguide device according to a first embodiment of the present invention, FIG. 1B is a sectional view taken along line IB-IB, and FIG. 1C is a sectional view taken along line IC-IC of FIG. FIG. 2 is a partially enlarged view (A) of the cross-sectional view taken along the line II-II in FIG. 1 (A) and a partially enlarged view (B) similar to that at the time of manufacture. FIG. 6 is a cross-sectional view sequentially showing the manufacturing steps of the optical waveguide device. FIG. 6 is a cross-sectional view sequentially showing the manufacturing steps of the optical waveguide device. The top view (A), the left view (B), the XX sectional view (C), and the YY sectional view (D) of the optical waveguide device by a 2nd embodiment of the present invention. It is. It is a perspective view of an optical waveguide. The top view and graph which show an optical waveguide and its optical waveguide efficiency similarly. It is sectional drawing of an example of the conventional optical waveguide apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Low resistance Si substrate, 2 ... Recessed part, 3 ... Light emitting (or light-receiving) element, 4, 34 ... Mirror surface,
5, 35 (R), 35 (G), 35 (B) ... incident light, 6, 36 ... optical waveguide,
7 ... Lower cladding, 8 ... Upper cladding, 9, 39 ... Core, 10 ... Optical waveguide device,
12 ... Waveguide side alignment marker, 13 ... Element side alignment marker,
14 ... concave portion (adhesive escape groove), 15 ... adhesive, 16 ... waveguide adhesion region, 18 ... outgoing light,
DESCRIPTION OF SYMBOLS 19 ... Electrode, 20 ... Back electrode (Ti / Pt / Au), 21 ... Insulating layer, 22 ... Electrode pad,
23 ... Terminal electrode, 30 ... Support plate, 31 ... Substrate,
33LED (R), 33LED (G), 33LED (B) ... light emitting element, 40 ... convex portion,
41 ... Si piece, 44 ... concave, 49 ... adhesive

Claims (54)

  An optical waveguide configured to guide light to the inside or the outside via a light reflecting surface formed on the end surface; a light emitting or receiving element disposed to face the end surface; the optical waveguide unit; An optical coupling device having a support to which each of the light emitting or light receiving elements is fixed, a recess formed by anisotropic etching of the support, and the light emitting or receiving element being fixed at a predetermined position in the recess .   The optical coupling device according to claim 1, wherein the optical waveguide portion is fixed to the support by bonding, and the concave portion is formed at an outer position of the bonding fixing region.   The concave portion includes a first concave portion for fixing the light emitting or light receiving element and a second concave portion for receiving an adhesive that protrudes out of the adhesive fixing region of the optical waveguide portion. The optical coupling device according to claim 2, wherein the second recesses are respectively formed by the anisotropic etching.   An air ridge type optical waveguide configured to guide light to the inside or the outside through a light reflecting surface formed on the end surface, a light emitting or receiving element disposed to face the end surface, and the optical waveguide And a support body to which the light emitting or light receiving element is respectively fixed, and the light emitting or light receiving element is fixed at a predetermined position in a recess formed in the support body, and at a position different from the predetermined position. An optical coupling device, wherein the core of the optical waveguide unit is disposed in the recess in a non-contact state with the support, and the optical waveguide unit is fixed to the support in a region other than the core .   The optical coupling device according to claim 4, wherein the optical waveguide portion is fixed to the support by bonding, and the concave portion is formed at an inner position of the bonding fixing region.   The optical coupling device according to claim 5, wherein a clad of the optical waveguide portion is fixed to the support at a position outside the concave portion.   The optical coupling device according to claim 4, wherein the recess is formed by a fixing piece fixed to the main body of the support.   The optical coupling device according to claim 1, wherein the support is made of a semiconductor.   An electrode is provided on the support surface opposite to the optical waveguide section and the fixed surface of the light emitting or receiving element with respect to the support, and the electrode and the electrode of the light emitting or receiving element are electrically connected through the support. The optical coupling device according to claim 8.   The optical coupling device according to claim 9, wherein the support is a low-resistance substrate having a specific resistance of 0.05 Ω-cm or less.   5. The optical coupling device according to claim 1, wherein the light reflecting surface is an optical mirror surface tilted at approximately 45 degrees, and the light emitting or light receiving element of a surface type is disposed to face the optical mirror surface. .   The optical coupling device according to claim 1, wherein an alignment marker is provided on each of the optical waveguide unit and the light emitting or light receiving element.   5. The optical coupling according to claim 1, wherein the optical waveguide portion has a plurality of cores, and the light emitting or light receiving portions of the light emitting or light receiving elements are arranged to face the respective end faces of these cores. apparatus.   