JP2005253187A - 静電アクチュエータの駆動装置及び駆動方法 - Google Patents

静電アクチュエータの駆動装置及び駆動方法 Download PDF

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Publication number
JP2005253187A
JP2005253187A JP2004059820A JP2004059820A JP2005253187A JP 2005253187 A JP2005253187 A JP 2005253187A JP 2004059820 A JP2004059820 A JP 2004059820A JP 2004059820 A JP2004059820 A JP 2004059820A JP 2005253187 A JP2005253187 A JP 2005253187A
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Prior art keywords
voltage
movable body
electrostatic actuator
electrode
fixed substrate
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Pending
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JP2004059820A
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Japanese (ja)
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JP2005253187A5 (enExample
Inventor
Takayuki Ide
隆之 井出
Akira Shimokawabe
明 下河辺
Seiichi Hata
誠一 秦
Takashi Fukushige
孝志 福重
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Olympus Corp
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Olympus Corp
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Priority to JP2004059820A priority Critical patent/JP2005253187A/ja
Publication of JP2005253187A publication Critical patent/JP2005253187A/ja
Publication of JP2005253187A5 publication Critical patent/JP2005253187A5/ja
Pending legal-status Critical Current

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JP2004059820A 2004-03-03 2004-03-03 静電アクチュエータの駆動装置及び駆動方法 Pending JP2005253187A (ja)

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JP2004059820A JP2005253187A (ja) 2004-03-03 2004-03-03 静電アクチュエータの駆動装置及び駆動方法

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JP2004059820A JP2005253187A (ja) 2004-03-03 2004-03-03 静電アクチュエータの駆動装置及び駆動方法

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JP2005253187A true JP2005253187A (ja) 2005-09-15
JP2005253187A5 JP2005253187A5 (enExample) 2007-03-08

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JP2004059820A Pending JP2005253187A (ja) 2004-03-03 2004-03-03 静電アクチュエータの駆動装置及び駆動方法

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008052270A (ja) * 2006-07-27 2008-03-06 Nippon Telegr & Teleph Corp <Ntt> ミラー制御装置
JP2009022108A (ja) * 2007-07-12 2009-01-29 Olympus Corp 超音波モータ駆動回路及び超音波モータの駆動信号生成方法
JP2009244760A (ja) * 2008-03-31 2009-10-22 Nippon Telegr & Teleph Corp <Ntt> ミラー装置およびミラーアレイ
JP2010146022A (ja) * 2006-07-27 2010-07-01 Nippon Telegr & Teleph Corp <Ntt> ミラー制御装置
WO2015098294A1 (ja) * 2013-12-26 2015-07-02 オリンパス株式会社 硬度可変アクチュエータ
JP2018063117A (ja) * 2016-10-11 2018-04-19 矢崎総業株式会社 電圧センサ

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008052270A (ja) * 2006-07-27 2008-03-06 Nippon Telegr & Teleph Corp <Ntt> ミラー制御装置
JP2010146022A (ja) * 2006-07-27 2010-07-01 Nippon Telegr & Teleph Corp <Ntt> ミラー制御装置
JP2009022108A (ja) * 2007-07-12 2009-01-29 Olympus Corp 超音波モータ駆動回路及び超音波モータの駆動信号生成方法
JP2009244760A (ja) * 2008-03-31 2009-10-22 Nippon Telegr & Teleph Corp <Ntt> ミラー装置およびミラーアレイ
WO2015098294A1 (ja) * 2013-12-26 2015-07-02 オリンパス株式会社 硬度可変アクチュエータ
JP2015123234A (ja) * 2013-12-26 2015-07-06 オリンパス株式会社 硬度可変アクチュエータ
JP2018063117A (ja) * 2016-10-11 2018-04-19 矢崎総業株式会社 電圧センサ
US10422820B2 (en) 2016-10-11 2019-09-24 Yazaki Corporation Voltage sensor

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