JP2001102438A - Precision substrate housing case - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a precision substrate housing case which is capable of properly fitting a positioning pin into a positioning recess without causing wear and damage to them even if they are in such a relation where they are at an upper and a lower tolerance limit respectively and preventing an excess load from being imposed on a latch mechanism when it is in operation. SOLUTION: A precision substrate housing case is composed of a case main body 1 which houses a plurality of precision substrates stacked in layers in a vertical direction, and a lid 17 which is provided to the front of the opening of the case main body 1 in a detachable manner so as to close it in a hermetical sealing manner. A pair of an upper and a lower positioning recess, 27A and 27B, are obliquely provided to the surface of the lid 17 separating from each other by a certain distance, the positioning recess 27A is formed like an ellipse whose major axes extends in line with a diagonal line DL connected between the recesses 27A and 27B. The positioning recess 27A covers both the maximum allowable deviations of the positioning recess and positioning pin which are determined depending on tolerance, and the positioning recess 27A is long enough to introduce the positioning pin into it, so that the positioning pin is properly fitted into the positioning recess 27A even if they are in such a relation where they are at an upper and a lower tolerance limit respectively.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used for storing precision substrates such as semiconductor wafers and mask glass, transporting precision substrates, positioning precision substrates with respect to processing devices, transporting between processing devices, and / or storing. More specifically, the present invention relates to a positioning structure of a lid for opening and closing one end surface of an opening of a container body and a latch mechanism.

[0002]

2. Description of the Related Art Precision substrates, such as semiconductor wafers and mask glass, involved in the manufacture of semiconductors have been increased in diameter (for example, from 300 mm to 40 mm) for the purpose of cost reduction by improving yield due to severe price competition for semiconductor devices.
0 mm) at a rapid pace. At the same time, semiconductor circuits are increasingly miniaturized, and DRAM design rules (minimum processing line width) are also shifting from 0.25 μm to 0.18 μm, or even lower pitches. As for precision substrate storage containers used when transporting precision substrates, increasingly sophisticated clean states are required.

[0003] As a means for realizing such a demand, a local environment (mini environment) required for processing a precision substrate is used.
A method has been proposed in which only a clean substrate is transported between a plurality of clean local environments and a precision substrate storage container that stores precision substrates only between the plurality of clean local environments. In response to this, the development of precision substrate storage containers that can be automatically transported without contaminating the precision substrate and that can directly access the processing apparatus is being actively pursued.

As shown in FIG. 17, this type of precision substrate storage container has a container body 1 for aligning and storing precision substrates.
And a lid 17 that closes the opening front of the container body 1 in a sealed state, and is transported to a local environment by a transport robot. The container body 1 has a separate bottom plate or an integral bottom plate portion (hereinafter, referred to as a bottom plate).
A plurality of V groups, through holes, and the like are appropriately disposed on the bottom plate.

[0005] The lid 17 has a pair of upper and lower round positioning recesses 27 diagonally opposed to each other at an interval, and a sealing gasket is provided on the peripheral surface thereof. Is built-in. Each latch mechanism includes a lid 17
A rotating plate which is rotatably supported by the inside and is rotated by an external operation through a rectangular operation port 26 on the surface of the lid, and has at least a pair of engaging portions, and an engaging portion which engages with the engaging portion of the rotating plate. And a pair of upper and lower power transmission plates, each of which is provided so as to be able to protrude and retract near the plurality of through-holes on the peripheral surface of the lid.
The power transmission plate is exposed from the through hole by the advance of the power transmission plate based on the 0 ° rotation and is locked in the locking hole on the inner periphery of the opening front surface of the container body 1. And a plurality of clamps which retreat into the through-hole by the retreat of the transmission plate and release the locking to the locking holes.

The stop position of the rotating plate configured as described above at the time of locking is determined by the engaging position between the engaging portion of the rotating plate and the engaging portion of the power transmitting plate, which is determined by the center of the rotating plate and the center of the power transmitting plate. It is on a line connecting the lines, that is, at a position corresponding to the 90 ° rotation position of the rotating plate.

In the local environment, a processing device for a precision substrate, a structure for housing the processing device, and a precision substrate storage container provided on one side wall of the structure and conveyed from the external environment are mounted and connected, It consists of an access device that loads and unloads precision substrates between this precision substrate storage container and the processing equipment.It performs highly efficient processing for creating electronic circuit wiring on precision substrates, and is highly clean. Has been The structure has an openable / closable opening for loading / unloading the precision substrate on the front partition wall.

