JP2005243874A - Multi-pattern wiring board - Google Patents

Multi-pattern wiring board Download PDF

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JP2005243874A
JP2005243874A JP2004050885A JP2004050885A JP2005243874A JP 2005243874 A JP2005243874 A JP 2005243874A JP 2004050885 A JP2004050885 A JP 2004050885A JP 2004050885 A JP2004050885 A JP 2004050885A JP 2005243874 A JP2005243874 A JP 2005243874A
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wiring board
wiring
conductor
groove
region
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JP4272560B2 (en
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Naoto Shibuichi
直人 澁市
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Kyocera Corp
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Kyocera Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a multi-pattern wiring board which can prevent warpage in a thin and wide ceramic mother board, also can manufacture a plurality of wiring boards having excellent electrical reliability which are arranged in vertical and horizontal directions, and surely can form a wiring board resulting in no missing or crack at the time of dividing the same. <P>SOLUTION: The multi-pattern wiring board is provided with a mother board 1 where square wiring board regions 2 are arranged in the vertical and horizontal directions at the central area of the main surface, and a frame type spoil allowance region 5 is formed at the external circumferential part, a wiring conductor formed at each wiring board region 2, a groove 3 formed at the spoil allowance region 5 to surround the entire part of the wiring board region 2, and a conductive layer 4 formed at the bottom surface of the groove 3. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、広面積の母基板の主面の中央部に各々が半導体素子や水晶振動子等の電子部品を搭載するための小型の配線基板となる多数の配線基板領域を縦横の並びに一体的に配列形成して成る多数個取り配線基板に関するものである。   In the present invention, a large number of wiring board regions are integrated vertically and horizontally into a central part of a main surface of a large-area mother board, each of which is a small wiring board for mounting electronic components such as semiconductor elements and crystal resonators. The present invention relates to a multi-cavity wiring board formed by arranging a plurality of wiring boards.

従来、例えば半導体素子や水晶振動子等の電子部品を収納するための電子部品収納用パッケージに用いられる小型の配線基板は、酸化アルミニウム質焼結体等のセラミック材料から成り、表面に配線導体が形成された四角平板状のセラミック絶縁層を複数層、上下に積層した構造である。この配線基板に電子部品を収納し、電子部品の電極を配線導体の露出部分に半田やボンディングワイヤ等を介して電気的に接続することにより電子装置が形成される。   Conventionally, for example, a small wiring board used for an electronic component storage package for storing an electronic component such as a semiconductor element or a crystal resonator is made of a ceramic material such as an aluminum oxide sintered body, and has a wiring conductor on the surface. In this structure, a plurality of formed rectangular flat ceramic insulating layers are stacked one above the other. An electronic device is formed by housing an electronic component on the wiring board and electrically connecting the electrode of the electronic component to an exposed portion of the wiring conductor via solder, a bonding wire, or the like.

ところで、このような配線基板は近時の電子装置の小型化の要求に伴い、その大きさが数mm角程度の極めて小さなものとなってきており、さらに、その厚みも1mm以下と薄くなってきている。そして、このような小さな多数個の配線基板の取り扱いを容易なものとするとともに、配線基板および電子装置の作製を効率よく行なうために、1枚の広面積のセラミック材料等から成る母基板から多数個の配線基板を同時集約的に得るようにした、いわゆる多数個取り配線基板の形態で作製されている。   By the way, with the recent demand for miniaturization of electronic devices, the size of such wiring boards has become extremely small, about several millimeters square, and the thickness has become as thin as 1 mm or less. ing. In order to facilitate handling of such a small number of wiring boards and to efficiently manufacture the wiring board and the electronic device, a large number of mother boards made of a single large-area ceramic material or the like are used. The circuit board is manufactured in the form of a so-called multi-cavity wiring board in which a plurality of wiring boards are obtained simultaneously and collectively.

この多数個取り配線基板は、四角形状の配線基板領域が縦横に複数配列形成されるとともに、外周部に枠状の捨て代領域が形成された母基板から成り、生産性を向上させるために、母基板の大きさは、100mm角程度と大きくなってきている。   This multi-cavity wiring board consists of a mother board in which a plurality of rectangular wiring board areas are formed in a matrix and a frame-shaped discard margin area is formed on the outer periphery, in order to improve productivity, The size of the mother board is increasing to about 100 mm square.

このような多数個取り配線基板の一例を図3に示す。多数個取り配線基板は、四角形状の配線基板領域32が縦横に複数配列形成された母基板31と、各配線基板領域32に形成された複数の配線導体(図示せず)と、母基板31の外周に形成された枠状の捨て代領域35とを具備した構造である。   An example of such a multi-piece wiring board is shown in FIG. The multi-cavity wiring board includes a mother board 31 in which a plurality of square-shaped wiring board areas 32 are arranged vertically and horizontally, a plurality of wiring conductors (not shown) formed in each wiring board area 32, and a mother board 31. It is the structure which comprised the frame-shaped discard margin area | region 35 formed in the outer periphery.

各配線基板領域32の上面には、電子部品を搭載するための搭載部(図示せず)が形成されており、配線導体は、一部が配線基板領域32の上面の搭載部、またはその周辺に露出するとともに、他の一部が配線基板領域32の下面や側面等に露出するようにして形成されている。   A mounting portion (not shown) for mounting electronic components is formed on the upper surface of each wiring board region 32, and a part of the wiring conductor is mounted on the upper surface of the wiring substrate region 32 or its periphery. The other part of the wiring board region 32 is exposed to the lower surface and the side surface.

そして、配線基板領域32の搭載部に電子部品(図示せず)を搭載固定するとともに電子部品の電極をボンディングワイヤや半田等の電気的接続手段を介して搭載部またはその周辺に露出している配線導体に電気的に接続し、配線基板領域32の上面に搭載部を塞ぐようにして金属やガラス等から成る蓋体を接合したり、電子部品をエポキシ樹脂等から成る樹脂製封止材で覆って封止することにより、搭載部の内部に電子部品を気密に収納することによって、多数の電子装置が縦横の並びに配列形成された多数個取りの状態で形成される。しかる後、この多数個取りの状態の電子装置を個々の配線基板領域32に分割することにより多数個の製品としての電子装置が形成される。なお、配線基板領域32への電子部品の搭載は、多数個取り配線基板を個々の配線基板領域32に分割した後に行われる場合もある。   An electronic component (not shown) is mounted and fixed on the mounting portion of the wiring board region 32, and the electrodes of the electronic component are exposed to the mounting portion or its periphery via an electrical connection means such as a bonding wire or solder. It is electrically connected to the wiring conductor, and a lid made of metal, glass or the like is joined to the upper surface of the wiring board region 32 so as to close the mounting portion, or an electronic component is made of a resin sealing material made of epoxy resin or the like. By covering and sealing, the electronic components are housed in the mounting portion in an airtight manner, so that a large number of electronic devices are formed in a multi-piece state in which the devices are arranged vertically and horizontally. Thereafter, the electronic device in the multi-cavity state is divided into individual wiring board regions 32 to form an electronic device as a large number of products. The electronic component may be mounted on the wiring board region 32 after the multi-piece wiring board is divided into the individual wiring board regions 32.

