JP2005254414A - Grinding fluid supplying method and grinding device - Google Patents

Grinding fluid supplying method and grinding device Download PDF

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JP2005254414A
JP2005254414A JP2004071897A JP2004071897A JP2005254414A JP 2005254414 A JP2005254414 A JP 2005254414A JP 2004071897 A JP2004071897 A JP 2004071897A JP 2004071897 A JP2004071897 A JP 2004071897A JP 2005254414 A JP2005254414 A JP 2005254414A
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grinding
grindstone
grinding fluid
fluid
nozzle
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Heiji Yasui
平司 安井
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Japan Science and Technology Agency
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Japan Science and Technology Agency
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and a device for sufficiently, properly and stably supplying grinding fluid to both of a grinding wheel work surface and a grinding wheel side surface. <P>SOLUTION: The grinding device has a grinding wheel for grinding a surface of a ground article, and a grinding fluid supplying nozzle for supplying the grinding fluid to the grinding wheel. The grinding fluid supplying nozzle forms a nozzle tip end portion in a fork shape across the grinding wheel. Grinding fluid supplying ports are respectively formed at positions opposite to the grinding work surface of the grinding wheel and its side surface in the nozzle tip end portion. The grinding fluid is simultaneously and generally vertically supplied to the grinding work surface and the side surface of the grinding wheel. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、研削液供給方法及び同方法を用いた研削装置に関するものである。   The present invention relates to a grinding liquid supply method and a grinding apparatus using the same method.

研削加工においては、発生研削熱の抑制・除去等を目的として、研削装置の砥石に研削液を供給しながら研削を行っている。そして、発生研削熱の抑制は、研削液の潤滑効果や目つまり除去効果によって、また、発生研削熱の除去は、研削液の冷却効果によって行われている。このような研削液がもつ効果を得るために、通常は、研削液を砥石作業面に供給して研削を行っている。(たとえば、特許文献1参照。)。
特開平7−241770号公報
In the grinding process, grinding is performed while supplying a grinding liquid to a grindstone of a grinding apparatus for the purpose of suppressing or removing generated grinding heat. The generated grinding heat is suppressed by the lubricating effect and the eye removal effect of the grinding fluid, and the generated grinding heat is removed by the cooling effect of the grinding fluid. In order to obtain the effect of such a grinding fluid, grinding is usually performed by supplying the grinding fluid to the grindstone working surface. (For example, see Patent Document 1).
JP-A-7-241770

しかし、研削加工では、基本的に砥石作業面と砥石側面の両方が、研削加工に関係するため、その両方に研削液を十分供給することが必要である。   However, in the grinding process, basically both the grindstone working surface and the grindstone side face are related to the grinding process, and therefore it is necessary to supply a sufficient amount of grinding fluid to both of them.

従来、砥石作業面への研削液供給は、十分に注意が払われてきたが、砥石側面への供給については、あまり考えられずにいた。その結果、形研削加工や溝研削加工のように砥石側面での研削現象が大きな影響を及ぼす研削作業では、砥石側面側の研削焼けが問題になることも多かった。   Conventionally, sufficient attention has been paid to the supply of the grinding liquid to the grindstone work surface, but the supply to the grindstone side surface has not been considered much. As a result, grinding burn on the side surface of the grinding wheel often becomes a problem in grinding operations where the grinding phenomenon on the side surface of the grinding wheel has a large effect, such as shape grinding and groove grinding.

また、近年、開発された超平滑研削法では、砥石切込みが微小ではあるが、砥石側面近傍での研削加工も重要であるので、砥石側面にも研削液を供給しながら研削を行う必要があるが、研削液の供給が適切でないと、超平滑研削加工が難しくなっていた。   Moreover, in the recently developed ultra-smooth grinding method, the grinding wheel cutting is fine, but grinding near the grinding wheel side surface is also important, so it is necessary to perform grinding while supplying the grinding fluid to the grinding wheel side surface However, if the supply of grinding fluid is not appropriate, ultra-smooth grinding has become difficult.

このようなことから、研削液供給については、砥石作業面と砥石側面の両方に研削液を十分適切に安定的に供給する方法の開発が重要になっている。   For this reason, regarding the supply of the grinding liquid, it is important to develop a method for supplying the grinding liquid sufficiently and stably to both the grindstone working surface and the grindstone side surface.

