JP2005203768A - Lid for thin plate support container and method for mounting same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To automate attaching and detaching of a lid by using an already existing attaching and detaching device and at the same time, to attempt to improve the workability of attaching and detaching. <P>SOLUTION: A lid 15 covers a container body 12 of a thin plate support container 11 for internally accommodating a semiconductor wafer 49. A simple attaching and detaching mechanism 32 capable of being easily attached to and detached from the container body 12 by fixing and releasing the fixed state is provided in a body section 30 of the lid body 15. The simple attaching and detaching mechanism 32 comprises a latch member 42 extending from the body section 30 to be latched by a second insertion target section 24 of the container body 12 and a guide member 43 provided at the top end of the latch member 42 for guiding the latch member 42 to the second insertion target section 24 by attaching to the second insertion target section 24 while the body section 30 is lightly inserted into the container body 12 side. The guide member 43 comprises an attaching section 43A that first attaches to the second insertion target section 24 and a guide section 43B for guiding the latch member 42 to the second insertion target section 24. The lid 15 is divided into a rotation region A for fixing the lid 15 to the container body 12 side and a rotation region B for fixing a feeding member 44 itself. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a lid for a thin plate support container that accommodates a thin plate such as a semiconductor wafer, a storage disk, and a liquid crystal glass substrate and can be used in storage, transportation, manufacturing processes, and the like, and a method of attaching the lid.

  Thin plate supporting containers for storing, storing and transporting thin plates such as semiconductor wafers are generally known.

  This thin plate support container is mainly composed of a container body and a lid that closes the upper opening of the container body. A member for supporting a thin plate such as a semiconductor wafer is provided inside the container body. In such a thin plate support container, it is necessary to transport the container while keeping the inside of the container clean in order to prevent contamination of the surface of the thin plate such as a semiconductor wafer accommodated therein. For this reason, the inside of the container is sealed. That is, the lid body is fixed to the container body, and the inside of the container body is sealed. There are various structures for fixing the lid to the container body.

  The thin plate support container transported to a semiconductor manufacturing factory or the like is placed on the production line, and the lid is automatically attached and detached by a dedicated device.

  There exists a thing of patent document 1 as a cover corresponding to this exclusive apparatus. As shown in FIG. 2, the lid 1 includes a main body 2, a cam member 3, a latch arm 4, and a fulcrum 5.

  The cam member 3 is rotatably attached to the main body 2. The cam member 3 is provided with a cam portion 6. The cam portion 6 is provided with an elongated hole-like connection opening 7.

  The latch arm 4 is provided with an S-shaped cam follower portion 8 at a base end portion thereof, and the S-shaped cam follower portion 8 is fitted into the connection opening 7 and captured.

  The fulcrum 5 is constituted by a protruding member provided on the main body 2 and supports the latch arm 4.

  With this configuration, when the cam member 3 rotates, the S-shaped cam follower portion 8 captured in the connection opening 7 is pushed upward while being moved rightward in the drawing. As a result, the latch arm 4 is rotated from the fulcrum 5 while being extended from the main body 2, and the tip of the latch arm 4 is pushed downward.

At this time, the leading end of the latch arm 4 is fitted in the hole on the container body side, and is pressed downward to press the lid on the container body side and fix it.
JP 2001-512288 A

  By the way, in the lid 1 as described above, the latch arm 4 extends from the main body 2 and the tip of the latch arm 4 fits into the hole on the container main body side. When the latch arm 4 extends from the main body 2 Needs to press the lid against the container body. This is because there is a sealing member for sealing the inside of the container body between the lid and the container body. This seal member is made of an elastic body such as a synthetic resin and pushes back the lid body fitted to the container body. Therefore, the latch body 4 is extended from the body 2 by pressing the lid body side. It is necessary to let it come out.

  However, in this case, if the lid is attached to the container body in a state where the container body is placed sideways (a state where the semiconductor wafer or the like is disposed horizontally), the container body is displaced. When attaching the lid to the container body, as described above, it is necessary to press the lid body against the container body side, but there is nothing to support the container body when the container body is placed sideways. The container body will shift. For this reason, there is a problem that it is difficult to automate the attachment and detachment of the lid.

  The present invention has been made in view of the above points, and an object of the present invention is to provide a thin plate supporting container lid that can be easily attached without pressing the lid against the container body.

  A lid for a thin plate support container according to the first invention is a lid for a thin plate support container that closes a container main body of the thin plate support container that is accommodated and transported in the thin plate, and includes the lid for the thin plate support container. A simple attachment / detachment mechanism that can be easily fixed and released from the container body and attached / detached is provided in the main body part constituting the outer shell, and the simple attachment / detachment mechanism extends from the main body part to fit the container main body. A locking member that locks to the mating portion, and the main body portion that is provided at the distal end portion of the locking member is lightly fitted to the container main body side, and is attached to the fitted portion, and the locking member is It is characterized by comprising a guide member for guiding into the fitted portion.

  According to the above configuration, when the locking member of the simple attachment / detachment mechanism is extended from the main body portion in a state where the main body portion is lightly fitted to the container main body side and the container main body is not pushed, the guide member at the distal end portion of the locking member is first Attach to the mating part. When the locking member is further extended from the main body in this state, the guide member guides the locking member to the fitted portion, and the locking member is fitted into the fitted portion.

  The thin plate supporting container lid according to the second invention is the thin plate supporting container lid according to the first invention, wherein the guide member is engaged with the main body portion lightly fitted to the container main body. A mounting portion that first attaches to the mated portion when the stop member extends toward the mated portion, and an extension of the locking member after the mounting portion is attached to the mated portion by the mounting portion. Along with this, a guide portion for guiding the locking member to the fitted portion is provided.

  With the above configuration, when the main body is lightly fitted to the container main body and the locking member of the simple attachment / detachment mechanism is extended from the main body without pushing the container main body, the mounting portion of the guide member is first fitted. Attach to the part. When the locking member is further extended from the main body in this state, the guide portion is inserted into the fitted portion following the mounting portion, and the locking member is guided to the fitted portion. And a locking member fits in a to-be-fitted part.

  The lid for a thin plate support container according to a third invention is the lid for a thin plate support container according to the second invention, wherein the mounting portion is the above-mentioned locking portion. It is configured with a protrusion provided at a position biased to the inside of the container main body among the front end portion of the member, and the guide portion is configured with an inclined surface that connects the mounting portion and the locking member. It is characterized by that.

  With the above configuration, when the locking member of the simple attachment / detachment mechanism is extended from the main body portion while the main body portion is lightly fitted to the container main body side and the container main body is not pushed, the projection of the mounting portion first becomes the fitted portion. Get caught in. When the locking member is further extended from the main body in this state, the inclined surface is inserted along the edge of the fitted portion following the projection to guide the locking member to the fitted portion. And a locking member fits in a to-be-fitted part.

  The lid for a thin plate support container according to a fourth invention is characterized in that the surface of the inclined surface of the guide portion is roughened in the lid for a thin plate support container according to the third invention.

  With the above configuration, when the locking member is further extended from the main body in a state where the protrusion of the mounting portion is hooked on the fitted portion, the inclined surface continues to the inside along the edge of the fitted portion following the projection. Although it is inserted, since the inclined surface roughens the surface, the frictional resistance with the edge of the fitted portion is reduced, and the locking member can be smoothly guided to the fitted portion.

  A thin plate supporting container lid according to a fifth aspect of the present invention is the thin plate supporting container lid according to any of the first to fourth aspects, wherein the sliding surface of each sliding portion of the simple attachment / detachment mechanism is roughened. It is characterized by that.

  With the above configuration, when the locking member is further extended from the main body portion with the protrusion of the mounting portion hooked on the fitted portion, the sliding contact surfaces of the sliding portions of the simple attachment / detachment mechanism slide with each other. Since the sliding contact surface is roughened, the frictional resistance is reduced, and the locking member can be smoothly guided to the fitted portion.

  A lid for a thin plate support container according to a sixth invention is the lid for a thin plate support container according to any of the first to fifth inventions, wherein a V-shaped groove is fitted into the thin plate stored in the container body. A thin plate presser that is pressed and supported together is provided, and the surface of the inclined surface in the V-shaped groove of the thin plate presser is roughened.

  With the above configuration, when the main body is lightly fitted to the container main body, the thin plate housed in the container main body slides smoothly along the inclined surface that roughens the surface of the V-shaped groove, and the groove Mates to the bottom.

  The thin plate supporting container lid according to the seventh invention is the thin plate supporting container lid according to the third invention, wherein at least the surface of the inclined surface of the guide portion is formed of a slidable synthetic resin. Features.

  With the above configuration, since the inclined surface is formed of slidable synthetic resin, the frictional resistance with the edge of the fitted portion is reduced, and the locking member can be smoothly guided to the fitted portion. it can.

  The thin plate supporting container lid according to the eighth invention is the thin plate supporting container lid according to any of the first, second, third, and seventh inventions, wherein at least the sliding portions of the simple attachment / detachment mechanism are in sliding contact. The surface is formed of a slidable synthetic resin.

  With the above configuration, since the sliding contact surface is formed of the slidable synthetic resin, the frictional resistance is reduced, and the locking member can be smoothly guided to the fitted portion.

  A lid for a thin plate support container according to a ninth invention is the thin plate support container lid according to any of the first, second, third, seventh, and eighth inventions. A thin plate presser that is fitted and pressed and supported by a letter-shaped groove is provided, and at least the surface of the inclined surface of the V-shaped groove of the thin plate presser is formed of a slidable synthetic resin.

  With the above configuration, since the inclined surface is formed of a slidable synthetic resin, the thin plate smoothly slides along the inclined surface with reduced frictional resistance and fits into the groove bottom.

