JP2005186006A - Slit nozzle and substrate treatment apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To make aperture intervals of discharge outlets formed in a slit nozzle even in the longitudinal direction of the slit nozzle. <P>SOLUTION: With respect to the slit nozzle of a substrate treatment apparatus, a straight line dividing an angle ψ formed between an upper end line 411e of a mutually restricting face S and a lower end line 411c of the mutually restricting face S into equal parts is determined to be a reference line L. In a second body part 411, a group of second screw holes 411a for screwing bolts into for bonding the second body part 411 to a first boy are arranged in the reference line L determined as described. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a technique for making the width of a discharge port uniform for a slit nozzle that discharges processing liquid from a straight discharge port.

  As a substrate processing apparatus used in a substrate manufacturing process, a slit for applying a processing liquid to the surface of a substrate by moving the slit nozzle in a predetermined direction while discharging the processing liquid from a slit nozzle having a linear discharge port The coater is known.

  In the slit coater, it is required to uniformly apply the treatment liquid with high accuracy. Here, if the opening interval of the discharge port of the slit nozzle (the opening width of the discharge port in the scanning direction of the slit nozzle) is non-uniform, a portion having a wide opening interval or a narrow portion depending on the position in the longitudinal direction of the slit nozzle Will exist. In that case, the amount of the processing liquid to be discharged becomes non-uniform, which causes a problem that the processing liquid is not uniformly applied. Therefore, the slit coater is required to make the opening intervals of the slit nozzle outlets uniform with high accuracy. For example, it is preferable to make uniform so that the error of the opening interval of the ejection port with respect to the length of the slit nozzle (width in the direction orthogonal to the scanning direction) is within ± 1.5%.

  On the other hand, the slit nozzle has a structure in which two members are joined in the front-rear direction and further tightened with a bolt for reasons such as ensuring the ease of cleaning. Therefore, there is a problem that the opening interval of the discharge port varies depending on the tightening condition of the bolt. In particular, since the bolt tightening position is determined by the position of the screw hole, it is important how to determine the position of the screw hole in order to make the opening interval of the discharge ports uniform.

  Therefore, conventionally, a technique for determining the position of the screw hole has been proposed. Such a technique is described in Patent Document 1, for example.

JP 2002-239436 A

  Here, the shape, material and dimensions of the slit nozzle (characteristics of the slit nozzle) can be variously changed depending on the size of the substrate to be processed, the type of processing liquid to be used, and the like.

  However, the technique described in Patent Document 1 is a technique that is effective only for slit nozzles having a specific shape, material, and dimensions in a specific range, and is out of the effective range when the characteristics of the slit nozzle are changed. The slit nozzle is not only a standard but also has a problem that the effective range itself is unclear. That is, the technique described in Patent Document 1 has a problem that it is effective only for slit nozzles having a limited range of characteristics.

  The present invention has been made in view of the above problems, and an object thereof is to determine the position of a screw hole that can make the opening interval of the discharge ports uniform without being affected by the characteristics of the individual slit nozzles. To do.

  In order to solve the above problems, the invention of claim 1 is a slit nozzle that discharges a predetermined processing liquid from a linear discharge port extending in a substantially horizontal direction, and is provided with a first insertion hole group, An elongated first main body portion extending in the horizontal direction and a second insertion hole group disposed at a position facing the first insertion hole group in a substantially horizontal direction. The first insertion hole group and the second insertion hole group are passed through in a state where the elongated second main body part, the first main body part, and the second main body part face each other. A plurality of fastening means for joining the first body portion and the second body portion to each other to form a long joined body extending in a substantially horizontal direction. In the joined body, A gap space serving as a flow path for a predetermined processing solution is formed in a part of the opposing surface of the main body and the second main body. The discharge port is formed in the slit nozzle by the lower opening of the gap space, and the reference line that bisects the mutual constraining surface of the first body portion and the second body portion in the combined body in the vertical direction. The first insertion hole group and the second insertion hole group are arranged.

  The invention according to claim 2 is the slit nozzle according to the invention according to claim 1, wherein an upper end line of the mutual restraint surface and a lower end line of the mutual restraint surface form a non-zero angle, and the reference line Is a straight line that bisects the angle.

