JP2005257394A - Hydrogen detection device - Google Patents

Hydrogen detection device Download PDF

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JP2005257394A
JP2005257394A JP2004067715A JP2004067715A JP2005257394A JP 2005257394 A JP2005257394 A JP 2005257394A JP 2004067715 A JP2004067715 A JP 2004067715A JP 2004067715 A JP2004067715 A JP 2004067715A JP 2005257394 A JP2005257394 A JP 2005257394A
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hydrogen
change
temperature
detection
weight
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Takeaki Shimada
毅昭 島田
Yoshio Nuitani
芳雄 縫谷
Taiichi Ono
泰一 小野
Toshiaki Konno
敏明 紺野
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Honda Motor Co Ltd
Alps Alpine Co Ltd
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Honda Motor Co Ltd
Alps Electric Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To detect easily the concentration of gaseous hydrogen included in gas by utilizing a hydrogen storing alloy having high selectivity to hydrogen. <P>SOLUTION: This hydrogen detection device 11 has a constitution equipped with a detection element 12 comprising the hydrogen storage alloy having a temperature change characteristic of a prescribed hydrogen storing pressure, a temperature measuring resister 15b comprising platinum sandwiched from both sides by a pair of insulating members 15a, 15a, a quartz oscillator 14 sandwiched from both sides by a pair of electrodes 13a, 13b, and a Peltier element 16 for keeping the detection element 12 at a prescribed temperature corresponding to energization control by a control device 20. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、気体中の水素濃度を検出する水素検出装置に関する。   The present invention relates to a hydrogen detector that detects a hydrogen concentration in a gas.

従来、例えば、水素吸蔵合金を利用して水素を検出する水素センサとして、基板の一方の面に水素吸蔵合金を固着し他方の面に水晶振動子を取り付け、水素吸蔵合金が水素を吸蔵した際の重量増大により生じる水晶振動子の周波数変動を検出し、検出した周波数変動の大きさに基づいて水素吸蔵量を検知する水素ガスセンサ(例えば、特許文献1参照)が知られている。
特開平2−110341号公報
Conventionally, for example, as a hydrogen sensor that detects hydrogen using a hydrogen storage alloy, when a hydrogen storage alloy is fixed to one surface of a substrate and a crystal unit is attached to the other surface, the hydrogen storage alloy stores hydrogen. There is known a hydrogen gas sensor (see, for example, Patent Document 1) that detects a frequency fluctuation of a crystal resonator caused by an increase in the weight of the gas and detects a hydrogen storage amount based on the detected magnitude of the frequency fluctuation.
JP-A-2-110341

ところで、上記従来技術の一例に係る水素ガスセンサにおいては、水素吸蔵量に応じた重量増大の変化率が大きいほど水素濃度を精度良く検知することができることから、水素センサ自体の重量を低減し、水素の吸蔵に応じた重量変化に対する感度を増大させることが望まれている。
本発明は上記事情に鑑みてなされたもので、水素に対する選択性が高い水素吸蔵合金を利用して、気体中に含まれる水素ガスの濃度を精度良く検出することが可能な水素検出装置を提供することを目的とする。
By the way, in the hydrogen gas sensor according to an example of the above-described prior art, the hydrogen concentration can be detected more accurately as the rate of change in weight increase according to the hydrogen storage amount is larger. It is desired to increase the sensitivity to weight change according to occlusion.
The present invention has been made in view of the above circumstances, and provides a hydrogen detector capable of accurately detecting the concentration of hydrogen gas contained in a gas by using a hydrogen storage alloy having high selectivity to hydrogen. The purpose is to do.