The optical waveguide area of the optical waveguide section is enlarged at the end face and gradually reduced toward the light emitting end, and a plurality of light emitting or receiving elements of the light emitting or light receiving element are opposed to the end face that has been enlarged in area. The optical coupling device according to claim 1, wherein the portion is disposed.   The optical coupling device according to claim 1, wherein the optical coupling device is configured for optical communication or display.   Light for fixing an optical waveguide unit configured to guide light to the inside or the outside via a light reflecting surface formed on the end surface, and a light emitting or light receiving element disposed to face the end surface A support for a coupling device, wherein a recess is formed by anisotropic etching, and the light emitting or light receiving element is fixed at a predetermined position in the recess.   The support for an optical coupling device according to claim 16, wherein the concave portion is formed at an outer position of an adhesive fixing region of the optical waveguide portion.   The concave portion includes a first concave portion for fixing the light emitting or light receiving element and a second concave portion for receiving an adhesive that protrudes out of the adhesive fixing region of the optical waveguide portion. The support body for optical coupling devices according to claim 17, wherein the second recesses are respectively formed by the anisotropic etching.   An air ridge type optical waveguide configured to guide light to the inside or the outside through a light reflecting surface formed on the end face, and a light emitting or light receiving element disposed to face the end face are fixed respectively. And a recess for fixing the light emitting or light receiving element, and the core of the optical waveguide portion is different from the fixing position at a position different from the fixing position. A support for an optical coupling device, which is arranged in a non-contact state in the recess and is configured such that the optical waveguide is fixed in a region other than the core.   The support for an optical coupling device according to claim 19, wherein the concave portion is formed at an inner position of an adhesive fixing region of the optical waveguide portion.   21. The support for an optical coupling device according to claim 20, wherein the clad of the optical waveguide portion is fixed at an outer position of the concave portion.   The support for an optical coupling device according to claim 19, wherein the recess is formed by a fixing piece fixed to the support body.   The support for an optical coupling device according to claim 16 or 19, which is made of a semiconductor.   24. The electrode according to claim 23, wherein an electrode is provided on a surface opposite to the fixed surface of the optical waveguide and the light emitting or receiving element, and the electrode and the electrode of the light emitting or receiving element are electrically connected. Support for optical coupling device.   The support for an optical coupling device according to claim 24, comprising a low-resistance substrate having a specific resistance of 0.05 Ω-cm or less.   A step of forming a recess in the support by anisotropic etching, a step of fixing a light emitting or light receiving element at a predetermined position in the recess, and a light is guided to the inside or outside through a light reflecting surface formed on the end face. And a step of fixing the optical waveguide section configured as described above to the support so that the light emitting or light receiving element is disposed facing the end face.   27. The method of manufacturing an optical coupling device according to claim 26, wherein the optical waveguide part is fixed to the support body by adhesion at an inner position of the recess.   28. The concave portion is formed with a first concave portion for fixing the light emitting or light receiving element and a second concave portion for receiving an adhesive that protrudes outside an adhesive fixing region of the optical waveguide portion, respectively. Method of manufacturing an optical coupling device.   29. The method of manufacturing an optical coupling device according to claim 28, wherein the first concave portion and the second concave portion are simultaneously formed using a common mask.   30. The method of manufacturing an optical coupling device according to claim 29, wherein, in the common mask, a width of the opening for the second recess is made smaller than a width of the opening for the first recess.   The light-emitting or light-receiving element is disposed facing the end face of the air ridge type optical waveguide, the light-emitting or light-receiving element is fixed at a predetermined position in the recess, and the light is emitted at a position different from the predetermined position. 27. The optical coupling device according to claim 26, wherein the core of the wave portion is disposed in the concave portion in a non-contact state with the support, and the optical waveguide portion is fixed to the support in a region other than the core. Manufacturing method.   32. The method of manufacturing an optical coupling device according to claim 31, wherein the optical waveguide unit is fixed to the support by bonding, and the concave portion is formed at an inner position of the bonding fixing region.   33. The method of manufacturing an optical coupling device according to claim 32, wherein a clad of the optical waveguide portion is fixed to the support body at a position outside the concave portion.   