  The invention according to claim 3 is the slit nozzle according to the invention according to claim 1, wherein an upper end line of the mutual restraint surface and a lower end line of the mutual restraint surface are substantially parallel, and the reference line is The straight line is equidistant from the upper end line of the mutual restraint surface and the lower end line of the mutual restraint surface.

  According to a fourth aspect of the present invention, there is provided a slit nozzle according to any one of the first to third aspects, wherein the gap space is provided by providing a spacer between the first main body portion and the second main body portion. Is formed.

  The invention according to claim 5 is the slit nozzle according to any one of claims 1 to 4, wherein the first main body portion and the second main body portion are configured by members having substantially the same shape. .

  The invention according to claim 6 is the slit nozzle according to any one of claims 1 to 5, wherein the gap space has a diffusion groove for diffusing the predetermined processing liquid in a longitudinal direction of the slit nozzle. Prepare.

  Further, the invention of claim 7 is a substrate processing apparatus for applying a predetermined processing solution to a substrate, the holding means for holding the substrate, and the linear discharge toward the substrate held by the holding means. A slit nozzle that discharges the predetermined processing liquid from an outlet; and a moving unit that relatively moves the substrate held by the holding unit and the slit nozzle, and the slit nozzle includes a first insertion hole group. Are provided so as to face the first body portion, and the second insertion hole group is provided at a position facing the first insertion hole group. The first insertion hole group and the second insertion hole group in a state where the elongated second main body portion extending in a substantially horizontal direction, and the first main body portion and the second main body portion face each other. By passing through both, the first main body and the second main body A plurality of fastening means that are coupled to each other to form a long combined body extending substantially in the horizontal direction, and the predetermined surface is disposed on the opposing surface of the second main body that faces the first main body. A flow path portion serving as a liquid flow path is provided, and in the combined body, a gap space communicating with the flow path portion is formed in a part of a facing surface between the first main body portion and the second main body portion. The discharge port is formed in the slit nozzle by the lower opening of the gap space, and the reference for dividing the mutual constraining surface between the first main body portion and the second main body portion in the combined body into two substantially vertically. The first insertion hole group and the second insertion hole group are arranged on a line.

  The invention of claim 8 is the substrate processing apparatus according to the invention of claim 7, wherein an upper end line of the mutual restraint surface and a lower end line of the mutual restraint surface form a non-zero angle, and the reference The line is a straight line that bisects the angle.

  The invention of claim 9 is the substrate processing apparatus according to the invention of claim 7, wherein an upper end line of the mutual restraint surface and a lower end line of the mutual restraint surface are substantially parallel, and the reference line is The straight line is equidistant from the upper end line of the mutual restraint surface and the lower end line of the mutual restraint surface.

  The invention according to claim 10 is the substrate processing apparatus according to any one of claims 7 to 9, wherein the gap is provided by providing a spacer between the first body portion and the second body portion. A space is formed.

  An eleventh aspect of the present invention is the substrate processing apparatus according to any of the seventh to tenth aspects, wherein the first main body portion and the second main body portion are configured by members having substantially the same shape. Yes.

  The invention according to claim 12 is the substrate processing apparatus according to any one of claims 7 to 11, wherein the gap space is a diffusion groove for diffusing the predetermined processing solution in the longitudinal direction of the slit nozzle. Is provided.

  In the invention according to any one of claims 1 to 12, the first insertion hole group and the second insertion hole group on a reference line that substantially bisects the mutual constraining surfaces of the first main body portion and the second main body portion in the combined body in the vertical direction. Are arranged, it is possible to easily determine the arrangement positions of the plurality of fastening means.

  In the inventions of claims 2 and 8, the upper end line of the mutual restraint surface and the lower end line of the mutual restraint surface form a non-zero angle, and the reference line is a straight line that bisects the angle. A reference line can be easily determined.

  In the inventions according to claims 3 and 9, the upper end line of the mutual restraint surface and the lower end line of the mutual restraint surface are substantially parallel, and the reference line extends from the upper end line of the mutual restraint surface and the lower end line of the mutual restraint surface. Since the straight lines are equidistant, the reference line can be easily determined.