  The lid for a thin plate support container according to a tenth invention is the lid for a thin plate support container according to any of the seventh to ninth inventions, wherein each of the surfaces is made of the slidable synthetic resin alone or the slide. It is characterized in that it is molded by adding a sliding agent to the synthetic resin.

  According to the above configuration, each of the surfaces is molded with the slidable synthetic resin alone or according to various conditions, or is formed by adding a sliding agent to the slidable synthetic resin. As a result, the thin plate smoothly slides along the inclined surface with reduced frictional resistance and fits into the groove bottom.

  The thin plate supporting container lid according to the eleventh invention is characterized in that, in the thin plate supporting container lid according to the tenth invention, the slidable synthetic resin formed by itself is a fluoride synthetic resin. And

  With the above configuration, a fluoride synthetic resin is used as the slidable synthetic resin, and by using this fluoride synthetic resin alone, the frictional resistance of each surface is reduced and the sliding can be performed smoothly.

  The lid for a thin plate support container according to the twelfth invention is the lid for a thin plate support container according to the eleventh invention, wherein PTFE (Polytetrafluoroethylene), PFA (Perfluoroalkoxy) or ETFE (Ethylene Tetrafluoroethylene) is used as the fluoride synthetic resin. It is used.

  With the above configuration, by using PTFE, PFA, or ETFE as the fluoride synthetic resin, the frictional resistance of each surface is reduced, and smooth sliding is possible.

  The lid for a thin plate support container according to a thirteenth invention is the lid for a thin plate support container according to the tenth invention, wherein the sliding agent is PTFE, PFA, silicon, glass fiber, carbon fiber, graphite, DLC ( Diamond-Like Carbon) or one or more of molybdenum disulfide.

  With the above configuration, by using PTFE or the like as the sliding agent, the sliding agent appears on the surface of the synthetic resin and functions as a lubricant, reducing the frictional resistance of the inclined surface, etc., and smooth sliding. realizable.

  A lid for a thin plate support container according to a fourteenth aspect of the present invention is the lid for a thin plate support container according to any one of the first to thirteenth aspects of the present invention. A feeding member that extends from the main body part and engages with the fitted part of the container body, and the feeding member rotates to move the locking member to the fitted part of the container body. And a rotation region for locking the lid body to the container body side and the feeding member to be further rotated with the lid body fixed to the container body side to fix the feeding member itself. It is characterized by separating the rotation area.

  With the above configuration, in the rotation region in which the lid body is fixed to the container body side, the force for rotating the feeding member is used to lock the locking member to the fitted portion. Further, in the rotation region for fixing the feeding member itself, the force for rotating the feeding member is all used to fix the feeding member itself. Thereby, the force which fixes the said cover body to the said container main body side and the force which fixes the said extending | stretching member itself do not overlap.

  A lid for a thin plate support container according to a fifteenth aspect of the present invention is the lid for a thin plate support container according to any one of the first to fourteenth aspects of the present invention, which rotates in a state of being locked with the locking member. A feeding member that extends from the main body portion and engages with the mating portion of the container body, and is provided between the key groove of the feeding member and the holding cover that covers the feeding member. A gap is provided to prevent contact of the latch key fitted in the key groove.

  With the above configuration, when the latch key is fitted in the key groove and rotated, the feeding member rotates together with the latch key. At this time, the latch key can prevent the latch key fitted in the key groove from coming into contact with the holding cover by the gap between the key groove and the holding cover.

  A lid attachment method according to a sixteenth aspect of the invention is a lid attachment method for attaching a lid to a container main body of a thin plate supporting container that is transported by accommodating a thin plate therein. The main body portion is provided with a simple attachment / detachment mechanism that can be attached to and detached from the container main body, and the simple attachment / detachment mechanism extends from the main body portion to be engaged with the fitted portion of the container main body. A locking member that stops, and the locking member is attached to the fitting portion in a state where the main body portion is lightly fitted to the container main body side, and the locking member is placed in the fitting portion. A guide member that guides to the engagement member, and rotates in a state of being engaged with the engagement member, so that the engagement member extends from the main body, and the guide member is attached to the fitted portion. A feeding member that guides the inside of the fitted portion. The lid body, which is sucked and supported by the suction pad in a state where the latch key is fitted in the key groove of the feeding member, and the feeding member is rotated while the main body portion of the lid body is fitted to the container body side. When the guide member is attached to the fitted portion by being moved, the suction by the suction pad is released.

  By this method, when the guide member is attached to the mated portion, the suction by the suction pad is released, so that when the lid is fixed to the container body, the lid fixed to the load port side The container body is prevented from being pulled and deformed.

  As described above in detail, the thin plate support container of the present invention has the following effects.

(1) With the main body part lightly fitted to the container body side and without pushing the container main body, the guide member guides the locking member to the fitted part, and the locking member is fitted into the fitted part. Therefore, the lid can be easily attached without fixing the container main body, and the attaching / detaching operation of the lid can be automated using the existing attaching / detaching device.

(2) Since the guide member is attached to the fitted portion and the guide portion guides the locking member into the fitted portion, similarly to the above, automating the attaching / detaching operation of the lid using the existing attaching / detaching device. Is possible.

(3) Since the protrusion of the mounting part is caught by the fitted part and the inclined surface of the guide part guides the locking member to the fitted part along the edge of the fitted part, the container body is not fixed. In addition, the lid can be easily attached, and the attaching / detaching operation of the lid can be automated using the existing attaching / detaching device.

(4) Since the surface of the inclined surface of the guide portion can be roughened and the locking member can be smoothly guided to the fitted portion, the rotational torque of the latch key can be reduced. It is possible to automate the attaching / detaching operation of the lid.

(5) Since the sliding contact surface of each sliding portion of the simple attachment / detachment mechanism can be roughened and the locking member can be smoothly guided to the fitted portion, the rotational torque of the latch key can be reduced. The attaching / detaching operation of the lid can be automated using the attaching / detaching device.

(6) Since the peripheral edge of the thin plate is fitted to the groove bottom along the inclined surface of the V-shaped groove whose surface has been roughened, the attaching / detaching operation of the lid can be automated using the existing attaching / detaching device as described above. become.

(7) Since the inclined surface or the like is formed of a synthetic resin to which a sliding agent is added, and the frictional resistance of each sliding contact portion is reduced, the rotational torque of the latch key can be reduced. It is possible to automate the attaching / detaching operation of the lid.

(8) The surface of the inclined surface or the slidable contact surface is molded by adding a sliding agent to the slidable synthetic resin alone or the slidable synthetic resin according to various conditions. Since the rotation torque of the latch key can be reduced, the lid attaching / detaching operation can be automated using the existing attaching / detaching device as described above.

  At this time, fluoride synthetic resin such as PTFE, PFA or ETFE is used as the slidable synthetic resin formed as a single substance, and PTFE, PFA, silicon, glass fiber, carbon fiber, graphite is used as the sliding agent. One or more of DLC and molybdenum disulfide can be used, and the rotational torque of the latch key can be reduced, and the lid attachment / detachment operation can be automated using the existing attachment / detachment device as described above. It becomes possible.

(9) A force for fixing the lid body to the container body side and the feeding member by separating a rotation area for fixing the lid body to the container body side and a rotation area for fixing the feeding member itself. Since the force to fix itself does not overlap, the rotation of the feeding member does not become abnormally heavy, and the workability of removing the lid is improved.

(9) In order to prevent a latch key fitted in the key groove from coming into contact with the holding cover by providing a gap between the key groove of the feeding member and the holding cover covering the feeding member, Breakage and generation of dust can be prevented.

(10) When the guide member is attached to the mated portion, the cover body is fixed to the load port side when the cover body is fixed to the container body in order to release the suction by the suction pad. The container main body is not attracted and deformed, and after the deformation, the suction generated by the suction pad is released and the container main body returns to the original state, so that it is possible to prevent the generation of vibrations and the accompanying dust.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[First Embodiment]
The thin plate support container of the present invention is a container for storing thin plates such as semiconductor wafers, storage disks, liquid crystal glass substrates, etc., for use in storage, transportation, production lines and the like. In the present embodiment, a thin plate support container that stores a semiconductor wafer will be described as an example. There are various types of lids for closing the thin plate supporting container, but here, two types of lids are shown.

  As shown in FIGS. 3 to 10, the thin plate supporting container 11 according to the present embodiment has a container main body 12 that houses a plurality of semiconductor wafers 49 (see FIG. 26), and opposing side walls in the container main body 12. Two thin plate support portions 13 for supporting the semiconductor wafer 49 provided and housed inside from both sides, the first lid body 14 and the second lid body 15 for closing the container main body 12, and a transfer device (see FIG. The top flange 16 is gripped by the arm portion (not shown), and the carrying handle 17 is gripped when the operator carries the thin plate supporting container 11 by hand.

  As shown in FIGS. 3 and 4, the container body 12 is formed in a substantially cubic shape as a whole. The container main body 12 is in a vertically placed state (the state shown in FIGS. 3 and 4), and is composed of four side wall portions 12A, 12B, 12C, 12D and a bottom plate portion 12E, which are surrounding walls, and an opening 12F is formed on the upper portion thereof. Is provided. When the container main body 12 is installed facing a wafer transfer robot (not shown) in the production line of the semiconductor wafer 49 or the like, it is placed horizontally. Positioning means (not shown) for the thin plate supporting container 11 is provided on the outside of the side wall portion 12A which becomes the bottom in the horizontally placed state. A top flange 16 is detachably attached to the outside of the side wall portion 12A that becomes a ceiling portion in the horizontal state. A carrying handle 17 is detachably attached to the outside of the side wall portions 12C and 12D that become the horizontal wall portion in the horizontal state.