The access device comprises a load port for positioning and mounting a precision substrate storage container and connecting to a processing device, and an opener which opens and closes opposite to the lid 17 of the precision substrate storage container. is set up. The load port includes a mounting unit slidably laid on a step of the structure, and the mounting unit is provided with a plurality of positioning pins and clamp members. The opener includes a cover member for opening and closing the opening of the structure, and an operating device for a latch mechanism is installed on the cover member, and the operating device locks or unlocks the latch mechanism. The cover member holds the lid by suction or the like during processing of the precision substrate, unlocks the latch mechanism, and then descends while retracting to communicate the precision substrate storage container with the inside of the local environment.

In the operating device, an attraction mechanism for adsorbing the surface of the lid 17 is provided on the cover member, and positioning pins (registration pins) which are respectively fitted into the pair of positioning recesses 27 are obliquely implanted. Further, a pair of operation keys 64 are rotatably supported by the cover member, and each operation key 64 is inserted into the rectangular key groove 30 at the center of the rotary plate through the operation port 26 and rotated (FIG. 18).
reference).

Therefore, when processing the precision substrate, first, the transport robot transports and mounts the precision substrate storage container on the mounting unit of the structure, and the V group of the precision substrate storage container is mounted on a plurality of positioning pins. Are respectively aligned, and the clamp member is locked and fixed in the through hole of the bottom plate, and then the mounting unit slides to bring the cover 17 into contact with the cover member in a sealed state. Then, a pair of positioning pins provided in the operation device are fitted into the positioning recesses 27 of the lid 17 respectively, and the operation keys 64 are fitted into the key grooves 30 of the respective rotating plates through the operation opening 26. At the same time, the lid 17 is sucked by the suction mechanism of the operating device.

Then, each operation key 64 is rotated to unlock the latch mechanism, and the clamps are respectively released from the plurality of locking holes of the container body 1 so that the lid 17 can be removed.
The cover member retreats and the lid 17 is removed from the container body 1. Then, the cover member retreats and descends to open the opening, and the front face of the opening of the container body 1 communicates with the processing device. Thereafter, the precision substrate is loaded and taken into the processing device, and the precision substrate is processed. Is done. At this time, the peripheral edge of the front of the opening of the container body 1 is sealed in the sealing region of the cover member, so that particles floating in the external environment do not enter the local environment.

[0012]

The precision substrate storage container and the opener of the access device are constructed as described above, but have the following problems. First, the precision substrate storage container and the opener are both standardized and their dimensions and tolerances are determined. However, even if the dimensions of the positioning recess 27 and the positioning pin of the lid 17 are within the standard, they are mutually standardized. If the dimensions have the upper limit / lower limit of the tolerance, the positioning recess 27 does not fit properly into the positioning pin, resulting in a problem that the positioning pin and the positioning recess 27 are worn or damaged. In addition, when repeatedly used with a plurality of openers of different manufacturers, it is necessary to reduce the clearance between the positioning recess 27 and the positioning pin in order to enhance the positioning accuracy. However, if the clearance is reduced, the positioning recess 27 is formed on the positioning pin. It does not fit properly and causes the above problem.

In view of this point, when the clearance is increased, the positioning pin can be easily fitted, but a new problem that the positioning accuracy between the positioning recess 27 and the positioning pin is lowered is newly caused. In addition, since the positioning pin not only performs positioning but also has a function of appropriately holding the lid 17 when the suction mechanism is stopped or omitted, the lid 17 is re-attached to the container body 1. In order to properly fit, the clearance cannot be easily set large.

If the positioning pins are forcibly fitted into the positioning recesses 27 ignoring the above points, the positional relationship between the precision substrate storage container and the opener deteriorates, so that an extra load acts on the operation of the latch mechanism. Due to the force (9 N or less) specified in SEMI standard E62, the precision substrate storage container cannot be brought into contact with the opener. Also, SEMI
The operating torque of the latch mechanism specified in the standard (1.7
N-m or less), the lid 17 cannot be opened and closed.

On the other hand, conventionally, the rotating plate 9
Since the engagement portion between the rotation plate and the power transmission plate is located on the 0 ° rotation axis, the rotation plate may return. If no measures are taken with respect to this point, the sealing force will be reduced during locking, and outside air will enter the container body, and the precision substrate will be contaminated. Further, when the latch mechanism is repeatedly operated, the play of the dimensions of the key groove 30 of the rotating plate and the operation key 64 and the external force cause the latch mechanism in the locked state to operate in the reverse direction to be unlocked, and the key groove 30 is rotated in the rotating direction. May shift. In this state, even if the user tries to insert the operation key 64 next time, the operation key 64 cannot be inserted. If the operation key 64 is forcibly inserted, the key groove 30 may be damaged (see FIG. 18).

