JP2012081973A - Glass substrate storage container, and method for manufacturing glass substrate using the glass substrate storage container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent deposition of dust which is generated when locking a lid of a storage container body for storing glass substrates, on the glass substrate.SOLUTION: A glass substrate storage container 10 includes a storage container body 20 for storing a plurality of glass substrates, a first lid 30 to be used in the inspection step of a manufacturing line of glass substrates, a second lid 40 which is used during the shipping, and a bottom part lid 50. In the inspection step, the first lid 30 is attached to the storage container body 20, and the second lid 40 is attached to the storage container body 20 during the shipping after the inspection, and thus, the slidable-contact number between a locking part 112 with a locked part 45 is reduced, and the number of foreign matters deposited on the glass substrate stored in the storage container body 20 is reduced.

Description

  The present invention relates to a glass substrate storage container for storing a plurality of glass substrates in an aligned state, and a glass substrate manufacturing method using the glass substrate storage container.

Generally, a glass substrate production line used for a magnetic recording medium includes at least the following steps 1 to 7.
(Step 1) A glass base substrate formed by a float method, a fusion method, or a press molding method is cut into a disk shape having a circular hole in the center, and then the inner peripheral side surface and the outer peripheral side surface are chamfered (shape) Application step).
(Step 2) End face polishing is performed on the side and chamfered portions of the inner and outer circumferences of the glass substrate (polishing step).
(Step 3) The upper and lower main planes of the glass substrate are polished (polishing step).
(Step 4) The glass substrate is precisely cleaned (cleaning step).
(Step 5) The washed glass substrate is dried (drying step).
(Step 6) The number of foreign matters adhering to the main plane of the dried glass substrate is inspected visually or with a light scattering surface observing machine (inspection step).
(Step 7) The inspected glass substrate is stored in a glass substrate storage container and packaged (shipment step).

  A glass substrate manufactured by a glass substrate manufacturing line including at least the above-described steps 1 to 7 is shipped as a product.

  Between each process of such a glass substrate production line, as a means for transporting the glass substrate, a storage container body for storing a plurality of glass substrates in a vertical state, and an upper surface opening and a side surface opening of the storage container body are closed. A glass substrate storage container including a lid is used (for example, see Patent Document 1).

  The glass substrate storage container is configured to be stored in a state where the glass substrates are aligned at predetermined intervals so that the glass substrates do not contact each other, and the inside is sealed by attaching a lid to the storage container body. Therefore, foreign matter such as dust floating in the air is prevented from adhering to the glass substrate.

  The glass substrate storage container includes a lid locking portion provided on the side surface of the storage container main body and a locked portion provided on the side surface closing portion of the lid. In the glass substrate production line, when the glass substrate that has been subjected to each step is stored in the storage container body and reaches a predetermined number, the cover is attached to the storage container body and provided on the side closure portion of the lid. By locking the locked portion to the lid locking portion on the side surface of the storage container main body, the sealed state of the upper surface opening and the side surface opening of the storage container main body can be maintained.

Japanese Utility Model Publication No. 63-49387

  In a glass substrate production line that transports a glass substrate using the conventional glass substrate storage container, the lid is opened when the glass substrate is stored in the storage container body or taken out from the storage container body in each step. Since the locked portion that is attached to the storage container main body and is provided on the side closing portion of the lid is locked to the lid locking portion on the side surface of the storage container main body, the lid locking portion and the locked portion each time There was a possibility that dust would be generated by rubbing each other and fine dust would adhere to the surface of the glass substrate.

  In addition, when the lid of the storage container body is removed, the lid locking portion and the locked portion are rubbed to generate dust, so as the glass substrate is stored or taken out in each step, the surface of the glass substrate is There was a possibility that the number of adhered foreign substances may increase. Furthermore, in the method of moving each glass substrate using the conventional glass substrate storage container, there are cases where a large number of foreign matters are detected more than specified in the inspection process before shipment and the specification as a glass substrate product is not satisfied. Yes. As described above, a glass substrate in which a large number of foreign substances are detected more than specified is processed as a defective product, or a polishing process, a cleaning process, a drying process, and an inspection process are performed again, resulting in a decrease in yield or production. This causes a decrease in efficiency.