  In the inventions according to claims 4 and 10, the gap space can be easily formed by providing the spacer between the first main body portion and the second main body portion.

  In the fifth and eleventh aspects of the invention, the first main body portion and the second main body portion are configured by members having substantially the same shape, so that the manufacturing cost can be suppressed.

  In the invention according to claims 6 and 12, the gap space includes a diffusion groove for diffusing the predetermined processing liquid in the longitudinal direction of the slit nozzle, thereby discharging the processing liquid in the longitudinal direction of the slit nozzle. It can be made uniform.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described in detail with reference to the accompanying drawings.

<1. First Embodiment>
FIG. 1 is a perspective view schematically showing a substrate processing apparatus 1 according to the present invention. FIG. 2 is a view showing a side cross section of the main body 2 of the substrate processing apparatus 1 and showing main components related to the application operation of the resist solution. In FIG. 1, for the sake of illustration and explanation, the Z-axis direction is defined as the vertical direction and the XY plane is defined as the horizontal plane, but these are defined for convenience in order to grasp the positional relationship. The directions described below are not limited. The same applies to the following figures.

<Overall configuration>
The substrate processing apparatus 1 is roughly divided into a main body 2 and a control system 6, and a square glass substrate for manufacturing a screen panel of a liquid crystal display device is a substrate to be processed (hereinafter simply referred to as “substrate”) 90. In a process of selectively etching an electrode layer or the like formed on the surface of the substrate 90, the coating device is configured to apply a resist solution as a processing solution to the surface of the substrate 90. Therefore, in this embodiment, the slit nozzle 41 discharges the resist solution. In addition, the substrate processing apparatus 1 can be modified and used not only as a glass substrate for a liquid crystal display device but also as a device for applying a processing liquid (chemical solution) to various substrates for a flat panel display.

  The main body 2 includes a stage 3 that functions as a holding table for mounting and holding the substrate 90 and also functions as a base for each attached mechanism. The stage 3 is made of, for example, an integral stone having a rectangular parallelepiped shape, and its upper surface (holding surface 30) and side surfaces are processed into flat surfaces.

  The upper surface of the stage 3 is a horizontal plane and serves as a holding surface 30 for the substrate 90. A number of vacuum suction ports (not shown) are formed on the holding surface 30 in a distributed manner, and the substrate 90 is held in a predetermined horizontal position by sucking the substrate 90 while the substrate processing apparatus 1 processes the substrate 90. To do. The holding surface 30 is provided with a plurality of lift pins LP that can be moved up and down by driving means (not shown) at appropriate intervals. The lift pins LP are used to push up the substrate 90 when the substrate 90 is removed.

  A pair of running rails 31 extending in parallel in a substantially horizontal direction are fixed to both ends of the holding surface 30 across the holding area of the substrate 90 (region where the substrate 90 is held). The traveling rail 31 guides the movement of the bridging structure 4 together with a support block (not shown) fixed at the lowermost part of both ends of the bridging structure 4 (the moving direction is defined in a predetermined direction), and holds the bridging structure 4. A linear guide supported above the surface 30 is configured.

  Above the stage 3, a bridging structure 4 is provided that extends substantially horizontally from both sides of the stage 3. The bridging structure 4 is mainly composed of, for example, a nozzle support portion 40 that uses carbon fiber reinforced resin as an aggregate, and lifting mechanisms 43 and 44 that support both ends thereof.

  A slit nozzle 41 is attached to the nozzle support portion 40. A supply mechanism 7 for supplying a resist solution to the slit nozzle 41 is connected to the slit nozzle 41 having a longitudinal direction in the Y-axis direction.

  FIG. 3 is a perspective view showing main members constituting the slit nozzle 41. The slit nozzle 41 includes a first main body 410, a second main body 411, a shim plate 412, and a plurality of bolts 413. In the present embodiment, the length of the slit nozzle 41 in the Z-axis direction is “H” and the length in the Y-axis direction is “W”. In a general slit coater, the value of W is assumed to be 100 to 3000 (mm), but of course not limited to this.

