JP2003203306A - Laminated magnetic head, method for manufacturing the same, and magnetic recording/reproducing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a head structure for reaching high track width accuracy and a manufacturing method regarding a laminated magnetic head. <P>SOLUTION: A track regulation groove is disposed to obliquely cross a metal magnetic layer. A metal magnetic layer surface and a gap surface are set orthogonal to each other, and the metal magnetic layer of the back side is formed thick. Thus, track shifting is prevented, and highly accurate tack width magnetic head is produced in high yield. A reduction in a reproducing output made in accordance with narrowness of the track width is prevented. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure and manufacturing method of a magnetic head used in a VTR, a streamer or the like.

[0002]

2. Description of the Related Art In recent years, as the density of magnetic recording has increased, it has been required to make a magnetic head narrower on a track. In order to realize the narrow track, it is necessary to further improve the track width accuracy. Further, in the narrowing of the track, there is also a problem that the reproduction output decreases according to the narrowing of the track width.
In view of these points, the present invention has high track width accuracy,
The present invention provides a structure and a manufacturing method of a magnetic head that does not reduce the reproduction output.

The structure of a conventional magnetic head is shown in FIG. This is a structure in which both sides of the metal magnetic layer 1 are sandwiched between the non-magnetic substrates 2, and the angle β formed by the magnetic gap surface 5 and the layer surface of the metal magnetic layer 1 is not a right angle.

Next, a method of manufacturing this head will be described with reference to FIGS.
Will be explained.

First, as shown in FIG. 5A, a first substrate 6 having a metal magnetic layer 1 on one side of a non-magnetic substrate 2 and an adhesive layer 3 on the other side, and a glass on one side of the non-magnetic substrate 2. A second substrate 6'on which an adhesive layer 3 containing a component is formed, and a non-magnetic substrate 2
A third substrate 6 ″ having the metal magnetic layer 1 formed on one side thereof is prepared.

As shown in FIG. 5 (b), a plurality of first substrates 6 are stacked, sandwiched between a second substrate 6'and a third substrate 6 '', and fused and laminated by an adhesive layer 3. Create block 7.

Next, as shown in FIG. 5 (c), the laminated block 7 is obliquely cut into strips to form a pair of substrate halves 8, 8 '.
To create.

Next, as shown in FIG. 6 (d), winding grooves 10 are provided on the magnetic gap surfaces 5 of the substrate halves 8 and 8 ', and the magnetic gap surfaces 5 are polished to a smooth gap length. A nonmagnetic layer of, for example, SiO ₂ and low melting point glass having a corresponding thickness is formed by sputtering or the like.

Then, as shown in FIG. 6 (e), the two substrate halves 8 and 8'are butted against each other at the magnetic gap surface 5, a low melting point glass is put in the winding groove, and they are joined by heat fusion to form a gapped gap. Create plate 9.

Next, the gapped plate 9 is cut at the position indicated by the alternate long and short dash line in FIG. 6 (e) to obtain the gapped bar 12 shown in FIG. 6 (f), which is a step for regulating the width of the tape sliding surface. The processed groove 11 is processed, and further, the gapped bar 12 is cut at the position indicated by the alternate long and short dash line in the drawing so as to have a predetermined core width,
The tape sliding surface on the front surface is polished to obtain a head chip 13 as shown in FIG.

The conventional head having such a structure has a problem that the track width cannot be produced with high precision and high yield.

As shown in FIG. 5C, the substrate halves 8 and 8 '.
The cutting is not perpendicular to the metal magnetic layer 1, but is tilted to form an azimuth angle (α in the figure).

Here, it is assumed that the cutting angle α deviates from a normal value as shown in FIG. 8A, or the magnetic gap surface 5 is inclined and polished (Z surface in the drawing), and the metal magnetism is Layer 1
The arrangement pitch P2 between them is different from the original pitch P1.

When the inclined magnetic gap surfaces 5 are butted against each other to perform track alignment, a track shift a occurs because the pitch is different as shown in FIG. 8B. If the inclination due to processing can be suppressed, such problems can be prevented. However, it is difficult to reduce the inclination during processing so that the track deviation is actually small enough to be ignored.

As a solution to the track deviation, FIG.
As shown in (a), with respect to the gapped bar 12, a track restriction groove 21 'is provided at the boundary portion between the metal magnetic layer 1 and the non-magnetic substrate 2 where the track deviation occurs, and the track deviation occurrence portion is removed. There is a way to reconstruct the truck.