  Accordingly, in view of the above circumstances, the present invention is directed to a glass substrate storage container and a glass substrate manufacturing method using the glass substrate storage container that solve the above problems by suppressing dust generation associated with opening and closing of the lid in each step. For the purpose of provision.

In order to solve the above problems, the present invention has the following means.
(1) The present invention relates to a storage chamber in which a plurality of glass substrates are stored in an aligned state, an upper opening and a side opening communicated with the storage chamber, and a lid latch formed around the side opening. A storage container body having a portion;
A first lid having an upper surface closing portion for closing the upper opening of the storage container body, and a side surface closing portion for closing the side opening of the storage container body;
An upper surface closing portion that closes the upper opening of the storage container body, a side surface closing portion that closes the side opening of the storage container body, and a locked state that is locked to the lid locking portion of the storage container body. A second lid having a portion;
With
One of the first lid and the second lid is attached to the storage container body.
(2) In the present invention, the glass substrate has a plate-shaped glass substrate shape imparting step, the glass substrate polishing step, the glass substrate cleaning step, the glass substrate drying step, and the glass substrate. It is manufactured by a glass substrate manufacturing method having at least a substrate inspection process and a shipping process of the glass substrate,
The first lid is attached to the storage container main body in which the plurality of glass substrates are stored in at least the glass substrate inspection step among the steps, and closes the upper opening and the side opening,
The second lid is attached to the storage container main body in which a glass substrate to be shipped is stored in the glass substrate shipping process to close the upper opening and the side opening, and the locked portion is the It is latched by the lid latching | locking part of a storage container main body.
(3) The storage container body according to the present invention is characterized in that a plurality of storage grooves for storing the glass substrate in a vertical state are formed at predetermined intervals on the inner wall of the storage chamber.
(4) The storage container main body of the present invention has a tapered inclined surface in which the side opening is formed in a size in which the upper opening width is larger than the lower opening width,
The side closure portions of the first lid and the second lid have a tapered projection having a shape corresponding to a tapered inclined surface of the side opening, and the tapered projection is the tapered slope. The storage chamber is sealed in contact with a surface.
(5) The present invention provides a glass substrate shape imparting step having a plate shape, a polishing step of the glass substrate, a cleaning step of the glass substrate, a drying step of the glass substrate, and an inspection step of the glass substrate. In the manufacturing method of a glass substrate having at least a shipping process of the glass substrate,
A storage container main body having a storage chamber in which a plurality of glass substrates are aligned, an upper opening and a side opening communicating with the storage chamber, and a lid engaging portion formed around the side opening; ,
A first lid having an upper surface closing portion for closing the upper opening of the storage container body, and a side surface closing portion for closing the side opening of the storage container body;
An upper surface closing portion that closes the upper opening of the storage container body, a side surface closing portion that closes the side opening of the storage container body, and a locked state that is locked to the lid locking portion of the storage container body. A second lid having a portion;
Using a glass substrate storage container with
The first lid is attached to the storage container main body in which the plurality of glass substrates are stored, at least in the glass substrate inspection process, and closes the upper opening and the side opening,
The second lid is attached to the storage container main body in which a glass substrate to be shipped is stored in the glass substrate shipping process to close the upper opening and the side opening, and the locked portion is the It is latched by the lid latching | locking part of a storage container main body.
(6) The glass substrate of the present invention is a glass substrate for a magnetic recording medium.
(7) The glass substrate of the present invention is a glass substrate for a magnetic recording medium.

  According to the present invention, depending on the work contents of each manufacturing process of the glass substrate, either one of the first lid without the locked portion or the second lid having the locked portion is placed in the storage container body. Therefore, it is possible to suppress dust generation accompanying the opening and closing of the lid in each manufacturing process, and to reduce the number of foreign matters attached to the glass substrate.