このような多数個取り配線基板においては、通常、配線導体の表面に、酸化腐食の防止や半田の濡れ性、ボンディングワイヤのボンディング性を向上させること等のために、あらかじめ配線導体に対してニッケルや金等のめっきが施される。   In such a multi-cavity wiring board, nickel is usually applied to the surface of the wiring conductor in advance to prevent oxidation corrosion, improve the wettability of the solder, and improve the bonding property of the bonding wire. Metal plating is applied.

配線導体にめっきを施すには、多数個取り配線基板をニッケル,金等のめっき液中に浸漬し、配線導体に所定のめっき用の電流を供給する。母基板31の一対の辺部等にはめっき導通用パターン37が、配線導体と電気的に接続するようにして形成されており、めっき用治具(ラック)に設けられた導通用端子(図示せず)をめっき導通用パターン37に接触させるとともに、導通用端子の一対の端部でめっき導通用パターン37を上下から挟み込むことにより、電源から導通用端子とめっき導通用パターン37とを介して配線導体にめっき用の電流が供給される。   In order to plate the wiring conductor, a multi-piece wiring board is immersed in a plating solution such as nickel or gold, and a predetermined plating current is supplied to the wiring conductor. A plating conduction pattern 37 is formed on a pair of sides of the mother board 31 so as to be electrically connected to the wiring conductor, and a conduction terminal (see FIG. (Not shown) is brought into contact with the plating conduction pattern 37, and the plating conduction pattern 37 is sandwiched from above and below by a pair of ends of the conduction terminal, whereby the conduction terminal and the plating conduction pattern 37 are connected from the power source. A current for plating is supplied to the wiring conductor.

なお、めっき導通用パターン37は図2に示すように、母基板31の一対の端面に形成された楕円弧状、または円弧状の切り欠き部38の内面にメタライズ層等の導体層を被着形成することにより形成されている。   As shown in FIG. 2, the plating conduction pattern 37 is formed by depositing a conductor layer such as a metallized layer on the inner surfaces of the elliptical arc-shaped or arc-shaped cutout portions 38 formed on the pair of end surfaces of the mother substrate 31. It is formed by doing.

この場合、一般に、電解めっき法においては、母基板31の外周部に近い被めっき部位(配線導体の露出した表面)ほど電流が流れ易く電流密度が高くなること、また、めっき液の循環供給がされやすいこと等から、めっき速度が速く、めっき厚みが厚くなることが知られている。   In this case, in general, in the electroplating method, the current density tends to increase as the portion to be plated (the exposed surface of the wiring conductor) near the outer peripheral portion of the mother substrate 31 increases, and the plating solution is circulated and supplied. It is known that the plating rate is high and the plating thickness is thick because it is easily applied.

そのため、配線基板領域32の配線導体に被着形成されるニッケルや金等のめっきの厚みを均一なものとするために、母基板31の捨て代領域35の主面には枠状の導体層34が、めっき導通用パターン37および配線導体と電気的に接続して形成されている。   Therefore, in order to make the thickness of the plating such as nickel or gold deposited on the wiring conductor in the wiring board region 32 uniform, a frame-like conductor layer is formed on the main surface of the disposal margin region 35 of the mother board 31. 34 is formed in electrical connection with the plating conduction pattern 37 and the wiring conductor.

枠状の導体層34は、その内側の被めっき部位に被着しようとするニッケル,金等のめっき金属を、引き寄せて導体層34自身のほうに被着させて、被めっき部位のめっき厚みのばらつきを抑える、いわゆる補助陰極として機能し、内側の配線基板領域32の配線導体に被着されるめっき厚みが厚くなることを防止している。   The frame-like conductor layer 34 draws a plating metal, such as nickel or gold, to be deposited on the inner portion to be plated, and deposits it on the conductor layer 34 itself, so that the plating thickness of the portion to be plated is increased. It functions as a so-called auxiliary cathode that suppresses variations, and prevents the plating thickness deposited on the wiring conductor in the inner wiring board region 32 from increasing.

なお、隣接する配線基板領域32の境界上には、貫通導体が形成されており、この貫通導体は、隣接する配線基板領域32の配線導体間や上下の配線導体を電気的に接続するように形成されており、個々の配線基板領域32に分割する際に縦に分割されることにより、配線基板の側面に位置する側面導体(キャスタレーション導体)となる。   A through conductor is formed on the boundary between the adjacent wiring board regions 32, and the through conductors electrically connect between the wiring conductors of the adjacent wiring board regions 32 and the upper and lower wiring conductors. It is formed, and when it is divided into individual wiring board regions 32, it is divided vertically so that it becomes a side conductor (castellation conductor) located on the side face of the wiring board.

このような多数個取り配線基板は、例えば、母基板31がセラミック材料から成る場合であれば、複数のセラミックグリーンシート(以下、単にグリーンシートともいう)を準備するとともに、配線基板領域32となる領域や、その領域の境界の所定位置に貫通孔を形成し、次に、グリーンシートのうち一対の端面を半円状や半楕円状等に打ち抜いて切り欠き部38を形成し、次に、金属ペーストをグリーンシートの表面、切り欠き部38の内面の全面および貫通孔内に印刷塗布、充填し、次に、金属ペーストを所定の配線導体や枠状の導体層34、めっき導通用パターン37等のパターンでグリーンシートの表面に印刷塗布し、最後に、このグリーンシートを積層して積層体とするとともに焼成することにより作製される。
特開2000−340898号公報
For example, if the mother board 31 is made of a ceramic material, such a multi-piece wiring board is prepared with a plurality of ceramic green sheets (hereinafter also simply referred to as green sheets) and becomes a wiring board region 32. A through hole is formed at a predetermined position of the region and the boundary of the region, and then a pair of end faces of the green sheet are punched out into a semicircular shape, a semi-elliptical shape, etc. to form a notch 38, The metal paste is printed and applied to the surface of the green sheet, the entire inner surface of the cutout portion 38, and the through-holes, and then the metal paste is applied to a predetermined wiring conductor, frame-shaped conductor layer 34, and plating conduction pattern 37. The green sheet is printed and applied in a pattern such as the above, and finally, the green sheet is laminated to form a laminate and fired.
JP 2000-340898 A

しかしながら、近年、電子部品収納用パッケージ等に用いられる小型の配線基板は、電子装置に対する低背化の要求のため、より一層の小型化、特に薄型化が必要となってきており、これに応じて母基板31は、例えば厚みが1mm以下と非常に薄型化されるようになってきている。   However, in recent years, small-sized wiring boards used for electronic component storage packages and the like have been required to be further reduced in size, in particular, to be thinner due to the demand for low-profile electronic devices. For example, the mother board 31 has become very thin, for example, with a thickness of 1 mm or less.