The present invention has been made in view of the above problems, and the dimensions of the positioning concave portion and the positioning pin have an upper limit of tolerance.
Even in the case of a lower limit relationship, they can be fitted properly to prevent wear and damage, etc., and furthermore, a precision board storage that can prevent an unnecessary load from acting on the operation of the latch mechanism. It is intended to provide containers.

[0017]

According to the first aspect of the present invention, in order to achieve the above object, a lid is fitted into one end face of an opening of a container main body for storing a precision substrate, and the container is closed in a sealed state. A pair of positioning recesses are provided on the surface of the lid at intervals, and at least one positioning recess of the pair of positioning recesses is formed as a long hole having a long axis on a line connecting the pair of positioning recesses. It is characterized by doing. It is preferable that an inner / outer communication port is provided in at least one of the container body and the lid, and a filter is attached to the inner / outer communication port.

[0018] Further, a lock mechanism for locking is built in the lid, and the latch mechanism is supported by the lid and rotated by an external operation through an operation port on the surface of the lid. A power transmission plate interlocked with the plate,
A locking portion that is provided integrally or connected to a distal end portion of the power transmission plate, and that protrudes and retracts from a through hole in the peripheral surface of the lid body. The center of the rotation plate is a center line of the power transmission plate. When the latch mechanism is locked, the engagement and / or connection position between the rotation plate and the power transmission plate interlocking with the rotation plate is aligned with the center of the rotation plate and the center of the power transmission plate. It is preferable that it is located at a position beyond the extension line to be connected.

Here, the precision substrate in the claims includes a semiconductor wafer such as one or more silicon wafers, a mask glass, a liquid crystal cell, or various recording media. As for the pair of positioning recesses, at least one positioning recess may be formed as an elongated hole, and all of the positioning recesses may be formed as elongated holes. The slot may be elliptical, oval, or similar. Further, one or more inner and outer communication ports and filters may be attached to only the container main body, or one or more inner and outer communication ports and filters may be attached to the surface of the lid or the like. Of course, it is also possible to provide a single unit and plural units on all of the container body and the lid.

According to the first aspect of the present invention, the at least one positioning recess is not a general round hole but an elongated hole having a long axis on a line connecting the pair of positioning recesses. The amount is large, and the difference in size depending on the type of the opener is absorbed, so that the positioning pin can be easily fitted. According to the second aspect of the invention, when there is a difference between the internal pressure and the external pressure of the precision substrate storage container storing the precision substrate, the internal and external communication ports equalize the difference. Further, the filter effectively prevents particles and the like from entering the precision substrate storage container from the outside through the inside / outside communication port.

According to the third aspect of the invention, when the lid is locked, the rotary plate of the latch mechanism rotates in one direction, the power transmission plate advances in the direction away from the rotary plate, and the locking portion of the lid is It protrudes from the through hole and is caught in the locking hole of the container body. On the other hand, when the lid is unlocked, the rotating plate of the latch mechanism rotates in the other direction, and the locked power transmission plate retreats in the direction approaching the rotating plate,
The locking portion is retracted into the through hole of the lid and comes off from the locking hole of the container body. Further, when the latch mechanism is locked, the engagement and / or connection position between the rotating plate and the power transmission plate interlocked therewith is not on the extension line connecting the center of the rotation plate and the center line of the power transmission plate, but on this extension line. Is located in the circumferential direction of the rotating plate, and even if an external force acts on the rotating plate, the rotating plate rotates in one direction instead of the other direction. Therefore, the locking force of the lid covering the one end surface of the opening of the container body does not decrease, and the sealed state can be suitably maintained.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the accompanying drawings. As shown in FIGS. For example, 13 or 25) precision substrates W
And a detachable lid 1 that fits and closes the opening front of the container body 1 in a sealed state.
7 and is conveyed from the external environment 40 having a lower degree of cleanliness to the local environment 50 to the local environment 50 by the overhead traveling robot 70 or the like. And the lid 17
A pair of positioning recesses 27A and 27B are provided opposite to each other, and one positioning recess 27A of the pair of positioning recesses 27A and 27B is formed into an elongated hole.

