JP2005233757A5 - - Google Patents
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- Publication number
- JP2005233757A5 JP2005233757A5 JP2004042919A JP2004042919A JP2005233757A5 JP 2005233757 A5 JP2005233757 A5 JP 2005233757A5 JP 2004042919 A JP2004042919 A JP 2004042919A JP 2004042919 A JP2004042919 A JP 2004042919A JP 2005233757 A5 JP2005233757 A5 JP 2005233757A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004042919A JP2005233757A (ja) | 2004-02-19 | 2004-02-19 | ホールパターン検査方法及びホールパターン検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004042919A JP2005233757A (ja) | 2004-02-19 | 2004-02-19 | ホールパターン検査方法及びホールパターン検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005233757A JP2005233757A (ja) | 2005-09-02 |
| JP2005233757A5 true JP2005233757A5 (ja) | 2008-12-18 |
Family
ID=35016879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004042919A Pending JP2005233757A (ja) | 2004-02-19 | 2004-02-19 | ホールパターン検査方法及びホールパターン検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005233757A (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI334933B (en) * | 2006-04-03 | 2010-12-21 | Cebt Co Ltd | Hole inspection apparatus and hole inspection method using the same |
| JP2011192837A (ja) * | 2010-03-15 | 2011-09-29 | Toshiba Corp | 評価装置および評価方法 |
-
2004
- 2004-02-19 JP JP2004042919A patent/JP2005233757A/ja active Pending
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