It is a disassembled perspective view which shows one Example of the glass substrate storage container by this invention. It is a top view of a storage container main body. It is the front view which looked at the storage container main body from the X direction. It is the side view which looked at the storage container main body from the Y direction. It is a longitudinal cross-sectional view of a storage container main body. It is a top view which expands and shows the one side inner wall of a storage chamber. It is a side view which shows the cover mounting state of a glass substrate storage container. It is a top view of the 1st lid. It is a longitudinal cross-sectional view which follows the BB line in FIG. 6A. It is a longitudinal cross-sectional view which follows the CC line in FIG. 6A. It is a longitudinal cross-sectional view which follows the DD line | wire in FIG. 6A. It is a longitudinal cross-sectional view of a 2nd lid | cover. It is a longitudinal cross-sectional view which follows the FF line in FIG. 7A. It is the partially cutaway front view which shows the state which mounted | wore the storage container main body with the 1st lid | cover. It is a sectional side view which shows the state which the side fitting part of the 1st cover fitted to the side opening of the storage container main body. It is the front view which carried out the partial cutting | disconnection which shows the state which mounted | wore the storage container main body with the 2nd lid | cover. It is a sectional side view which shows the state which the side fitting part of the 2nd lid fitted to the side opening of the storage container main body.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.

[Configuration of Glass Substrate Storage Container 10]
FIG. 1 is an exploded perspective view showing an embodiment of a glass substrate storage container according to the present invention. As shown in FIG. 1, a glass substrate storage container 10 is used at the time of shipment, a storage container main body 20 in which a plurality of glass substrates are stored, a first lid 30 used in an inspection process of a production line. A second lid 40 and a bottom lid 50 are provided. The storage container body 20, the first lid 30, the second lid 40, and the bottom lid 50 are formed of a resin material (for example, polypropylene: Polypropylene). In the inspection process of the glass substrate production line, the first lid 30 is attached to the storage container body 20, and the second lid 40 is attached to the storage container body 20 at the time of shipment after completion of the inspection. In this way, by selectively mounting the first lid 30 and the second lid 40 according to the work content, the number of sliding contact between the locking portion 112 and the locked portion 45 described later can be reduced. .

  Moreover, as an inspection process, the inspection process 1 which inspects the number of the foreign material adhering to the main plane of the glass substrate by the light scattering system surface observation machine mentioned later, and the inspection process 2 which inspects the main plane of the glass substrate by the inspector's visual observation. There is. Then, the glass substrate that has passed the inspection steps 1 and 2 (the number of foreign matters is not more than a specified value) is stored in the storage container body 20. In the inspection steps 1 and 2, the first lid 30 with less dust generation is used. In the subsequent shipping process, the storage container body 20 in which a predetermined number of glass substrates is stored uses the second lid 40 and is shipped with the second lid 40 locked to the storage container body 20. The

In the present embodiment, the glass substrate is used, for example, for a magnetic recording medium, and as a stage before the magnetic recording layer is formed on the main plane portion, each manufacturing process ( After Step 1 to Step 7) are performed, they are shipped as products. The glass substrate contains, for example, SiO ₂ formed by a float method as a main component, and is formed into a dimensional shape having, for example, an outer diameter of 65 mm, an inner diameter of 20 mm, and a plate thickness of 0.635 mm.

Also, when using a glass substrate as a magnetic recording medium, if there is a foreign object on the main plane, the magnetic head will come into contact with the foreign object. It is important to prevent this.
[Configuration of Storage Container Body 20]
FIG. 2A is a plan view of the storage container body 20. FIG. 2B is a front view of the storage container body as viewed from the X direction. FIG. 2C is a side view of the storage container body as seen from the Y direction.