  As shown in FIGS. 5 and 6, a lid body receiving portion 21 for fitting the lid body 14 is provided at the upper end portion of each side wall portion 12 </ b> A, 12 </ b> B, 12 </ b> C, 12 </ b> D of the container body 12. The lid body receiving portion 21 is formed by expanding the upper end portion of the container body 12 to the size of the lid body 14. Accordingly, the lid body 14 is fitted to the lid body receiving portion 21 by fitting inside the vertical plate portion 21A of the lid body receiving portion 21 and contacting the horizontal plate portion 21B. Further, the horizontal plate portion 21B is provided with a seal groove 21C on the entire periphery thereof, and a gasket 22 attached to the lower surface of the first lid 14 is fitted to seal the inside of the thin plate support container 11. It has become. On the inner surface of the vertical plate portion 21A at the four corners of the lid receiving portion 21, a lid locking claw (not shown) of a simple attachment / detachment mechanism 26, which will be described later, is fitted and the first lid 14 is placed on the container body 12 side. The 1st to-be-fitted part 23 for fixing to is provided. The first fitted portion 23 is formed by recessing the vertical plate portion 21 </ b> A in a square shape, and a lid locking claw is fitted on the inner upper surface thereof.

  Further, a second fitted portion 24 is provided in the vicinity of each first fitted portion 23. The second fitted portion 24 is adapted to fix the second lid 15 to the container body 12 side by fitting the locking member 42 of the simple attachment / detachment mechanism 32 of the second lid 15.

  The thin plate support part 13 is detachably attached to the container body 12. The thin plate support portion 13 is configured as shown in FIGS. The thin plate support portion 13 is mainly composed of a mounting plate piece 25A in which a plurality of thin plate support portions 13 are arranged in parallel with a predetermined interval, and each semiconductor wafer 49 is mounted and supported one by one, and each mounting plate piece 25A. A connecting plate piece 25B that integrally supports them at three positions in a state where they are arranged in parallel at a predetermined interval, and an inner surface (the contact with the semiconductor wafer 49) of the innermost connecting plate piece 25B. And a V-shaped groove 25C for supporting the semiconductor wafer 49 formed on the surface). It is made. The surface of the V-shaped groove 25C is roughened and finished. In a state where the container body 12 is in a horizontal state (a state in which the semiconductor wafer 49 is disposed horizontally), only the lower side surface of the V-shaped groove 25C located on the lower side or both the upper and lower side surfaces are roughened. . Roughening the surface of the V-shaped groove 25C means finishing the unevenness of about 10 to 15 μm on the entire surface with a density of about 20,000 to 30,000 / cm 2. If the surface of the V-shaped groove 25C is finished with excessively high accuracy, the surface of the semiconductor wafer 49 and the surface of the V-shaped groove 25C are too close to each other to increase the frictional resistance and make it difficult to slide, whereas the surface is roughened. Then, the semiconductor wafer 49 and the surface of the V-shaped groove 25C are not in close contact with each other, and the frictional resistance is reduced. For this reason, the surface of the V-shaped groove 25 </ b> C is roughened and finished in a state where unevenness of about 10 to 15 μm remains. There are various means for roughing and finishing the surface of the V-shaped groove 25C. For example, the surface of the V-shaped groove 25C may be roughened by polishing, sandblasting, or the like. Further, the surface of the portion of the mold corresponding to the V-shaped groove 25C may be roughened to form irregularities of about 10 to 15 μm. Any means can be used as long as it can finish in a state where unevenness of about 10 to 15 μm remains at a density of about 20,000 to 30,000 / cm 2 on the surface of the V-shaped groove 25C.

  A lower support hole 25D for fitting a lower support protrusion (not shown) provided in the container main body 12 to support the lower portion of the thin plate support portion 13 and an upper support on the back surface of the thin plate support portion 13 An upper support hole 25E that is fitted to a projection (not shown) and supports the upper portion of the thin plate support portion 13 is provided.

  The 1st cover body 14 is formed in a dish shape, and the center part is raised and formed in the cylindrical shape so that it may not contact the upper part of the semiconductor wear accommodated in an inside. As shown in FIGS. 3 and 4, simple attachment / detachment mechanisms 26 for detachably fixing the first lid 14 to the container body 12 are provided at the four corners of the first lid 14. The simple attachment / detachment mechanism 26 mainly includes a lid locking claw (not shown) provided in a state protruding from the peripheral edge of the first lid 14. This lid locking claw is adapted to be fitted to the first fitted portion 23.

  The second lid 15 is used when the thin plate support container 11 is transported, or is used on a production line in a factory. As shown in FIGS. 1, 9, and 10, the second lid body 15 includes a main body portion 30, a cover plate (not shown), and a simple attachment / detachment mechanism 32.

  The main body 30 is formed in a thin, substantially quadrangular shape as a whole, and does not protrude outside when mounted on the lid receiving portion 21 of the container main body 12. A gasket receiving portion 31 is attached around the lower portion of the main body portion 30. The gasket receiving portion 31 is provided with a gasket (not shown), and the main body portion 30 is fitted to the seal groove 21C in a state where the main body portion 30 is attached to the lid receiving portion 21, so that the inside of the container main body 12 is sealed. It has become. Note that the gasket is appropriately formed in accordance with the shape of the seal groove 21 </ b> C, similarly to the gasket 22 of the first lid 14.

  Concave portions 33 to which the simple attachment / detachment mechanism 32 is attached are respectively provided at the ends of the main body portion 30 of the second lid 15 on both sides in the longitudinal direction (upper left and lower right sides in FIG. 9). The recess 33 is formed by recessing the end of the main body 30 in a substantially rectangular shape. At both ends in the longitudinal direction of the recess 33 (upper right and lower left ends in FIG. 9), openings 34 in which a front end fitting portion 56 of a locking member 42 described later appears and disappears are provided. The opening 34 is provided at a position aligned with the second fitted portion 24 of the lid receiving portion 21 in a state where the main body 30 is fitted to the lid receiving portion 21. A rotation support shaft 36, a stopper 37, a locking claw 38, a proximal lower cam 39, and a distal cam 40 are provided at the bottom of the recess 33, respectively. A cover plate is detachably attached to the recess 33. The cover plate is removed when cleaning the simple attachment / detachment mechanism 32 provided in the recess 33.

  The rotation support shaft 36 is a member for rotatably supporting a feeding member 44 described later. The rotation support shaft 36 is provided so as to protrude in a cylindrical shape from the bottom. The rotation support shaft 36 is fitted into the rotating cylinder portion 63 of the feeding member 44 to support the feeding member 44 rotatably. The stopper 37 is a member for supporting the feeding member 44 in a state of being rotated by a predetermined angle. The stopper 37 is composed of a plate-like member raised from the bottom at two places around the rotation support shaft 36. The plate-shaped member is curved to form a receiving portion 37A. By fitting the projection 65A of the engaging piece 65 of the feeding member 44 into the receiving portion 37A, the feeding member 44 is supported at a predetermined angle.

  The locking claw 38 is a member for fixing a later-described cover presser 47 to the bottom of the recess 33. Since the cover presser 47 is attached to both sides of the concave portion 33 in the longitudinal direction, six locking claws 38 are attached to the both sides of the concave portion 33 in the longitudinal direction accordingly. The locking claw 38 is formed of an L-shaped member, and the lower support plate piece 88 of the cover presser 47 is fitted therein.

  The proximal lower cam 39 and the distal cam 40 are members constituting a cam mechanism 45 described later. Further, the base end lower cam 39 and a base end upper cam 53 described later constitute a base end cam that pushes down the base end side of the locking member 42 when the locking member 42 is extended.

  As shown in FIGS. 1 and 9, the base end lower cam 39 is a member for pushing (pushing down) the base end side to the other (downward in FIG. 1) as the locking member 42 is extended. . The base end lower cams 39 are provided on both sides of the rotation support shaft 36, respectively. The base end lower cam 39 is formed with a slope 39 </ b> A that is formed in a substantially triangular shape in a side sectional shape and moves up and down the base end side of the locking member 42. In order to reduce the frictional resistance with the base end side sliding contact surface 52 of the locking member 42, the inclined surface 39A is finished with a rough surface as described above.

  The distal end cam 40 is a member for pushing (raising) the distal end fitting portion 56 to one side (upward in FIG. 1) as the locking member 42 is extended. The distal cam 40 is provided at both ends in the longitudinal direction of the recess 33 so as to face the opening 34. The distal-side cam 40 is configured to include a slope 40 </ b> A that has a side cross-sectional shape formed in a triangular shape and lifts the distal end side of the locking member 42 upward. The inclined surface 40A is finished with a rough surface in the same manner as described above in order to reduce the frictional resistance with the tip side sliding contact surface 55A of the fulcrum portion 55 of the locking member 42. A fitting recess 40B is provided at the upper end of the inclined surface 40A. The fitting recess 40B is a portion into which the fulcrum 55 of the locking member 42 is fitted.

  A simple attachment / detachment mechanism 32 is provided in the recess 33. The simple attachment / detachment mechanism 32 is a device that allows the second lid 15 to be easily attached to and detached from the container body 12. As shown in FIG. 1, the simple attachment / detachment mechanism 32 includes a locking member 42, a guide member 43, a feeding member 44, a cam mechanism 45, a holding cover 46, and a cover presser 47.

  The locking member 42 extends from the opening 34 of the main body 30 in a state in which the second lid 15 is mounted on the lid receiving portion 21 of the container main body 12, and the second fitting of the lid receiving portion 21 is performed. It is a member for fitting to the portion 24. As shown in FIGS. 1 and 11 to 13, the locking member 42 includes a connecting shaft 51, a base end side sliding contact surface 52, a base end upper cam 53, an upper groove portion 54, and a fulcrum portion 55. The distal end fitting portion 56, the proximal end side plate portion 57, and the distal end side plate portion 58 are configured.