上記課題を解決して係る目的を達成するために、請求項1に記載の発明の水素検出装置は、可逆的に水素を吸収および放出する水素吸収材(例えば、実施の形態での検出素子12)と、前記水素吸収材の水素の吸収および放出に応じた状態変化を検出し、該状態変化に応じて雰囲気ガスの水素濃度を検出する状態変化検出手段(例えば、実施の形態での水晶振動子14)と、前記水素吸収材の温度を検出する温度センサ(例えば、実施の形態での絶縁部材15aおよび測温抵抗体15b)とを備え、前記温度センサは、絶縁被膜(例えば、実施の形態での絶縁部材15a)により被覆された抵抗体(例えば、実施の形態での測温抵抗体15b)からなり、前記状態変化検出手段に隣接して配置されることを特徴としている。   In order to solve the above-described problems and achieve the object, a hydrogen detection apparatus according to claim 1 is a hydrogen-absorbing material that reversibly absorbs and releases hydrogen (for example, detection element 12 in the embodiment). ) And state change detecting means for detecting a change in state of the hydrogen absorbing material according to absorption and release of hydrogen, and detecting a hydrogen concentration of the atmospheric gas in accordance with the state change (for example, crystal oscillation in the embodiment) 14) and a temperature sensor (for example, the insulating member 15a and the resistance temperature detector 15b in the embodiment) for detecting the temperature of the hydrogen absorbing material, and the temperature sensor has an insulating coating (for example, an implementation) It comprises a resistor (for example, a resistance temperature detector 15b in the embodiment) covered with an insulating member 15a), and is arranged adjacent to the state change detecting means.

上記構成の水素検出装置によれば、例えば水素吸蔵合金等からなる水素吸収材は、この水素検出装置の雰囲気の水素分圧および温度に応じて可逆的に水素を吸収および放出し、この吸収および放出に応じて体積や温度や重量等の状態変化が生じる。このため、例えば温度センサの検出結果に応じて水素吸収材の温度を適宜に制御した状態で、水素吸収材に生じる状態変化を状態変化検出手段によって検出することにより、水素検出装置の雰囲気の水素濃度を検知することができる。
しかも、温度センサとして、絶縁被膜により被覆された抵抗体(例えば、白金等からなる測温抵抗体)を状態変化検出手段に隣接して配置することにより、例えばサーミスタ等の温度センサを備える場合に比べて水素検出装置の重量を軽減することができ、水素吸収材に生じる状態変化として重量変化を検出する場合の水素濃度の検出精度を向上させることができる。また、絶縁被膜により被覆された抵抗体は、サーミスタ等の温度センサに比べて軽量かつ小型化が容易であり、水素検出装置が大型化することを防止しつつ、取り付けに要するスペースを容易に確保することができる。
According to the hydrogen detection device having the above-described configuration, for example, the hydrogen absorbing material made of a hydrogen storage alloy or the like reversibly absorbs and releases hydrogen in accordance with the hydrogen partial pressure and temperature of the atmosphere of the hydrogen detection device. Depending on the release, state changes such as volume, temperature and weight occur. For this reason, for example, by detecting the state change generated in the hydrogen absorbent material by the state change detection means in a state where the temperature of the hydrogen absorbent material is appropriately controlled according to the detection result of the temperature sensor, The density can be detected.
Moreover, when a temperature sensor such as a thermistor is provided as a temperature sensor by disposing a resistor (for example, a resistance temperature detector made of platinum or the like) covered with an insulating film adjacent to the state change detection means. In comparison, the weight of the hydrogen detection device can be reduced, and the detection accuracy of the hydrogen concentration when detecting a weight change as a state change occurring in the hydrogen absorbent can be improved. In addition, a resistor covered with an insulating coating is lighter and easier to reduce in size than temperature sensors such as thermistors, and easily secures the space required for installation while preventing the hydrogen detector from becoming larger. can do.

さらに、請求項2に記載の発明の水素検出装置では、前記状態変化検出手段は、前記水素吸収材の重量変化あるいは前記水素吸収材の重量変化に係る状態量変化を検出することを特徴としている。
上記構成の水素検出装置によれば、温度センサとして絶縁被膜により被覆された抵抗体を備えたことにより、水素検出装置の重量を軽減することができ、水素の吸収および放出に応じて水素吸収材に生じる重量変化を精度良く検出することができる。
Furthermore, in the hydrogen detection device according to claim 2, the state change detection means detects a change in the amount of the hydrogen absorbent material or a change in a state quantity related to a change in the weight of the hydrogen absorbent material. .
According to the hydrogen detection device having the above configuration, the weight of the hydrogen detection device can be reduced by providing the resistor covered with the insulating film as the temperature sensor, and the hydrogen absorption material can be used according to the absorption and release of hydrogen. It is possible to detect the weight change occurring in

さらに、請求項3に記載の発明の水素検出装置では、前記状態変化検出手段は、水晶振動子であることを特徴としている。
上記構成の水素検出装置によれば、水素の吸収および放出に応じて水素吸収材に生じる重量変化を水晶振動子に生じる周波数変動として精度良く検出することができる。
Furthermore, in the hydrogen detector of the invention described in claim 3, the state change detecting means is a crystal resonator.
According to the hydrogen detection device having the above-described configuration, it is possible to accurately detect a change in weight generated in the hydrogen absorbing material in accordance with absorption and release of hydrogen as a frequency variation generated in the crystal resonator.