32. The method for manufacturing an optical coupling device according to claim 31, wherein the concave portion is formed by a fixing piece fixed to the support body.   27. The method for manufacturing an optical coupling device according to claim 26, wherein the support is formed of a semiconductor.   An electrode is provided on a surface of the support opposite to the optical waveguide portion and the fixed surface of the light emitting or light receiving element with respect to the support, and the electrode and the electrode of the light emitting or light receiving element are electrically connected through the support. 36. A method of manufacturing an optical coupling device according to claim 35.   The method for manufacturing an optical coupling device according to claim 36, wherein a low-resistance substrate having a resistivity of 0.05 Ω-cm or less is used as the specific resistance of the support.   27. The method of manufacturing an optical coupling device according to claim 26, wherein the light reflecting surface is formed on an optical mirror surface inclined at approximately 45 degrees, and the planar light emitting or light receiving element is disposed opposite to the optical mirror surface. .   27. The method of manufacturing an optical coupling device according to claim 26, wherein an alignment marker is provided on each of the optical waveguide section and the light emitting or light receiving element.   27. The method of manufacturing an optical coupling device according to claim 26, wherein a plurality of cores are formed in the optical waveguide portion, and the light emitting or light receiving portions of the light emitting or light receiving elements are arranged to face the respective end faces of these cores. .   The optical waveguide area of the optical waveguide section is enlarged at the end face and gradually reduced toward the light emitting end, and a plurality of light emitting or receiving sections of the light emitting or receiving element are arranged facing the end face that has been enlarged in area. The method of manufacturing an optical coupling device according to claim 26.   27. The method of manufacturing an optical coupling device according to claim 26, wherein an optical coupling device configured for optical communication or display is manufactured.   Light for fixing an optical waveguide unit configured to guide light to the inside or the outside via a light reflecting surface formed on the end surface, and a light emitting or light receiving element disposed to face the end surface A method for manufacturing a support for an optical coupling device, the method comprising: forming a recess for fixing the light emitting or light receiving element by anisotropic etching.   44. The method for manufacturing a support for an optical coupling device according to claim 43, wherein the concave portion is formed at a position outside an adhesive fixing region of the optical waveguide portion.   45. The first concave portion for fixing the light emitting or light receiving element and the second concave portion for receiving an adhesive that protrudes outside the adhesive fixing region of the optical waveguide portion are formed as the concave portion, respectively. A method of manufacturing a support for an optical coupling device.   The manufacturing method of the support body for optical coupling devices of Claim 45 which forms the said 1st recessed part and the said 2nd recessed part simultaneously using a common mask.   47. The method of manufacturing a support for an optical coupling device according to claim 46, wherein, in the common mask, a width of the opening for the second recess is made smaller than a width of the opening for the first recess.   The light-emitting or light-receiving element is disposed facing the end face of the air ridge type optical waveguide, the light-emitting or light-receiving element is fixed at a predetermined position in the recess, and the light is emitted at a position different from the predetermined position. 44. The optical coupling device according to claim 43, wherein the core of the wave portion is disposed in the recess in a non-contact state, and a support for fixing the optical waveguide portion in a region other than the core is manufactured. A method for producing a support.   49. The method of manufacturing a support for an optical coupling device according to claim 48, wherein the optical waveguide portion is fixed by bonding, and the concave portion is formed at an inner position of the bonding fixing region.   50. The method for manufacturing a support for an optical coupling device according to claim 49, wherein the concave portion is formed at a position inside an adhesive fixing region of the clad of the optical waveguide portion.   The manufacturing method of the support body for optical coupling devices of Claim 48 which forms the said recessed part with the fixed piece fixed to the support body main body.   The manufacturing method of the support body for optical coupling devices of Claim 43 formed with a semiconductor.   53. The optical coupling according to claim 52, wherein an electrode is provided on a surface opposite to a fixed surface of the optical waveguide and the light emitting or receiving element, and the electrode and the electrode of the light emitting or receiving element are electrically connected. A method for producing a support for an apparatus. The method for producing a support for an optical coupling device according to claim 53, wherein a low-resistance substrate having a specific resistance of 0.05 Ω-cm or less is used.

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