  The connecting shaft 51 is a member that fits into a long hole portion 64 of the feeding member 44 described later and connects the feeding member 44 and the locking member 42 to each other. The connecting shaft 51 is formed in a round bar shape, and is provided on the base end portion of the locking member 42 toward the upper side.

  The base end side sliding contact surface 52 is a portion for sliding up and down the base end portion of the locking member 42 in sliding contact with the inclined surface 39A of the base end lower cam 39. The base end side sliding contact surface 52 is formed by obliquely shaving the lower side of the base end portion of the locking member 42. In order to reduce the frictional resistance with the inclined surface 39A of the base end lower cam 39, the base end side sliding contact surface 52 is finished with a rough surface as described above. In a state where the base end side sliding contact surface 52 is in sliding contact with the inclined surface 39A of the base end lower cam 39, the locking member 42 is extended, whereby the base end portion of the locking member 42 is pushed downward, When the stop member 42 is pulled, the base end portion of the locking member 42 is pushed upward.

  The base end upper cam 53 is a part for moving the base end portion of the locking member 42 up and down together with the base end lower cam 39. The proximal upper cam 53 is a portion that becomes a power point on the lever principle. Note that the connecting shaft 51 is not a force point of the lever principle, but is a portion that receives a force in the longitudinal direction when the locking member 42 is simply moved in and out.

  The proximal upper cam 53 is provided in the vicinity of the proximal end portion of the locking member 42 so as to face upward. The base end upper cam 53 has a side surface cross-sectional shape formed in a triangular shape, and includes a slope 53A that moves the base end side of the locking member 42 up and down. The slope 53A of the base end upper cam 53 is finished with a roughened surface, like the slope 39A of the base end lower cam 39, and is in sliding contact with a cam presser protrusion 69 on the holding cover 46 described later. . Similarly, the projection 69 is finished with a rough surface. The slope 53A of the base end upper cam 53 is set to be substantially parallel to the slope 39A of the base end lower cam 39. Accordingly, when the locking member 42 is extended in a state where the cam presser protrusion 69 and the inclined surface 53A of the base end upper cam 53 are in sliding contact with each other, the base end upper cam 53 is pressed by the cam presser protrusion 69 and the locking member 42. The base end part of this is pushed downward. Further, when the locking member 42 is pulled, the base side sliding contact surface 52 is pushed by the inclined surface 39A of the base end lower cam 39 so that the base end portion of the locking member 42 is pushed upward. .

  The fulcrum portion 55 is a portion that supports the distal end portion of the locking member 42 and serves as a rotation center. The fulcrum portion 55 is a portion that becomes a fulcrum in the lever principle. The fulcrum portion 55 is formed on the lower side in the vicinity of the front end of the locking member 42 so as to be squared at a substantially right angle. A tip side sliding contact surface 55 </ b> A is formed at the apex portion of the angular fulcrum portion 55. The front end side sliding contact surface 55A is a part for sliding up and down the front end fitting portion 56 of the locking member 42 in sliding contact with the inclined surface 40A of the front end side cam 40. The tip side sliding contact surface 55A is formed by obliquely shaving the apex portion of the fulcrum portion 55. In order to reduce the frictional resistance with the inclined surface 40A of the tip side cam 40, the tip side sliding contact surface 55A is finished with a rough surface as described above. In a state where the tip side sliding contact surface 55A is in sliding contact with the inclined surface 40A of the tip side cam 40, the locking member 42 is extended, whereby the tip fitting portion 56 of the locking member 42 is pushed down and locked. By pulling the member 42, the tip end portion of the locking member 42 is pushed downward.

  Further, the fulcrum portion 55 is configured to rotate around the fitting recess 40B by being fitted into the fitting recess 40B of the distal cam 40.

  The front end fitting portion 56 is a portion that extends to the outside from the opening 34 of the concave portion 33 and is directly fitted to the second fitted portion 24 of the lid receiving portion 21. The tip fitting portion 56 is an action point of the lever principle. The front end fitting portion 56 is provided at a slight distance from the fulcrum portion 55 so that a sufficient force can be exerted in a state where it is fitted to the second fitted portion 24 of the lid receiving portion 21.

  The proximal end side plate portion 57 and the distal end side plate portion 58 are members for supporting the locking member 42 and allowing reciprocation. The proximal end side plate portion 57 and the distal end side plate portion 58 are finished with rough surfaces as described above. Further, all of the sliding contact surfaces of the portion that slides by the inserting and removing operation of the locking member 42 such as the connecting shaft 51, the rotation supporting shaft 36, the rotating cylinder portion 63, the elongated hole portion 64 of the feeding member 44, The surface is roughened and finished.

  The guide member 43 is a member for attaching to the second fitted portion 24 and guiding the locking member 42 into the second fitted portion 24 in a state where the main body portion 30 is lightly fitted to the container body 12 side. It is. The guide member 43 is provided at the distal end portion of the distal end fitting portion 56 of the locking member 42. The guide member 43 includes a mounting portion 43A and a guide portion 43B.

  The attachment portion 43 </ b> A is a member for first attaching to the second fitted portion 24. That is, the attachment portion 43A is formed when the locking member 42 is extended toward the second fitted portion 24 in a state where the main body portion 30 is lightly fitted to the lid receiving portion 21 of the container main body 12. 2 A member that first attaches to the fitted portion 24. The attachment portion 43A is configured such that the main body 30 is lightly fitted into the lid body receiving portion 21 of the container main body 12 and the gasket 22 is lightly in contact with the seal groove 21C so that the locking member 42 is not pushed in with force. 2 When it is extended toward the fitted portion 24, it is attached to the second fitted portion 24. 43 A of this attaching part is comprised by the protrusion provided in the position biased inside the container main body 12 among the front-end | tip parts of the locking member 42 (position biased to the lower side in FIG. 1).

  The guide part 43 </ b> B is a member for guiding the locking member 42 to the second fitted part 24. The guide portion 43B is configured by an inclined surface that connects the attachment portion 43A and the tip fitting portion 56 of the locking member 42. After the guide portion 43B is attached to the second fitted portion 24 by the attaching portion 43A, the inclined portion slides into the edge of the second fitted portion 24 along with the extension of the locking member 42 and is pushed inside. Accordingly, the locking member 42 is guided to the second fitted portion 24. As described above, the inclined surface constituting the guide portion 43B is finished by roughening the surface.

  The feeding member 44 is a member that is connected to the locking member 42 and moves the locking member 42 in and out. The feeding member 44 is rotatably attached to the rotation support shaft 36 of the recess 33. As shown in FIGS. 1, 9, and 14 to 17, the feeding member 44 includes a top plate portion 61, a key groove 62, a rotating cylinder portion 63, a long hole portion 64, and an engagement piece 65. Yes.

  The top plate portion 61 is formed in a substantially disc shape. Cutouts 66 for providing engagement pieces 65 are provided at two opposing positions of the top plate portion 61.

  The key groove 62 is a groove for fitting a latch key of the device when the second lid 15 is automatically attached / detached by a lid attaching / detaching device (not shown). The key groove 62 is provided at the center of the upper side surface of the top plate portion 61.

  The rotating cylinder portion 63 is a member for rotatably attaching the feeding member 44 to the rotation support shaft 36 of the recess 33. The rotating cylinder portion 63 is provided at the center of the lower surface of the top plate portion 61. A key groove 62 is positioned at the center of the rotating cylinder portion 63.

  The long hole portion 64 is a portion for converting the rotation of the feeding member 44 into the protruding and retracting operation of the locking member 42. The long hole portions 64 are provided at two opposing positions of the top plate portion 61, respectively. The elongated hole portion 64 is formed of a part of a spiral so that one end portion 64A is close to the center of the top plate portion 61 and the other end portion 64B is far away. When the connecting shaft 51 of the locking member 42 is fitted at the one end portion 64A of the elongated hole portion 64, the locking member 42 is retracted, and when the coupling shaft 51 is fitted at the other end portion 64B, the locking member 42 is extended.

  A gently inclined wall surface 64 </ b> C is provided on the lower surface of the top plate portion 61 of the long hole portion 64. The wall surface 64 </ b> C is set to have the same height as the lower side surface of the top plate portion 61 at one end portion 64 </ b> A of the long hole portion 64 and gradually increase toward the other end portion. This is for reliably connecting the locking member 42 and the feeding member 44. That is, in the state where the connecting shaft 51 of the locking member 42 is fitted and fed out at the other end portion 64B of the elongated hole portion 64, the base end portion of the locking member 42 is pushed down. This is because the connecting shaft 51 can be reliably fitted into the long hole portion 64 even when the base end portion is pushed down.

  The engagement piece 65 is a member for supporting the feeding member 44 in a state where it is rotated by a predetermined angle. The engaging pieces 65 are provided at two opposing positions on the periphery of the top plate portion 61, respectively. The engagement piece 65 is configured by a plate-like member extending from the top plate portion 61 along the periphery. The tip of the engagement piece 65 is provided with a protrusion 65A that fits into the receiving portion 37A of the stopper 37. Furthermore, the engagement piece 65 has elasticity and elastically supports the protrusion 65A. When the protrusion 65A is fitted into the receiving portion 37A of the stopper 37, the feeding member 44 is rotated by a predetermined angle (an angle at which the locking member 42 is extended and the second lid 15 is fixed to the container body 12). It has come to be supported.

