JP2005251790A5 - - Google Patents

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Publication number
JP2005251790A5
JP2005251790A5 JP2004056286A JP2004056286A JP2005251790A5 JP 2005251790 A5 JP2005251790 A5 JP 2005251790A5 JP 2004056286 A JP2004056286 A JP 2004056286A JP 2004056286 A JP2004056286 A JP 2004056286A JP 2005251790 A5 JP2005251790 A5 JP 2005251790A5
Authority
JP
Japan
Prior art keywords
flow path
manual valve
common flow
gas common
process gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004056286A
Other languages
English (en)
Japanese (ja)
Other versions
JP3767897B2 (ja
JP2005251790A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2004056286A external-priority patent/JP3767897B2/ja
Priority to JP2004056286A priority Critical patent/JP3767897B2/ja
Priority to CN2005800067744A priority patent/CN101073141B/zh
Priority to PCT/JP2005/000656 priority patent/WO2005083754A1/ja
Priority to KR1020067020398A priority patent/KR100825050B1/ko
Priority to TW100130883A priority patent/TWI416029B/zh
Priority to TW094102114A priority patent/TWI411742B/zh
Priority to TW099130142A priority patent/TWI486535B/zh
Publication of JP2005251790A publication Critical patent/JP2005251790A/ja
Publication of JP2005251790A5 publication Critical patent/JP2005251790A5/ja
Publication of JP3767897B2 publication Critical patent/JP3767897B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2004056286A 2004-03-01 2004-03-01 ガス供給集積ユニット Expired - Fee Related JP3767897B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2004056286A JP3767897B2 (ja) 2004-03-01 2004-03-01 ガス供給集積ユニット
CN2005800067744A CN101073141B (zh) 2004-03-01 2005-01-20 气体供给集成单元
PCT/JP2005/000656 WO2005083754A1 (ja) 2004-03-01 2005-01-20 ガス供給集積ユニット
KR1020067020398A KR100825050B1 (ko) 2004-03-01 2005-01-20 가스 공급 집적 유닛
TW100130883A TWI416029B (zh) 2004-03-01 2005-01-25 Gas supply collection unit
TW094102114A TWI411742B (zh) 2004-03-01 2005-01-25 Gas supply collection unit
TW099130142A TWI486535B (zh) 2004-03-01 2005-01-25 Gas supply collection unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004056286A JP3767897B2 (ja) 2004-03-01 2004-03-01 ガス供給集積ユニット

Publications (3)

Publication Number Publication Date
JP2005251790A JP2005251790A (ja) 2005-09-15
JP2005251790A5 true JP2005251790A5 (ko) 2005-11-17
JP3767897B2 JP3767897B2 (ja) 2006-04-19

Family

ID=34908905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004056286A Expired - Fee Related JP3767897B2 (ja) 2004-03-01 2004-03-01 ガス供給集積ユニット

Country Status (5)

Country Link
JP (1) JP3767897B2 (ko)
KR (1) KR100825050B1 (ko)
CN (1) CN101073141B (ko)
TW (3) TWI411742B (ko)
WO (1) WO2005083754A1 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4567370B2 (ja) * 2004-05-10 2010-10-20 シーケーディ株式会社 ガス供給集積ユニット
CN100408900C (zh) * 2004-05-20 2008-08-06 喜开理株式会社 气体供给集成单元和气体单元的增设方法
EP1917244A2 (de) 2005-08-24 2008-05-07 Abbott GmbH & Co. KG Hetaryl substituierte guanidinverbindungen und ihre verwendung als bindungspartner für 5-ht5-rezeptoren
KR101194104B1 (ko) 2011-01-27 2012-10-24 주식회사 바이코 집적화 가스블럭을 이용한 가스공급장치
KR102543187B1 (ko) 2018-11-09 2023-06-15 삼성전자주식회사 밸브 장치

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100242982B1 (ko) * 1996-10-17 2000-02-01 김영환 반도체 장비의 가스 공급 장치
JP3586075B2 (ja) * 1997-08-15 2004-11-10 忠弘 大見 圧力式流量制御装置
JPH11212653A (ja) * 1998-01-21 1999-08-06 Fujikin Inc 流体供給装置
JP3607950B2 (ja) 1998-04-10 2005-01-05 大陽日酸株式会社 ガス供給設備
JP4238453B2 (ja) * 2000-03-10 2009-03-18 株式会社東芝 流体制御装置
JP4554853B2 (ja) * 2001-09-17 2010-09-29 シーケーディ株式会社 ガス供給集積弁

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