The container body 1 can be formed using a synthetic resin such as polycarbonate, acrylic resin, polyetheretherketone, etc., which is excellent in strength and rigidity. ,
It is preferable to use a thermoplastic resin to which a conductive additive such as carbon fiber or metal fiber is added, and to perform an antistatic treatment. Alternatively, an antistatic treatment resin and a portion using a resin which has not been subjected to the antistatic treatment may be used in an integrated manner.
In the present embodiment, the container body 1 subjected to the antistatic treatment is shown, but the present invention is not limited to this. For example,
The container body 1 having conductivity by applying or coating a film of a conductive polymer on a thermoplastic resin may be used.

The container body 1 is formed in a front open box having an open front, and is standardized based on the SEMI standard. As shown in FIG. 2, the container body 1 is provided with a V group 2 having a substantially V-shaped cross section, which is a positioning means, at a location defined by the SEMI standard on the bottom surface, specifically, on both sides of the front portion and the center of the rear portion of the bottom surface. A bottom plate 3 formed of the same molding material as that of the container body 1 is detachably fitted and screwed to the plurality of V groups 2 via a plurality of fasteners. Bottom rails 4 extending in the front-rear direction are integrally formed on both sides.

Each V group 2 has a pair of opposing pieces 5 whose ends are curved as shown in the figure, and a bridge reinforcing piece 6 is integrally formed between the central portions of the pair of opposing pieces 5. I have.
A gap 7 is defined between the ends of the pair of opposing pieces 5, and the gap 7 functions so as to drain water during washing and contribute to drying. Further, the bottom plate 3 is basically formed in a substantially Y-shape, and a portion defined by the SEMI standard,
More specifically, substantially oval guide members 8 fitted to the outer periphery of the V group 2 are formed on both sides of the front part and the center of the rear part, respectively. It acts to guide the alignment pin 58 of the port 56. Each of the guide members 8 can be integrally formed with the bottom plate 3 or abrasion-resistant polyetheretherketone, polybutyleneterephthalate, polycarbonate, polyetherimide, or abrasion-resistant modifier such as Teflon. Molding using a resin containing the agent,
It can also be installed as a separate part.

A through hole 9 is formed in the center of the bottom plate 3 in a substantially rectangular shape, and the through hole 9 is held and fixed to an L-shaped clamp member 59 of a load port 56 described later. As shown in FIG. 1, a robotic flange 10 formed of the same molding material as the container body 1 is engaged with a locking rail formed on the ceiling of the container body 1 at the center of the ceiling of the container body 1. At the same time, the robotic flange 10 is detachably fitted and screwed via a plurality of fasteners, and the robotic flange 10 is held by the overhead traveling robot 70. A flange 11 is integrally formed on the opening front face of the container body 1 by bulging, and locking holes (not shown) are formed in the inner peripheral surface of the flange 11 at the upper, lower, left and right sides. As shown in FIG. 3, polycarbonate,
A window 12 for visually recognizing the precision substrate W is formed integrally with a transparent rectangle such as an acrylic resin or polyetherimide by a two-color molding or an insert molding without any gap.

As shown in FIG. 1 to FIG. 4, on the left and right side walls of the container body 1, a side rail 13 having a plate-shaped cross section formed of the same molding material as the container body 1 is provided at a lower portion, and an emergency is provided at an upper portion. The manual handles 14 used for the above-mentioned operations are detachably fitted and screwed. As shown in FIG. 3, shelves 15 are opposed to each other and integrally formed on both sides inside the container body 1.
The U-shaped grooves or U-shaped grooves 16 are formed vertically, and the precision substrate W is horizontally stored and supported in a pair of opposed V-shaped grooves or U-shaped grooves 16.

As shown in FIG. 1, FIG. 4, or FIG. 8, the lid 17 has a base 18 having a substantially U-shaped cross section, and the base 18
And a surface plate 25 covered on the opening surface through a plurality of fasteners.
8 are built in side by side. The base 18 is formed of the same molding material as that of the container body 1, and rectangular through holes 19 are formed on the upper, lower, left, and right sides of the peripheral surface, and a frame-shaped gasket 20 is fitted on the peripheral surface. The gasket 20 is sandwiched when the flange 11 at the front of the opening of the container body 1 is fitted, and exhibits a sealing function. Gasket 2
0 is various thermoplastic elastomers, fluorine rubber, EP
Molding is performed using DM, NBR, or the like, and molding using a fluororubber that generates a small amount of gas upon heating is most preferable. The gasket 20 is appropriately selected according to the sealing property, shape, hardness, and the like.

