JP2005215579A5 - - Google Patents

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Publication number
JP2005215579A5
JP2005215579A5 JP2004025083A JP2004025083A JP2005215579A5 JP 2005215579 A5 JP2005215579 A5 JP 2005215579A5 JP 2004025083 A JP2004025083 A JP 2004025083A JP 2004025083 A JP2004025083 A JP 2004025083A JP 2005215579 A5 JP2005215579 A5 JP 2005215579A5
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JP
Japan
Prior art keywords
optical system
imaging optical
imaging
projection
light beam
Prior art date
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Withdrawn
Application number
JP2004025083A
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English (en)
Japanese (ja)
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JP2005215579A (ja
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Publication date
Application filed filed Critical
Priority to JP2004025083A priority Critical patent/JP2005215579A/ja
Priority claimed from JP2004025083A external-priority patent/JP2005215579A/ja
Publication of JP2005215579A publication Critical patent/JP2005215579A/ja
Publication of JP2005215579A5 publication Critical patent/JP2005215579A5/ja
Withdrawn legal-status Critical Current

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JP2004025083A 2004-02-02 2004-02-02 投影光学系、露光装置、および露光方法 Withdrawn JP2005215579A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004025083A JP2005215579A (ja) 2004-02-02 2004-02-02 投影光学系、露光装置、および露光方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004025083A JP2005215579A (ja) 2004-02-02 2004-02-02 投影光学系、露光装置、および露光方法

Publications (2)

Publication Number Publication Date
JP2005215579A JP2005215579A (ja) 2005-08-11
JP2005215579A5 true JP2005215579A5 (enExample) 2008-02-28

Family

ID=34907555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004025083A Withdrawn JP2005215579A (ja) 2004-02-02 2004-02-02 投影光学系、露光装置、および露光方法

Country Status (1)

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JP (1) JP2005215579A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102768397B (zh) * 2011-05-05 2014-11-12 上海微电子装备有限公司 一种投影光刻物镜
JP6039292B2 (ja) * 2012-08-02 2016-12-07 キヤノン株式会社 露光装置及び物品の製造方法

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