  As shown in FIGS. 2A to 2C, the storage container body 20 opens to a storage chamber 60 that stores a plurality of glass substrates, an upper opening 70 that opens to the top of the storage chamber 60, and a lower portion of the storage chamber 60. And a lower opening 80. A plurality of protrusions 90 are provided at predetermined intervals on the inner walls on both sides in the X direction of the storage chamber 60. Between the adjacent protrusions 90, storage grooves 92 are formed in which the glass substrates W are engaged in a vertical state.

  A stepped portion 72 is formed on the upper peripheral edge of the upper opening 70 so that the first lid 30 or the second lid 40 is fitted and sealed without a gap. Further, the lower peripheral edge portion 82 surrounding the lower opening 80 is sealed without a gap when the bottom lid 50 is fitted.

  The storage container body 20 has a pair of side wall portions 62 facing the Y direction side of the storage chamber 60, and the pair of side wall portions 62 penetrates the main plane portion of the glass substrate stored in the storage chamber 60. It has a side opening 110 that is opened in a substantially U shape up to a position where the center hole is exposed. The side surface opening 110 has a tapered inclined surface 110a formed so that an upper opening width is larger than a lower opening width, and a curved surface 110b that is curved in an arc shape. The side closure portion of the lid 40 is formed in a shape that can be easily fitted from above. Further, the inner peripheral surface of the side opening 110 acts as a sealing surface that is sealed by the first lid 30 and the second lid 40 as described later.

  Further, a lid locking portion 112 that locks the second lid 40 projects below the side opening 110 so as to extend downward. The lid engaging portions 112 may be provided on both sides in the Y direction of the storage container body 20 or may be provided on any one of the side wall portions 62.

  FIG. 3 is a longitudinal sectional view of the storage container body 10. As shown in FIG. 3, the plurality of protrusions 90 are formed along the inner walls on both sides in the X direction of the storage container main body 20, and the curved portions of the inner walls correspond to the outer diameter of the glass substrate W. An arcuate mounting portion 100 having a curved line is provided. The glass substrate W (shown by a one-dot chain line in FIG. 3) stored in the storage chamber 60 is partly placed on both sides in the X direction of the storage chamber 60. Supported by

  When taking out the glass substrate stored in the storage chamber 60, if the side opening 110 is used, the glass substrate can be easily inserted by inserting a jig or a finger into the center hole of the glass substrate without contacting the main plane portion of the glass substrate. Can be taken out from the upper opening 70.

  FIG. 4 is an enlarged plan view showing one side inner wall of the storage chamber 60. As shown in FIG. 4, each of the plurality of protrusions 90 has a trapezoidal cross-sectional shape, and a glass substrate W (indicated by a one-dot chain line in FIG. 4) is provided between adjacent protrusions 90. A storage groove 92 for storing the sheets one by one is formed.

  The pair of protrusions 90 adjacent to each other has an inclined surface 94 having a predetermined inclination angle α (for example, α = 30 ° to 35 °), and the glass substrate W is inserted into each storage groove 92. When the glass substrate W is taken out or when the glass substrate W is taken out, it is formed so as not to contact the main plane portion of the glass substrate W. The minimum width of the storage groove 92 (the minimum value of the Y-direction groove width) is formed to have a width that is slightly larger than the thickness of the glass substrate W.

  Therefore, when the glass substrate W is inserted into the storage groove 92 from above the storage chamber 60, the outer peripheral edge is guided by the inclined surfaces 94 of the protrusions 90 on both sides, and the intermediate position (minimum width portion) of the storage groove 92 is reached. ).

  FIG. 5 is a side view showing a state where the glass substrate storage container is mounted with a lid. As shown in FIG. 5, when the glass substrate storage container 10 moves or stores the glass substrate in the inspection process, the upper opening 70 and the side opening 110 on both sides of the storage container body 20 are formed by the first lid 30. It is blocked. Further, after shipment, the upper opening 70 and the side opening 110 on both sides of the storage container body 20 are closed by the second lid 40. This prevents dust floating in the air from entering the storage chamber 60 and prevents dust from adhering to the glass substrate W stored in the storage chamber 60.