By this manufacturing method, a magnetic head chip having the structure shown in FIG. 7B can be obtained. The metal magnetic layer 1 and the track regulating groove 21 'are parallel to each other. This method can eliminate the previously problematic track deviation, and since the high processing accuracy of the machine is transferred to the track width accuracy, it should be high in nature.

However, according to this method, since the ductile and soft metal magnetic layer 1 and the hard and brittle non-magnetic substrate 2 having different workability are processed at the same time, it is difficult to process both of them accurately. When the grinding stone is optimized for processing the metal magnetic layer 1, the processing of the non-magnetic substrate 2 becomes difficult, and the non-magnetic substrate 2
If a grindstone is optimized for the above processing, there arises a problem that the processing accuracy of the metal magnetic layer 1 deteriorates. Therefore, there is still a problem in terms of track width accuracy.

[0018]

SUMMARY OF THE INVENTION The present invention provides a laminated magnetic head having a head structure and a manufacturing method for realizing high track width accuracy.

[0019]

In order to solve the above-mentioned problems, the laminated magnetic head of the present invention has a structure in which a track restricting groove is provided obliquely across the metal magnetic layer. The metal magnetic layer layer surface and the gap surface are orthogonal to each other, and the back side metal magnetic layer is thickened.

That is, the present invention has a metal magnetic layer and a non-magnetic substrate sandwiching the metal magnetic layer, and a track restricting groove diagonally crossing the metal magnetic layer is provided on the tape sliding surface side.
This is a laminated magnetic head having a structure in which the two track restricting grooves are substantially parallel to each other.

Further, the present invention has a metal magnetic layer and a non-magnetic substrate sandwiching the metal magnetic layer, and two track restricting grooves which are diagonally crossing the metal magnetic layer are provided on the tape sliding surface side. In the laminated magnetic head, the directions in which the two track restriction grooves are provided are non-parallel to each other and are substantially symmetrical with respect to the metal magnetic layer.

Further, the laminated magnetic head is a magnetic head having a structure in which one metal magnetic layer or a plurality of metal magnetic layers and insulating layers are alternately laminated.

Further, according to the present invention, the non-magnetic substrate and the non-magnetic substrate are obliquely penetrated and sandwiched by the non-magnetic substrate, and the layer thickness of the portion apart from the layer thickness near the tape sliding surface is set. A laminated magnetic head having a thickened metal magnetic layer and having a structure in which a layer surface of the metal magnetic layer and a magnetic gap surface are substantially orthogonal to each other.

In the present invention, a non-magnetic substrate is laminated with a substrate having a metal magnetic layer on one surface and an adhesive layer on the opposite surface.
The laminated block fixed by the bonding of the adhesive layers is cut diagonally with respect to the laminated surface to form a paired laminated substrate, and the magnetic gap surface, which is the cut surface of the laminated substrate, is subjected to winding groove processing, polishing, and a gap. After the material is adhered, a magnetic gap surface of a pair of laminated substrates is butted against each other to create a gapped plate, and the gapped plate is cut into strips to obtain a tape sliding surface side of the gapped bar. In the method of manufacturing a magnetic head, a plurality of track regulating grooves are provided diagonally across the metal magnetic layer, and then the head chip is produced by cutting the metal magnetic layer at an azimuth angle.

Further, according to the present invention, a non-magnetic substrate having a metal magnetic layer on one surface and an adhesive layer on the opposite surface is stacked,
The laminated block fixed by the bonding of the adhesive layers is cut diagonally with respect to the laminated surface to form a paired laminated substrate, and the magnetic gap surface, which is the cut surface of the laminated substrate, is subjected to winding groove processing, polishing, and a gap. After the materials are adhered, a magnetic gap layer of each of the gapped bars obtained by creating a gapped plate by joining the magnetic gap surfaces of the pair of laminated substrates by abutting each other, and cutting the gapped plate into strips , Two tracks that are non-parallel to each other are diagonally traversed with respect to the metal magnetic layer, and a track regulation groove that is also symmetrical with respect to the metal magnetic layer is provided. It is a method of manufacturing a magnetic head in which a head chip is manufactured by using a magnetic head.

Further, according to the present invention, after the second metal magnetic layer is formed on the surface of the non-magnetic substrate on which the plurality of embedded grooves are formed, on the groove formation side, the second metal magnetic layer is polished to be a smooth surface, and One metal magnetic layer is formed, substrates on which the adhesive layer is formed on the opposite side are stacked, and the laminated block fixed by joining the adhesive layers is cut at a right angle to the laminated surface to create a laminated substrate that forms a pair. Then, after performing winding groove processing, polishing, and gap material attachment on the magnetic gap surface that is the cut surface of the laminated substrate, a gapped plate is created by joining and joining the gap surfaces of the laminated substrate that is a pair, It is a method of manufacturing a magnetic head in which a gap is obtained by cutting the gapped plate into strips, and the gapped bar is tilted by an azimuth angle and cut to form a head chip.