  The first main body portion 410 is provided with a first screw hole group 410 a for screwing a plurality of bolts 413. In addition, a second screw hole group 411a for screwing a plurality of bolts 413 into a position opposed to the first screw hole group 410a is disposed in the second main body part 411 disposed so as to face the first main body part 410. Is provided. The first screw hole group 410a and the second screw hole group 411a are both provided as substantially cylindrical holes in the direction along the X axis, and although not shown in detail, the cylindrical surfaces are screwed with bolts 413. Screw threads and screw grooves are formed.

  Note that the above-described screw threads and screw grooves may be provided only in the second screw hole group 411a, for example. That is, the first screw hole group 410a may simply be a through hole into which the bolt 413 can be inserted. Alternatively, both the first screw hole group 410a and the second screw hole group 411a may be insertion holes into which the bolts 413 can be simply inserted. In that case, the bolt 413 may be separately fixed by a nut. In other words, any structure may be used as long as it is inserted into the first screw hole group 410a and the second screw hole group 411a and connects the first main body portion and the second main body portion.

  The shim plate 412 is a plate-like member disposed between the first main body portion 410 and the second main body portion 411, and is provided with holes through which a plurality of bolts 413 pass. The shim plate 412 is disposed avoiding a land 411d (gap space), which will be described later, and functions as a spacer for providing a predetermined interval between the first main body portion 410 and the second main body portion 411.

  The bolt 413 is screwed into the first screw hole group 410a and the second screw hole group 411a in a state where the first main body part 410 and the second main body part 411 are opposed to each other. The second main body 411 is coupled to each other. That is, the conjugate in the present invention is thus formed. FIG. 3 shows only nine bolts 413 as the plurality of bolts 413 and the first and second screw hole groups 410a and 411a having the corresponding number of screw holes. This number is not limited to this, and an appropriate number is determined mainly depending on the rigidity and weight of the slit nozzle 41 and the value of W.

  FIG. 4 is a front view showing a part of the second main body 411. The second main body 411 has a symmetrical structure with respect to the center position in the Y-axis direction, and only the (−Y) direction one side portion is shown in FIG. 4.

  The opposing surface of the second main body portion 411 facing the first main body portion 410 has depressions formed at predetermined positions, and these depressions form a manifold (diffusion groove) 411b and a land 411d. Further, in the above-described facing surfaces, the portions where the manifold 411b and the land 411d are not formed are subjected to mutual restraint stress via the shim plate 412 when the second main body 411 is coupled to the first main body 410. A “mutually constraining surface S” is formed. The upper end line 411e of the mutual restraint surface S is included in the upper end surface of the slit nozzle 41 and is a straight line along the Y-axis direction. On the other hand, the lower end line 411c of the mutual restraint surface S constitutes the upper end line of the manifold 411b and is inclined at an angle ψ (°) with respect to the upper end line 411e of the mutual restraint surface S. It should be noted that “the lower end line 411 c of the mutual restraint surface S” does not include portions that form the lower surface of the slit nozzle 41 at both ends of the slit nozzle 41.

  The manifold 411b is formed as a groove deeper in the (−X) direction than the land 411d, forms a flow path for the resist solution inside the slit nozzle 41, and constitutes a part of the gap space of the slit nozzle 41. ing. The slit nozzle 41 is supplied with a resist solution from a supply port (not shown) provided near the center, and the manifold 411b is provided to diffuse the resist solution supplied from the supply port in the Y-axis direction. .

  In the slit nozzle 41 in the present embodiment, the manifold 411b is formed in an inclined state toward both ends of the slit nozzle 41 in order to quickly diffuse the supplied resist solution to both ends.

  Here, in the substrate processing apparatus 1 in the present embodiment, the angle between the reference line L and the upper end line 411e of the mutual restraint surface S is “bolt arrangement angle θ (°)”, and the upper end line 411e of the mutual restraint surface S is If the angle formed with the lower end line 411c is “ψ (°)”, the reference line L is determined so that ψ = 2θ. Thereby, the reference line L becomes a straight line that bisects the angle ψ formed by the upper end line 411e and the lower end line 411c of the mutual restraint surface S. As shown in FIG. 4, the reference line L is a line that divides the mutual constraining surface S of the combined body into two substantially vertically.