  When the glass substrate is inserted into the storage chamber 60 or when the glass substrate of the storage chamber 60 is taken out, the first lid 30 is removed and the upper opening 70 and the side opening 110 of the storage container body 20 are removed in the inspection process. Is released. Further, after shipment, the second lid 40 is removed, and the upper opening 70 and the side opening 110 of the storage container body 20 are opened.

The lower opening 80 of the storage container body 20 is closed by a bottom cover 50 fitted to the lower peripheral edge 82.
[Configuration of the first lid 30]
FIG. 6A is a plan view of the first lid. 6B is a longitudinal sectional view taken along line BB in FIG. 6A. 6C is a longitudinal sectional view taken along the line CC in FIG. 6A. 6D is a longitudinal sectional view taken along line DD in FIG. 6A.

  As shown in FIGS. 6A to 6D, the first lid 30 includes an upper closing portion 32 that closes the upper opening 70 of the storage container body 20, and a pair of side surface closing portions 34 that close the side opening 110. . On the lower surface side of the peripheral portion of the upper closing portion 32, a fitting portion 36 that is fitted to the peripheral portion 72 of the upper opening 70 of the storage container body 20 is provided. The side closing part 34 extends downward from both ends of the upper closing part 32 in the Y direction, and covers the side fitting part 38 fitted inside the side opening 110 and the periphery of the side opening 110. An extended flange portion 39 is provided.

  The side fitting portion 38 includes a tapered protrusion 38a having a shape corresponding to the tapered inclined surface 110a of the side opening 110, and an arc-shaped protrusion 38b having a shape corresponding to the curved surface 110b. In the side fitting portion 38, the tapered protrusion 38 a comes into contact with the tapered inclined surface 110 a of the side opening 110, and the arc-shaped protrusion 38 b comes into close contact with the curved surface 110 b to seal the storage chamber 60.

Therefore, the first lid 30 is not provided with a latched portion that is latched on the outer periphery of the side opening 110 like the second lid 40 described later, and thus the first lid 30 covers the storage container body 60 from the upper side to the lower side. Thus, the fitting portion 36 of the upper closing portion 32 is fitted to the stepped portion 72 of the upper opening 70 to close the upper opening 70, and the side fitting portions 38 of the pair of side closing portions 34 are The side opening 110 can be closed by being in close contact with the tapered inclined surface 110a and the curved surface 110b.
[Configuration of Second Lid 40]
FIG. 7A is a longitudinal sectional view of the second lid 40. FIG. 7B is a longitudinal sectional view taken along line FF in FIG. 7A.

  As shown in FIGS. 7A and 7B, the second lid 40 includes an upper closing portion 42 that closes the upper opening 70 of the storage container body 20, a side closing portion 44 that closes the side opening 110, and the side opening 110. And a pair of locked portions 45 that are locked to a lid locking portion 112 formed on the outer periphery. On the lower surface side of the peripheral portion of the upper closing portion 42, a fitting portion 46 that is fitted to the peripheral portion 72 of the upper opening 70 of the storage container body 20 is provided. The side closing part 44 is provided with a side fitting part 48 that fits inside the side opening 110 and a flange part 49 that extends so as to cover the periphery of the side opening 110.

  The side fitting portion 48 includes a tapered protrusion 48a having a shape corresponding to the tapered inclined surface 110a of the side opening 110, and an arcuate protrusion 48b having a shape corresponding to the curved surface 110b. In the side fitting portion 48, the tapered protrusion 48 a comes into contact with the tapered inclined surface 110 a of the side opening 110, and the arc-shaped protrusion 48 b comes into close contact with the curved surface 110 b to seal the storage chamber 60.

  A pair of to-be-latched part 45 is curving with the same curvature radius so that it may fit to the outer periphery of the curved surface 110b of the side surface opening 110. FIG. Further, a gap 43 that is slightly smaller than the thickness of the curved surface 110b of the side surface opening 110 is formed between the pair of locked portions 45 and the arcuate protrusion 48b.