Further, the present invention is a magnetic recording / reproducing apparatus equipped with the magnetic head having the above structure.

According to the present invention, with the above structure, it is possible to prevent the occurrence of track deviation, and it is possible to produce a magnetic head having a highly accurate track width with a high yield. In addition, it is possible to prevent a reduction in reproduction output that occurs due to the narrow track width.

[0029]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention is intended to prevent an increase in magnetic resistance of a magnetic path while eliminating the above-mentioned track deviation. The structure and manufacturing method thereof will be described below.

(Embodiment 1) FIG. 1C shows the configuration of the invention of Embodiment 1, and FIG. 1D shows the tape sliding surface.
Shown in.

The structure is such that both sides of the metal magnetic layer 1 are sandwiched between the non-magnetic substrates 2, and the angle β formed between the magnetic gap surface 5 and the layer surface of the metal magnetic layer 1 is not the same as the conventional structure.

Also, in the present invention, the track restricting groove 21 is provided, but the direction in which the track restricting groove 21 is provided is parallel to the layer surface of the metal magnetic layer 1 in the conventional structure. The feature is that it is provided diagonally.

The track width is regulated by the track regulation groove 21, and the track regulation groove 21 is filled with glass. The track width is shown as TW in the figure.

Next, a method of manufacturing the magnetic head having this structure will be described.

The steps to obtain the gapped bar 12 are
Since this is the same as the conventional method of manufacturing a magnetic head shown in FIGS. 5A to 6F, description thereof will be omitted.

In the present invention, the gap bar 12 is shown in FIG.
As shown in (a), a track regulation groove 21 is formed diagonally across the metal magnetic layer 1. The track width is determined by the processing positions of the pair of track restriction grooves 21. next,
As shown in FIG. 1 (b), glass is melt-filled into the track regulation groove 21 and the stepped groove 11 for regulating the width of the tape sliding surface is processed to obtain a predetermined core width. The head chip 13 as shown in FIG. 1C is obtained by cutting at the position indicated by the alternate long and short dash line in the figure and polishing the front tape sliding surface.

As described above, when the method for processing the track restricting groove 21 obliquely with respect to the metal magnetic layer 1 is used, the non-magnetic substrate 2 is processed by the grindstone. Non-magnetic substrate 2
By selecting a grindstone with specifications close to the optimum processing specifications of, the high processing accuracy of the processing machine can be transferred to the track width accuracy,
It is possible to improve the track width accuracy.

(Second Embodiment) As in the first embodiment,
Another method for improving the track width accuracy by providing the track restriction groove will be described below with reference to FIG.

The steps until obtaining the gapped bar 12 are
Since this is the same as the conventional method of manufacturing a magnetic head shown in FIGS. 5A to 6F, description thereof will be omitted.

In the present invention, the gap bar 12 is shown in FIG.
As shown in (a), the track restricting grooves 22a and 22b are processed so as to cross the metal magnetic layer 1 obliquely. The pair of track regulation grooves 22a and 22b that determine the track width are not parallel to each other, and this point is parallel to the first embodiment.
Is different from.

Next, as in the first embodiment, the track regulating grooves 22a and 22b are melt-filled with glass to form the stepped groove 11 for regulating the width of the tape sliding surface, and further, predetermined. 2C to obtain the core width, and the front tape sliding surface is polished to obtain a head chip 13 as shown in FIG. 2C.

FIG. 2D shows the arrangement of the metal magnetic layer 1 and the track regulating grooves 22a and 22b on the tape sliding surface. Like the first embodiment, the present invention can eliminate the track deviation and improve the track width accuracy therewith, but is further superior to the first embodiment in terms of contact between the tape and the head.

In the first embodiment, as shown in FIG.
Since the track restriction groove 21 is asymmetrical in the vertical direction in the figure, the wear amount becomes asymmetrical in the vertical direction as the head wear advances, the contact state changes from the initial state, and the optimum contact point moves vertically from the center point. There is a possibility that the reproduction output may decrease due to the shift.

On the other hand, in the present invention, as shown in FIG. 2D, since the track regulating groove 22 is symmetrical in the vertical direction of the drawing, the optimum contact point is vertically displaced from the center point. And the reproduction output does not decrease.