このように母基板31が薄型化されると、枠状の導体層34となる金属ペーストと母基板31となるグリーンシートとの焼成時の収縮率の違いにより、母基板の主面の外周部分の各辺において、各辺の全長にわたる大きな応力が一方向に作用し、この応力により母基板31が凹状、または凸状に反ってしまい、各配線基板領域32を個片状に分割する際に、各配線基板領域32の間や、配線基板領域32と捨て代領域35との間の境界線が歪むため個々の配線基板においてクラックやバリが発生するという問題点を有していた。また、母基板31を分割しない状態で半導体素子等の電子部品を実装する際に、搭載部が変形して搭載精度が悪化してしまい、実装不良が多発するという問題点を有していた。   When the mother board 31 is thinned in this way, the outer peripheral portion of the main surface of the mother board is caused by the difference in shrinkage rate during firing between the metal paste that becomes the frame-like conductor layer 34 and the green sheet that becomes the mother board 31. In each side, a large stress over the entire length of each side acts in one direction, and this stress causes the base substrate 31 to be warped in a concave shape or a convex shape, and each wiring board region 32 is divided into individual pieces. The boundary lines between the wiring board regions 32 and between the wiring board region 32 and the disposal margin region 35 are distorted, so that there is a problem that cracks and burrs are generated in the individual wiring boards. Further, when mounting electronic parts such as semiconductor elements without dividing the mother board 31, the mounting portion is deformed, mounting accuracy is deteriorated, and mounting defects frequently occur.

本発明はかかる問題点に鑑み案出されたものであり、その目的は、より一層の小型化、特に薄型化が進んだ配線基板領域32において、母基板31の外周の捨て代領域35の主面にめっき厚みのばらつきを防止するための枠状の導体層34を設けたとしても、枠状の導体層34となる金属ペーストと母基板31となるグリーンシートとの焼成時の収縮率の違いを緩和して母基板31の反り等に不具合が生じることを防止することが可能であり、その結果、各配線基板領域32を個片状に分割する際にクラックやバリの発生を防止することが可能で、かつ配線導体の表面に大きな厚みバラつきを生じさせることなく良好にめっき層を被着させることが可能な多数個取り配線基板を提供することにある。   The present invention has been devised in view of such a problem, and the object thereof is to provide a main part of the discard margin area 35 on the outer periphery of the mother board 31 in the wiring board area 32 which has been further reduced in size, particularly reduced in thickness. Even if a frame-like conductor layer 34 for preventing variation in plating thickness is provided on the surface, the difference in shrinkage ratio during firing between the metal paste that becomes the frame-like conductor layer 34 and the green sheet that becomes the mother substrate 31 It is possible to prevent the occurrence of defects in the warp of the mother board 31 by mitigating the above, and as a result, it is possible to prevent the occurrence of cracks and burrs when dividing each wiring board region 32 into individual pieces. An object of the present invention is to provide a multi-piece wiring board that can be applied with good plating layers without causing a large thickness variation on the surface of the wiring conductor.

本発明の多数個取り配線基板は、主面の中央部に四角形状の配線基板領域が縦横に複数配列形成されるとともに、外周部に枠状の捨て代領域が形成された母基板と、前記各配線基板領域に形成された配線導体と、前記捨て代領域に前記配線基板領域の全体を取り囲むように形成された溝と、該溝の底面に形成された導体層とを具備していることを特徴とするものである。   A multi-cavity wiring board according to the present invention includes a mother board in which a plurality of rectangular wiring board regions are formed in a central portion of a main surface in a vertical and horizontal manner, and a frame-shaped discard margin region is formed in an outer peripheral portion; A wiring conductor formed in each wiring board region; a groove formed in the discard margin region so as to surround the entire wiring board region; and a conductor layer formed in a bottom surface of the groove. It is characterized by.

また、本発明の多数個取り配線基板において、好ましくは、前記母基板は、前記主面の前記配線基板領域同士の境界および前記配線基板領域と前記捨て代領域との境界に沿ってそれぞれ分割溝が形成されており、前記溝は、深さが前記母基板の厚みの1/2未満であるとともに前記分割溝よりも深いことを特徴とするものである。   In the multi-cavity wiring board of the present invention, it is preferable that the mother board is divided into grooves along the boundary between the wiring board areas on the main surface and the boundary between the wiring board area and the margin area. The groove has a depth that is less than ½ of the thickness of the mother substrate and is deeper than the dividing groove.

本発明の多数個取り配線基板は、前記導体層は、前記各配線基板領域の前記配線導体と電気的に接続されており、前記配線導体および前記導体層は、その露出した表面にめっき層が被着されることを特徴とするものである。   In the multi-cavity wiring board of the present invention, the conductor layer is electrically connected to the wiring conductor in each wiring board region, and the wiring conductor and the conductor layer have a plating layer on the exposed surface. It is characterized by being deposited.

本発明の多数個取り配線基板によれば、主面の中央部に四角形状の配線基板領域が縦横に複数配列形成されるとともに、外周部に枠状の捨て代領域が形成された母基板と、各配線基板領域に形成された配線導体と、捨て代領域に配線基板領域の全体を取り囲むように形成された溝と、該溝の底面に形成された導体層とを具備していることから、溝の底面に形成された導体層と母基板との間で焼成時の収縮率の違いに起因して応力が生じたとしても、その応力は母基板の主面から離れた、厚みの中央付近に位置する溝の底面部に作用することとなり、表面の収縮によって比較的大きな応力が発生しやすい母基板の捨て代領域の主面に導体層を形成した場合よりも母基板に作用する応力を小さいものとすることができることから、母基板の反りを防止することが可能となる。   According to the multi-cavity wiring board of the present invention, a plurality of quadrangular wiring board regions are formed in the center portion of the main surface in the vertical and horizontal directions, and a mother board in which a frame-shaped discard margin region is formed in the outer peripheral portion; A wiring conductor formed in each wiring board region, a groove formed so as to surround the entire wiring board region in the disposal margin area, and a conductor layer formed on the bottom surface of the groove. Even if stress is generated due to the difference in shrinkage rate during firing between the conductor layer formed on the bottom surface of the groove and the mother substrate, the stress is separated from the main surface of the mother substrate, the center of the thickness Stress that acts on the bottom surface of the groove located in the vicinity, and is more likely to generate a relatively large stress due to surface contraction. Can reduce the warpage of the mother board. It is possible to stop.

