JP2005251790A5 - - Google Patents
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- Publication number
- JP2005251790A5 JP2005251790A5 JP2004056286A JP2004056286A JP2005251790A5 JP 2005251790 A5 JP2005251790 A5 JP 2005251790A5 JP 2004056286 A JP2004056286 A JP 2004056286A JP 2004056286 A JP2004056286 A JP 2004056286A JP 2005251790 A5 JP2005251790 A5 JP 2005251790A5
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- manual valve
- common flow
- gas common
- process gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004056286A JP3767897B2 (ja) | 2004-03-01 | 2004-03-01 | ガス供給集積ユニット |
CN2005800067744A CN101073141B (zh) | 2004-03-01 | 2005-01-20 | 气体供给集成单元 |
PCT/JP2005/000656 WO2005083754A1 (ja) | 2004-03-01 | 2005-01-20 | ガス供給集積ユニット |
KR1020067020398A KR100825050B1 (ko) | 2004-03-01 | 2005-01-20 | 가스 공급 집적 유닛 |
TW100130883A TWI416029B (zh) | 2004-03-01 | 2005-01-25 | Gas supply collection unit |
TW094102114A TWI411742B (zh) | 2004-03-01 | 2005-01-25 | Gas supply collection unit |
TW099130142A TWI486535B (zh) | 2004-03-01 | 2005-01-25 | Gas supply collection unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004056286A JP3767897B2 (ja) | 2004-03-01 | 2004-03-01 | ガス供給集積ユニット |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005251790A JP2005251790A (ja) | 2005-09-15 |
JP2005251790A5 true JP2005251790A5 (ko) | 2005-11-17 |
JP3767897B2 JP3767897B2 (ja) | 2006-04-19 |
Family
ID=34908905
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004056286A Expired - Fee Related JP3767897B2 (ja) | 2004-03-01 | 2004-03-01 | ガス供給集積ユニット |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP3767897B2 (ko) |
KR (1) | KR100825050B1 (ko) |
CN (1) | CN101073141B (ko) |
TW (3) | TWI411742B (ko) |
WO (1) | WO2005083754A1 (ko) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4567370B2 (ja) * | 2004-05-10 | 2010-10-20 | シーケーディ株式会社 | ガス供給集積ユニット |
CN100408900C (zh) * | 2004-05-20 | 2008-08-06 | 喜开理株式会社 | 气体供给集成单元和气体单元的增设方法 |
EP1917244A2 (de) | 2005-08-24 | 2008-05-07 | Abbott GmbH & Co. KG | Hetaryl substituierte guanidinverbindungen und ihre verwendung als bindungspartner für 5-ht5-rezeptoren |
KR101194104B1 (ko) | 2011-01-27 | 2012-10-24 | 주식회사 바이코 | 집적화 가스블럭을 이용한 가스공급장치 |
KR102543187B1 (ko) | 2018-11-09 | 2023-06-15 | 삼성전자주식회사 | 밸브 장치 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100242982B1 (ko) * | 1996-10-17 | 2000-02-01 | 김영환 | 반도체 장비의 가스 공급 장치 |
JP3586075B2 (ja) * | 1997-08-15 | 2004-11-10 | 忠弘 大見 | 圧力式流量制御装置 |
JPH11212653A (ja) * | 1998-01-21 | 1999-08-06 | Fujikin Inc | 流体供給装置 |
JP3607950B2 (ja) | 1998-04-10 | 2005-01-05 | 大陽日酸株式会社 | ガス供給設備 |
JP4238453B2 (ja) * | 2000-03-10 | 2009-03-18 | 株式会社東芝 | 流体制御装置 |
JP4554853B2 (ja) * | 2001-09-17 | 2010-09-29 | シーケーディ株式会社 | ガス供給集積弁 |
-
2004
- 2004-03-01 JP JP2004056286A patent/JP3767897B2/ja not_active Expired - Fee Related
-
2005
- 2005-01-20 CN CN2005800067744A patent/CN101073141B/zh not_active Expired - Fee Related
- 2005-01-20 WO PCT/JP2005/000656 patent/WO2005083754A1/ja active Application Filing
- 2005-01-20 KR KR1020067020398A patent/KR100825050B1/ko active IP Right Grant
- 2005-01-25 TW TW094102114A patent/TWI411742B/zh not_active IP Right Cessation
- 2005-01-25 TW TW100130883A patent/TWI416029B/zh not_active IP Right Cessation
- 2005-01-25 TW TW099130142A patent/TWI486535B/zh not_active IP Right Cessation
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