  The cam mechanism 45 has a second fitted portion in a state where the tip fitting portion 56 of the locking member 42 fed by the feeding member 44 is fitted to the second fitted portion 24 of the lid receiving portion 21. It is a member that abuts on the upper surface of the part 24 and pushes the second lid 15 down to the container body 12 side to fix it. By this cam mechanism 45, the distal end fitting portion 56 of the locking member 42 fed by the feeding member 44 is pushed up and brought into contact with the upper surface of the second fitted portion 24, and the base end portion is pushed down to this principle. Thus, the second lid body 15 is pushed down to the container body 12 side and fixed. The cam mechanism 45 includes a proximal lower cam 39, a proximal upper cam 53, a proximal sliding surface 52, a cam presser protrusion 69, a distal cam 40, and a distal sliding surface 55A. Has been. The proximal lower cam 39, the proximal upper cam 53, the proximal sliding surface 52, the distal cam 40, and the distal sliding surface 55A are as described above.

  The cam retainer protrusion 69 is a member that abuts the inclined surface 53 </ b> A of the proximal upper cam 53 and pushes down the proximal end portion of the locking member 42 as the locking member 42 is extended. The cam presser protrusion 69 is provided on the lower surface of the holding cover 46. Specifically, in a state where the base end side sliding contact surface 52 of the locking member 42 is in sliding contact with the slope 39 of the base end lower cam 39, the cam presser protrusion 69 and the slope 53 </ b> A of the base end upper cam 53 have a gap. It is provided at a position where it does not slide.

  The holding cover 46 is a member for holding the locking member 42 and the feeding member 44. As shown in FIGS. 18 and 19, the holding cover 46 includes a feeding member holding portion 71 and a locking member holding portion 72.

  The feeding member holding portion 71 is a member for supporting the feeding member 44 in a state where the rotation of the feeding member 44 is allowed. The feeding member holding portion 71 is composed of a peripheral plate 74 and a top plate 75. The peripheral plate 74 is formed so as to cover the peripheral edge of the feeding member 44. The top plate 75 is formed so as to cover the upper side of the feeding member 44. A key hole 76 having the same size as the key groove 62 of the feeding member 44 is provided at the center of the top plate 75. The key hole 76 is aligned with the key groove 62 of the feeding member 44 with the top plate 75 covering the feeding member 44. As a result, the key groove 62 and the key hole 76 are aligned in a state where the locking member 42 is retracted.

  The locking member holding part 72 is a member for supporting the locking member 42 in a state in which the reciprocating motion is allowed. The locking member holding portion 72 is provided on each of the left and right sides of the feeding member holding portion 71. Each locking member holding portion 72 includes a side plate 78 and a top plate 79.

  The side plate 78 is a member for supporting the vicinity of the proximal end of the locking member 42 from the left and right. The side plate 78 includes a wide portion 78A and a narrow portion 78B. The wide portion 78A is a portion into which the base end side plate portion 57 of the locking member 42 is fitted. The narrow width portion 78 </ b> B is a portion into which the gap between the proximal end side plate portion 57 and the distal end side plate portion 58 of the locking member 42 is fitted.

  The top plate 79 is a member for supporting the locking member 42 from above. The above-described cam presser protrusion 69 is provided on the base end portion of the lower surface of the top plate. A support protrusion 80 that fits into the upper groove 54 of the locking member 42 is provided at the tip of the lower surface of the top plate 79. A slit 81 is provided on the tip side of the top plate, and a raised portion 82 is provided at the tip of the slit 81. The raised portion 82 includes a central raised piece 82 </ b> A and left and right locking pieces 82 </ b> B, and is elastically supported by a slit 81. The central raised piece 82A and the left and right locking pieces 82B of the raised portion 82 are fitted to the cross-shaped notch 86A of the cover presser 47 so that the holding cover 46 and the cover presser 47 are positioned. It has become.

  The cover presser 47 is a member for fixing the holding cover 46 to the recess 33 of the second lid 15 as shown in FIGS. Specifically, the two cover pressers 47 support the respective locking member holding portions 72 and fix the holding cover 46 to the concave portion 33. The cover presser 47 includes a side plate 85, a top plate 86, an upper support plate piece 87, and a lower support plate piece 88.

  Each side plate 85 covers the left and right sides of the locking member 42 and allows the locking member 42 to reciprocate. The top plate 86 integrally supports the side plates 85 and covers the upper side of the locking member 42 to allow the locking member 42 to reciprocate. The upper support plate piece 87 is a member for supporting the top plate 79 of the locking member holding portion 72 of the holding cover 46 from below. The top plate 79 of the locking member holding portion 72 is supported from above and below by the top plate 86 of the cover presser 47 and the upper support plate piece 87. The lower support plate piece 88 is a part for fixing the cover presser 47 to the recess 33. Three lower support plate pieces 88 are provided at the lower end of each side plate 85. Each lower support plate piece 88 is engaged with the locking claw 38 provided in the recess 33, thereby fixing the cover presser 47 to the recess 33. Each lower support plate 88 is provided with a taper 88 </ b> A so as to be easily fitted into the locking claw 38.

  As shown in FIGS. 22 to 26, a wafer presser 89 as a thin plate presser is provided on the lower surface of the first cover body 14 and the second cover body 15. The wafer retainer 89 is a member for supporting a plurality of semiconductor wafers 49 accommodated in the container main body 12 from above. The wafer presser 89 includes a base end support portion 90, an elastic support plate portion 91, a contact piece 92, a connection support plate portion 93, and a support rib 94.

  The base end support portions 90 are members that are respectively provided at both ends of the wafer retainer 89 and directly support the two elastic support plate portions 91. The base end support portion 90 is formed in a square bar shape and is formed over the entire length of the wafer presser 89 in the longitudinal direction (vertical direction in FIG. 23). Two hook-shaped support portions 96 are provided on the lower surface of the lid 15. The proximal end support portions 90 are fitted into the respective hook-shaped support portions 96 and are fixed to the back side of the lid.

  The elastic support plate portion 91 is a member for elastically supporting the outer end of the contact piece 92. The two elastic support plate portions 91 are provided side by side by the number of semiconductor wafers 49 accommodated in the container body 12. Each elastic support plate portion 91 is fixed to the base end support portion 90 in a state of being arranged in a horizontal row. The elastic support plate portion 91 is configured by bending the side surface shape into an S shape. The two elastic support plate portions 91 have their base end portions fixed to the two base end support portions 90, respectively, and contact pieces 92 are respectively attached to the front end portions to elastically support the contact pieces 92. ing.

  The contact piece 92 is a member for directly supporting the semiconductor wafer 49 by directly contacting the peripheral edge of each semiconductor wafer 49. As shown in FIG. 26, a V-shaped groove 98 into which the semiconductor wafer 49 is fitted is provided on one side surface of each contact piece 92. The V-shaped groove 98 supports the semiconductor wafer 49 from the lid 15 side by fitting the peripheral edge of the semiconductor wafer 49 to the groove bottom. In the V-shaped groove 98, the lower side surface 98A, which is the surface located on the lower side, is enlarged in a state where the semiconductor wafers 49 are arranged horizontally (the container body 12 is placed sideways). Yes. Specifically, the area is increased by reducing the inclination angle. Thereby, the lower end portion of the lower side surface 98A is formed to extend downward. As a result, the lower end portion of the lower side surface 98A is set to be positioned below the semiconductor wafer 49 that is shifted downward. Note that the state in which the semiconductor wafer 49 is displaced downward means that each semiconductor wafer 49 is placed on the placement plate piece 25 </ b> A with the container body 12 lying sideways and out of the V-shaped groove 25 </ b> C of the thin plate support portion 13. State (state of the semiconductor wafer 49A in FIG. 26). Further, the lower side surface 98A is finished by roughening the surface thereof in the same manner as the surface of the V-shaped groove 25C. Although the area of the lower side surface 98A is increased here, the V-shaped groove 98 may be shifted downward.

  The connection support plate portion 93 is a member for connecting and supporting the two contact pieces 92 with each other. Both end portions of the connecting support plate portion 93 are connected to the contact pieces 92 to elastically support the contact pieces 92. The connecting support plate portion 93 is formed by bending the side surface shape into a substantially U shape. Specifically, it is composed of vertical plate portions 93A and 93B on both sides and a horizontal plate portion 93C. The vertical plate portions 93 </ b> A and 93 </ b> B are arranged in a direction perpendicular to the back surface of the lid body 15, and support each contact piece 92 without being bent.

  The horizontal plate portion 93C is elastically bent. The function of the connecting support plate portion 93 to elastically support each contact piece 92 is mainly performed by the horizontal plate portion 93C. The horizontal plate portion 93 </ b> C is arranged in a direction along the back surface of the lid body 15 with the vertical plate portions 93 </ b> A and 93 </ b> B connected to both ends thereof. The horizontal plate portion 93 </ b> C is supported at the center by a supporting ridge 100 described later, and both ends are bent around the supporting ridge 100.

  The support rib 94 is a support member for supporting the connection support plate portion 93 and preventing it from shifting in the direction along the back surface of the lid. The support rib 94 is provided at the center of the back surface of the lid 15. The support ribs 94 are provided so as to cover all of the connection support plate portions 93 of the wafer pressers 89 arranged in large numbers. Specifically, the length is set such that all of the connecting support plate portions 93 arranged side by side as many as the number of semiconductor wafers 49 to be accommodated can be fitted. The support rib 94 is composed of two support wall portions 101 and 102.

  The support wall portions 101 and 102 are provided in parallel to face each other. Each of the support wall portions 101 and 102 includes a support plate piece 103 and a partition plate piece 104.

