JP2005233757A5 - - Google Patents

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Publication number
JP2005233757A5
JP2005233757A5 JP2004042919A JP2004042919A JP2005233757A5 JP 2005233757 A5 JP2005233757 A5 JP 2005233757A5 JP 2004042919 A JP2004042919 A JP 2004042919A JP 2004042919 A JP2004042919 A JP 2004042919A JP 2005233757 A5 JP2005233757 A5 JP 2005233757A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004042919A
Other languages
Japanese (ja)
Other versions
JP2005233757A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004042919A priority Critical patent/JP2005233757A/ja
Priority claimed from JP2004042919A external-priority patent/JP2005233757A/ja
Publication of JP2005233757A publication Critical patent/JP2005233757A/ja
Publication of JP2005233757A5 publication Critical patent/JP2005233757A5/ja
Pending legal-status Critical Current

Links

JP2004042919A 2004-02-19 2004-02-19 ホールパターン検査方法及びホールパターン検査装置 Pending JP2005233757A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004042919A JP2005233757A (ja) 2004-02-19 2004-02-19 ホールパターン検査方法及びホールパターン検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004042919A JP2005233757A (ja) 2004-02-19 2004-02-19 ホールパターン検査方法及びホールパターン検査装置

Publications (2)

Publication Number Publication Date
JP2005233757A JP2005233757A (ja) 2005-09-02
JP2005233757A5 true JP2005233757A5 (enExample) 2008-12-18

Family

ID=35016879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004042919A Pending JP2005233757A (ja) 2004-02-19 2004-02-19 ホールパターン検査方法及びホールパターン検査装置

Country Status (1)

Country Link
JP (1) JP2005233757A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI334933B (en) * 2006-04-03 2010-12-21 Cebt Co Ltd Hole inspection apparatus and hole inspection method using the same
JP2011192837A (ja) * 2010-03-15 2011-09-29 Toshiba Corp 評価装置および評価方法

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