JP2005222652A - Laminated magnetic head, and method of manufacturing laminated magnetic head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a head structure capable of realizing a high track width accuracy in a laminated magnetic head, and to provide a method of manufacturing the laminated magnetic head. <P>SOLUTION: A laminated substrate 8 being a pair by cutting a laminated block prepared by stacking substrates, each in which a metal magnetic layer 1 and a adhesive layer are formed on both surfaces of a non-magnetic substrate 2, and bonding and forming them with an adhesive layer at a plane being orthogonal to the plane 1 of the metal magnetic layer is formed. After winding wire groove process is applied to a cutting gap plane of this lamination substrate 8, a window part metal magnetic layer is stuck to the winding wire groove, the gap plane is ground, the window part metal magnetic layer is left only at a winding wire window part, a gap material is stuck, gap planes of the laminated substrate being a pair are mutually butted and jointed to prepare a gapped plate, and the gaped plate is cut in a strip-like state while being tilted by an azimuth angle, thereby forming a head chip. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a laminated magnetic head used for a VTR, a streamer, and the like, and a method of manufacturing the laminated magnetic head.

  In recent years, with the increase in the density of magnetic recording, it is required to form a magnetic head with a narrow track. In order to realize the sandwiched track, it is necessary to further improve the track width accuracy.

  The structure of a conventional magnetic head is shown in FIG. In this structure, both sides of the metal magnetic layer 1 are sandwiched between nonmagnetic substrates 2, and the angle β formed by the magnetic gap surface 5 and the layer surface of the metal magnetic layer 1 is not a right angle.

  Next, a method for manufacturing the head will be described with reference to FIGS. First, as shown in FIG. 14, a first substrate 6 in which an adhesive layer 3 containing glass as a component is formed on one side of a nonmagnetic substrate 2, a metal magnetic layer 1 on one side of the nonmagnetic substrate 2, and an adhesive layer on the other side. 3 is formed, and a third substrate 6b in which the metal magnetic layer 1 is formed on one surface of the nonmagnetic substrate 2 is formed.

  Next, as shown in FIG. 15, a plurality of second substrates 6 a stacked between a first substrate 6 and a third substrate b <b> 2 are sandwiched and fused with an adhesive layer 3 to form a laminated block 7. Next, as shown in FIG. 16, this laminated block 7 is diagonally cut into strips to form a pair of laminated substrates 8 and 8a.

Next, as shown in FIG. 17, a winding groove 10 and a glass trough groove 11 are provided on the magnetic gap surface 5 of the laminated substrate 8, and after the magnetic gap surface 5 is polished smoothly, SiO having a thickness corresponding to the gap length is obtained. ₂ and a non-magnetic layer of low melting point glass are formed by sputtering or the like.

  Then, as shown in FIG. 18, the laminated substrates 8 and 8a are brought together at the magnetic gap surface 5, low melting point glass is put into the winding groove and the glass trough groove, and bonded by this fusion to form the gap Plate 9 is created.

  Next, as shown in FIGS. 19 and 20, the gapd plate 9 is cut to obtain a gapd bar 12, and the gapd bar 12 is further cut with a predetermined core width to obtain a head chip 13. The surface is polished to obtain a magnetic head as shown in FIG.

  The conventional head having such a structure has a problem that the track width cannot be produced with high accuracy and high yield. That is, as shown in FIG. 16, the laminated substrates 8 and 8a are not cut at a right angle to the metal magnetic layer 1 but are cut at an angle (α in the figure) to give an azimuth angle. Here, if the cutting angle α is deviated from a normal value as shown in FIG. 28 and the magnetic gap surface 5 is inclined and polished, the arrangement pitch P2 between the metal magnetic layers 1 at this time is essentially The pitch a is different from the pitch P1, and a shift a occurs.

  When the magnetic gap surfaces 5 tilted in this way are brought together and the tracks are aligned, as shown in FIG. 29, since the pitches are different, a track deviation a occurs. Such a problem can be prevented if the tilt due to processing can be suppressed. However, it is difficult to reduce the inclination at the time of machining so that the track deviation is actually small enough to be ignored.