As shown in FIG. 6, the back surface of the base 18
A vertically long retainer 21 is provided at a central portion, and an inner / outer communication port 22 as a plurality of through holes is provided at a side wall portion, and a filter 23 for filtering particles is attached to each inner / outer communication port 22. The retainer 21 is formed using polyetheretherketone, polycarbonate, polybutylene terephthalate, or the like, and a V-shaped groove or a U-shaped groove 24 is formed on a contact surface that contacts the front end of the precision substrate W and is vertically formed. Each V-shaped groove or U-shaped groove 24 individually and resiliently supports the precision substrate W to prevent displacement and damage. Each filter 23 is attached to a rib of the inside / outside communication port 22 or is sandwiched between a step portion of the inside / outside communication port 22 and a support projection inside the lid 17. When each filter 23 is attached, a lattice-shaped rib is formed in the inside / outside communication port 22 to protect the filter 23 from deformation when a gas such as air passes through the inside / outside communication port 22 due to a difference in internal / external pressure. Is preferred.

As the filter 23, a commercially available molecular filtration filter made of polytetrafluoroethylene, polyester, cellulose acetate, nylon, or the like, a porous sintered ceramic, or the like can be used. Further, it is preferable to provide a plurality of filters 23 having different meshes (pore diameters) from the outside in the order of coarser meshes to improve the particle filtration efficiency. The filtration area of the filter 23 is equal to 0.
The range of 4 to 160 cm ² is good, and within this range, it is appropriately set according to the size of the precision substrate storage container and the use environment (derived pressure difference and the like).

The surface plate 25 is formed of the same molding material as that of the container body 1, and as shown in FIG. 1 and FIG. Positioning recesses 27A and 27B, which are positioned on the pair of positioning pins 63 of the opener 60, are formed diagonally oppositely at upper, lower, left and right sides. As shown in FIG. 4 and FIG. 5, when the precision substrate storage container is mounted on the load port 56, the pair of positioning recesses 27A and 27B are positioned above the positioning recess 27A far from the reference horizontal plane of the apparatus. Is formed into a long hole having a long axis on an imaginary diagonal line DL connecting the pair of positioning recesses 27A and 27B, and the other positioning recess 27B below it is formed.
Are round and concavely formed.

The one positioning recess 27A covers both the maximum permissible deviation position B, which can be considered as a tolerance, and the maximum permissible deviation position C of the positioning pin 63. It has an oval shape. In addition, it is preferable that a chamfer for guiding the positioning pin 63 is provided on the periphery of the opening of the positioning recesses 27A and 27B.

As shown in FIGS. 7 to 10, each latch mechanism 28 is rotatably supported by a central portion of the base 18 and rotated by an external operation through an operation port 26 on the surface of the lid. A curved groove 34 of a power transmission plate 32 is loosely fitted to the pair of engagement pins 31 of the rotating plate 29, and the front end of each power transmission plate 32 is inserted through the through hole 19 of the lid 17. A clamp 35 that is a locking part that comes and goes is supported by a shaft. A rectangular key groove 30 is formed at the center of the rotating plate 29 so as to correspond to the operation port 26, and a pair of cylindrical engaging pins 31 are formed on the outer periphery of the rotating plate 29 at an angle of 180 °. .

Each power transmission plate 32 is formed in a thin plate shape oriented in the up-down direction, and is loosely supported by a plurality of support projections of the base 18 via an oval hole 33 so as to be able to move forward and backward.
The end of each power transmission plate 32 is curved and formed in an arc shape and overlaps the outer periphery of the surface of the rotating plate 29, and an arc-shaped curved groove 34 is cut along the outer periphery of the rotating plate 29 at this end. It is chipped. Each clamp 35
Is bent and formed into a substantially L-shaped cross section. The bent portion is rotatably supported via a pin near the through-hole 19 of the lid 17, and one end is provided with an arm or the like at the tip of the power transmission plate 32. The other end is rotatably supported by a roller 36 for preventing wear, which is fitted and locked in the locking hole of the container body 1 at the other end.

Each of the latch mechanisms 28 includes a rotating plate 29, a pair of power transmission plates 32, and a pair of clamps 35, which are made of polyether ether ketone.
Molded using polyacetal or fluororesin. Then, as shown in FIGS. 9A and 9B, the keyway 30
Is the extension line E of the center line CL of the power transmission plate 32.
L, the extension line EL and the keyway 30
And the straight line SL connecting the engagement pin 31 at the time of locking is 1 °.
Rotating plate 29 at the time of locking by crossing at an angle θ of -10 °
Prevents reverse rotation in the unlocking direction.