(Embodiment 3) FIG. 4 (j) shows the structure of the magnetic head of the present invention, and FIG.
Shown in (k).

The magnetic layer comprises a first metal magnetic layer 31a and a second metal magnetic layer 31b. The second metal magnetic layer 31b is stacked on the first metal magnetic layer 31a and exposed on the tape sliding surface 37. It is not configured. In addition, on the tape sliding surface, as shown in FIG.
The angle β formed by 5 and the layer surface of the first metal magnetic layer 31a is a right angle.

Next, a method of manufacturing the magnetic head of the present invention will be described.

First, as shown in FIG. 3A, a plurality of embedded grooves 34 are processed in the non-magnetic substrate 32.

Next, as shown in FIG. 3B, the second metal magnetic layer 31b is attached to the surface on the buried groove 34 side by sputtering or the like, and this surface is polished as shown in FIG. 3C. To make a smooth surface.

Next, as shown in FIG. 3 (d), a first metal magnetic layer 31a is attached to this polished surface by sputtering or the like,
On the opposite surface, a first substrate 36 having an adhesive layer 33 containing glass as a component and a second substrate 36 'having no adhesive layer 33 attached
Then, a third substrate 36 ″ in which only the adhesive layer 33 is attached to the non-magnetic substrate 32 is created.

Next, as shown in FIG. 3 (e), a plurality of first substrates 36 are stacked to form a second substrate 36 'and a third substrate 36'.
It is sandwiched by the substrates 36 ″ and fused with the adhesive layer 33 to form a laminated block 37.

Next, this laminated block 37 is shown in FIG.
A pair of substrate halves 38, 38 'is formed by cutting the substrate in a rectangular shape at a right angle at the position indicated by the alternate long and short dash line.

Next, as shown in FIG. 4G, the substrate half 3
The winding groove 40 is provided on the magnetic gap surface 35 of 8, 38 ',
After the magnetic gap surface 35 is polished smoothly, a nonmagnetic layer of SiO ₂ and low melting point glass having a thickness corresponding to the gap length is formed by sputtering or the like.

Then, as shown in FIG. 4 (h), the two substrate halves 38, 38 'are butted against each other at the magnetic gap surface 35, the low melting point glass is put in the winding groove, and they are joined by heat fusion. The gapped plate 39 is created.

Next, the gapped plate 39 is cut at the position indicated by the alternate long and short dash line in FIG. 4 (h) to obtain the gapped bar 42 shown in FIG. 4 (i), which is a step for regulating the width of the tape sliding surface. The processed groove 41 is processed, and the gap bar 42
Is cut at a position indicated by an alternate long and short dash line in the drawing so as to have a predetermined core width, and the tape sliding surface on the front surface is polished to obtain a head chip 43 as shown in FIG. 4 (j).

In the magnetic head of the present invention thus manufactured, the angle formed by the magnetic gap surface 35 and the first metal magnetic layer 31a is a right angle, as shown in FIG. 8 (c). Conventionally, when the magnetic gap surface 35 is inclined or cut or polished during polishing, the arrangement pitch P2 of the metal magnetic layers changes as shown in FIG. 8A. On the other hand, it occurs because the metal magnetic layer is inclined.

However, as in the present invention, the magnetic gap surface 3
When the angle formed by 5 and the first metal magnetic layer 31a is a right angle and there is no inclination, the arrangement pitch P3 of the metal magnetic layer 31a hardly changes even if the magnetic gap surface 35 is inclined and cut or polished. Therefore, the track deviation caused by cutting or polishing, which has been a problem in the related art, does not occur, and the track width accuracy can be improved.

Further, in the present invention, the second metal magnetic layer 31b.
Is superposed on the first metal magnetic layer 31a. Therefore, the cross-sectional area of the magnetic path becomes large and the magnetic flux easily flows, and it is possible to prevent the reproduction output from deteriorating, which has been a problem in the past.

[0059]

According to the present invention described above, the occurrence of track deviation can be prevented, and a magnetic head with a highly accurate track width can be produced with a high yield. Further, by adding the second metal magnetic layer, it becomes possible to prevent the reduction of the reproduction output due to the narrowing of the track of the magnetic head.

[Brief description of drawings]

FIG. 1 is a configuration diagram and a process diagram of a magnetic head according to a first embodiment of the present invention.

FIG. 2 is a configuration diagram and a process diagram of a magnetic head according to a second embodiment of the invention.

FIG. 3 is a configuration diagram and a processing step diagram of a magnetic head according to a third embodiment of the present invention.

FIG. 4 is a configuration diagram and a processing step diagram of a magnetic head according to a third embodiment of the present invention.