Further, the pair of locked portions 45 is formed with a gap 47 that holds both sides of the lid locking portion 112 provided on the side wall 62 of the storage container body 20. The gap 47 is a gap that is slightly smaller than the width in the X direction of the lid locking portion 112, and protrudes inside the flange portion 49 so as to contact both sides of the lid locking portion 112.
[About a state in which the first lid 30 is attached to the storage container body 20]
FIG. 8A is a partially cut front view showing a state where the first lid 30 is attached to the storage container body 20. FIG. 8B is a side sectional view showing a state in which the side fitting portion 38 of the first lid 30 is fitted into the side opening 110 of the storage container body.

  As shown in FIGS. 8A and 8B, the first lid 30 has an upper closing portion 32 that closes the upper opening 70 of the storage container body 20 and a side fitting portion 38 that is in close contact with the inside of the side opening 110. Then, the side opening 110 of the storage container body 20 is closed. That is, the first lid 30 is attached to the storage container main body 20 from above, the fitting portion 36 is fitted to the peripheral edge 72 of the upper opening 70, and the tapered protrusion 38 a of the side fitting portion 38 is further provided. The arcuate protrusion 38b is in close contact with the curved surface 110b while contacting the tapered inclined surface 110a of the side opening 110. For this reason, the first lid 30 is not locked to the storage container body 20, and the storage chamber 60 can be sealed so as to cover the first lid 30 from above.

Accordingly, when the first lid 30 is attached to the storage container body 20, there is no dust generation due to sliding contact with the locking portion 112, so the first glass 30 is stored in the storage chamber 60 with respect to the first glass substrate W. It is possible to prevent dust (foreign matter) from attaching when the lid 30 is attached.
[About the state in which the second lid 40 is attached to the storage container body 20]
FIG. 9A is a partially cut front view showing a state in which the second lid 40 is mounted on the storage container body 20. FIG. 9B is a side sectional view showing a state in which the side fitting portion 48 of the second lid 40 is fitted to the side opening 110 of the storage container body 20.

  9A and 9B, in the second lid 40, the upper closing portion 42 closes the upper opening 70 of the storage container body 20, and the side fitting portion 48 is in close contact with the inner side of the side opening 110. Then, the side opening 110 of the storage container body 20 is closed. Further, by pressing the flange portion 49 from the side, the locked portion 45 protruding inside the flange portion 49 is locked to the locking portion 112 formed on the outer periphery of the side surface opening 110. That is, the second lid 40 is mounted on the storage container main body 20 from above, the fitting portion 46 is fitted to the peripheral edge 72 of the upper opening 70, and the tapered protrusion 48 a of the side fitting portion 48 is further provided. The arcuate protrusion 48b comes into close contact with the curved surface 110b while contacting the tapered inclined surface 110a of the side opening 110.

  Thereafter, when the flange portion 49 of the second lid 40 is pressed, the locked portion 45 provided on the flange portion 49 is locked to the locking portion 112 of the storage container body 20. That is, the curved surface 110b of the side surface opening 110 is fitted into the gap 43 formed between the pair of locked portions 45 and the arcuate protrusion 48b, and the gap 47 between the pair of locked portions 45 is fitted. Is fitted with the lid locking portion 112 provided on the side wall 62 of the storage container body 20. Therefore, the pair of locked portions 45 sandwich the lid locking portion 112 and are securely locked in close contact with the outer peripheral surface 114 of the curved surface 110b of the side surface opening 110.

  Thereby, the flange part 49 of the 2nd lid | cover 40 is latched by the side wall 62 of the storage container main body 20, and does not remove | deviate during conveyance, but can hold | maintain the storage chamber 60 in a sealing state. After the inspection process is completed, the second lid 40 is mounted on the storage container body 20 and shipped in a state where the storage container body 20 is held in a sealed state. When the second lid 40 is attached to the storage container body 20 and the locked portion 45 is locked by the lid locking portion 112, dust generation occurs once. The number of foreign matters adhering to the glass substrate W is greatly increased as compared with the case where dust is generated by attaching or detaching the second lid 40 to or from the storage container main body 20 for each operation in each process until shipping. Can be reduced.