  In the second main body 411 in the present embodiment, the second screw hole group 411a is arranged on the reference line L. In the slit nozzle 41, the first screw hole group 410a is also provided on the reference line L by providing the first screw hole group 410a at a position facing the second screw hole group 411a. Therefore, in the slit nozzle 41 in the present embodiment, when the first main body part 410 and the second main body part 411 are coupled by the bolts 413, a plurality of bolts 413 are arranged on the reference line L.

  Thus, the slit nozzle 41 of the substrate processing apparatus 1 in the present embodiment determines the reference line L as a straight line that bisects the angle ψ formed by the upper end line 411e and the lower end line 411c of the mutual restraint surface S. Then, by arranging the first screw hole group 410a and the second screw hole group 411a on the reference line L, the angle ψ formed by the upper end line 411e and the lower end line 411c of the mutual restraint surface S is not “0”. In this case, the positions of the first screw hole group 410a and the second screw hole group 411a can be determined regardless of the size of the slit nozzle 41 or the like. More specifically, the first screw hole group 410a and the second screw hole group are arranged such that the centers of the screw holes of the first screw hole group 410a and the second screw hole group 411a are arranged on the reference line L. It is preferable to determine the position of 411a.

  FIG. 5 is a cross-sectional view of a combined body (slit nozzle 41) in which the first main body 410 and the second main body 411 are combined, cut along a plane parallel to the XZ plane.

  As shown in FIG. 5, the land 411d is formed as a gap space communicating with the manifold 411b. That is, the land 411d is a flow path through which the resist solution diffused in the Y-axis direction by the manifold 411b flows toward the discharge port 41a. Further, the end portion on the (−Z) side of the land 411 d is opened downward with respect to the outside, and forms the discharge port 41 a of the slit nozzle 41. The width of the discharge port 41a in the X-axis direction is the opening interval D.

  As shown in FIG. 4, in the slit nozzle 41 in the present embodiment, a recess is formed on the (+ X) side surface of the second main body 411, thereby forming a part of the land 411 d. Therefore, even if the shim plate 412 is not used, the land 411d can be formed. However, in the case where the shim plate 412 is used like the slit nozzle 41 in the present embodiment, it is not necessary to form the depressions constituting the land 411d in the second main body portion 411. In this case, the first main body 410 and the second main body 411 sandwich the shim plate 412 so that the land 411d is formed as a portion where the shim plate 412 does not exist (notched portion).

  FIG. 6 is a diagram illustrating the utility of the slit nozzle when the dimensions of the slit nozzle and the arrangement state of the bolts are variously changed. In the following description, a straight line on which a bolt is arranged is referred to as an arrangement straight line. In FIG. 6, the practical determination value is that the non-uniformity of the opening interval D with respect to the length of the slit nozzle in the Y-axis direction is 1.50% or less.

  Examples 1 to 3 are determined by changing only the bolt arrangement angle θ in the same slit nozzle. Example 1 shows a case where the arrangement straight line and the reference line L coincide with each other like the slit nozzle 41 in the present embodiment. On the other hand, Example 2 shows a case where the arrangement straight line is a straight line along the substantially horizontal direction, and Example 3 shows a case where the arrangement straight line is a straight line along the upper end line of the manifold.

  Comparing Example 1 to Example 3, in Example 1, the non-uniformity of the opening interval D is a practical value (judgment result is “◯”), and the arrangement straight line coincides with the reference line L in the same slit nozzle. It can be seen that the opening interval D is made uniform by providing the gaps as described above. That is, the opening interval D can be made uniform in the Y-axis direction by arranging the bolts 413 on the reference line L as in the substrate processing apparatus 1 in the present embodiment.

  In Example 4 and Example 5, the dimensions “H” and “W” of the slit nozzles shown in Examples 1 to 3 are each doubled, and like the slit nozzle 41 in the present embodiment, the arrangement straight line and the reference line L Are determined by arranging the bolts so as to match. Note that Example 4 and Example 5 have different values of the angle at which the manifold is inclined (the angle formed by the upper end line and the lower end line of the mutual restraint surface).