As shown in FIG. 12, the local environment 50 includes various processing apparatuses 51 for the precision substrate W and the processing apparatuses 51.
And an access device 55 for loading and unloading a precision substrate W between the precision substrate storage container and the processing device 51 by mounting and connecting a structure 52 for isolating and storing the precision substrate storage container transported from the external environment 40. It is highly clean in order to efficiently perform various processes for creating electronic circuit wiring on the precision substrate W (US Federal Standard
(Federal standard 209E) cleanliness level of 1 or less, 0.01 level as required). The structure 52 is formed in a substantially stepped cross section having a flat step portion 53 on the front outside, and an opening for passing the precision substrate W is formed in a rectangular shape on the partition wall 54 on the front.

As shown in FIGS. 13 and 14, the access device 55 positions and mounts the precision substrate storage container, and faces the load port 56 connected to the processing device 51 and the lid 17 of the precision substrate storage container. An opener 60 that opens and closes, and is installed in front of a structure 52 exposed to the external environment 40. The load port 56 includes a mounting unit 57 slidably laid on the step portion 53 of the structure 52, and a plurality of V groups 2 are mounted on the mounting unit 57.
Alignment pins 58 respectively fitted at predetermined intervals are provided upright, and a clamp member 59 which is engaged with the through hole 9 of the bottom plate 3 is installed so as to be able to move up and down and swing. Each positioning pin 58 is formed in a cylindrical shape, and has a rounded upper end.

As shown in the figure, the opener 60 has a cover member 61 for opening and closing the opening of the partition wall 54 so as to be movable horizontally and vertically, and an operating device 62 for the latch mechanism 28 is provided on the cover member 61. The operating device 62 locks or unlocks the latch mechanism 28. The cover member 61 is formed in a plate-like rectangle, and when the precision substrate storage container is connected to load and unload the precision substrate W, the cover member 17 is held and the latch mechanism 28 is unlocked and lowered. Then, the local environment 50 is communicated with the precision substrate storage container. Then, it always rises and closes the opening in a sealed state, thereby preventing floating particles from entering the clean local environment 50 from the external environment 40.

As shown in FIG. 15, the operating device 62 is provided with a suction mechanism 62A for vacuum-sucking the surface of the lid 17 on the cover member 61 and a pair of positioning recesses 27.
The positioning pins 63 respectively fitted into the A. 27B are obliquely implanted. Further, as shown in FIG. 16, a pair of operation keys 64 having a substantially T-shaped cross section
Are rotatably supported, and each operation key 64 is inserted into the key groove 30 of the rotation plate 29 through the operation port 26 and rotated.

Therefore, when processing the precision substrate W, first, as shown in FIGS.
The transport robot 70 transports and mounts the precision substrate storage container on the second mounting unit 57, and the V group 2 of the precision substrate storage container is aligned with the plurality of positioning pins 58 via the guide member 8, respectively. The clamp member 59 is inserted and locked into the through hole 9 of the third member 3 and fixed, and then the mounting unit 57 slides and the cover member 61 is attached to the cover member 61.
Is brought into contact with the sealing state. Then, the positioning recesses 27 </ b> A and 27 </ b> B are fitted into the pair of positioning pins 63 of the operating device 62 (see FIG. 15), and the operation keys 64 are fitted into the key grooves 30 of the respective rotating plates 29 through the operation ports 26 (see FIG. 15). 11 and 16). At the same time, the lid 17 is suction-fixed to the suction mechanism 62A of the operating device 62.

Next, each operation key 64 is rotated to rotate the rotating plate 29 of each latch mechanism 28 clockwise by 90 °, and each power transmission plate 32 in the locked state is retracted toward the rotating plate 29, and The upper end of the clamp 35 swings and retreats into the through hole 19 to release the engagement with the engagement hole.
As a result, each latch mechanism 28 is unlocked and the lid 17 can be removed, and the cover member 61 is retracted to remove the lid 17 from the container body 1. Then, the cover member 6
1 to open the opening (see FIG. 14), the front of the opening of the container body 1 communicates with the processing device 51, and then the precision substrate W is loaded into the processing device 51 and taken in. Is processed.