請求項1に記載の発明の水素検出装置によれば、水素吸収材に生じる状態変化を状態変化検出手段によって検出することにより、水素検出装置の雰囲気の水素濃度を検知することができる。しかも、温度センサとして、絶縁被膜により被覆された抵抗体を状態変化検出手段に隣接して配置することにより、例えばサーミスタ等の温度センサを備える場合に比べて水素検出装置の重量を軽減することができ、水素吸収材に生じる状態変化として重量変化を検出する場合の水素濃度の検出精度を向上させることができる。
さらに、請求項2または請求項3に記載の発明によれば、水素の吸収および放出に応じて水素吸収材に生じる重量変化を精度良く検出することができる。
According to the hydrogen detection device of the first aspect of the invention, the hydrogen concentration in the atmosphere of the hydrogen detection device can be detected by detecting the state change occurring in the hydrogen absorbent by the state change detection means. In addition, as a temperature sensor, a resistor covered with an insulating film is disposed adjacent to the state change detection means, so that the weight of the hydrogen detection device can be reduced compared to a case where a temperature sensor such as a thermistor is provided. It is possible to improve the detection accuracy of the hydrogen concentration when detecting a weight change as a state change occurring in the hydrogen absorbing material.
Furthermore, according to the invention described in claim 2 or claim 3, it is possible to accurately detect a change in weight generated in the hydrogen absorbent material in accordance with absorption and release of hydrogen.

以下、本発明の水素検出装置の一実施形態について添付図面を参照しながら説明する。
本実施の形態による水素検出装置11は、例えば図1に示すように、検出素子12と、一対の電極13a,13bにより両側から挟み込まれた水晶振動子14と、一対の絶縁部材15a,15aにより挟み込まれた測温抵抗体15bと、ペルチェ素子16と、伝熱材17と、撥水フィルタ18と、制御装置20とを備えて構成されている。
そして、検査対象ガスが導入される開口部を有する箱型の筐体21の内部がガス検出室として形成され、この筐体21の内部に、検出素子12と、一対の電極13a,13bを備える水晶振動子14と、一対の絶縁部材15a,15aにより挟み込まれた測温抵抗体15bと、ペルチェ素子16と、伝熱材17と、撥水フィルタ18とが収容され、筐体21の外部に制御装置20が配置されている。
Hereinafter, an embodiment of the hydrogen detector of the present invention will be described with reference to the accompanying drawings.
As shown in FIG. 1, for example, the hydrogen detector 11 according to the present embodiment includes a detection element 12, a crystal resonator 14 sandwiched between a pair of electrodes 13a and 13b, and a pair of insulating members 15a and 15a. The temperature measuring resistor 15b, the Peltier element 16, the heat transfer material 17, the water repellent filter 18, and the control device 20 are sandwiched.
And the inside of the box-shaped housing | casing 21 which has an opening part into which inspection object gas is introduce | transduced is formed as a gas detection chamber, and the inside of this housing | casing 21 is equipped with the detection element 12 and a pair of electrodes 13a and 13b. A quartz oscillator 14, a resistance temperature detector 15 b sandwiched between a pair of insulating members 15 a, 15 a, a Peltier element 16, a heat transfer material 17, and a water repellent filter 18 are accommodated outside the housing 21. A control device 20 is arranged.