現在の研削液供給方法は、砥石作業面と砥石側面の両方に研削液を十分供給することが考えられておらず、多くの問題点が生じている。そこで、本発明では、砥石作業面と砥石側面の両方に研削液を十分適切に安定的に供給する方法およびその装置の開発を課題としている。   In the current grinding fluid supply method, it is not considered that the grinding fluid is sufficiently supplied to both the grinding wheel working surface and the grinding wheel side surface, which causes many problems. Therefore, the present invention has an object to develop a method and an apparatus for supplying a grinding liquid sufficiently and stably to both the grindstone working surface and the grindstone side.

そこで、請求項1に係る本発明では、被研削物の表面を研削する砥石に研削液を供給する研削液供給方法において、前記研削液は、砥石の研削作業面とその側面とに同時に供給することにした。   Therefore, in the present invention according to claim 1, in the grinding fluid supply method for supplying the grinding fluid to the grinding wheel for grinding the surface of the workpiece, the grinding fluid is simultaneously supplied to the grinding work surface and the side surface of the grinding stone. It was to be.

また、請求項2に係る本発明では、請求項1に係る本発明において、前記研削液は、前記研削作業面とその側面に略垂直に供給することにした。   Further, in the present invention according to claim 2, in the present invention according to claim 1, the grinding liquid is supplied substantially perpendicularly to the grinding work surface and its side surface.

また、請求項3に係る本発明では、被研削物の表面を研削する砥石と、この砥石に研削液を供給する研削液供給ノズルとを有する研削装置において、前記研削液供給ノズルは、前記砥石を跨いで二股状にノズル先端部を形成し、このノズル先端部の前記砥石の研削作業面及びその側面と対向する位置に研削液供給口をそれぞれ形成することにした。   According to a third aspect of the present invention, there is provided a grinding apparatus comprising a grinding wheel for grinding a surface of an object to be ground and a grinding fluid supply nozzle for supplying a grinding fluid to the grinding wheel, wherein the grinding fluid supply nozzle is the grinding stone. The nozzle tip is formed in a bifurcated shape across the nozzle, and the grinding fluid supply port is formed at a position facing the grinding work surface of the grindstone and the side surface of the nozzle tip.

そして、本発明では、従来の供給方法に比較して、研削液を砥石作業面と砥石側面に安定的に供給するようにしているため、同一研削条件でも工作物仕上面を良好な状態に仕上げることができる。   In the present invention, since the grinding liquid is stably supplied to the grindstone working surface and the grindstone side surface as compared with the conventional feeding method, the finished surface of the workpiece is finished in a good state even under the same grinding conditions. be able to.

また、砥石側面にも研削液を十分に供給するため、砥石側面での砥石作業面の悪化を防ぎ、同じ研削条件でも、砥石の高寿命化を図ることができる。   In addition, since the grinding fluid is sufficiently supplied to the side surface of the grindstone, it is possible to prevent deterioration of the grindstone working surface on the side surface of the grindstone and to increase the life of the grindstone even under the same grinding conditions.

本発明に係る研削装置は、被研削物の表面を研削するために回転する砥石と、この砥石に研削液を供給する研削液供給ノズルとを有している。   A grinding apparatus according to the present invention includes a grindstone that rotates to grind the surface of an object to be ground, and a grinding fluid supply nozzle that supplies a grinding fluid to the grindstone.

この研削液供給ノズルは、砥石を跨いで二股状にノズル先端部を形成し、このノズル先端部の砥石の研削作業面及びその側面と対向する位置に研削液供給口をそれぞれ形成している。   The grinding liquid supply nozzle has a nozzle tip portion that is bifurcated across the grindstone, and a grinding fluid supply port is formed at a position facing the grinding work surface of the grindstone at the nozzle tip portion and its side surface.

そして、本発明では、研削液供給ノズルを用いて被研削物の表面を研削する砥石に研削液を供給するようにしている。   And in this invention, it is made to supply a grinding liquid to the grindstone which grinds the surface of a to-be-ground object using a grinding liquid supply nozzle.

その研削液供給方法は、研削液を砥石の研削作業面とその側面とに垂直に同時に供給するようにしている。   In the grinding liquid supply method, the grinding liquid is simultaneously supplied perpendicularly to the grinding work surface and the side surface of the grindstone.

このように、本発明では、砥石の研削作業面だけでなくその側面にも研削液を同時に供給しているために、従来と同一研削条件でも工作物仕上面を良好な状態に仕上げることができ、また、砥石側面での砥石作業面の悪化を防ぎ、同じ研削条件でも、砥石の高寿命化を図ることができる。   In this way, in the present invention, since the grinding fluid is simultaneously supplied not only to the grinding work surface of the grindstone but also to the side surfaces thereof, the work surface can be finished in a good condition even under the same grinding conditions as before. Moreover, deterioration of the grindstone working surface on the side surface of the grindstone can be prevented, and the life of the grindstone can be extended even under the same grinding conditions.

