JP2005259706A5 - - Google Patents
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- Publication number
- JP2005259706A5 JP2005259706A5 JP2005107006A JP2005107006A JP2005259706A5 JP 2005259706 A5 JP2005259706 A5 JP 2005259706A5 JP 2005107006 A JP2005107006 A JP 2005107006A JP 2005107006 A JP2005107006 A JP 2005107006A JP 2005259706 A5 JP2005259706 A5 JP 2005259706A5
- Authority
- JP
- Japan
- Prior art keywords
- sample
- sample stage
- stage
- fixed
- micro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims 3
- 238000010884 ion-beam technique Methods 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005107006A JP3904018B2 (ja) | 2005-04-04 | 2005-04-04 | 微小試料加工観察方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005107006A JP3904018B2 (ja) | 2005-04-04 | 2005-04-04 | 微小試料加工観察方法及び装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004317452A Division JP4259454B2 (ja) | 2004-11-01 | 2004-11-01 | 微小試料加工観察装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005259706A JP2005259706A (ja) | 2005-09-22 |
| JP2005259706A5 true JP2005259706A5 (https=) | 2006-03-09 |
| JP3904018B2 JP3904018B2 (ja) | 2007-04-11 |
Family
ID=35085183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005107006A Expired - Lifetime JP3904018B2 (ja) | 2005-04-04 | 2005-04-04 | 微小試料加工観察方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3904018B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102020203580B4 (de) | 2020-03-20 | 2021-10-07 | Carl Zeiss Microscopy Gmbh | Verfahren zum Ändern der Raum-Orientierung einer Mikroprobe in einem Mikroskop-System, sowie Computerprogrammprodukt |
-
2005
- 2005-04-04 JP JP2005107006A patent/JP3904018B2/ja not_active Expired - Lifetime
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