FIG. 5 is a configuration diagram and a processing step diagram of a conventional magnetic head.

FIG. 6 is a configuration diagram of a conventional magnetic head and a processing step diagram.

FIG. 7 is a configuration diagram of a conventional magnetic head and a processing step diagram.

FIG. 8 is an explanatory diagram of occurrence of track deviation.

[Explanation of symbols]

1 Metal magnetic layer 2,32 non-magnetic substrate 3,33 Adhesive layer 21, 22a, 22b Track restriction groove 31a First metal magnetic layer 31b Second metal magnetic layer 34 Embedded groove 36 First substrate 36 'Second substrate 36 '' 3rd substrate

Continued front page    (72) Inventor Akinaga Natsui             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. (72) Inventor Shozo Ninomiya             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. F-term (reference) 5D093 AA01 AB01 BB05 BC07 DA02                 5D111 AA22 DD03 DD12 DD22 GG12                       HH03

Claims (8)

[Claims] 1. A metal magnetic layer and a non-magnetic substrate sandwiching the metal magnetic layer, and two track restriction grooves diagonally crossing the metal magnetic layer are provided on the tape sliding surface side.
A laminated magnetic head having a structure in which track regulation grooves of a book are substantially parallel. 2. A metal magnetic layer and a non-magnetic substrate sandwiching the metal magnetic layer, and two track restriction grooves diagonally crossing the metal magnetic layer are provided on the tape sliding surface side.
The direction in which the track restriction groove of the book is provided is non-parallel,
A stacked magnetic head having a configuration in which the direction is substantially symmetrical with respect to the metal magnetic layer. 3. A non-magnetic substrate, and a metal which obliquely penetrates the non-magnetic substrate, is sandwiched by the non-magnetic substrate, and has a thicker layer at a portion apart from a portion near a tape sliding surface. A laminated magnetic head having a magnetic layer, wherein the layer surface of the metal magnetic layer and the magnetic gap surface are substantially orthogonal to each other. 4. A non-magnetic substrate is laminated with a metal magnetic layer on one surface and an adhesive layer on the opposite surface, and the laminated block fixed by bonding the adhesive layers is cut diagonally to the laminated surface. After forming a laminated substrate to be paired, after performing winding groove processing, polishing, and adhering a gap material on the magnetic gap surface which is a cut surface of the laminated substrate, the magnetic gap surfaces of the laminated substrate to be paired are bonded to each other. Create a gapped plate,
A plurality of track regulating grooves diagonally crossing the metal magnetic layer are provided on the tape sliding surface side of the gapped bar obtained by cutting the gapped plate into strips, and the head chip is cut at an azimuth angle. Method of manufacturing magnetic head for manufacturing. 5. A non-magnetic substrate having a metal magnetic layer on one surface and a substrate having an adhesive layer on the opposite surface is stacked, and a laminated block fixed by bonding the adhesive layers is cut obliquely to the laminated surface. After making a laminated substrate to be paired, after performing winding groove processing, polishing, and adhering a gap material on the magnetic gap surface which is the cut surface of the laminated substrate, the magnetic gap surfaces of the laminated substrate to be paired are bonded to each other. Create a gapped plate,
Two metal magnetic layers of the gapped bar obtained by cutting the gapped plate into a strip shape are diagonally crossed with respect to each other, and are also parallel to the metal magnetic layer. A method of manufacturing a magnetic head in which a track regulating groove is formed in a symmetrical direction, and then a head chip is produced by cutting the azimuth angle by tilting. 6. A second metal magnetic layer is formed on the surface of the non-magnetic substrate on which a plurality of embedded grooves are formed on the groove formation side, and then polished to form a smooth surface, and the first metal magnetic layer is formed on the smooth surface. And stacking substrates with an adhesive layer formed on the opposite surface, and cutting the laminated block fixed by bonding the adhesive layers at a substantially right angle to the laminated surface to form a laminated substrate that forms a pair. The magnetic gap surface, which is the cut surface of the substrate, is subjected to winding groove processing, polishing, and gap material attachment, and then the gap surfaces of the pair of laminated substrates are abutted and joined to each other to form a gapped plate. A method for manufacturing a magnetic head, in which a gap is obtained by cutting the strip into a strip shape, and the gap is cut at an azimuth angle to cut a head chip. 7. The magnetic head according to claim 1, 2 or 3, wherein one metal magnetic layer or a plurality of metal magnetic layers and insulating layers are alternately laminated. 8. A magnetic recording / reproducing apparatus equipped with the magnetic head having the structure according to claim 1, 2, or 3.