表１に、（工程１）〜（工程７）を含むガラス基板の製造方法により造られた磁気記録媒体用ガラス基板を光散乱方式表面観察機（ＫＬＡ Ｔｅｎｃｏｒ社製、製品名：Ｃａｎｄｅｌａ６１００）を用いて検査し、ガラス基板の主平面に付着している異物（０．２μｍ〜１．５μｍのサイズの異物）の数をカウントした結果を示す。表１に示されるように、５個のガラス基板収納容器を検査用サンプルとし、各収納容器本体２０に収納されたガラス基板Ｗを収納容器（表１では「カセット」と表記する）の右端部、中央部、左端部の３箇所から取出し、各ガラス基板Ｗに付着した異物の個数を光散乱方式表面観察機を用いて検査した結果、検査工程では第１の蓋３０を収納容器本体２０に装着し、検査後の出荷時に第２の蓋４０を収納容器本体２０に装着した場合（例１）は、収納容器Ｎｏ．（カセットＮｏ．）１〜５の異物付着数の平均値が、「４０個、５０個、７５個、５３個、５５個」であった。一方、第２の蓋４０のみを使用した従来の場合（例２）は、収納容器Ｎｏ．（カセットＮｏ．）１〜５の異物付着数の平均値が、「１５１個、２４０個、１７６個、１０２個、８０個」であった。

Table 1 shows a glass substrate for a magnetic recording medium produced by the method for producing a glass substrate including (Step 1) to (Step 7) using a light scattering surface observing device (product name: Candela 6100, manufactured by KLA Tencor). The results of counting the number of foreign matters (foreign matters having a size of 0.2 μm to 1.5 μm) adhering to the main plane of the glass substrate are shown. As shown in Table 1, five glass substrate storage containers are used as test samples, and the glass substrate W stored in each storage container body 20 is the right end of the storage container (indicated as “cassette” in Table 1). In the inspection process, the first lid 30 is attached to the storage container main body 20 as a result of inspecting the number of foreign substances attached to each glass substrate W by using a light scattering surface observing machine. When the second lid 40 is attached to the storage container body 20 at the time of shipment after inspection (Example 1), the storage container no. (Cassette No.) The average value of the number of adhered foreign substances of 1 to 5 was “40, 50, 75, 53, 55”. On the other hand, in the conventional case (example 2) in which only the second lid 40 is used, the storage container no. (Cassette No.) The average value of the number of adhered foreign substances of 1 to 5 was “151, 240, 176, 102, 80”.

  As a result of this inspection, the first lid 30 is attached to the storage container body 20 and the second lid 40 is attached to the storage container body 20 at the time of shipment after completion of the inspection in the inspection process as compared with the prior art. It has been confirmed that the number of sliding contacts between the stopper 112 and the locked portion 45 is reduced, and the number of foreign matters attached to the glass substrate stored in the storage container body 20 is reduced.

  In the above embodiment, the configuration in which the locking portion 112 shown in FIG. 2C and the locked portion 45 shown in FIG. 7B are fitted is given as an example, but the shape and configuration of the locking portion and the locked portion are as follows. Of course, this is not restrictive.

  In addition, the number of glass substrates W stored in the storage container body 20, the outer diameter, the inner diameter, the thickness and other dimensions are appropriately selected and are not limited to specific numerical values.

  Moreover, in the said Example, although demonstrated taking the case of the glass substrate used for magnetic recording media as an example, this invention is applicable also to the container which accommodates the glass substrate used for another use.

  Specific examples of glass substrates to which the present invention can be applied include glass substrates for magnetic recording media, photomasks, displays such as liquid crystals and organic EL, and optical components such as optical pickup elements and optical filters. As mentioned.

