JP2005193336A - Mems素子とその製造方法 - Google Patents
Mems素子とその製造方法 Download PDFInfo
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- JP2005193336A JP2005193336A JP2004002586A JP2004002586A JP2005193336A JP 2005193336 A JP2005193336 A JP 2005193336A JP 2004002586 A JP2004002586 A JP 2004002586A JP 2004002586 A JP2004002586 A JP 2004002586A JP 2005193336 A JP2005193336 A JP 2005193336A
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Abstract
【解決手段】半導体基板2の絶縁層3,4上に第1の犠牲層を形成する工程と、第1の犠牲層を跨ぐ状態で絶縁層3,4上にビーム電極6を形成する工程と、第1の犠牲層との間でビーム電極6を取り囲むように第2の犠牲層を形成する工程と、第2の犠牲層上に固定電極8,9を形成する工程と、第1の犠牲層及び第2の犠牲層を除去することにより、ビーム電極6の周囲に第1のギャップ5と第2のギャップ7を確保する工程とを経てMEMS素子1を製造する。
【選択図】図1
Description
Claims (4)
- 基板の絶縁層上に第1の犠牲層を形成する工程と、
前記第1の犠牲層を跨ぐ状態で前記絶縁層上にビーム電極を形成する工程と、
前記第1の犠牲層との間で前記ビーム電極を取り囲むように第2の犠牲層を形成する工程と、
前記第2の犠牲層上に固定電極を形成する工程と、
前記第1の犠牲層及び前記第2の犠牲層を除去する工程と
を有することを特徴とするMEMS素子の製造方法。 - 前記固定電極を支持する支持部を形成する工程を含む
ことを特徴とする請求項1記載のMEMS素子の製造方法。 - 基板の絶縁層上に第1のギャップを跨ぐ状態で形成されたビーム電極と、
前記第1のギャップと共に前記ビーム電極を取り囲む第2のギャップを介して前記ビーム電極上に形成された固定電極と
を備えることを特徴とするMEMS素子。 - 前記固定電極を支持する支持部を具備する
ことを特徴とする請求項3記載のMEMS素子。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004002586A JP4466081B2 (ja) | 2004-01-08 | 2004-01-08 | Mems素子 |
Applications Claiming Priority (1)
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---|---|---|---|
JP2004002586A JP4466081B2 (ja) | 2004-01-08 | 2004-01-08 | Mems素子 |
Publications (2)
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JP2005193336A true JP2005193336A (ja) | 2005-07-21 |
JP4466081B2 JP4466081B2 (ja) | 2010-05-26 |
Family
ID=34817737
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Application Number | Title | Priority Date | Filing Date |
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JP2004002586A Expired - Lifetime JP4466081B2 (ja) | 2004-01-08 | 2004-01-08 | Mems素子 |
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JP (1) | JP4466081B2 (ja) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7495339B2 (en) | 2006-02-15 | 2009-02-24 | Panasonic Corporation | Connection structure and method for fabricating the same |
US7629688B2 (en) | 2005-08-15 | 2009-12-08 | Panasonic Corporation | Bonded structure and bonding method |
US8064124B2 (en) | 2006-01-18 | 2011-11-22 | Qualcomm Mems Technologies, Inc. | Silicon-rich silicon nitrides as etch stops in MEMS manufacture |
US8115988B2 (en) | 2004-07-29 | 2012-02-14 | Qualcomm Mems Technologies, Inc. | System and method for micro-electromechanical operation of an interferometric modulator |
US8164815B2 (en) | 2007-03-21 | 2012-04-24 | Qualcomm Mems Technologies, Inc. | MEMS cavity-coating layers and methods |
JP2012178710A (ja) * | 2011-02-25 | 2012-09-13 | Sanyo Electric Co Ltd | Memsデバイスおよびその製造方法 |
US8284475B2 (en) | 2007-05-11 | 2012-10-09 | Qualcomm Mems Technologies, Inc. | Methods of fabricating MEMS with spacers between plates and devices formed by same |
US8298847B2 (en) | 2005-08-19 | 2012-10-30 | Qualcomm Mems Technologies, Inc. | MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same |
US8394656B2 (en) | 2005-12-29 | 2013-03-12 | Qualcomm Mems Technologies, Inc. | Method of creating MEMS device cavities by a non-etching process |
-
2004
- 2004-01-08 JP JP2004002586A patent/JP4466081B2/ja not_active Expired - Lifetime
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8115988B2 (en) | 2004-07-29 | 2012-02-14 | Qualcomm Mems Technologies, Inc. | System and method for micro-electromechanical operation of an interferometric modulator |
US7629688B2 (en) | 2005-08-15 | 2009-12-08 | Panasonic Corporation | Bonded structure and bonding method |
US8012869B2 (en) | 2005-08-15 | 2011-09-06 | Panasonic Corporation | Bonded structure and bonding method |
US8298847B2 (en) | 2005-08-19 | 2012-10-30 | Qualcomm Mems Technologies, Inc. | MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same |
US8394656B2 (en) | 2005-12-29 | 2013-03-12 | Qualcomm Mems Technologies, Inc. | Method of creating MEMS device cavities by a non-etching process |
US8064124B2 (en) | 2006-01-18 | 2011-11-22 | Qualcomm Mems Technologies, Inc. | Silicon-rich silicon nitrides as etch stops in MEMS manufacture |
US7495339B2 (en) | 2006-02-15 | 2009-02-24 | Panasonic Corporation | Connection structure and method for fabricating the same |
US8164815B2 (en) | 2007-03-21 | 2012-04-24 | Qualcomm Mems Technologies, Inc. | MEMS cavity-coating layers and methods |
US8284475B2 (en) | 2007-05-11 | 2012-10-09 | Qualcomm Mems Technologies, Inc. | Methods of fabricating MEMS with spacers between plates and devices formed by same |
US8830557B2 (en) | 2007-05-11 | 2014-09-09 | Qualcomm Mems Technologies, Inc. | Methods of fabricating MEMS with spacers between plates and devices formed by same |
JP2012178710A (ja) * | 2011-02-25 | 2012-09-13 | Sanyo Electric Co Ltd | Memsデバイスおよびその製造方法 |
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Publication number | Publication date |
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JP4466081B2 (ja) | 2010-05-26 |
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