以下に、本発明に係る研削装置及び研削液供給方法について、図面を参照しながら具体的に説明する。   Hereinafter, a grinding apparatus and a grinding fluid supply method according to the present invention will be specifically described with reference to the drawings.

本発明に係る研削装置1は、図1に示すように、被研削物2の表面を研削する砥石3と、この砥石に研削液を供給する研削液供給ノズル4とを有しており、特に研削液供給ノズル4の構造に特徴を有している。   As shown in FIG. 1, a grinding apparatus 1 according to the present invention includes a grindstone 3 for grinding the surface of a workpiece 2 and a grinding fluid supply nozzle 4 for supplying a grinding fluid to the grindstone. The structure of the grinding fluid supply nozzle 4 is characteristic.

被研削物2としては、金属(鉄鋼、非鉄金属)や非金属(セラミック、ガラス、プラスチック)などが挙げられる。   Examples of the workpiece 2 include metals (iron and steel, non-ferrous metals) and non-metals (ceramic, glass, plastic) and the like.

砥石3は、円板状に形成しており、その外周部の研削作業面9に砥粒切れ刃6が形成され、回転モータに連動連結した回転軸5に取付けられている。   The grindstone 3 is formed in a disc shape, and an abrasive grain cutting edge 6 is formed on a grinding work surface 9 on the outer peripheral portion thereof, and is attached to a rotating shaft 5 linked to a rotary motor.

研削液供給ノズル4は、図1〜図3に示すように、断面矩形菅状の研削液導水部を持つノズル本体部7の先端部に、砥石3を跨いで二股状のノズル先端部8を形成し、そのノズル先端部8で砥石3の側面の研削点から上部を被覆している。   As shown in FIGS. 1 to 3, the grinding liquid supply nozzle 4 has a bifurcated nozzle tip 8 across the grindstone 3 at the tip of the nozzle body 7 having a grinding fluid water guide having a rectangular bowl shape in cross section. The nozzle tip 8 covers the upper part from the grinding point on the side surface of the grindstone 3.

この研削液供給ノズル4は、ノズル先端部8の砥石3の研削作業面9及びその側面10と対向する位置に研削液供給口11,12をそれぞれ形成している。   The grinding fluid supply nozzle 4 has grinding fluid supply ports 11 and 12 formed at positions facing the grinding work surface 9 and the side surface 10 of the grindstone 3 at the nozzle tip 8.

そして、研削液供給ノズル4は、中央部の研削液供給口11から砥石3の研削作業面9に向けて垂直に研削液を供給するとともに、両側部の研削液供給口12,12から砥石3の側面10に向けて垂直に研削液を供給するようにしている。   The grinding fluid supply nozzle 4 feeds the grinding fluid vertically from the grinding fluid supply port 11 at the central portion toward the grinding work surface 9 of the grinding stone 3 and also from the grinding fluid supply ports 12 and 12 on both sides. The grinding fluid is supplied vertically toward the side surface 10 of the machine.

研削装置1は、上述したように構成しており、研削加工を行う際には、被研削物2の表面に砥石3を当接させた状態で砥石3を回転させ、それと同時に、研削液供給ノズル4の中央部の研削液供給口11から砥石3の研削作業面9に向けて略垂直に研削液を供給するとともに、両側部の研削液供給口12,12から砥石3の側面10に向けて略垂直に研削液を供給する。   The grinding apparatus 1 is configured as described above, and when performing the grinding process, the grinding wheel 3 is rotated in a state where the grinding wheel 3 is in contact with the surface of the workpiece 2 and at the same time, the grinding fluid is supplied. Grinding fluid is supplied from the grinding fluid supply port 11 at the center of the nozzle 4 toward the grinding work surface 9 of the grindstone 3 substantially vertically, and from the grinding fluid supply ports 12 and 12 on both sides to the side surface 10 of the grinding stone 3. The grinding fluid is supplied almost vertically.

図4に、上記構成の研削装置1で研削した場合と従来の研削装置で研削した場合との超平滑研削仕上面の比較実験の結果を示す。   FIG. 4 shows the results of a comparative experiment of the ultra-smooth grinding finished surface between the case of grinding with the grinding apparatus 1 having the above configuration and the case of grinding with a conventional grinding apparatus.