  First, by comparing Example 1 and Example 4, even if the size (dimension) of the slit nozzle 41 is changed, by providing the arrangement straight line so as to coincide with the reference line L, the opening interval D It can be seen that it can be made uniform. Further, by comparing Example 4 and Example 5, even when the inclination angle ψ of the manifold 411b is changed, the opening interval D is made uniform by providing the arrangement straight line so as to coincide with the reference line L. I understand that I can do it.

  In Examples 6 to 8, when the dimension “H” of the slit nozzle shown in Examples 1 to 3 is quadrupled and “W” is doubled, only the bolt arrangement angle θ is changed. In addition, Example 6 shows the case where a volt | bolt is arrange | positioned so that the arrangement | positioning straight line and the reference line L may correspond like the slit nozzle 41 in this Embodiment. Therefore, by comparing Example 1 and Example 6, even when the ratio of “H” and “W” of the slit nozzle 41 is changed, the arrangement straight line is provided so as to coincide with the reference line L. It can be seen that the opening interval D can be made uniform. Further, by comparing Example 6 to Example 8, even if the ratio of “H” and “W” of the slit nozzle 41 is changed, the arrangement straight line must not be provided so as to coincide with the reference line L. It can be seen that the opening interval D cannot be made uniform.

  As described above, in the substrate processing apparatus 1 according to the present embodiment, in the slit nozzle 41, the first screw hole group 410a and the second screw hole group 411a are placed on the reference line L (a straight line that bisects the angle ψ). By disposing, the opening interval D of the discharge ports 41a can be made uniform. Here, even if the slit nozzle 41 is changed, the reference line L can be easily determined, so the positions of the first screw hole group 410a and the second screw hole group 411a are easily determined. be able to. Therefore, it is possible to make the opening interval D of the discharge ports 41a uniform without performing complicated adjustment work and determining the positions of the first screw hole group 410a and the second screw hole group 411a.

  With the structure as described above, the slit nozzle 41 allows the resist solution supplied by the supply mechanism 7 to be applied to the surface of the substrate 90 held on the stage 3 from the slit-like (linear) discharge port 41a formed at the tip. Discharge to a predetermined area (hereinafter referred to as “resist application area”). Thereby, the substrate processing apparatus 1 applies the resist solution to the substrate 90. Here, the resist application region is a region in the surface of the substrate 90 where the resist solution is to be applied, and is usually a region obtained by excluding a region having a predetermined width along the edge from the entire area of the substrate 90. It is.

  The elevating mechanisms 43 and 44 are divided on both sides of the slit nozzle 41 and connected to the slit nozzle 41 by the nozzle support portion 40. The elevating mechanisms 43 and 44 are mainly composed of AC servomotors 43 a and 44 a and a ball screw (not shown), and generate elevating driving force for the bridge structure 4 based on a control signal from the control system 6. Thereby, the raising / lowering mechanisms 43 and 44 raise / lower the slit nozzle 41 in translation. The lifting mechanisms 43 and 44 are also used to adjust the posture of the slit nozzle 41 in the YZ plane. Further, the AC servomotors 43a and 44a have a function of detecting the rotation amount and outputting it to the control system 6.

  A pair of AC coreless linear motors (hereinafter simply referred to as “stator”) and a “moving element 50b” and “stator 51a” and “moving element 51b” are provided at both ends of the bridging structure 4 along the edges on both sides of the stage 3, respectively. , Abbreviated as “linear motor”.) 50 and 51 are fixed. In addition, linear encoders 52 and 53 each having a scale portion and a detector are fixed to both ends of the bridging structure 4. The linear encoders 52 and 53 detect the positions of the linear motors 50 and 51. The linear motors 50 and 51 and the linear encoders 52 and 53 mainly constitute the traveling mechanism 5 for moving the bridge structure 4 on the stage 3 while being guided by the traveling rail 31. That is, the traveling mechanism 5 acts as a nozzle moving unit that relatively moves the slit nozzle 41 in a substantially horizontal direction along the surface of the substrate 90. Based on the detection results from the linear encoders 52 and 53, the control system 6 controls the operation of the linear motor 50, thereby controlling the movement of the bridging structure 4 on the stage 3, that is, the scanning of the substrate 90 by the slit nozzle 41. Is done.