When each latch mechanism 28 is locked, each operation key 64 rotates to rotate the rotating plate 29 to 90 degrees.
° Lock and rotate counterclockwise to rotate each power transmission plate 32
Is advanced in the direction of the anti-rotation plate 29, and the other end of each clamp 35 swings out from the inside of the through-hole 19 and is locked in the locking hole. As a result, each latch mechanism 28 is locked and the lid 17 is locked.
In a state where it cannot be removed. The other parts are the same as in the conventional example, and the description is omitted.

According to the above configuration, one positioning recess 27
A has an oval shape so as to cover both the maximum permissible deviation position B considered as a tolerance and the maximum permissible deviation position C of the positioning pin 63, and that the amount of attraction for inserting the positioning pin 63 is sufficient. Therefore, even when the dimensions of the positioning recesses 27A and the positioning pins 63 are in the relation of the upper limit and the lower limit of the tolerance, the positioning recesses 27
A is fitted properly, and the positioning pin 63 and the positioning recess 2
7A does not wear or damage. Further, even when the opener 60 is repeatedly used by a plurality of different manufacturers, the positioning recesses 27A can be suitably fitted into the positioning pins 63. Accordingly, the positional relationship between the precision substrate storage container and the opener 60 can be actually improved, and no extra load acts on the operation of the latch mechanism 28, and the cover 17 can be operated with the torque set for the opener 60.
Can be opened and closed smoothly.

Further, the center of the key groove 30 is positioned on the extension line EL of the center line CL of the power transmission plate 32,
Since the extension line EL and a straight line SL connecting the center of the key groove 30 and the engagement pin 31 at the time of locking intersect at an angle θ of 1 ° to 10 °, the rotation is prevented during locking. Even if an external force is applied to the plate 29, there is no possibility that the rotating plate 29 will return in the unlocking direction. This point will be described in detail with reference to FIG.
When an external force E for releasing the sealing property acts in a direction in which the power transmission plate 32 is disengaged, a force P for moving the power transmission plate 32 acts on the rotating plate 29. This force P acts on the engagement pin 31 from the curved groove 34 of the power transmission plate 32, but is divided into a force in two directions of QR. R is a force for rotating the rotating plate 29 in the locking direction to secure the sealing property.

As described above, since the rotation plate 29 can be prevented from rotating in the direction in which the clamp 35 comes off from the locking hole, the sealing force of the lid 17 is reduced during transportation or storage, so that the container body The outside air intrudes into 1 and the precision substrate W
Can be very effectively prevented from being contaminated. Further, even when the latch mechanism 28 is repeatedly operated, the key groove 30 of the rotating plate 29 and the operation key 64
The keyway 30 is not displaced in the rotation direction due to the play of the dimensions described above or an external force. Therefore, even if the operation key 64 is inserted next time, the operation key 64 can be properly inserted, and furthermore, the prevention of the damage of the key groove 30 can be expected.

In the above-described embodiment, the plurality of V groups 2 are integrally formed on the bottom surface of the container body 1 and the bottom plate 3 is fitted and supported by the plurality of V groups 2, but the invention is not limited to this. Not something. For example, the bottom plate 3 may be integrally formed on the bottom surface of the container body 1. In addition, a plurality of shelf boards 15
May be provided. The inner surface of the positioning recess 27A is
The surface may be flat, at least partly curved, or at least partly tapered. Further, the number, position, and the like of the rotation plate 29, the power transmission plate 32, and the clamp 35 of the latch mechanism 28 can be appropriately increased or decreased.

Further, the lid 17 may be provided with a detent mechanism for accurately stopping the rotary plate 29 at the origin and the end position of the rotation to further ensure safety. This detent mechanism is provided, for example, with a detent projection provided at a predetermined location on the inner surface of the lid 17 or the rotating plate 29, and with a detent projection provided at a predetermined location on the inner surface of the lid 17 or the rotating plate 29, and at two end positions And a detent engagement portion that frictionally engages.

[0048]

As described above, according to the first aspect of the present invention, the dimensions of the positioning recess and the positioning pin are set to the upper limit of the tolerance.
Even in the case of the lower limit, there is an effect that they can be fitted properly to prevent wear, damage and the like. Furthermore, according to the third aspect of the present invention, it is possible to prevent the key groove and the like at the center of the rotating plate from being shifted in the rotating direction, so that the precision substrate storage container is maintained in a sealing state and the precision substrate is contaminated. Can be suppressed. Furthermore, even when repeatedly used, the key groove of the rotating plate and the operation key can be correctly fitted, so that no extra load acts on the latch mechanism, and improvement in durability can be expected.

[Brief description of the drawings]

FIG. 1 is an overall perspective view showing an embodiment of a precision substrate storage container according to the present invention.