また、溝の底面に導体層を被着させた場合でも、導体層は、母基板の外周部に形成されていることから最もめっき用の電流が流れやすいことには変わりはなく、補助陰極として有効に機能し、配線導体に被着されるめっき層の厚みのばらつきを有効に防止することができる。   Even when the conductor layer is deposited on the bottom surface of the groove, the conductor layer is formed on the outer periphery of the mother substrate, so that the current for plating is most likely to flow, and as an auxiliary cathode It functions effectively and can effectively prevent variations in the thickness of the plating layer deposited on the wiring conductor.

これにより、各配線基板領域を個片状に分割する際にクラックやバリが発生することを防止できるとともに、配線導体に大きな厚みのばらつきを生じさせることなくめっき層を被着させることができる。その結果、各配線基板領域を個片状に分割する際にクラックやバリの発生を防止することが可能で、かつ配線導体の表面に大きな厚みバラつきを生じさせることなく良好にめっき層を被着させることが可能な多数個取り配線基板を提供することができる。   Thereby, cracks and burrs can be prevented from occurring when each wiring board region is divided into individual pieces, and a plating layer can be deposited without causing a large thickness variation in the wiring conductor. As a result, it is possible to prevent the occurrence of cracks and burrs when dividing each wiring board region into individual pieces, and to deposit the plating layer well without causing a large thickness variation on the surface of the wiring conductor Thus, it is possible to provide a multi-piece wiring board that can be made to operate.

本発明の多数個取り配線基板によれば、好ましくは、母基板は、主面の配線基板領域同士の境界および配線基板領域と捨て代領域との境界に沿ってそれぞれ分割溝が形成されており、捨て代領域に形成された溝は、深さが母基板の厚みの1/2未満であるとともに前記分割溝よりも深く形成したことから、分割溝に沿って容易に母基板を各配線基板領域に分割することができるとともに、溝が形成されている部位で母基板の機械的な強度が低下して母基板に割れ等の機械的な破壊が生じることを防止することができる。   According to the multi-cavity wiring board of the present invention, it is preferable that the mother board has dividing grooves formed along the boundary between the wiring board areas on the main surface and the boundary between the wiring board area and the disposal margin area. In addition, since the groove formed in the disposal margin region has a depth less than ½ of the thickness of the mother board and is formed deeper than the divided groove, each mother board can be easily formed along the divided groove. In addition to being divided into regions, it is possible to prevent the mechanical strength of the mother board from being lowered at the portion where the groove is formed, and mechanical damage such as cracking to occur on the mother board.

また、溝の底面の導体層となる金属ペーストと母基板となるグリーンシートとの焼成時の収縮率の違いによる応力は、母基板の主面から離れた、厚みの中央付近に位置する溝の底面部に作用することとなることから、より効果的に導体層と母基板との焼成時の収縮率の違いによる母基板の反りを防止することが可能となる。   In addition, the stress due to the difference in shrinkage between the metal paste as the conductor layer on the bottom surface of the groove and the green sheet as the mother substrate is caused by the stress of the groove located near the center of the thickness away from the main surface of the mother substrate. Since it acts on the bottom surface portion, it is possible to more effectively prevent the mother substrate from warping due to the difference in shrinkage rate during firing between the conductor layer and the mother substrate.

また、この多数個取り配線基板を個々の配線基板領域に分割するための分割溝を、母基板の外周の捨て代領域に溝の底面に形成された導体層を越えて長く形成しても導体層を断線させることがない。このように、母基板の縦方向、及び幅方向に母基板の端部まで長く分割溝を形成することによって、母基板の分割性をさらに向上させることができる。   Further, even if the dividing groove for dividing this multi-piece wiring board into individual wiring board regions is formed longer than the conductor layer formed on the bottom surface of the groove in the discarding area on the outer periphery of the mother board, the conductor Does not break the layers. As described above, by forming the dividing groove long in the longitudinal direction and the width direction of the mother substrate up to the end of the mother substrate, the dividing property of the mother substrate can be further improved.

また、本発明の多数個取り配線基板によれば、好ましくは、導体層は、各配線基板領域の配線導体と電気的に接続されており、配線導体および導体層は、その露出した表面にめっき層が被着されることから、配線導体の酸化腐食を防止し、半田の濡れ性、ボンディングワイヤのボンディング性を向上させることができる。また、全ての配線基板領域に形成された配線導体(図示せず)と、母基板の主面に形成された溝の底面の導体層とめっき導通用パターンとを、一体的に導通を取ることとなり、各配線基板領域の配線導体に被着されるめっき層の厚みを均一で安定したものとすることができる。   Further, according to the multi-cavity wiring board of the present invention, preferably, the conductor layer is electrically connected to the wiring conductor in each wiring board region, and the wiring conductor and the conductor layer are plated on the exposed surface. Since the layer is deposited, the oxidative corrosion of the wiring conductor can be prevented, and the wettability of the solder and the bondability of the bonding wire can be improved. Also, the wiring conductor (not shown) formed in all the wiring board regions, the conductor layer on the bottom surface of the groove formed on the main surface of the mother board, and the plating conduction pattern should be integrated. Thus, the thickness of the plating layer deposited on the wiring conductor in each wiring board region can be made uniform and stable.

次に、本発明の多数個取り配線基板を添付の図面を基に説明する。   Next, a multi-piece wiring board according to the present invention will be described with reference to the accompanying drawings.

図1(a)は本発明の多数個取り配線基板の実施の形態の一例を示す平面図であり、図1(b)は断面図である。同図において1は母基板、2は配線基板領域、3は溝、4は溝3の底面に形成された導体層、5は捨て代領域である。なお、各配線基板領域2には配線導体が形成されているが、配線導体は、図面を見易くするために省略している。   FIG. 1A is a plan view showing an example of an embodiment of a multi-piece wiring board according to the present invention, and FIG. 1B is a cross-sectional view. In the figure, 1 is a mother board, 2 is a wiring board area, 3 is a groove, 4 is a conductor layer formed on the bottom surface of the groove 3, and 5 is a margin area. In addition, although the wiring conductor is formed in each wiring board area | region 2, the wiring conductor is abbreviate | omitted in order to make drawing easy to see.