  The support plate piece 103 is a member for supporting the vertical plate portions 93 </ b> A and 93 </ b> B of the connection support plate portion 93 so as not to be displaced in the circumferential direction of the semiconductor wafer 49 (left and right direction in FIG. 18). The support plate piece 103 directly supports the vertical plate portions 93 </ b> A and 93 </ b> B of the connection support plate portion 93, thereby indirectly supporting the contact pieces 92 so as not to be displaced in the circumferential direction of the semiconductor wafer 49. doing.

  The partition plate piece 104 is a plate piece for partitioning a large number of the connection support plate portions 93 that are arranged individually. Each partition plate piece 104 is provided so as to be positioned between the outermost side and each connection support plate portion 93. Thereby, each partition plate piece 104 is supporting each connection support plate part 93 from the width direction both sides. Thus, each partition plate piece 104 directly supports the connection support plate portion 93 so that the contact pieces 92 are not indirectly shifted in a direction perpendicular to the circumferential direction of the semiconductor wafer 49. I support it.

  The support plate piece 103 and the partition plate piece 104 are individually supported by sandwiching the connection support plate portion 93 from the periphery (a direction perpendicular to the circumferential direction of the semiconductor wafer 49 housed in the container body 12). The displacement of the connecting support plate portion 93 in the direction along the back surface of the lid body is prevented, and variation in the direction perpendicular to the back surface of the lid body is allowed.

  A small gap is set between the support plate piece 103 and the partition plate piece 104 and the connecting support plate portion 93 so that they do not come into contact with each other when the vibration is small. That is, when the semiconductor wafer 49 is slightly vibrated, the connecting support plate portion 93 is bent without absorbing the support plate piece 103 and the partition plate piece 104 and absorbs vibration. When the vibration becomes intense, the connection support plate portion 93 also vibrates vigorously through the contact pieces 92, so that the connection support plate portion 93 is supported by being in contact with the support plate piece 103 and the partition plate piece 104. It has become.

  Between the two support wall portions 101, 102 of the support rib 94, a support protrusion 100 is provided. The supporting ridge 100 is a member for directly abutting and supporting each connecting support plate portion 93. Specifically, the central portion of the horizontal plate portion 93C of each connection support plate portion 93 is supported by being in contact with the supporting protrusion 100, and both end portions of the horizontal plate portion 93C can be flexed freely. ing. The supporting ridge 100 is provided at a central portion between two supporting wall portions 101 and 102 provided in parallel to face each other, in parallel with the supporting wall portions 101 and 102 and to have substantially the same length. .

  The thin plate support container 11 configured as described above is used as follows.

  When removing the second lid 15 from the container body 12, the latch key is fitted in the key groove 62 and rotated. Thereby, from the state of FIG. 27A, the feeding member 44 rotates and the locking member 42 is gradually pulled. As a result, the tip side sliding contact surface 55A of the fulcrum portion 55 of the locking member 42 comes into sliding contact with the inclined surface 40A of the tip side cam 40, and the tip fitting portion as shown in FIGS. 24 (B), (C) and (D). 56 is pushed downward. At the same time, the base end side sliding contact surface 52 of the locking member 42 is in sliding contact with the inclined surface 39A of the base end lower cam 39, and the base end portion of the locking member 42 is pushed up. Thereby, the front end fitting portion 56 is completely accommodated in the main body portion 30. Then, the second lid 15 is removed from the container body 12.

  When attaching the second lid 15 to the container body 12, the second lid 15 having the latch key fitted in the key groove 62 is lightly fitted to the lid body receiving portion 21, and the latch key is not pushed. Rotate. Thereby, contrary to the above case, the locking member 42 is pushed out from the main body 30.

  By pushing out the locking member 42, the guide member 43 at the distal end of the locking member 42 is first attached to the second fitted portion 24. Specifically, the attachment portion 43 </ b> A of the guide member 43 enters the second fitted portion 24. Since the attachment portion 43A is eccentrically provided on the inner side of the container body 12 at the distal end portion of the locking member 42, the second fitted portion is inserted before the distal end portion of the locking member 42 is pushed up by the cam mechanism 45. It can enter the part 24. At this time, each semiconductor wafer 49 in the container main body 12 is fitted in each V-shaped groove 98 of the contact piece 92 of the wafer retainer 89. The peripheral edge of each semiconductor wafer 49 is smoothly and surely guided and fitted to the bottom of the groove along the lower side surface 98A of the V-shaped groove 98 which is enlarged and roughened. The rotational torque of the latch key can be small.

  When the locking member 42 is further pushed out from the main body 30 in this state, the fulcrum portion 55 of the locking member 42 is slidably brought into contact with the inclined surface 40A of the distal end side cam 40 and the distal end fitting portion 56 is pushed upward. Further, the cam pressing projection 69 comes into contact with the inclined surface 53 </ b> A of the base end upper cam 53 to push down the base end portion of the locking member 42. Thereby, the base end side sliding contact surface 52 of the locking member 42 is pushed down along the inclined surface 39 </ b> A of the base end lower cam 39. At the same time, the guide portion 43B of the guide member 43 enters the second fitted portion 24 while slidingly contacting the edge of the second fitted portion 24, and guides the locking member 42 to the second fitted portion 24. To do. As a result, the distal end portion of the locking member 42 enters the second fitted portion 24 while being pushed up by the cam mechanism 45.

  At the fulcrum portion 55 of the locking member 42, the distal-side slidable contact surface 55A is fitted into the fitting recess 40B, and the locking member 42 rotates around the fitting recess 40B.

  At the base end portion of the locking member 42, the base end side sliding contact surface 52 is in sliding contact with the inclined surface 39 </ b> A of the base end lower cam 39, and the cam presser protrusion 69 is in contact with the inclined surface 53 </ b> A of the base end upper cam 53. The base end portion of the locking member 42 is pushed down.

  Accordingly, the locking member 42 functions by using the fulcrum portion 55 fitted in the fitting recess 40B as a fulcrum, and the tip fitting portion 56 is fitted into the second fitted portion 24 of the lid receiving portion 21. In the combined state, the second lid 15 is firmly pushed down to the container body 12 side and fixed.

  At this time, the semiconductor wafer 49 is pushed into the thin plate support portion 13 side of the container body 12 by the wafer retainer 89, but the V-shaped groove 25 </ b> C of the thin plate support portion 13 roughens the surface thereof, so that the peripheral portion of the semiconductor wafer 49 is Fits smoothly into the groove bottom along the inclined surface of the V-shaped groove 25C. Other sliding contact portions can also be smoothly slipped with rough surfaces, and the rotational torque of the latch key can be reduced.

  Such a method of attaching the second lid 15 is effective both when the container body 12 is placed vertically and horizontally. When the container main body 12 is laid sideways to put in and out the semiconductor wafer 49, the container main body 12 is merely mounted on the mounting table and is not fixed, and thus it has been difficult to automate the attachment and detachment of the lid 15 until now. However, as described above, since the lid body 15 can be attached with almost no pressing of the horizontal container body 12, it is possible to automate the detachment work of the lid body 15 using an existing attachment / detachment device. Become.

[Second Embodiment]
Next, a second embodiment of the present invention will be described. In addition, since the whole structure of the cover for thin plate support containers of this embodiment is substantially the same as the cover for thin plate support containers of 1st Embodiment mentioned above, the same code | symbol is attached | subjected to the same part and the description is given. Omitted, only the features of the present invention will be described.

  In the feeding member 44 of the first embodiment, the elongated hole portion 64 is formed in a spiral shape. In this case, the force for fixing the lid 15 to the container body 12 side and the feeding member 44 itself are fixed. The force may overlap, and the rotation of the feeding member 44 may become heavy. Also in this case, there is no particular problem as long as the rotation of the feeding member 44 does not become abnormally heavy due to the relationship with surrounding members. However, in some cases, the rotation of the feeding member 44 may become abnormally heavy. Therefore, the elongated hole portion 64 of the feeding member 44 is improved so that the force for fixing the lid 15 to the container body 12 side and the force for fixing the feeding member 44 itself do not overlap.

  Specifically, as shown in FIG. 29, the shape of the long hole portion 64 was improved. In the first embodiment, the elongated hole portion 64 is formed in a simple spiral shape. However, in this embodiment, the locking member 42 is moved to the second fitted portion 24 of the container body 12 by rotating the feeding member 44. A rotation region A for locking and fixing the lid 15 to the container body 12 side, and a further rotation of the feeding member 44 with the lid body 15 fixed to the container body 12 side to fix the feeding member 44 itself. The rotation area B is divided so that the force for fixing the lid 15 to the container body 12 side and the force for fixing the feeding member 44 itself do not overlap.

  The rotation area A occupies most of the rotatable angle of the feeding member 44 (the entire length of the long hole portion 64). That is, it is a region that occupies an angle from one end 64A of the long hole portion 64 to slightly before the other end portion 64B. The rotation area A is formed in a spiral shape. The spiral shape of the rotation area A is set so that the process from the feeding of the locking member 42 to the fixing of the lid 15 to the container body 12 side can be completed within the rotation area A. Specifically, it is set so that the next series of operations is finished in the rotation area A. That is, the locking member 42 locked to the one end portion 64A of the elongated hole portion 64 is fed out as the feeding member 44 rotates, and the mounting portion 43A of the guide member 43 is attached to the second fitted portion 24. The guide portion 43B guides the locking member 42 to the second fitted portion 24 and inserts the tip fitting portion 56 into the second fitted portion 24, and the cam mechanism 45 or the like pushes up the tip fitting portion 56. The lid 15 is fixed to the container body 12 side by abutting against the upper surface of the second fitted portion 24 and pushing down the base end portion, and a series of operations are set to be finished in the rotation region A. Has been. Thereby, in the rotation region A, the force for rotating the feeding member 44 is used to lock the locking member 42 to the second fitted portion 24 and fix the lid 15 to the container body 12 side. Is called.