  In order to solve the above problems, a magnetic head having the structure and manufacturing method shown in FIGS. 22 to 27 has been proposed. First, this manufacturing method will be described. The process up to the creation of the laminated block 7 is the same as that of the conventional example described above. That is, first, as shown in FIG. 14, the first substrate 6 having the glass adhesive layer 3 formed on one surface of the nonmagnetic substrate 2, the metal magnetic layer 1 on one surface of the nonmagnetic substrate 2, and the other surface on the other surface. A second substrate 61 on which the adhesive layer 3 is formed and a third substrate 6b on which the metal magnetic layer 1 is formed on one surface of the nonmagnetic substrate 2 are created.

  Next, as shown in FIG. 15, a plurality of second substrates 6 a stacked between a first substrate 6 and a third substrate b <b> 2 are sandwiched and fused with an adhesive layer 3 to form a laminated block 7.

  The subsequent steps are as follows.

  The laminated block 7 is cut into a strip shape in a plane perpendicular to the magnetic path layer 21 to produce a pair of laminated metal magnetic layer substrates 8 and 8a as shown in FIG.

  In the prior art, in this step, the cutting is performed by inclining by the azimuth angle, and the point of cutting at this right angle is an improvement.

  Next, as shown in FIG. 23, after the winding groove 10 is processed, the magnetic gap surface 5 is polished smoothly, and bonded to the first gap material 19 of a nonmagnetic material having a thickness corresponding to a predetermined gap length. A second gap material 19a is attached by sputtering or the like.

  Next, as shown in FIG. 24, the magnetic gap surface 5 is brought together, the glass rod 14 placed in the winding window 16 is melted and integrated to create a gaped bar plate 9, and then cut at the position of the dashed line in the figure. Thus, the gapd bar 12 as shown in FIG. 25 is obtained.

  Next, the gapd bar 12 is cut at an azimuth angle with respect to the magnetic gap surface 5 as shown by the line in the drawing, and the tape sliding surface is polished to obtain a magnetic head as shown in FIG. When viewed from the tape sliding surface, the magnetic gap surface 5 and the track end surface 15 are orthogonal to each other as shown in FIG.

  As described above, since the magnetic gap surface 5 and the track end surface 15 are orthogonal to each other, the cutting angle is slightly deviated in the strip cutting process of the laminated substrate 8 shown in FIG. Even if the gap surface 5 is processed with a slight inclination in the polishing process, the track deviation can be prevented.

  However, in the magnetic head of this structure, as shown in FIG. 26, when the winding window becomes large, the magnetic path constituted by the metal magnetic layer 1 is interrupted at the winding window 16, and only a small winding window is provided. There is a problem that can not be.

  The present invention provides a magnetic head with high track width accuracy and a manufacturing method in view of the problems of conventional magnetic heads.

  In order to solve the above problems, a magnetic head according to the present invention includes a nonmagnetic substrate, a metal magnetic layer sandwiched between the nonmagnetic substrates on both sides, and a window metal magnetic layer provided inside the winding window. It is what you have.

  In the magnetic head according to the present invention, the apex side surface of the winding window is substantially perpendicular to the magnetic gap surface.

  Further, the method of manufacturing a magnetic head according to the present invention includes stacking a block in which a metal magnetic layer and an adhesive layer are formed on both surfaces of a nonmagnetic substrate and fixing the bonded block by bonding the adhesive layer. A laminated substrate is formed by cutting along a plane orthogonal to the laminated substrate, and a winding groove is processed on the cutting gap surface of the laminated substrate, and then a window metal magnetic layer is attached to the winding groove, and the gap surface Gap plate is made by leaving the window metal magnetic layer only on the winding window, attaching the gap material, and joining the gap surfaces of the laminated substrates that are paired together. A head chip is produced by cutting a gapd bar obtained by cutting the sheet into a strip shape by inclining it by an azimuth angle.

  The magnetic head manufacturing method according to the present invention is such that the apex side side of the winding window is shaded when the window metal magnetic layer is attached, and the metal magnetic layer is provided on the side of the winding window apex. It is not attached.

  As described above, according to the present invention, it is possible to eliminate the interruption of the magnetic path, and it is possible to produce a magnetic head having a highly accurate track width with a high yield.

(Embodiment 1)
In the first embodiment, the magnetic path is prevented from being interrupted by the winding window 16 while eliminating the track deviation, and the magnetic path is prevented from being interrupted by the winding window 16 as shown in FIG. Therefore, the metal magnetic layer 4 is also provided inside the winding window 16. The manufacturing method will be described below.

