JP2005196959A - 垂直磁気記録媒体 - Google Patents
垂直磁気記録媒体 Download PDFInfo
- Publication number
- JP2005196959A JP2005196959A JP2005001119A JP2005001119A JP2005196959A JP 2005196959 A JP2005196959 A JP 2005196959A JP 2005001119 A JP2005001119 A JP 2005001119A JP 2005001119 A JP2005001119 A JP 2005001119A JP 2005196959 A JP2005196959 A JP 2005196959A
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- Prior art keywords
- magnetic recording
- underlayer
- recording medium
- perpendicular magnetic
- layer
- Prior art date
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- 230000005291 magnetic effect Effects 0.000 title claims abstract description 156
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 229910000531 Co alloy Inorganic materials 0.000 claims abstract description 19
- 229910045601 alloy Inorganic materials 0.000 claims description 12
- 239000000956 alloy Substances 0.000 claims description 12
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 229910052796 boron Inorganic materials 0.000 claims description 4
- 229910052758 niobium Inorganic materials 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- 230000001747 exhibiting effect Effects 0.000 abstract description 3
- 230000000052 comparative effect Effects 0.000 description 14
- 239000013078 crystal Substances 0.000 description 14
- 239000010408 film Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 7
- 230000001681 protective effect Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 238000013459 approach Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052707 ruthenium Inorganic materials 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000001050 lubricating effect Effects 0.000 description 3
- 239000006249 magnetic particle Substances 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 230000005294 ferromagnetic effect Effects 0.000 description 2
- 238000010587 phase diagram Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000006104 solid solution Substances 0.000 description 2
- 229910003321 CoFe Inorganic materials 0.000 description 1
- -1 FeAlSi Inorganic materials 0.000 description 1
- 229910005435 FeTaN Inorganic materials 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 230000005307 ferromagnetism Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/658—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing oxygen, e.g. molecular oxygen or magnetic oxide
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/657—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing inorganic, non-oxide compound of Si, N, P, B, H or C, e.g. in metal alloy or compound
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
- G11B5/7369—Two or more non-magnetic underlayers, e.g. seed layers or barrier layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Magnetic Record Carriers (AREA)
Abstract
【解決手段】 Co系磁気記録層と、前記磁気記録層を支持する基板との間に垂直配向下地層を備える磁気記録媒体において、前記垂直配向下地層を1原子%〜65原子%のCo含有量を持つRu−Co合金により構成する。すなわち、前記垂直磁気記録媒体は、磁気記録層との格子不一致度が小さな垂直配向下地層を持つ。
【選択図】 図4E
Description
(1)記録層の優秀な結晶性確保を通じた高い垂直磁気異方性エネルギー定数(Ku>1×106erg/cc)および高い保磁力
(2)小さな結晶粒径
(3)磁気粒子間の小さな交換結合力
Co100-(x+y+z)CrxPtyXz
商用化された直径2.5インチのガラス基板上にTi下地層を70nmに積層した後、その上にCo62Cr16Pt18B4の合金磁性層を30nm厚さに蒸着して垂直磁気記録媒体を製造した。
<比較例2>
Pt下地層を40nmに積層することを除き比較例1と同じ方法で垂直磁気記録媒体を製造した。
<比較例3>
基板平坦化のために下地層でTaを5nm厚さに蒸着し、かつRu下地層を15nmに積層した後、その上にCo62Cr16Pt18B4の合金磁性層を17nm厚さに蒸着した。
102、113 垂直配向下地層
103、114 垂直磁気記録層
104、115 保護膜
105、116 潤滑膜
112 軟磁性下地層
Claims (6)
- Co系磁気記録層と、
前記磁気記録層を支持する基板と、
前記磁気記録層と前記基板との間に設けられた垂直配向下地層と、
を備える磁気記録媒体において、
前記垂直配向下地層が1原子%〜65原子%のCo含有量を持つRu−Co合金よりなるRu−Co合金下地層であることを特徴とする垂直磁気記録媒体。 - 前記Co系磁気記録層が下記化学式1の合金よりなるRu−Co合金下地層であることを特徴とする請求項1に記載の垂直磁気記録媒体:
<化学式1>
Co100-(x+y+z)CrxPtyXz
前記化学式1で
XはNb、B、Ta、OおよびSiO2よりなる群から選択されたいずれか一つであり、
xは5原子%〜25原子%、yは10原子%〜25原子%、zはXがNb、B、TaまたはOであるときは0原子%〜10原子%であり、XがNSiO2であるときは0モル%〜15モル%である。 - 前記Co系磁気記録層と前記Ru−Co合金下地層の格子定数間の差が±4%以内であることを特徴とする請求項2に記載の垂直磁気記録媒体。
- 前記垂直配向下地層と前記基板との間に軟磁性下地層がさらに形成されていることを特徴とする請求項1に記載の垂直磁気記録媒体。
- 前記垂直配向下地層と前記基板との間または前記垂直配向下地層と前記軟磁性下地層との間に、Ta、Pt、Pd、Ti、Crまたはそれらの合金よりなる非磁性体下地層がさらに形成されていることを特徴とする請求項4に記載の垂直磁気記録媒体。
- 前記垂直配向下地層の厚さが30nm以下であることを特徴とする請求項1ないし請求項5のうちいずれか1項に記載の垂直磁気記録媒体。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040001409A KR100601938B1 (ko) | 2004-01-09 | 2004-01-09 | Co계 수직자기기록매체 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2005196959A true JP2005196959A (ja) | 2005-07-21 |
Family
ID=34737998
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005001119A Pending JP2005196959A (ja) | 2004-01-09 | 2005-01-06 | 垂直磁気記録媒体 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20050153168A1 (ja) |
JP (1) | JP2005196959A (ja) |
KR (1) | KR100601938B1 (ja) |
CN (1) | CN100538826C (ja) |
SG (1) | SG113535A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130280556A1 (en) * | 2006-12-01 | 2013-10-24 | Seagate Technology Llc | Magnetic recording media with soft magnetic underlayers |
US9093101B2 (en) * | 2011-02-28 | 2015-07-28 | Seagate Technology Llc | Stack including a magnetic zero layer |
JP6180755B2 (ja) * | 2013-02-25 | 2017-08-16 | 山陽特殊製鋼株式会社 | 磁気記録用Cr合金およびスパッタリング用ターゲット材並びにそれらを用いた垂直磁気記録媒体 |
JP6245708B2 (ja) * | 2013-09-12 | 2017-12-13 | 国立研究開発法人物質・材料研究機構 | 垂直磁気記録媒体およびその製造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1302932B1 (en) * | 1999-06-08 | 2004-10-13 | Fujitsu Limited | Magnetic recording medium |
JP4467116B2 (ja) * | 1999-12-20 | 2010-05-26 | 富士電機デバイステクノロジー株式会社 | 磁気記録媒体 |
JP4185228B2 (ja) * | 2000-01-21 | 2008-11-26 | Tdk株式会社 | 磁気記録媒体および磁気記録再生方法 |
JP2002100030A (ja) * | 2000-09-21 | 2002-04-05 | Toshiba Corp | 垂直磁気記録媒体 |
JP3762277B2 (ja) * | 2000-09-29 | 2006-04-05 | キヤノン株式会社 | 磁気記録媒体及びその製造方法 |
US6623874B2 (en) * | 2000-10-06 | 2003-09-23 | Hitachi, Ltd. | Magnetic recording medium and magnetic recording apparatus |
US7166375B2 (en) * | 2000-12-28 | 2007-01-23 | Showa Denko K.K. | Magnetic recording medium utilizing a multi-layered soft magnetic underlayer, method of producing the same and magnetic recording and reproducing device |
KR100374793B1 (ko) * | 2001-01-03 | 2003-03-04 | 삼성전자주식회사 | 수직 자기 기록 매체 |
US6926977B2 (en) * | 2001-10-22 | 2005-08-09 | Showa Denko Kabushiki Kaisha | Magnetic recording medium, production process thereof, and magnetic recording and reproducing apparatus |
KR100803201B1 (ko) * | 2002-07-27 | 2008-02-14 | 삼성전자주식회사 | 수직자기기록매체 |
KR100695121B1 (ko) * | 2002-07-27 | 2007-03-14 | 삼성전자주식회사 | 수직자기기록매체 |
JP2004079058A (ja) * | 2002-08-14 | 2004-03-11 | Toshiba Corp | 垂直磁気記録媒体及び磁気記録再生装置 |
US7235314B2 (en) * | 2004-03-11 | 2007-06-26 | Seagate Technology Llc | Inter layers for perpendicular recording media |
-
2004
- 2004-01-09 KR KR1020040001409A patent/KR100601938B1/ko not_active IP Right Cessation
- 2004-12-28 SG SG200407781A patent/SG113535A1/en unknown
-
2005
- 2005-01-06 JP JP2005001119A patent/JP2005196959A/ja active Pending
- 2005-01-07 CN CNB2005100517767A patent/CN100538826C/zh not_active Expired - Fee Related
- 2005-01-10 US US11/030,892 patent/US20050153168A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
CN100538826C (zh) | 2009-09-09 |
US20050153168A1 (en) | 2005-07-14 |
KR100601938B1 (ko) | 2006-07-14 |
CN1655242A (zh) | 2005-08-17 |
KR20050073175A (ko) | 2005-07-13 |
SG113535A1 (en) | 2005-08-29 |
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