  The rotation area B is an area that occupies a part of the other end portion 64B side of the rotation angle of the feeding member 44 (the entire length of the long hole portion 64). That is, the rotation region B is a region for fixing the feeding member 44 itself by further rotating the feeding member 44 after the lid 15 is fixed to the container body 12 side. Specifically, this is an area necessary for fitting the protrusion 65 </ b> A of the engagement piece 65 to the receiving portion 37 </ b> A of the stopper 37. The rotation region B is not formed in a spiral shape, but is formed in a circular shape centered on the rotation center of the feeding member 44, and the locking member 42 is not fed out. Since the fixing of the lid 15 to the container main body 12 side is completed in the rotation region A and the locking member 42 does not need to be paid out, the locking member 42 is not drawn here, and the feeding member 44 itself is not drawn. Only fixing is performed. That is, all of the force for rotating the feeding member 44 is used to fix the feeding member 44 itself by fitting the projection 65A of the engagement piece 65 to the receiving portion 37A of the stopper 37.

  As described above, the force for rotating the feeding member 44 to attach the lid 15 to the container body 12 side causes the locking member 42 to be locked to the second fitted portion 24 in the rotation region A. Used to fix the lid 15 to the container body 12 side. In the rotation region B, the protrusion 65A of the engaging piece 65 is fitted to the receiving portion 37A of the stopper 37 to fix the feeding member 44 itself. Used for. Thereby, the force which fixes the cover body 15 to the container main body 12 side and the force which fixes the feeding member 44 itself are divided into the rotation areas A and B and do not overlap.

  As a result, the force for rotating the feeding member 44 does not become extremely heavy, and the mounting workability of the lid 15 is improved.

  Further, when the lid 15 is removed, the force for pulling the locking member 42 from the second fitted portion 24 and the force for removing the projection 65A of the engagement piece 65 from the receiving portion 37A of the stopper 37 are rotated. Since it is divided into areas A and B and does not overlap, the removal workability of the lid 15 is improved.

  A gap 101 is provided between the keyway 62 of the feeding member 44 and the holding cover 46 as shown in FIGS. The thickness T of the holding cover 46 in the vicinity of the key groove 62 is reduced to increase the width of the gap 101. The gap 101 is a gap for preventing contact of the latch key 100 fitted in the key groove 62. That is, as shown in FIG. 33, when the holding cover 105 is thick and does not have a large gap, such as between the key groove 104 of the feeding member 103 and the holding cover 105, the latch key 100 does not completely fit into the key groove 104. When the latch key 100 is rotated in this state, the latch key 100 comes into contact with the holding cover 105, and the holding cover 105 is damaged or dust or the like is generated. As described in the first embodiment, the lid 15 is attached to the container main body 12 in a state where the main body 30 of the lid 15 is lightly fitted to the container main body 12 side by the mounting portion 43A and the guide portion 43B of the guide member 43. As shown in FIG. 32, a gap C is formed between the load port side door 106 and the lid 15. For this reason, as shown in FIG. 33, the latch key 100 may not be completely fitted in the key groove 104, which may cause damage to the holding cover 105. That is, when the lid 15 is attached to the container main body 12 side, the latch key 100 is rotated in a state of being fitted in the key groove 104, and the lid 15 is pulled toward the container main body 12 by the simple attachment / detachment mechanism 32. At this time, the latch key 100 and the inner surface of the holding cover 105 may come into contact with each other and may be damaged. Further, when removing the lid 15 from the container body 12, the latch key 100 is fitted into the key groove 104 and rotated. At this time, if the latch key 100 is not completely fitted in the key groove 104, the latch key 100 is turned on. May come into contact with the holding cover 105 and cause damage or the like.

  In order to prevent this, a gap 101 is provided between the key groove 62 of the feeding member 44 and the holding cover 46. Accordingly, when the latch key 100 is fitted in the key groove 62 and rotated, the feeding member 44 rotates together with the latch key 100. At this time, the latch key 100 is separated by the gap 101 between the key groove 62 and the holding cover 46. Can be prevented from contacting the holding cover 46. Thereby, breakage of the holding cover and generation of dust and the like can be prevented.

  In the lid for a thin plate support container having the above configuration, the overall operation is the same as that of the lid for the thin plate support container of the first embodiment, but the method of attaching the lid 15 is performed as follows. .

  As shown in FIGS. 34 and 35, the load port side door 106 is provided with a suction pad 107 together with the latch key 100. The suction pad 107 is sucked and supported by the lid 15 when the lid 15 is attached or detached.

  First, the lid 15 supported by the load port side door 106 by being sucked by the suction pad 107 is lightly fitted to the container body 12 side. Specifically, the main body 30 of the lid 15 is inserted into the container main body 12 until the wafer presser 89 comes into light contact with the semiconductor wafer 49. At this time, as shown in FIG. 34, since the semiconductor wafer 49 is positioned below the V-shaped grooves 25C and 98, there is a gap D between the load port side door 106 (lid 15) and the container body 12. Will occur. By rotating the latch key 100 from this state, the lid body 15 is fixed to the container body 12 by the attachment portion 43A and the guide portion 43B of the guide member 43, but the load port side door 106 supports the lid body 15. As it is, the container body 12 is displaced. That is, when the lid 15 is supported by the load port side door 106, there is a gap D between the load port side door 106 (lid 15) and the container body 12. When fixed to the main body 12, the container main body 12 is drawn toward the load port side door 106 by the gap D, and as a result, the container main body 12 is deformed as shown by the dotted line in FIG. 34. . If the suction with the suction pad 107 is released in a state where the container main body 12 is deformed in this way, the container main body 12 suddenly returns to the original state, and vibration may be generated and dust or the like may be generated.

  For this reason, in this embodiment, the suction by the suction pad 107 is released early. Specifically, the feeding member 44 is rotated in a state in which the main body 30 of the lid 15 is lightly fitted to the container main body 12, and the attachment portion 43 </ b> A of the guide member 43 is attached to the second fitted portion 24. At this time, the suction by the suction pad 107 was released.

  At this time, a gap D is generated between the load port side door 106 and the lid body 15, and the insertion of the latch key 100 into the key groove 62 becomes shallow. The clearance 101 is eliminated between the keyway 62 and the holding cover 46. That is, as described above, the latch key 100 and the inner surface of the holding cover 105 come into contact with each other when the lid 15 is attached to the container body 12 side, or when the lid 15 is removed from the container body 12, the latch key 100 fits shallowly. In order to eliminate contact with the holding cover 105 together, in this embodiment, the thickness T of the holding cover 46 is reduced to provide the gap 101. Although the insertion of the latch key 100 into the key groove 62 becomes shallow and the latch key 100 may come into contact with the holding cover 46, the clearance 101 eliminates the contact of the latch key 100 with the holding cover 46.

  By this method, when the lid 15 is fixed to the container main body 12, the container main body 12 is prevented from being pulled toward the load port side door 106 and deformed. As a result, it is possible to prevent vibrations generated when the deformed container body 12 returns to the original state, and the generation of dust and the like.

[Modification]
(1) In the first embodiment, the distal end cam 40 and the proximal end cam (53) are provided as the cam mechanism 45 for lifting the locking member 42. However, a mechanism including only the distal end cam 40 may be used. Moreover, a cam mechanism may be used for another structure. For example, as shown in FIG. 28, a cam mechanism having a locking member 112 provided with a protrusion 111 on the lower side of the distal end side and a slide plate 114 provided with a cam 113 may be used. In this case, if the locking member 112 and the slide plate 114 are extended at the same time and the tip of the locking member 112 is inserted into the second fitted portion 24, then the slide plate 114 is further extended, The distal end portion of the stop member 112 is lifted in the second fitted portion 24 to fix the lid body 15 to the container body 12. In addition to this, the present invention can be applied to all cam mechanisms having a structure in which the locking member 42 extends and is locked in the second fitted portion 24.

  Even in this configuration, the same operations and effects as the above-described embodiment can be achieved.

(2) In the first embodiment, the guide portion 43B of the guide member 43 has a linear flat surface, but may be curved. The guide part 43 </ b> B may be a surface having a shape that can enter the inside while being in sliding contact with the edge of the second fitted portion 24, and may be a flat surface, a curved surface, a convex surface, or a concave surface. Also in this case, the same operation and effect as the above-described embodiment can be obtained.

(3) In the first embodiment, sliding contact surfaces (such as the surface of the V-shaped groove 25C) such as the thin plate support portion 13, the simple attachment / detachment mechanism 32, the wafer retainer 89, and the inclined surface (the inclined surface of the guide portion 43B). In order to reduce the frictional resistance of the surface, etc., the surface is roughened and molded, but the material itself for molding the sliding contact surface and the like may be adjusted. A slidable synthetic resin is used as a material for reducing the frictional resistance. As the slidable synthetic resin for molding the sliding contact surface or the like, the slidable synthetic resin may be used alone, or a sliding agent may be added to the slidable synthetic resin.

  As a single slidable synthetic resin, a fluoride synthetic resin is used. As this fluoride synthetic resin, a material having a small surface friction resistance such as PTFE, PFA or ETFE is used.

  PTFE, PFA, silicon, glass fiber, carbon fiber, graphite, DLC, or molybdenum disulfide is used as a sliding agent (sliding agent for plastic addition) to be added to the sliding synthetic resin. About 10 to 20% of these materials are mixed alone or in combination with engineering plastics such as PBT and POM as a base material. Since the combination and blending ratio of the above-mentioned sliding agents for adding plastics vary depending on the type of engineering plastic, an optimal value is set by experiment etc. according to each engineering plastic.