  The process up to the production of the multilayer substrates 8 and 8a shown in FIG. 1 is the same as that of the second conventional technique described above. That is, first, as shown in FIG. 14, the first substrate 6 having the glass adhesive layer 3 formed on one surface of the nonmagnetic substrate 2, the metal magnetic layer 1 on one surface of the nonmagnetic substrate 2, and the other surface on the other surface. A second substrate 61 on which the adhesive layer 3 is formed and a third substrate 6b on which the metal magnetic layer 1 is formed on one surface of the nonmagnetic substrate 2 are created.

  Next, as shown in FIG. 15, a plurality of second substrates 6 a stacked between a first substrate 6 and a third substrate b <b> 2 are sandwiched and fused with an adhesive layer 3 to form a laminated block 7.

  Next, the laminated block 7 is cut into strips on a plane perpendicular to the magnetic path layer 21 to produce a pair of laminated metal magnetic layer substrates 8 and 8a as shown in FIG.

  Next, as shown in FIG. 2, the winding groove 10 was processed on the magnetic gap surface 5 of the laminated substrate 8 in which the track portion metal magnetic layer 1 and the nonmagnetic substrate 2 shown in FIG. Thereafter, the window metal magnetic layer 4 is attached by sputtering or the like.

  Next, as shown in FIG. 3, the magnetic gap surface 5 is polished to leave the window metal magnetic layer 4 only in the winding groove 10.

  Next, as shown in FIG. 4, a notch 7 for removing the window portion metal magnetic layer 4 in the apex portion is processed. The reason why the notch 7 is provided in this manner is to prevent a magnetic path from leaking when the opposing window metal magnetic layers 4 are joined to each other, and the magnetic flux leaks.

  The subsequent steps are the same as those in the prior art. As shown in FIGS. 5 and 6, the gapd bar plate 9 is formed, the gapd bar 12 is cut, and the tape sliding surface is polished. As shown in FIG. Get the head.

  As described above, in the magnetic head of the first embodiment, the window metal magnetic layer 4 is attached to the inside of the winding window 16 so that the magnetic path is not interrupted regardless of the size of the winding window winding 16.

(Embodiment 2)
A manufacturing method according to the second embodiment will be described with reference to the drawings. The process up to the production of the laminated substrate 8 shown in FIG. 8 is the same as that of the first embodiment.

  That is, first, as shown in FIG. 14, the first substrate 6 having the glass adhesive layer 3 formed on one surface of the nonmagnetic substrate 2, the metal magnetic layer 1 on one surface of the nonmagnetic substrate 2, and the other surface on the other surface. A second substrate 61 on which the adhesive layer 3 is formed and a third substrate 6b on which the metal magnetic layer 1 is formed on one surface of the nonmagnetic substrate 2 are created.

  Next, as shown in FIG. 15, a plurality of second substrates 6 a stacked between a first substrate 6 and a third substrate b <b> 2 are sandwiched and fused with an adhesive layer 3 to form a laminated block 7.

  Next, the laminated block 7 is cut into strips on a plane perpendicular to the magnetic path layer 21 to produce a pair of laminated metal magnetic layer substrates 8 and 8a as shown in FIG.

  Next, as shown in FIG. 9, when the winding groove 10 is processed in the magnetic gap surface 5, the apex portion 17 is processed at a right angle to the magnetic gap surface 5.

  Next, the window portion metal magnetic layer 4 is attached by sputtering or the like. Since the apex portion 17 is perpendicular to the magnetic gap surface 5, the apex portion 17 is hardly attached with the metal magnetic layer.

  Furthermore, if the apex portion 17 is arranged so as to be shaded during sputtering by tilting the laminated substrate 8 or the like, the adhesion of the metal magnetic layer can be prevented more completely.

  As in the first embodiment, the head chip shown in FIG. 13 is obtained through the gap surface polishing shown in FIG. 10, the creation of the gapd plate 9 shown in FIG. 11, and the creation of the gapd bar 12 shown in FIG. It is done.

  The second embodiment is characterized in that since the apex portion 17 does not have a metal magnetic layer, the processing of the notch 7 shown in FIG. 4 required in the first embodiment is unnecessary.