そして、主として母基板1、配線基板領域2、溝3、導体層4、捨て代領域5で本発明の多数個取り配線基板が構成されている。   The mother board 1, the wiring board area 2, the groove 3, the conductor layer 4, and the disposal margin area 5 constitute the multi-cavity wiring board of the present invention.

ここで、母基板1は、酸化アルミニウム質焼結体や窒化アルミニウム質焼結体,ムライト質焼結体,ガラスセラミックス等のセラミック材料から成るセラミック層を積層して成る。また、各配線基板領域2は、例えば一辺の長さが2〜20mm程度で厚みが0.5〜2mm程度の四角形状である。そして、各配線基板領域2の上面中央部に電子部品を収納し搭載するための搭載部(図示せず)が設けられている。   Here, the mother substrate 1 is formed by laminating ceramic layers made of a ceramic material such as an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, or a glass ceramic. Moreover, each wiring board area | region 2 is a square shape whose length of one side is about 2-20 mm and thickness is about 0.5-2 mm, for example. A mounting portion (not shown) for storing and mounting electronic components is provided at the center of the upper surface of each wiring board region 2.

このような母基板1は、例えば酸化アルミニウム質焼結体から成る場合であれば、酸化アルミニウム等の原料粉末をシート状に成形したグリーンシートを複数枚準備するとともに縦横に区画して配線基板領域2を設け、次に、このグリーンシートの一部のものについて適当な打ち抜き加工を施した後、積層、焼成することによって作製される。   If such a mother substrate 1 is made of, for example, an aluminum oxide sintered body, a plurality of green sheets obtained by forming a raw material powder such as aluminum oxide into a sheet shape are prepared, and the substrate is partitioned vertically and horizontally. Next, a part of the green sheet is subjected to an appropriate punching process, and then laminated and fired.

各配線基板領域2には、配線導体(図示せず)が形成されている。配線導体は、搭載部に搭載される電子部品の電極とボンディングワイヤや半田等を介して電気的に接続し、これを配線基板領域2の下面や側面に導出する導電路として機能する。   A wiring conductor (not shown) is formed in each wiring board region 2. The wiring conductor is electrically connected to an electrode of an electronic component mounted on the mounting portion via a bonding wire, solder, or the like, and functions as a conductive path leading to the lower surface or side surface of the wiring board region 2.

配線導体は、タングステンやモリブデン,銅,銀等の金属材料から成り、例えば、タングステンから成る場合であれば、タングステンの金属ペーストを母基板1となるグリーンシートに所定の配線導体のパターンで印刷しておくことにより形成される。   The wiring conductor is made of a metal material such as tungsten, molybdenum, copper, or silver. For example, when the wiring conductor is made of tungsten, a metal paste of tungsten is printed on a green sheet as the mother substrate 1 in a predetermined wiring conductor pattern. It is formed by keeping.

配線導体の表面には、酸化腐食を防止するとともに、半田やボンディングワイヤを接続する際の半田の濡れ性、ボンディングワイヤのボンディング性等の特性を向上させるために、ニッケルや金等のめっき層(図示せず)が被着されている。   On the surface of the wiring conductor, a plating layer (such as nickel or gold) is used to prevent oxidative corrosion and to improve characteristics such as solder wettability when bonding solder and bonding wires and bonding wire bonding properties. (Not shown) is attached.

このめっき層は、めっき液中で被めっき部(配線導体の表面)にめっき被着用の電流を供給し、電解めっきを施すことにより形成される。   This plating layer is formed by supplying a plating current to the portion to be plated (surface of the wiring conductor) in the plating solution and performing electrolytic plating.

溝3の底面に形成されている導体層4は、このときに被着されるめっき層のばらつきを低減し、均一にするためのものである。すなわち、導体層4は、いわゆる補助陰極として機能し、これにより、内側の配線基板領域2の配線導体に被着されるめっき厚みが厚くなってめっき層の厚さにばらつきが生じることを防止している。   The conductor layer 4 formed on the bottom surface of the groove 3 is for reducing and making uniform the plating layer deposited at this time. That is, the conductor layer 4 functions as a so-called auxiliary cathode, thereby preventing the plating layer deposited on the wiring conductor in the inner wiring board region 2 from becoming thick and causing variations in the plating layer thickness. ing.

なお、導体層4は、配線導体と同様の金属材料から成り、例えば、タングステンから成る場合であれば、タングステンの金属ペーストを母基板1の捨て代領域5に枠状のパターンで印刷しておくことにより形成される。導体層4は、生産性等を考慮すると、配線導体と同じ材料で形成することが好ましい。   The conductor layer 4 is made of the same metal material as that of the wiring conductor. For example, if the conductor layer 4 is made of tungsten, a metal paste of tungsten is printed in a frame-like pattern on the discard margin region 5 of the mother board 1. Is formed. The conductor layer 4 is preferably formed of the same material as the wiring conductor in consideration of productivity and the like.

本発明の多数個取り配線基板は、捨て代領域5に配線基板領域2の全体を取り囲むように溝3を形成し、溝3の底面に導体層4を形成している。   In the multi-piece wiring board of the present invention, the groove 3 is formed in the discard margin area 5 so as to surround the entire wiring board area 2, and the conductor layer 4 is formed on the bottom surface of the groove 3.

これにより、溝3の底面に形成された導体層4と母基板1との間で焼成時の収縮率の違いに起因して応力が生じたとしても、その応力は母基板1の主面から離れた、厚みの中央付近に位置する溝3の底面部に作用することとなり、表面の収縮によって比較的大きな応力が発生しやすい母基板1の捨て代領域5の主面に導体層4を形成した場合よりも母基板1に作用する応力を小さいものとすることができることから、母基板1の反りを防止することが可能となる。   As a result, even if stress is generated between the conductor layer 4 formed on the bottom surface of the groove 3 and the mother substrate 1 due to a difference in shrinkage rate during firing, the stress is generated from the main surface of the mother substrate 1. The conductor layer 4 is formed on the main surface of the abandon margin region 5 of the mother substrate 1 which acts on the bottom surface of the groove 3 located near the center of the separated thickness, and relatively large stress is likely to occur due to surface shrinkage. Since the stress acting on the mother board 1 can be made smaller than that in the case where it is done, the warp of the mother board 1 can be prevented.