  Thereby, the frictional resistance at each sliding contact surface becomes small, the attachment of the lid 15 to the container main body 12, the operation of the simple attachment / detachment mechanism 32, etc. become smooth, and the container main body 12 placed sideways is hardly pushed. The lid 15 can be easily attached. As a result, it is possible to automate the attaching / detaching operation of the lid 15 using an existing attaching / detaching device.

It is a principal part perspective view which shows the simple attachment or detachment mechanism of the cover body for thin plate support containers which concerns on 1st Embodiment of this invention. It is a side cross section which shows the cover body for the conventional thin plate support container. It is a perspective view which shows the thin plate support container which concerns on 1st Embodiment of this invention. It is a perspective view which shows the thin plate support container which concerns on 1st Embodiment of this invention in the state which removed the cover body. It is a fragmentary perspective view which shows the cover body receiving part of the thin plate support container which concerns on 1st Embodiment of this invention. It is a fragmentary sectional view of the lid receiving part of the thin plate support container concerning a 1st embodiment of the present invention. It is a front view which shows the thin plate support part which concerns on 1st Embodiment of this invention. It is a side view which shows the thin plate support part which concerns on 1st Embodiment of this invention. It is a top perspective view showing the 2nd lid concerning a 1st embodiment of the present invention. It is a bottom perspective view showing the 2nd lid concerning a 1st embodiment of the present invention. It is a top perspective view showing the locking member concerning a 1st embodiment of the present invention. It is a bottom perspective view showing a locking member concerning a 1st embodiment of the present invention. It is side surface sectional drawing which shows the locking member which concerns on 1st Embodiment of this invention. It is an upper surface perspective view which shows the feeding member which concerns on 1st Embodiment of this invention. It is a bottom perspective view showing a feeding member according to the first embodiment of the present invention. It is a top view which shows the feeding member which concerns on 1st Embodiment of this invention. It is a reverse view which shows the payout member which concerns on 1st Embodiment of this invention. It is a top perspective view showing a holding cover concerning a 1st embodiment of the present invention. It is a bottom perspective view showing a holding cover concerning a 1st embodiment of the present invention. It is a top perspective view showing a cover presser according to the first embodiment of the present invention. It is a top perspective view showing a cover presser according to the first embodiment of the present invention. It is side surface sectional drawing which shows the wafer holder which concerns on 1st Embodiment of this invention. It is a perspective view which shows the wafer holder which concerns on 1st Embodiment of this invention. It is a section perspective view showing the wafer holder concerning a 1st embodiment of the present invention. It is a principal part perspective view which shows the wafer holder which concerns on 1st Embodiment of this invention. It is a principal part enlarged view which shows the thin-plate support part and wafer press which concern on 1st Embodiment of this invention. It is a schematic diagram which shows operation | movement of the simple attachment / detachment mechanism which concerns on 1st Embodiment of this invention. It is a side view which shows the modification of 1st Embodiment of this invention. It is a top view which shows the simple attachment / detachment mechanism which concerns on 2nd Embodiment of this invention. It is side surface sectional drawing of FIG. It is sectional drawing which shows the principal part of the simple attachment / detachment mechanism which concerns on 2nd Embodiment of this invention. It is a schematic diagram which shows the attachment state of the cover body for thin plate support containers which concerns on 2nd Embodiment of this invention. It is sectional drawing which shows the principal part of the conventional simple attachment / detachment mechanism. It is a schematic diagram which shows the attachment state of the cover body for thin plate support containers which concerns on 2nd Embodiment of this invention. It is a schematic diagram which shows the attachment state of the cover body for thin plate support containers which concerns on 2nd Embodiment of this invention.

Explanation of symbols

  11: Thin plate support container, 12: Container body, 12A, 12B, 12C, 12D: Side wall portion, 12E: Bottom plate portion, 12F: Opening, 13: Thin plate support portion, 14: First lid body, 15: Second lid body , 16: top flange, 23: first fitted portion, 24: second fitted portion, 30: body portion, 32: simple attachment / detachment mechanism, 34: opening, 36: rotation support shaft, 37: stopper, 39 : Base end lower cam, 40: distal end cam, 42: locking member, 43: guide member, 43A: mounting portion, 43B: guide portion, 44: feeding member, 45: cam mechanism, 46: holding cover, 47 : Cover presser, 49: semiconductor wafer, 53: base end upper cam, 55: fulcrum part, 55A: tip side sliding contact surface, 56: tip end fitting part, 69: cam presser protrusion, 89: wafer presser, 100: latch key , 101: gap, 103: feeding member, 1 4: key groove, 105: holding cover, 106: load port side door, 107: suction pad.

Claims (16)

A lid for a thin plate support container that closes the container main body of the thin plate support container that is housed and transported therein,
Provided with a simple attaching / detaching mechanism that can be attached to and detached from the container body by fixing and unfixing to the body part constituting the outer shell of the lid for the thin plate supporting container,
The simple attachment / detachment mechanism is provided at a distal end portion of the locking member that extends from the main body portion and engages with a fitted portion of the container main body, and the main body portion is lightly placed on the container main body side. A lid for a thin plate supporting container, comprising: a guide member that is attached to the fitted portion in a fitted state and guides the locking member into the fitted portion. In the lid for thin plate supporting containers according to claim 1,
The guide member is
A mounting part that first attaches to the fitted part when the locking member extends toward the fitted part in a state where the main body part is lightly fitted to the container body side,
And a guide portion that guides the locking member to the fitted portion as the locking member extends after being attached to the fitted portion by the mounting portion. Thin plate support container lid. In the lid for thin plate supporting containers according to claim 2,
The mounting portion is configured to include a protrusion provided at a position biased to the inside of the container body among the distal end portion of the locking member,
The lid for a thin plate supporting container, wherein the guide portion includes an inclined surface that connects the attachment portion and the locking member. In the lid for thin plate supporting containers according to claim 3,
A lid for a thin plate support container, wherein the surface of the inclined surface of the guide portion is roughened. In the lid for thin plate supporting containers according to any one of claims 1 to 4,
A lid for a thin plate supporting container, wherein the sliding contact surface of each sliding portion of the simple attachment / detachment mechanism is roughened. In the lid for thin plate supporting containers according to any one of claims 1 to 5,
A thin plate presser that fits and presses and supports a V-shaped groove on the thin plate stored in the container body;
A lid for a thin plate supporting container, wherein the surface of the inclined surface of the V-shaped groove of the thin plate presser is roughened. In the lid for thin plate supporting containers according to claim 3,
A lid for a thin plate supporting container, wherein at least the surface of the inclined surface of the guide portion is formed of a slidable synthetic resin. In the lid for thin plate supporting containers according to any one of claims 1, 2, 3, and 7,
A lid for a thin plate supporting container, wherein at least a sliding contact surface of each sliding portion of the simple attachment / detachment mechanism is formed of a sliding synthetic resin. In the lid for thin plate supporting containers according to any one of claims 1, 2, 3, 7, and 8,
A thin plate presser that fits and presses and supports a V-shaped groove on the thin plate stored in the container body;
A lid for a thin plate support container, wherein at least the surface of the inclined surface of the V-shaped groove of the thin plate presser is formed of a slidable synthetic resin. The thin plate supporting container lid according to any one of claims 7 to 9,
A lid for a thin plate supporting container, wherein each of the surfaces is formed of the slidable synthetic resin alone or by adding a sliding agent to the slidable synthetic resin. The lid for a thin plate supporting container according to claim 10,
A lid for a thin plate supporting container, wherein the slidable synthetic resin formed by itself is a fluoride synthetic resin. The lid for a thin plate supporting container according to claim 11,
A lid for a thin plate supporting container using PTFE, PFA or ETFE as a fluoride synthetic resin. The lid for a thin plate supporting container according to claim 10,
The lid for a thin plate supporting container, wherein the sliding agent is made of one or more of PTFE, PFA, silicon, glass fiber, carbon fiber, graphite, DLC or molybdenum disulfide. The lid for a thin plate supporting container according to any one of claims 1 to 13,
A feeding member that rotates in a state of being locked with the locking member, extends the locking member from the main body portion, and is locked to the fitted portion of the container main body,
A rotation region in which the locking member is locked to the fitted portion of the container main body by rotating the feeding member to fix the lid to the container main body, and the lid is fixed to the container main body. A lid for a thin plate supporting container, wherein the feeding member is further rotated and the turning region for fixing the feeding member itself is separated while being fixed to the side. In the lid for thin plate supporting containers according to any one of claims 1 to 14,
A feeding member that rotates in a state of being locked with the locking member, extends the locking member from the main body portion, and is locked to the fitted portion of the container main body;
A lid for a thin plate supporting container, wherein a gap is provided between a key groove of the feeding member and a holding cover covering the feeding member to prevent a latch key fitted in the key groove from contacting. A lid mounting method for mounting a lid on a container body of a thin plate support container that is transported with a thin plate stored therein,
The main body part constituting the outer shell of the lid body is provided with a simple attachment / detachment mechanism that can be attached to and detached from the container main body, and the simple attachment / detachment mechanism extends from the main body part to extend from the main body part. A locking member that locks to the fitted portion of the locking member, and the locking member attached to the fitted portion in a state where the main body portion is lightly fitted to the container body side provided at the distal end portion of the locking member. A guide member that guides the member into the fitted portion; and a pivot member that is engaged with the locking member and rotates to extend the locking member from the main body portion. A feeding member for attaching and guiding the locking member into the fitted portion;
The lid body, which is sucked and supported by a suction pad in a state where a latch key is fitted in the key groove of the feeding member, and the feeding member is mounted in a state where the main body portion of the lid body is fitted to the container body side. A method of attaching a lid, wherein when the guide member is rotated and attached to the fitted portion, the suction by the suction pad is released.

Images