  On the holding surface 30 of the main body 2, an opening 32 is provided on the (−X) direction side of the holding area. The opening 32 has a longitudinal direction in the Y-axis direction similar to the slit nozzle 41, and the longitudinal length is substantially the same as the longitudinal direction length of the slit nozzle 41. Although not shown in FIGS. 1 and 2, a standby pot, a nozzle cleaning mechanism, and a pre-coating mechanism are provided inside the main body 2 below the opening 32. These mechanisms are used, for example, during preliminary processing such as resist solution supply processing, air bleeding processing, or pre-dispensing processing that is performed prior to application of the resist solution to the substrate 90.

  The nozzle support 40 is provided with a supply mechanism 7 for supplying a resist solution to the slit nozzle 41 at a position above the slit nozzle 41. The supply mechanism 7 has a function of supplying a resist solution stored in a buffer tank (not shown) to the slit nozzle 41. Although not shown in detail, the supply mechanism 7 is mainly composed of a pump, a pipe, and a valve.

  1 and 2, the control system 6 includes an arithmetic unit 60 that processes various data according to a program and a storage unit 61 that stores the program and various data. In addition, an operation unit 62 for an operator to input necessary instructions to the substrate processing apparatus 1 and a display unit 63 for displaying various data are provided on the front surface.

  Specifically, a RAM that temporarily stores data, a read-only ROM, a magnetic disk device, and the like correspond to the storage unit 61. Alternatively, it may be a storage medium such as a portable magneto-optical disk or a memory card, and a reading device thereof. The operation unit 62 corresponds to buttons and switches (including a keyboard and a mouse). Or what has the function of the display part 63 like a touchscreen display may be used. The display unit 63 corresponds to a liquid crystal display or various lamps.

  The above is description of the structure and function of the substrate processing apparatus 1 in this Embodiment.

<Description of operation>
Next, the coating processing operation in the substrate processing apparatus 1 will be briefly described. The following operation of the substrate processing apparatus 1 is performed based on the control of the control system 6 unless otherwise specified.

  In the substrate processing apparatus 1, when the substrate 90 is transported to a predetermined position by an operator or a transport mechanism (not shown), the stage 3 sucks and holds the substrate 90 at a predetermined position on the holding surface 30. Subsequently, based on a control signal from the control system 6, the elevating mechanisms 43 and 44 move the nozzle support portion 40 in the Z-axis direction to adjust the slit nozzle 41 to an appropriate posture. The proper posture is a posture in the YZ plane of the slit nozzle 41 in which the distance between the slit nozzle 41 and the resist application region is an appropriate interval for applying the resist solution.

  Further, the linear motors 50 and 51 move the bridging structure 4 in the (−X) direction, and move the slit nozzle 41 to the discharge start position. Here, the ejection start position is a position where the slit nozzle 41 substantially extends along one side of the resist coating region.

  When the slit nozzle 41 moves to the discharge start position, the control system 6 gives a control signal to the linear motors 50 and 51 of the traveling mechanism 5. Based on the control signal, the linear motors 50 and 51 move the bridging structure 4 in the (−X) direction so that the slit nozzle 41 scans the surface of the substrate 90.

  At this time, the supply mechanism 7 supplies the resist solution to the slit nozzle 41, and the slit nozzle 41 discharges the resist solution to the resist application region. As a result, a layer (thin film) of a resist solution is formed on the surface of the substrate 90.

  When the slit nozzle 41 moves to the discharge end position, the control system 6 gives a control signal to the elevating mechanisms 43 and 44, the traveling mechanism 5 and the supply mechanism 7. Based on the control signal, the elevating mechanisms 43 and 44 and the traveling mechanism 5 move the slit nozzle 41 to the standby position, and the supply mechanism 7 stops the supply of the resist solution, so that the resist solution from the slit nozzle 41 is supplied. Discharge stops.