検出素子12は、所定の水素吸蔵圧の温度変化特性を有する水素吸蔵合金からなり、所定の作動温度(例えば、100℃等)での水素吸蔵圧(例えば、0.005atm)は、大気中における水素分圧と水素濃度との対応関係から、所定の水素濃度に対応するように設定されている。(例えば、水素分圧0.005atmは水素濃度0.5%に相当する。)
さらに、検出素子12は、水素を吸蔵した際に発生する状態変化(例えば、体積膨張、発熱、重量増大等)あるいは吸蔵した水素を放出する際に発生する状態変化(例えば、体積収縮、吸熱、重量低下等)が所定の状態変化となるように設定されている。例えば、検査対象ガスの水素分圧が所定分圧(例えば、0.005atm)以上の状態で検出素子12が水素を吸蔵した場合に重量が増分Δmだけ増大するようになっている。
そして、検出素子12は、例えば焼結、圧着、溶射、接着等の耐熱性を有する適宜の接合方法により一方の絶縁部材15aの表面上に接合されている。
The detection element 12 is made of a hydrogen storage alloy having a temperature change characteristic of a predetermined hydrogen storage pressure, and a hydrogen storage pressure (for example, 0.005 atm) at a predetermined operating temperature (for example, 100 ° C.) From the correspondence between the hydrogen partial pressure and the hydrogen concentration, it is set to correspond to a predetermined hydrogen concentration. (For example, a hydrogen partial pressure of 0.005 atm corresponds to a hydrogen concentration of 0.5%.)
Further, the detection element 12 changes in a state that occurs when hydrogen is occluded (for example, volume expansion, heat generation, weight increase, etc.) or changes in a state that occurs when the occluded hydrogen is released (for example, volume contraction, endotherm, (Weight reduction, etc.) is set to be a predetermined state change. For example, when the detection element 12 occludes hydrogen when the hydrogen partial pressure of the inspection target gas is equal to or higher than a predetermined partial pressure (for example, 0.005 atm), the weight increases by an increment Δm.
The detection element 12 is bonded onto the surface of the one insulating member 15a by an appropriate bonding method having heat resistance such as sintering, pressure bonding, thermal spraying, and adhesion.

一対の絶縁部材15a,15aにより挟み込まれた測温抵抗体15bは、例えば白金を測温素子として備え、制御装置20を介して通電されている。制御装置20は、この測温抵抗体15bの温度変化に応じた抵抗値の変化を検出することによって、検出素子12の温度を検知する。
略板状の水晶振動子14は、この水晶振動子14を励振させるための一対の電極13a,13bにより厚さ方向の両側から挟み込まれ、一方の電極13aは測温抵抗体15bの他方の絶縁部材15aの表面上に接合され、検出素子12の状態変化に応じた水晶振動子14の共振周波数の変化が電気信号として一対の電極13a,13bを介して制御装置20に出力される。
The temperature measuring resistor 15b sandwiched between the pair of insulating members 15a and 15a includes platinum as a temperature measuring element, for example, and is energized via the control device 20. The control device 20 detects the temperature of the detection element 12 by detecting a change in resistance value corresponding to the temperature change of the resistance temperature detector 15b.
The substantially plate-shaped crystal resonator 14 is sandwiched from both sides in the thickness direction by a pair of electrodes 13a and 13b for exciting the crystal resonator 14, and one electrode 13a is the other insulation of the resistance temperature detector 15b. A change in the resonance frequency of the quartz crystal resonator 14 according to a change in the state of the detection element 12 is output to the control device 20 via the pair of electrodes 13a and 13b as bonded to the surface of the member 15a.

水晶振動子14の他方の電極13bの表面上には、検出素子12を所定温度に保持するための温度保持装置としてのペルチェ素子16が配置され、さらに、このペルチェ素子16は、筐体21の内壁面上に配置された伝熱材17に接合されている。
ペルチェ素子16は、制御装置20による通電制御に応じて吸熱または放熱することで、検出素子12の温度を所定の作動温度に設定する。
On the surface of the other electrode 13 b of the crystal resonator 14, a Peltier element 16 is disposed as a temperature holding device for holding the detection element 12 at a predetermined temperature. It is joined to the heat transfer material 17 arranged on the inner wall surface.
The Peltier element 16 sets the temperature of the detection element 12 to a predetermined operating temperature by absorbing or radiating heat according to energization control by the control device 20.

なお、伝熱材17が配置された筐体21の外面上には複数の放熱フィン22,…,22が備えられている。
また、筐体21の開口部には、検査対象ガスを透過可能であって、検査対象ガス中に含まれる水分の透過を規制する撥水フィルタ18が備えられている。
A plurality of heat radiation fins 22,..., 22 are provided on the outer surface of the housing 21 in which the heat transfer material 17 is disposed.
In addition, the opening of the housing 21 is provided with a water repellent filter 18 that can transmit the gas to be inspected and restricts the permeation of moisture contained in the gas to be inspected.

