JP2005238568A - 液体吐出ヘッド及びその製造方法 - Google Patents
液体吐出ヘッド及びその製造方法 Download PDFInfo
- Publication number
- JP2005238568A JP2005238568A JP2004049590A JP2004049590A JP2005238568A JP 2005238568 A JP2005238568 A JP 2005238568A JP 2004049590 A JP2004049590 A JP 2004049590A JP 2004049590 A JP2004049590 A JP 2004049590A JP 2005238568 A JP2005238568 A JP 2005238568A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- pressure chamber
- piezoelectric body
- piezoelectric
- liquid discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 51
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 238000007599 discharging Methods 0.000 title abstract description 3
- 238000000034 method Methods 0.000 claims abstract description 48
- 238000000151 deposition Methods 0.000 claims abstract description 33
- 239000000443 aerosol Substances 0.000 claims abstract description 32
- 238000005192 partition Methods 0.000 claims description 47
- 239000000463 material Substances 0.000 claims description 15
- 239000000843 powder Substances 0.000 claims description 15
- 239000002994 raw material Substances 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 abstract description 12
- 239000000976 ink Substances 0.000 description 39
- 239000010408 film Substances 0.000 description 36
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 33
- 238000007639 printing Methods 0.000 description 15
- 238000010438 heat treatment Methods 0.000 description 11
- 239000000758 substrate Substances 0.000 description 11
- 239000010410 layer Substances 0.000 description 8
- 238000012545 processing Methods 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 238000000137 annealing Methods 0.000 description 6
- 238000001035 drying Methods 0.000 description 6
- 238000000059 patterning Methods 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000005499 meniscus Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
【解決手段】振動板60の一方の面にPZT(圧力室隔壁)64をエアロゾルデポジション法(AD法)によって形成し、他方の面に振動板60を駆動するためにPZT72をAD法によって形成するようにしている。これにより、AD法による成膜時の応力歪みを相殺することができ、振動板の反りをなくすことができる。また、圧力室隔壁64等をADでパターン成膜することにより、微細3次元構造化を実現することができる。
【選択図】 図5
Description
まず、本発明に係る液体吐出ヘッドを適用するインクジェット記録装置の概要について説明する。
次に、本発明に係る液体吐出ヘッドの製造に使用するAD法による成膜方法について説明する。
次に、本発明に係る液体吐出ヘッドの製造方法について説明する。
Claims (9)
- 振動板と、この振動板の第1面に形成され、該振動板を駆動するための第1の圧電体と、前記振動板の前記第1面と反対側の第2面に形成された圧力室隔壁とを備え、前記第1の圧電体及び圧力室隔壁は、それぞれ堆積法によって形成されていることを特徴とする液体吐出ヘッド。
- 前記圧力室隔壁は、圧電材料によって形成されていることを特徴とする請求項1に記載の液体吐出ヘッド。
- 前記圧力室隔壁は、前記圧電材料に電極が形成された第2の圧電体であることを特徴とする請求項2に記載の液体吐出ヘッド。
- 前記第1の圧電体及び圧力室隔壁は、それぞれエアロゾルデポジション法によって形成されていることを特徴とする請求項1乃至3のいずれかに記載の液体吐出ヘッド。
- 振動板と、この振動板の第1面に形成され、該振動板を駆動するための第1の圧電体と、前記振動板の前記第1面と反対側の第2面に形成され、圧力室隔壁を構成する第2の圧電体と、を備えることを特徴とする液体吐出ヘッド。
- 前記第1の圧電体及び第2の圧電体は、それぞれ独立して駆動可能に電極が形成されていることを特徴とする請求項3又は5に記載の液体吐出ヘッド。
- 前記第1の圧電体はd31モードで変位し、前記第2の圧電体はd33モードで変位するものであることを特徴とする請求項3又は5に記載の液体吐出ヘッド。
- エアロゾルデポジション法により原料の粉体を含むエアロゾルを振動板に噴射し、該振動板に粉体を堆積させて液体吐出ヘッドを製造する液体吐出ヘッドの製造方法であって、 前記振動板の第1面にエアロゾルデポジション法により圧電体を形成する工程と、
前記圧電体上にエアロゾルデポジション法により個別電極を形成する工程と、
前記振動板の前記第1面と反対側の第2面にエアロゾルデポジション法により圧力室隔壁を形成する工程と、
を含むことを特徴とする液体吐出ヘッドの製造方法。 - 前記圧力室隔壁を形成する工程は、圧電材料の粉体の堆積によって圧電体を形成する工程と、導電材料の粉体の堆積によって電極を形成する工程とを含むことを特徴とする請求項8に記載の液体吐出ヘッドの製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004049590A JP4396317B2 (ja) | 2004-02-25 | 2004-02-25 | 液体吐出ヘッド及びその製造方法 |
US11/063,572 US20050185027A1 (en) | 2004-02-25 | 2005-02-24 | Liquid discharge head and manufacturing method thereof |
US13/249,389 US20120019603A1 (en) | 2004-02-25 | 2011-09-30 | Liquid discharge head and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004049590A JP4396317B2 (ja) | 2004-02-25 | 2004-02-25 | 液体吐出ヘッド及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005238568A true JP2005238568A (ja) | 2005-09-08 |
JP4396317B2 JP4396317B2 (ja) | 2010-01-13 |
Family
ID=34858263
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004049590A Expired - Fee Related JP4396317B2 (ja) | 2004-02-25 | 2004-02-25 | 液体吐出ヘッド及びその製造方法 |
Country Status (2)
Country | Link |
---|---|
US (2) | US20050185027A1 (ja) |
JP (1) | JP4396317B2 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007229961A (ja) * | 2006-02-27 | 2007-09-13 | Fujifilm Corp | 液体吐出ヘッドの製造方法 |