また、溝3の底面に導体層4を被着させた場合でも、導体層4は、母基板1の外周部に形成されていることから最もめっき用の電流が流れやすいことには変わりはなく、補助陰極として有効に機能し、配線導体に被着されるめっき層の厚みのばらつきを有効に防止することができる。   Further, even when the conductor layer 4 is deposited on the bottom surface of the groove 3, since the conductor layer 4 is formed on the outer peripheral portion of the mother substrate 1, the current for plating is most likely to flow. It effectively functions as an auxiliary cathode and can effectively prevent variations in the thickness of the plating layer deposited on the wiring conductor.

そのため、各配線基板領域2を個片状に分割する際にクラックやバリが発生することを防止できるとともに、配線導体に大きな厚みのばらつきを生じさせることなくめっき層を被着させることができる。その結果、各配線基板領域2を個片状に分割する際にクラックやバリの発生を防止することが可能で、かつ配線導体の表面に大きな厚みバラつきを生じさせることなく良好にめっき層を被着させることが可能な多数個取り配線基板を提供することができる。   Therefore, cracks and burrs can be prevented from occurring when each wiring board region 2 is divided into individual pieces, and a plating layer can be deposited without causing a large thickness variation in the wiring conductor. As a result, it is possible to prevent the occurrence of cracks and burrs when dividing each wiring board region 2 into individual pieces, and to cover the plating layer satisfactorily without causing a large thickness variation on the surface of the wiring conductor. A multi-piece wiring board that can be attached can be provided.

なお、溝3は、母基板1となるグリーンシートのうち、最上層となるもの、または最上層から下層にかけて複数の層にわたって、溝3に対応した枠状の打ち抜き部を形成しておくことにより形成される。なお、グリーンシートの外周部に枠状の打ち抜き部を形成した場合、打ち抜き部よりも外側の部位(外周部)と内側の部位(中央部)とに分離されるので、これを個々に下層のグリーンシート上に積層する。また、完全に枠状に打ち抜くのではなく、一部に柱部(非打ち抜き部)を設けておいて、外周部と中央部とが柱部を介してつながった状態としておいてもよい。   The groove 3 is formed by forming a frame-shaped punched portion corresponding to the groove 3 over a plurality of layers from the uppermost layer to the lower layer among the green sheets to be the mother substrate 1. It is formed. In addition, when the frame-shaped punching part is formed on the outer periphery of the green sheet, it is separated into an outer part (outer peripheral part) and an inner part (center part) than the punching part. Laminate on green sheet. Further, instead of completely punching into a frame shape, a column portion (non-punched portion) may be provided in a part, and the outer peripheral portion and the center portion may be connected via the column portion.

導体層4は、配線導体のめっき厚みのばらつきを防止するためには、2mm以上の幅で形成することが好ましい。この場合、母基板1の全周にわたって連続するように溝3を形成する必要はなく、例えば、配線基板領域2の辺の長さ程度毎に配線基板領域2と捨て代領域5との主面が同じ高さで連結されるように柱部を形成し、柱部では母基板の内層を介して連続した導体層4を形成するようにしてもよい。なお、後述するように、母基板1の分割を容易とするための分割溝6を形成する場合、母基板1の機械的な強度を確保するために、分割溝6を避けて柱部を形成することが望ましい。   The conductor layer 4 is preferably formed with a width of 2 mm or more in order to prevent variations in the plating thickness of the wiring conductor. In this case, it is not necessary to form the groove 3 so as to be continuous over the entire circumference of the mother substrate 1. For example, the main surfaces of the wiring substrate region 2 and the discard margin region 5 are approximately equal to the length of the side of the wiring substrate region 2. May be formed so that they are connected at the same height, and the continuous conductor layer 4 may be formed in the pillar portion via the inner layer of the mother board. As will be described later, when forming the dividing groove 6 for facilitating the division of the mother board 1, in order to ensure the mechanical strength of the mother board 1, the column part is formed avoiding the dividing groove 6. It is desirable to do.

また、導体層4は、厚みを10〜30μmとすることが、電気特性や多数個取り配線基板の生産性、焼成時の反りの効果的な防止等のうえで、好ましい。   Moreover, it is preferable that the conductor layer 4 has a thickness of 10 to 30 μm in view of electrical characteristics, productivity of a multi-piece wiring board, effective prevention of warpage during firing, and the like.

また、底面に導体層4が形成されている溝3は、母基板1の全周にわたって同じ幅とする必要はない。例えば、特にめっき用の電流密度が高くなる配線基板領域2の並びの各角部の外側における幅を、他の部位における幅よりも広くし、より確実にめっき厚みのばらつきを防止するようにしてもよい。   Further, the groove 3 in which the conductor layer 4 is formed on the bottom surface does not need to have the same width over the entire circumference of the mother board 1. For example, the width on the outer side of each corner portion of the wiring substrate region 2 where the current density for plating is particularly high is made wider than the width at other portions, so that variations in plating thickness can be prevented more reliably. Also good.

また、めっき液が溝3内で滞留してめっき導体層4のめっきの形成効率が低下することによって配線導体の厚みばらつきを防止する効果が低下するのを有効に防止するために、溝3を上側ほど幅が広くなるように形成して、めっき液の溝3内への流れをより良好にしてもよい。   In order to effectively prevent the plating solution from staying in the groove 3 and reducing the effect of preventing the thickness variation of the wiring conductor due to the decrease in the plating formation efficiency of the plating conductor layer 4, the groove 3 is formed. It may be formed so that the width becomes wider toward the upper side, and the flow of the plating solution into the groove 3 may be improved.

ここで、母基板1の外周の捨て代領域5に形成する溝は、母基板1の上面と下面との焼成時の磁器収縮のバランスを考えると、両面に同じ深さで形成することが望ましい。この場合、両面側の溝のそれぞれの底面に導体層4を形成することが、より確実に母基板1の反りを防止する上で、望ましい。また、溝3の部分の母基板1の厚みは、最薄部として0.2mm以上を確保することが望ましい。0.2mm未満になると、焼成後の母基板1の取り扱い時に、少しの機械的衝撃により誤って母基板1が割れる可能性が高くなる。   Here, considering the balance of the porcelain shrinkage during firing of the upper surface and the lower surface of the mother substrate 1, it is desirable to form the grooves formed at the same depth on both surfaces of the discard margin region 5 on the outer periphery of the mother substrate 1. . In this case, it is desirable to form the conductor layer 4 on the bottom surfaces of the grooves on both sides in order to more reliably prevent the mother substrate 1 from warping. Further, it is desirable that the thickness of the mother substrate 1 in the groove 3 is 0.2 mm or more as the thinnest portion. When the thickness is less than 0.2 mm, there is a high possibility that the mother substrate 1 will be accidentally cracked due to a slight mechanical impact when the mother substrate 1 after firing is handled.