FIG. 2 is a bottom view showing an embodiment of the precision substrate storage container according to the present invention.

FIG. 3 is an explanatory front view of the precision substrate storage container according to the embodiment of the present invention with a lid removed.

FIG. 4 is a front view showing an embodiment of the precision substrate storage container according to the present invention.

FIG. 5 is an explanatory diagram showing a portion V in FIG. 4;

FIG. 6 is an explanatory view showing a lid from the back side in the embodiment of the precision substrate storage container according to the present invention.

FIG. 7 is an explanatory view showing a latch mechanism of a lid in the embodiment of the precision substrate storage container according to the present invention.

FIG. 8 is a sectional view taken along line VIII-VIII in FIG. 4;

FIG. 9 is an explanatory view showing an embodiment of the precision substrate storage container according to the present invention, wherein FIG. 9 (a) is an explanatory view showing a latch mechanism at the time of locking, and FIG. 9 (b) is an explanatory view showing the latch mechanism at the time of unlocking; FIG.

FIG. 10 is an explanatory view showing the operation principle of preventing the reverse rotation of the latch mechanism in the embodiment of the precision substrate storage container according to the present invention.

FIG. 11 is an explanatory cross-sectional view showing a relationship between key grooves and operation keys in the embodiment of the precision substrate storage container according to the present invention.

FIG. 12 is an explanatory view showing the entire system in the embodiment of the precision substrate storage container according to the present invention.

FIG. 13 is an explanatory perspective view showing a normal access device in the embodiment of the precision substrate storage container according to the present invention.

FIG. 14 is an explanatory perspective view showing an access device at the time of precision substrate processing in the precision substrate storage container according to the embodiment of the present invention.

FIG. 15 is a partial cross-sectional explanatory view showing a relationship between a positioning concave portion of a lid and a positioning pin in the embodiment of the precision substrate storage container according to the present invention.

FIG. 16 is a partial cross-sectional explanatory view showing a relationship between a key groove of a rotating plate and operation keys in the embodiment of the precision substrate storage container according to the present invention.

FIG. 17 is an explanatory front view showing a conventional precision substrate storage container.

FIG. 18 is an explanatory cross-sectional view showing a relationship between a conventional key groove and an operation key.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Container main body 2 V group 3 Bottom plate 17 Lid 18 Base 19 Through-hole 20 Gasket 22 Inner / outer communication port 23 Filter 25 Surface plate 26 Operation port 27 Positioning recess 27A Positioning recess 27B Positioning recess 28 Latch mechanism 29 Rotating plate 30 Keyway 31 Engagement pin 32 Power transmission plate 34 Curved groove 35 Clamp 50 Local environment 51 Processing device 52 Structure 55 Access device 58 Alignment pin 60 Opener 63 Positioning pin 64 Operation key CL Power transmission plate centerline DL Diagonal line EL Extension line SL Straight line W precision board

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Toshiyuki Kamada 4-3-5 Nihonbashi Honcho, Chuo-ku, Tokyo Shin-Etsu Polymer Co., Ltd. F-term (reference) 3E096 BA15 BA16 BA17 BB03 CA02 DA17 FA09 FA16 FA22 GA07 5F031 CA02 DA08 EA12 EA14 EA20 FA09

Claims (3)

[Claims] 1. A precision substrate storage container, wherein a lid is fitted into one end face of an opening of a container main body for storing a precision substrate and closed in a sealed state, wherein a pair of positioning recesses are spaced from each other on the surface of the lid. Wherein the at least one positioning recess of the pair of positioning recesses is formed as a long hole having a long axis on a line connecting the pair of positioning recesses. 2. The precision substrate storage container according to claim 1, wherein an internal / external communication port is provided in at least one of the container main body and the lid, and a filter is attached to the internal / external communication port. A rotating plate supported by the lid and rotated by an external operation through an operation port on a surface of the lid; and a rotating plate supported by the lid and rotating the latch mechanism. A power transmission plate interlocked with the plate,
A locking portion that is provided integrally or connected to a distal end portion of the power transmission plate, and that protrudes and retracts from a through-hole in the peripheral surface of the lid, wherein the center of the rotation plate is a center line of the power transmission plate. When the latch mechanism is locked, the engagement and / or connection position between the rotation plate and the power transmission plate interlocking with the rotation plate is aligned with the center of the rotation plate and the center of the power transmission plate. 3. The precision substrate storage container according to claim 1, wherein the container is located at a position beyond an extension line to be connected.