WO2009110543A1 (ja) * | 2008-03-06 | 2009-09-11 | 日本碍子株式会社 | 圧電/電歪膜型素子の製造方法 |
JP2010214714A (ja) * | 2009-03-16 | 2010-09-30 | Brother Ind Ltd | 圧電アクチュエータの製造方法、及び、液体移送装置の製造方法 |
JP2014041112A (ja) * | 2012-07-27 | 2014-03-06 | Nec Tokin Corp | 焦電型赤外線センサ |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005246789A (ja) * | 2004-03-04 | 2005-09-15 | Fuji Photo Film Co Ltd | 液体吐出ヘッド及びその製造方法 |
JP4901870B2 (ja) * | 2006-08-01 | 2012-03-21 | パナソニック株式会社 | カメラ装置、液体レンズ及び撮像方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1993022140A1 (en) * | 1992-04-23 | 1993-11-11 | Seiko Epson Corporation | Liquid jet head and production thereof |
IT1268870B1 (it) * | 1993-08-23 | 1997-03-13 | Seiko Epson Corp | Testa di registrazione a getto d'inchiostro e procedimento per la sua fabbricazione. |
JP3366146B2 (ja) * | 1995-03-06 | 2003-01-14 | セイコーエプソン株式会社 | インク噴射ヘッド |
JP3379479B2 (ja) * | 1998-07-01 | 2003-02-24 | セイコーエプソン株式会社 | 機能性薄膜、圧電体素子、インクジェット式記録ヘッド、プリンタ、圧電体素子の製造方法およびインクジェット式記録ヘッドの製造方法、 |
JP3328609B2 (ja) * | 1998-12-30 | 2002-09-30 | 三星電子株式会社 | インクジェットプリンタヘッドアクチュエータ及びその製造方法 |
DE60005288T2 (de) * | 2000-01-11 | 2004-07-01 | Samsung Electronics Co., Ltd., Suwon | Tintenstrahldruckkopf mit mehrfach gestapeltem PZT Antriebselement |
-
2004
- 2004-02-25 JP JP2004049590A patent/JP4396317B2/ja not_active Expired - Fee Related
-
2005
- 2005-02-24 US US11/063,572 patent/US20050185027A1/en not_active Abandoned
-
2011
- 2011-09-30 US US13/249,389 patent/US20120019603A1/en not_active Abandoned
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007229961A (ja) * | 2006-02-27 | 2007-09-13 | Fujifilm Corp | 液体吐出ヘッドの製造方法 |
WO2009110543A1 (ja) * | 2008-03-06 | 2009-09-11 | 日本碍子株式会社 | 圧電/電歪膜型素子の製造方法 |
JP2010214714A (ja) * | 2009-03-16 | 2010-09-30 | Brother Ind Ltd | 圧電アクチュエータの製造方法、及び、液体移送装置の製造方法 |
JP2014041112A (ja) * | 2012-07-27 | 2014-03-06 | Nec Tokin Corp | 焦電型赤外線センサ |
Also Published As
Publication number | Publication date |
---|---|
US20050185027A1 (en) | 2005-08-25 |
JP4396317B2 (ja) | 2010-01-13 |
US20120019603A1 (en) | 2012-01-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5089860B2 (ja) | 圧電アクチュエータ及び液体吐出ヘッド | |
US7575306B2 (en) | Discharge head, method of manufacturing discharge head, and liquid discharge apparatus | |
JP5063892B2 (ja) | 液体吐出ヘッドの製造方法 | |
JP5207546B2 (ja) | 液体吐出ヘッド、液体吐出ヘッドの製造方法及び画像形成装置 | |
US20120019603A1 (en) | Liquid discharge head and manufacturing method thereof | |
JP2010221420A (ja) | 圧電アクチュエータ、圧電アクチュエータの製造方法、液体吐出ヘッド、液体吐出ヘッドの製造方法及び画像形成装置 | |
JP5204380B2 (ja) | 圧電素子及びその製造方法並びに液体噴出装置 | |
JP2010208300A (ja) | 液体吐出ヘッド、液体吐出ヘッドの製造方法及び画像形成装置 | |
US7347538B2 (en) | Method for manufacturing discharge head, and discharge head | |
US8011075B2 (en) | Method of manufacturing a piezoelectric actuator | |
US7245017B2 (en) | Liquid discharge head and manufacturing method thereof | |
JP3838519B2 (ja) | 吐出ヘッド製造方法及び吐出ヘッド | |
JP5030252B2 (ja) | 圧電アクチュエータ、圧電アクチュエータの製造方法及び液体吐出ヘッド | |
JP2005280349A (ja) | 液体吐出ヘッド及びその製造方法 | |
US7500728B2 (en) | Liquid discharge head and manufacturing method thereof | |
JP2006173249A (ja) | 圧電アクチュエータ及びその製造方法並びに液体吐出ヘッド | |
JP2005246961A (ja) | インクジェットヘッド及びその製造方法 | |
JP2006248174A (ja) | 液体吐出ヘッド、その製造方法、及び、画像形成装置 | |
JP2006175599A (ja) | 液体吐出ヘッド及びその製造方法 | |
JP2007229961A (ja) | 液体吐出ヘッドの製造方法 | |
JP5457122B2 (ja) | 液体吐出装置 | |
JP2016058694A (ja) | 薄膜圧電素子の形成方法、圧電アクチュエータ、マイクロポンプ、液滴吐出ヘッド、インクカートリッジ、および画像形成装置 | |
JP4933765B2 (ja) | 液体吐出ヘッドの製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060411 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20061214 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20090401 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090706 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090828 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20090929 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121030 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20091012 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121030 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131030 Year of fee payment: 4 |
|
LAPS | Cancellation because of no payment of annual fees |