また、母基板1は、主面の配線基板領域2同士の境界および配線基板領域2と捨て代領域5との境界に沿ってそれぞれ分割溝6が形成されており、溝3は、図2に示すように、深さdが母基板1の厚みtの1/2未満であるとともに分割溝6よりも深いことが好ましい。なお、図2は、図1に示した多数個取り配線基板の要部拡大断面図であり、図2において図1(a),(b)と同じ部位には同じ符号を付している。   Further, the mother board 1 has divided grooves 6 formed along the boundary between the wiring board areas 2 on the main surface and the boundary between the wiring board area 2 and the discard margin area 5, respectively. As shown, the depth d is preferably less than ½ of the thickness t of the mother substrate 1 and deeper than the dividing groove 6. 2 is an enlarged cross-sectional view of the main part of the multi-piece wiring board shown in FIG. 1. In FIG. 2, the same parts as those in FIGS. 1 (a) and 1 (b) are denoted by the same reference numerals.

これにより、分割溝6に沿って容易に母基板1を各配線基板領域2に分割することができるとともに、溝3が形成されている部位で母基板1の機械的な強度が低下して母基板1に割れ等の機械的な破壊が生じることを防止することができる。   As a result, the mother board 1 can be easily divided into the respective wiring board regions 2 along the dividing grooves 6, and the mechanical strength of the mother board 1 is lowered at the portion where the grooves 3 are formed. It is possible to prevent the substrate 1 from being mechanically broken such as a crack.

また、溝3の底面の導体層4となる金属ペーストと母基板1となるグリーンシートとの焼成時の収縮率の違いによる応力は、母基板1の主面から離れた、厚みtの中央付近に位置する溝3の底面部に作用することとなることから、より効果的に導体層4と母基板1との焼成時の収縮率の違いによる母基板1の反りを防止することが可能となる。   Further, the stress due to the difference in shrinkage between the metal paste as the conductor layer 4 on the bottom surface of the groove 3 and the green sheet as the mother substrate 1 is near the center of the thickness t away from the main surface of the mother substrate 1. Therefore, it is possible to more effectively prevent the warp of the mother substrate 1 due to the difference in shrinkage rate during firing between the conductor layer 4 and the mother substrate 1. Become.

また、この多数個取り配線基板を個々の配線基板領域2に分割するための分割溝6を、母基板1の外周の捨て代領域5に、溝3の底面に形成された導体層4を越えて長く形成しても導体層4を断線させることがない。このように、母基板の縦方向、及び幅方向に母基板の端部まで長く分割溝を形成することによって、母基板1の分割性をさらに向上させることができる。   Further, the dividing groove 6 for dividing the multi-piece wiring board into individual wiring board areas 2 is disposed in the discard margin area 5 on the outer periphery of the mother board 1 and exceeds the conductor layer 4 formed on the bottom surface of the groove 3. Even if it is formed long, the conductor layer 4 will not be disconnected. In this way, by forming the dividing grooves long in the longitudinal direction and the width direction of the mother substrate up to the end of the mother substrate, the division property of the mother substrate 1 can be further improved.

また、本発明の多数個取り配線基板は、導体層4は、各配線基板領域2の配線導体と電気的に接続されており、配線導体および導体層4は、その露出した表面にめっき層が被着されることが好ましい。   Further, in the multi-piece wiring board of the present invention, the conductor layer 4 is electrically connected to the wiring conductor of each wiring board region 2, and the wiring conductor and the conductor layer 4 have a plating layer on the exposed surface. It is preferred that it be deposited.

これにより、配線導体の酸化腐食を防止し、半田の濡れ性、ボンディングワイヤのボンディング性を向上させることができる。また、全ての配線基板領域に形成された配線導体(図示せず)と、母基板1の主面に形成された溝3の底面の導体層4をめっき導通用パターン7を介して一体的にめっき用治具等から導通を取ることとなり、各配線基板領域2の配線導体に被着されるめっき層の厚みを均一で安定したものとすることができる。   Thereby, the oxidative corrosion of the wiring conductor can be prevented, and the wettability of the solder and the bondability of the bonding wire can be improved. Also, the wiring conductor (not shown) formed in all the wiring board regions and the conductor layer 4 on the bottom surface of the groove 3 formed in the main surface of the mother board 1 are integrated with each other through the plating conduction pattern 7. Conductivity is obtained from a plating jig or the like, and the thickness of the plating layer deposited on the wiring conductor in each wiring board region 2 can be made uniform and stable.

なお、めっき導通用パターン7は、例えば、母基板1の対向する2辺に形成され、めっき用治具等から電流を受けるための端子となる。めっき導通用パターン7は、配線導体2や導体層4と同様の金属材料を用い、同様の方法で形成することができる。   The plating conduction pattern 7 is formed on, for example, two opposing sides of the mother substrate 1 and serves as a terminal for receiving a current from a plating jig or the like. The plating conduction pattern 7 can be formed by the same method using the same metal material as the wiring conductor 2 and the conductor layer 4.

以上のことにより、各配線基板領域2を個片状に分割する際にクラックやバリが発生することを防止できる。また、母基板1を分割しない状態で半導体素子等の電子部品を実装する際に、搭載精度の悪化を防止して実装不良を防止することができる。   As described above, it is possible to prevent the occurrence of cracks and burrs when the wiring board regions 2 are divided into individual pieces. In addition, when mounting electronic components such as semiconductor elements without dividing the mother board 1, mounting accuracy can be prevented from being deteriorated and mounting defects can be prevented.

また、母基板1の一対の対向する各辺部にはめっき導通用パターン7が形成されており、この構成により、母基板1の一対の対向する各辺部に形成された各めっき導通用パターン7を、めっき用治具(ラック)に設けられた導通用端子で上下から挟み込むことにより、めっき導通用パターン7と導通用端子との電気的な接続を容易かつ確実なものとすることができ、より確実に配線導体にめっき用の電流を供給し、均一な厚みのめっき層をより確実に配線導体に形成することができる。   In addition, a plating conduction pattern 7 is formed on each of a pair of opposing sides of the mother substrate 1, and each plating conduction pattern formed on each of a pair of opposing sides of the mother substrate 1 by this configuration. 7 is sandwiched from above and below by a conduction terminal provided on a plating jig (rack), whereby the electrical connection between the plating conduction pattern 7 and the conduction terminal can be made easy and reliable. Thus, a plating current can be supplied to the wiring conductor more reliably, and a plating layer having a uniform thickness can be more reliably formed on the wiring conductor.