本実施の形態による水素検出装置11は上記構成を備えており、次に、この水素検出装置11の動作について説明する。
検出素子12を構成する水素吸蔵合金は、ガス検出室とされる筐体21内部の雰囲気の水素分圧が温度に応じた各水素吸蔵圧よりも低いときには水素の吸蔵が抑制され、水素分圧が温度に応じた各水素吸蔵圧に達すると水素の吸蔵を開始する。そして、水素吸蔵合金は水素を吸蔵すると重量が増大するので、水晶振動子14の共振周波数の変化が制御装置20によって検出される。
つまり、検出素子12の温度を所定の作動温度となるように制御すると、検出素子12を構成する水素吸蔵合金が水素を吸蔵しているか否かに応じて、検出される水晶振動子14の共振周波数が異なり、この共振周波数の変化に基づき、雰囲気の水素濃度がどの濃度範囲にあるかを検知することができる。
The hydrogen detection device 11 according to the present embodiment has the above-described configuration. Next, the operation of the hydrogen detection device 11 will be described.
The hydrogen storage alloy constituting the detection element 12 suppresses the storage of hydrogen when the hydrogen partial pressure of the atmosphere inside the casing 21 serving as the gas detection chamber is lower than each hydrogen storage pressure corresponding to the temperature, and the hydrogen partial pressure is reduced. Starts to store hydrogen when each hydrogen storage pressure according to the temperature is reached. Since the hydrogen storage alloy increases in weight when storing hydrogen, a change in the resonance frequency of the crystal resonator 14 is detected by the control device 20.
In other words, when the temperature of the detection element 12 is controlled to be a predetermined operating temperature, the resonance of the crystal resonator 14 to be detected depends on whether or not the hydrogen storage alloy constituting the detection element 12 stores hydrogen. The frequency is different, and based on the change in the resonance frequency, it is possible to detect in which concentration range the hydrogen concentration of the atmosphere is.

例えば、検出素子12の温度が所定の作動温度(例えば、100°C等)に保持されている状態において、雰囲気の水素分圧が検出素子12の水素吸蔵圧(例えば、0.005atm)に満たない場合には、検出素子12は水素を吸蔵せず、水素検出装置11の重量変化はゼロであるから水晶振動子14の共振周波数の変化はゼロとなって、雰囲気の水素濃度は0.5%未満であると検知される。   For example, in a state where the temperature of the detection element 12 is maintained at a predetermined operating temperature (for example, 100 ° C.), the hydrogen partial pressure of the atmosphere satisfies the hydrogen storage pressure (for example, 0.005 atm) of the detection element 12. In the case where there is not, the detection element 12 does not occlude hydrogen and the change in the weight of the hydrogen detection device 11 is zero, so the change in the resonance frequency of the crystal unit 14 is zero, and the hydrogen concentration in the atmosphere is 0.5. Detected to be less than%.

そして、雰囲気の水素分圧が検出素子12の水素吸蔵圧(例えば、0.005atm)以上の場合には、検出素子12が水素を吸蔵し、水素検出装置11の重量が増分Δmだけ増大する。この重量増大に応じた水晶振動子14の共振周波数の変化が検出されることで、雰囲気の水素濃度は0.5%以上であると検知される。   And when the hydrogen partial pressure of atmosphere is more than the hydrogen occlusion pressure (for example, 0.005 atm) of the detection element 12, the detection element 12 occludes hydrogen and the weight of the hydrogen detection apparatus 11 increases by increment (DELTA) m. By detecting a change in the resonance frequency of the crystal resonator 14 according to the increase in weight, it is detected that the hydrogen concentration in the atmosphere is 0.5% or more.

上述したように、本実施の形態による水素検出装置11によれば、水素検出装置11の雰囲気の水素濃度範囲を容易に精度良く検知することができることに加えて、測温抵抗体15bを水晶振動子14に隣接して配置することにより、例えばサーミスタ等のように検出素子12に対する相対的な重量が大きな温度センサを備える場合に比べて、水素検出装置11の重量を軽減することができ、検出素子12に生じる状態変化として重量変化を検出する場合の感度、つまり水素濃度の検出精度を向上させることができる。また、測温抵抗体15bは、サーミスタ等の温度センサに比べて軽量かつ小型化が容易であり、水素検出装置10が大型化することを防止しつつ、取り付けに要するスペースを容易に確保することができる。   As described above, according to the hydrogen detection device 11 according to the present embodiment, in addition to being able to easily and accurately detect the hydrogen concentration range of the atmosphere of the hydrogen detection device 11, the resistance temperature detector 15b is made to vibrate with quartz. By arranging adjacent to the child 14, the weight of the hydrogen detection device 11 can be reduced compared to the case where a temperature sensor having a large relative weight with respect to the detection element 12, such as a thermistor, is provided. Sensitivity when detecting a weight change as a state change occurring in the element 12, that is, the detection accuracy of the hydrogen concentration can be improved. Further, the resistance temperature detector 15b is lighter and smaller than a temperature sensor such as a thermistor, and easily secures a space required for mounting while preventing the hydrogen detector 10 from becoming larger. Can do.