  In the second embodiment, the apex portion 17 is processed at a right angle to the magnetic gap surface 5 for the purpose of not attaching the metal magnetic layer to the apex portion 17. However, the apex portion 17 is shaded during sputtering. If they can be arranged, the same effect can be obtained. Therefore, it is not always necessary to process the apex portion 17 at a right angle to the magnetic gap surface 5.

  As described above, the present invention makes it possible to eliminate the interruption of the magnetic path, and to produce a magnetic head with a high accuracy track width at a high yield. It can be used in fields where manufacturing methods are desired.

Configuration diagram and machining process diagram of magnetic head in Embodiment 1 of the present invention Configuration diagram and machining process diagram of magnetic head in Embodiment 1 of the present invention Configuration diagram and machining process diagram of magnetic head in Embodiment 1 of the present invention Configuration diagram and machining process diagram of magnetic head in Embodiment 1 of the present invention Configuration diagram and machining process diagram of magnetic head in Embodiment 1 of the present invention Configuration diagram and machining process diagram of magnetic head in Embodiment 1 of the present invention Configuration diagram and machining process diagram of magnetic head in Embodiment 1 of the present invention Configuration diagram and machining process diagram of magnetic head in embodiment 2 of the present invention Configuration diagram and machining process diagram of magnetic head in embodiment 2 of the present invention Configuration diagram and machining process diagram of magnetic head in embodiment 2 of the present invention Configuration diagram and machining process diagram of magnetic head in embodiment 2 of the present invention Configuration diagram and machining process diagram of magnetic head in embodiment 2 of the present invention Configuration diagram and machining process diagram of magnetic head in embodiment 2 of the present invention Configuration diagram and machining process diagram of conventional magnetic head Configuration diagram and machining process diagram of conventional magnetic head Configuration diagram and machining process diagram of conventional magnetic head Configuration diagram and machining process diagram of conventional magnetic head Configuration diagram and machining process diagram of conventional magnetic head Configuration diagram and machining process diagram of conventional magnetic head Configuration diagram and machining process diagram of conventional magnetic head Configuration diagram and machining process diagram of conventional magnetic head Configuration diagram and machining process diagram of conventional magnetic head Configuration diagram and machining process diagram of conventional magnetic head Configuration diagram and machining process diagram of conventional magnetic head Configuration diagram and machining process diagram of conventional magnetic head Configuration diagram and machining process diagram of conventional magnetic head Configuration diagram and machining process diagram of conventional magnetic head Explanation of occurrence of track deviation Explanation of occurrence of track deviation

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Metal magnetic layer 2 Nonmagnetic board | substrate 3 Adhesion layer 4 Window part metal magnetic layer 6 1st board | substrate 6a 2nd board | substrate 8 Laminated board 10 Winding groove | channel 21 Magnetic path layer

Claims (5)

  A magnetic head comprising: a nonmagnetic substrate; a metal magnetic layer sandwiched between the nonmagnetic substrates; and a window metal magnetic layer provided inside the winding window.   2. The magnetism according to claim 1, wherein the metal magnetic layer and the window metal magnetic layer are formed of a single magnetic layer or a magnetic path layer in which a plurality of metal magnetic layers and insulating layers are alternately stacked. head.   2. The magnetic head according to claim 1, wherein the side surface of the winding window on the apex side is substantially perpendicular to the magnetic gap surface.   Stacked substrates with metal magnetic layers and adhesive layers formed on both sides of a non-magnetic substrate, and laminated blocks formed by bonding the adhesive layers are cut at a plane orthogonal to the metal magnetic layer surface to form a pair. After making a laminated substrate and processing a winding groove on the cut gap surface of the laminated substrate, a window metal magnetic layer is attached to the winding groove, and the gap surface is polished to form a window metal only on the winding window portion. A gapd plate was created by leaving the magnetic layer, attaching a gap material, and bonding the gap surfaces of the paired laminated substrates together, and cutting the gapd plate into strips. A method of manufacturing a magnetic head, wherein a head chip is produced by cutting at an angle.   5. The metal magnetic layer is not attached to the side surface of the winding window apex as an arrangement in which the side surface on the apex side of the winding window is a shadow when the window portion metal magnetic layer is attached. Manufacturing method of magnetic head.

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