めっき導通用パターン7にラックの導通用端子の金属ピンを嵌め込で接触させ、めっき液中で導通用端子からめっき導通用パターン7を介して各配線基板領域2の配線導体にめっき被着用の電流を供給することにより、めっき液中の金属成分(ニッケル、金等)が析出し、配線導体にめっきが施される。   A metal pin of a rack conduction terminal is fitted and brought into contact with the plating conduction pattern 7, and plating is applied to the wiring conductor of each wiring board region 2 from the conduction terminal via the plating conduction pattern 7 in the plating solution. By supplying an electric current, metal components (nickel, gold, etc.) in the plating solution are deposited, and the wiring conductor is plated.

なお、めっき導通用パターン7は、例えば、厚みを10〜30μmとすることが、電気特性や多数個取り配線基板の生産性、焼成時の反りの効果的な防止等のうえで、好ましい。   In addition, it is preferable that the plating conduction pattern 7 has a thickness of, for example, 10 to 30 μm in view of electrical characteristics, productivity of a multi-piece wiring board, effective prevention of warpage during firing, and the like.

また、母基板1の外側面に上下方向に溝状の切り欠き部8を形成し、切り欠き部8の内側面にめっき導通用パターン7を形成するようにしてもよい。この場合、切り欠き部8内にめっき用治具の端子を嵌め込んで固定しやすいので、作業性が向上し、まためっき用の電流の通電をより確実に行わせることができる。   Alternatively, the groove-shaped notch 8 may be formed in the vertical direction on the outer surface of the mother substrate 1, and the plating conduction pattern 7 may be formed on the inner surface of the notch 8. In this case, since the terminal of the plating jig is easily fitted and fixed in the notch 8, the workability is improved and the current for plating can be more reliably supplied.

以上の結果、本発明によれば、電気的な接続信頼性に優れた配線基板を作製可能な多数個取り配線基板を提供することができる。   As a result, according to the present invention, it is possible to provide a multi-piece wiring board capable of producing a wiring board excellent in electrical connection reliability.

なお、本発明は以上の実施の形態の例に限定されるものではなく、本発明の要旨を逸脱しない範囲で種々の変更を加えても何ら差し支えない。例えば、この例では7行×4列の28個の配線基板領域で構成された母基板としたが、その他の配列個数の母基板で構成してもよいのは言うまでもない。   It should be noted that the present invention is not limited to the above embodiments, and various modifications may be made without departing from the gist of the present invention. For example, in this example, the mother board is composed of 28 wiring board regions of 7 rows × 4 columns, but it is needless to say that the mother board may be composed of other arrangement numbers.

(a)は、本発明の多数個取り配線基板の実施の形態の一例を示す平面図であり、(b)は(a)の多数個取り配線基板の断面図である。(A) is a top view which shows an example of embodiment of the multi-cavity wiring board of this invention, (b) is sectional drawing of the multi-cavity wiring board of (a). 図1に示す多数個取り配線基板の要部拡大断面図であるIt is a principal part expanded sectional view of the multi-piece wiring board shown in FIG. (a)は、従来の多数個取り配線基板の平面図、(b)は(a)の多数個取り配線基板の断面図、(c)は(a)の多数個取り配線基板の要部拡大断面図である。(A) is a plan view of a conventional multi-cavity wiring board, (b) is a cross-sectional view of the multi-cavity wiring board of (a), and (c) is an enlarged main part of the multi-cavity wiring board of (a). It is sectional drawing.

符号の説明Explanation of symbols

1・・・母基板
2・・・配線基板領域
3・・・溝
4・・・導体層
5・・・捨て代領域
6・・・分割溝
DESCRIPTION OF SYMBOLS 1 ... Mother board 2 ... Wiring board area | region 3 ... Groove 4 ... Conductor layer 5 ... Discard allowance area 6 ... Dividing groove

Claims (3)

主面の中央部に四角形状の配線基板領域が縦横に複数配列形成されるとともに、外周部に枠状の捨て代領域が形成された母基板と、前記各配線基板領域に形成された配線導体と、前記捨て代領域に前記配線基板領域の全体を取り囲むように形成された溝と、該溝の底面に形成された導体層とを具備していることを特徴とする多数個取り配線基板。 A plurality of quadrangular wiring board regions are arranged in the center of the main surface in the vertical and horizontal directions, and a mother board in which a frame-shaped discarding area is formed in the outer periphery, and wiring conductors formed in the respective wiring board regions A multi-piece wiring board comprising: a groove formed so as to surround the entire wiring board area in the abandon margin area; and a conductor layer formed on a bottom surface of the groove. 前記母基板は、前記主面の前記配線基板領域同士の境界および前記配線基板領域と前記捨て代領域との境界に沿ってそれぞれ分割溝が形成されており、前記溝は、深さが前記母基板の厚みの1/2未満であるとともに前記分割溝よりも深いことを特徴とする請求項1記載の多数個取り配線基板。 The mother board is formed with dividing grooves along the boundary between the wiring board regions on the main surface and the boundary between the wiring board region and the abandonment region, and the groove has a depth of the mother substrate. 2. The multi-piece wiring board according to claim 1, wherein the multi-cavity wiring board is less than ½ of the thickness of the substrate and deeper than the dividing groove. 前記導体層は、前記各配線基板領域の前記配線導体と電気的に接続されており、前記配線導体および前記導体層は、その露出した表面にめっき層が被着されることを特徴とする請求項1または請求項2記載の多数個取り配線基板。 The conductive layer is electrically connected to the wiring conductor in each wiring board region, and the wiring conductor and the conductive layer are coated with a plating layer on the exposed surface. The multi-piece wiring board according to claim 1 or 2.
JP2004050885A 2004-02-26 2004-02-26 Multiple wiring board Expired - Fee Related JP4272560B2 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014143241A (en) * 2013-01-22 2014-08-07 Kyocera Corp Multiple patterning wiring board
CN113795093A (en) * 2021-08-31 2021-12-14 江门市众阳电路科技有限公司 Production method of PCB (printed circuit board) cathode and anode copper plates

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014143241A (en) * 2013-01-22 2014-08-07 Kyocera Corp Multiple patterning wiring board
CN113795093A (en) * 2021-08-31 2021-12-14 江门市众阳电路科技有限公司 Production method of PCB (printed circuit board) cathode and anode copper plates
CN113795093B (en) * 2021-08-31 2023-08-04 江门市众阳电路科技有限公司 Production method of PCB (printed circuit board) cathode-anode copper plate

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