従来の研削装置の場合には、炭化珪素セラミック工作物仕上面上に、脆性破壊痕が見られ、仕上面粗さも100nm程度(256μmx256μmの3次元粗さ)になっている。一方、本発明に係る研削装置の場合には、目立った脆性破壊痕も見られず、仕上面粗さも30nm程度になっている。これにより、本発明に係る研削装置及び研削液供給方法の有効性が確認された。   In the case of a conventional grinding apparatus, brittle fracture marks are observed on the finished surface of the silicon carbide ceramic workpiece, and the finished surface roughness is also about 100 nm (three-dimensional roughness of 256 μm × 256 μm). On the other hand, in the case of the grinding apparatus according to the present invention, no noticeable brittle fracture marks are observed, and the finished surface roughness is about 30 nm. Thereby, the effectiveness of the grinding device and the grinding fluid supply method according to the present invention was confirmed.

本発明に係る研削装置を示す斜視図。The perspective view which shows the grinding device which concerns on this invention. 研削液供給ノズルを示す斜視図。The perspective view which shows a grinding fluid supply nozzle. 同断面図。FIG. 比較実験結果。(a)は、従来の研削装置による場合の表面状態を3次元的に表示したグラフ。(b)は、従来の研削装置による場合のX方向の表面状態を表示したグラフ。(c)は、従来の研削装置による場合のY方向の表面状態を表示したグラフ。(d)は、本発明に係る研削装置による場合の表面状態を3次元的に表示したグラフ。(e)は、本発明に係る研削装置による場合のX方向の表面状態を表示したグラフ。(f)は、本発明に係る研削装置による場合のY方向の表面状態を表示したグラフ。Comparative experiment results. (a) is the graph which displayed the surface state in the case of a conventional grinding device three-dimensionally. (b) is the graph which displayed the surface state of the X direction at the time of a conventional grinding device. (c) is the graph which displayed the surface state of the Y direction at the time of the conventional grinding device. (d) is a graph that three-dimensionally displays the surface state when the grinding apparatus according to the present invention is used. (e) is the graph which displayed the surface state of the X direction at the time of the grinding apparatus based on this invention. (f) is the graph which displayed the surface state of the Y direction at the time of the grinding apparatus based on this invention.

符号の説明Explanation of symbols

1 研削装置
2 被研削物
3 砥石
4 研削液供給ノズル
5 回転軸
6 円板
7 ノズル本体部
8 ノズル先端部
9 研削作業面
10 側面
11,12 研削液供給口
DESCRIPTION OF SYMBOLS 1 Grinding device 2 Object to be ground 3 Grinding wheel 4 Grinding fluid supply nozzle 5 Rotating shaft 6 Disc 7 Nozzle body 8 Nozzle tip 9 Grinding work surface
10 sides
11,12 Grinding fluid supply port

Claims (3)

被研削物の表面を研削する砥石に研削液を供給する研削液供給方法において、
前記研削液は、砥石の研削作業面とその側面とに同時に供給することを特徴とする研削液供給方法。
In a grinding liquid supply method for supplying a grinding liquid to a grindstone for grinding the surface of an object to be ground,
A grinding fluid supply method, wherein the grinding fluid is supplied simultaneously to a grinding work surface and a side surface of a grinding wheel.
前記研削液は、前記研削作業面とその側面に略垂直に供給することを特徴とする請求項1に記載の研削液供給方法。   2. The grinding fluid supply method according to claim 1, wherein the grinding fluid is supplied substantially perpendicularly to the grinding work surface and its side surface. 被研削物の表面を研削する砥石と、この砥石に研削液を供給する研削液供給ノズルとを有する研削装置において、
前記研削液供給ノズルは、前記砥石を跨いで二股状にノズル先端部を形成し、このノズル先端部の前記砥石の研削作業面及びその側面と対向する位置に研削液供給口をそれぞれ形成したことを特徴とする研削装置。
In a grinding apparatus having a grindstone for grinding a surface of an object to be ground and a grinding liquid supply nozzle for supplying a grinding liquid to the grindstone,
The grinding fluid supply nozzle has a bifurcated nozzle tip that straddles the grinding wheel, and a grinding fluid supply port is formed at a position facing the grinding work surface of the grinding wheel and the side surface of the nozzle tip. A grinding device characterized by the above.
JP2004071897A 2004-03-15 2004-03-15 Grinding fluid supplying method and grinding device Pending JP2005254414A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110142696A (en) * 2019-06-26 2019-08-20 西安奕斯伟硅片技术有限公司 Spray head, spray assemblies, the Supply Method of coolant and wafer grinding method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110142696A (en) * 2019-06-26 2019-08-20 西安奕斯伟硅片技术有限公司 Spray head, spray assemblies, the Supply Method of coolant and wafer grinding method

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