DESCRIPTION OF SYMBOLS 10 Glass substrate storage container 20 Storage container main body 30 1st lid | cover 32, 42 Upper side obstruction | occlusion part 34,44 Side obstruction | occlusion part 36,46 Fitting part 38,48 Side fitting part 38a, 48a Tapered protrusion 38b, 48b Circle Arc-shaped protrusions 39, 49 Flange 40 Second lid 43, 47 Clearance 50 Bottom lid 60 Storage chamber 62 Side wall 70 Upper opening 72 Step 80 Lower opening 82 Lower peripheral edge 90 Projection 92 Storage groove 94 Inclined surface 100 Placement part 110 Side opening 110a Tapered inclined surface 110b Curved surface 112 Lid locking part 200 Insertion guide member 202 Insertion slit

Claims (7)

A storage container main body having a storage chamber in which a plurality of glass substrates are aligned, an upper opening and a side opening communicating with the storage chamber, and a lid engaging portion formed around the side opening; ,
A first lid having an upper surface closing portion for closing the upper opening of the storage container body, and a side surface closing portion for closing the side opening of the storage container body;
An upper surface closing portion that closes the upper opening of the storage container body, a side surface closing portion that closes the side opening of the storage container body, and a locked state that is locked to the lid locking portion of the storage container body. A second lid having a portion;
With
One of the first lid and the second lid is attached to the storage container main body, and the glass substrate storage container. The glass substrate has a plate-shaped glass substrate shape imparting step, the glass substrate polishing step, the glass substrate cleaning step, the glass substrate drying step, the glass substrate inspection step, It is manufactured by a glass substrate manufacturing method having at least a glass substrate shipping process,
The first lid is attached to the storage container main body in which the plurality of glass substrates are stored in at least the glass substrate inspection step among the steps, and closes the upper opening and the side opening,
The second lid is attached to the storage container main body in which a glass substrate to be shipped is stored in the glass substrate shipping process to close the upper opening and the side opening, and the locked portion is the The glass substrate storage container according to claim 1, wherein the glass substrate storage container is locked to a lid locking portion of the storage container body.   3. The glass substrate storage container according to claim 1, wherein the storage container body has a plurality of storage grooves formed at predetermined intervals on the inner wall of the storage chamber in which the glass substrate is stored in a vertical state. The storage container body has a tapered inclined surface in which the side opening is formed in a dimension in which the upper opening width is larger than the lower opening width,
The side closure portions of the first lid and the second lid have a tapered projection having a shape corresponding to a tapered inclined surface of the side opening, and the tapered projection is the tapered slope. The glass substrate storage container according to claim 1, wherein the glass substrate storage container is in contact with a surface to seal the storage chamber. Forming step of glass substrate having plate shape, polishing step of glass substrate, cleaning step of glass substrate, drying step of glass substrate, inspection step of glass substrate, shipping step of glass substrate In a method for producing a glass substrate having at least
A storage container main body having a storage chamber in which a plurality of glass substrates are aligned, an upper opening and a side opening communicating with the storage chamber, and a lid engaging portion formed around the side opening; ,
A first lid having an upper surface closing portion for closing the upper opening of the storage container body, and a side surface closing portion for closing the side opening of the storage container body;
An upper surface closing portion that closes the upper opening of the storage container body, a side surface closing portion that closes the side opening of the storage container body, and a locked state that is locked to the lid locking portion of the storage container body. A second lid having a portion;
Using a glass substrate storage container with
The first lid is attached to the storage container main body in which the plurality of glass substrates are stored, at least in the glass substrate inspection process, and closes the upper opening and the side opening,
The second lid is attached to the storage container main body in which a glass substrate to be shipped is stored in the glass substrate shipping process to close the upper opening and the side opening, and the locked portion is the A glass substrate manufacturing method using a glass substrate storage container, wherein the glass substrate storage container is locked to a lid locking portion of a storage container body.   The glass substrate storage container according to claim 1, wherein the glass substrate is a glass substrate for a magnetic recording medium.   The method for producing a glass substrate according to claim 5, wherein the glass substrate is a glass substrate for a magnetic recording medium.

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