なお、上述した実施の形態においては、水晶振動子14により検出素子12の重量変化を検出するとしたが、これに限定されず、例えば歪ゲージ等によって体積変化を検出してもよいし、温度センサにより温度変化を検出してもよい。   In the above-described embodiment, the change in the weight of the detection element 12 is detected by the quartz crystal resonator 14. However, the present invention is not limited to this. For example, the change in volume may be detected by a strain gauge or the like. The temperature change may be detected by

本発明の一実施形態に係る水素検出装置の構成図である。It is a block diagram of the hydrogen detection apparatus which concerns on one Embodiment of this invention.

符号の説明Explanation of symbols

11 水素検出装置
12 検出素子(水素吸収材)
14 水晶振動子(状態変化検出手段)
15a 絶縁部材(温度センサ、絶縁被膜)
15b 測温抵抗体(温度センサ、抵抗体)

11 Hydrogen detector 12 Detection element (hydrogen absorbing material)
14 Crystal resonator (state change detection means)
15a Insulating member (temperature sensor, insulating coating)
15b Resistance temperature detector (temperature sensor, resistor)

Claims (3)

可逆的に水素を吸収および放出する水素吸収材と、
前記水素吸収材の水素の吸収および放出に応じた状態変化を検出し、該状態変化に応じて雰囲気ガスの水素濃度を検出する状態変化検出手段と、
前記水素吸収材の温度を検出する温度センサとを備え、
前記温度センサは、絶縁被膜により被覆された抵抗体からなり、前記状態変化検出手段に隣接して配置されることを特徴とする水素検出装置。
A hydrogen absorber that reversibly absorbs and releases hydrogen; and
A state change detecting means for detecting a state change according to absorption and release of hydrogen of the hydrogen absorbent, and detecting a hydrogen concentration of the atmospheric gas according to the state change;
A temperature sensor for detecting the temperature of the hydrogen absorbing material,
The temperature sensor is made of a resistor covered with an insulating film, and is disposed adjacent to the state change detecting means.
前記状態変化検出手段は、前記水素吸収材の重量変化あるいは前記水素吸収材の重量変化に係る状態量変化を検出することを特徴とする請求項1に記載の水素検出装置。 2. The hydrogen detection apparatus according to claim 1, wherein the state change detection unit detects a change in a weight of the hydrogen absorbent material or a change in a state quantity related to a change in the weight of the hydrogen absorbent material. 前記状態変化検出手段は、水晶振動子であることを特徴とする請求項2に記載の水素検出装置。

The hydrogen detection apparatus according to claim 2, wherein the state change detection means is a crystal resonator.

JP2004067715A 2004-03-10 2004-03-10 Hydrogen detection device Withdrawn JP2005257394A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015169581A (en) * 2014-03-07 2015-09-28 バキュームプロダクツ株式会社 Physical property dependence type pressure gauge and hydrogen concentration measurement device
EP3744434A1 (en) 2019-05-27 2020-12-02 Nihon Dempa Kogyo Co., Ltd. Sensing device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015169581A (en) * 2014-03-07 2015-09-28 バキュームプロダクツ株式会社 Physical property dependence type pressure gauge and hydrogen concentration measurement device
EP3744434A1 (en) 2019-05-27 2020-12-02 Nihon Dempa Kogyo Co., Ltd. Sensing device
JP2020193846A (en) * 2019-05-27 2020-12-03 日本電波工業株式会社 Sensing device
US11287399B2 (en) 2019-05-27 2022-03-29 Nihon Dempa Kogyo Co., Ltd. Sensing device
JP7246049B2 (en) 2019-05-27 2023-03-27 日本電波工業株式会社 sensing device

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