  In parallel with the movement of the slit nozzle 41, the stage 3 stops the suction of the substrate 90, and after the lift pins LP lift the substrate 90, the operator or the transport mechanism picks up the substrate 90 from the holding surface 30 and performs the next processing. Transport to process.

  Further, the substrate processing apparatus 1 determines whether there is another substrate 90 to be processed, and repeats the above-described processing when there is a substrate 90 to be processed. On the other hand, if there is no substrate 90 to be processed, the process is terminated.

  As described above, in the substrate processing apparatus 1 according to the present embodiment, the first screw hole group 410a is arranged on the reference line L that bisects the angle ψ between the upper end line 411e and the lower end line 411c of the mutual restraint surface S. By providing the second screw hole group 411a, the opening interval D of the discharge ports 41a of the slit nozzle 41 can be made uniform. Further, as described above, since the reference line L can be easily determined regardless of the shape and dimensions of the slit nozzle 41, the first screw hole group 410a and the first screw hole group 410a and The position of the second screw hole group 411a can be determined.

Further, inside the slit nozzle 41, a manifold 411b is formed in the resist solution flow path.
By providing, the resist solution can be diffused in the longitudinal direction of the slit nozzle 41. Therefore, the discharge of the resist solution in the Y-axis direction can be made uniform.

  Further, by providing a shim plate 412 (gap member) disposed between the first main body portion 410 and the second main body portion 411, a flow path of the resist solution from the manifold 411b to the discharge port 41a is easily formed. be able to.

<2. Second Embodiment>
In the first embodiment, when the diffusion grooves (manifolds) are formed so as to be inclined toward both ends of the slit nozzle, the arrangement positions of the bolts (positions of the first and second screw hole groups) are determined. However, the diffusion grooves may be provided substantially horizontally. In this case, since the upper end line of the diffusion groove and the upper end surface of the slit nozzle are substantially parallel, the angle ψ is “0”, and the reference line L cannot be determined as in the above embodiment. However, even in such a case, the present invention can be applied.

  FIG. 7 is a front view showing the second main body 414 of the slit nozzle 41 of the substrate processing apparatus 1 according to the second embodiment configured based on such a principle. In FIG. 7, a configuration having the same function as that of the second main body portion 411 in the first embodiment will be described with appropriate reference numerals. Further, the substrate processing apparatus 1 in the second embodiment is the same as the substrate processing apparatus 1 in the first embodiment except for the configuration of the second main body 414, and the description thereof is omitted.

  In the second main body 414 in the present embodiment, the manifold 411b is formed parallel to the Y axis, and the upper end line (the lower end line 411c of the mutual constraining surface S) is substantially parallel to the upper end line 411e of the mutual constraining surface S. ing. That is, the distance between the upper end line 411e of the mutual restraint surface S and the lower end line 411c of the mutual restraint surface S is “LE” over the Y axis direction of the slit nozzle 41 and is constant.

  In the substrate processing apparatus 1 according to the second embodiment, the midpoint between the upper end line 411e and the lower end line 411c of the mutual restraint surface S is connected to be a reference line L. That is, the reference line L is determined such that the distance from the upper end line 411e and the distance from the lower end line 411c are both equal to “LE1” and LE = 2 × LE1. And the 2nd screw hole group 411a of the 2nd main-body part 414 is arrange | positioned on the reference line L determined in this way.

  In the slit nozzle 41 of the substrate processing apparatus 1, the manifold 411 b is not formed so as to open upward, and therefore the mutual restraint surface S always exists. Therefore, even if the manifold 411b is provided substantially parallel to the upper end line 411e of the mutual constraining surface S, the reference line L can always be determined as described above.

  As described above, even when the slit nozzle 41 of the substrate processing apparatus 1 in the second embodiment cannot determine the angle ψ as in the substrate processing apparatus 1 in the first embodiment, The reference line L can be determined, and by arranging the first screw hole group 410a and the second screw hole group 411a on the reference line L, it is the same as the substrate processing apparatus 1 in the first embodiment. An effect can be obtained.

<3. Third Embodiment>
In the above embodiment, the first main body portion and the second main body portion have different shapes, but the present invention is not limited to this. That is, any shape may be used as long as the manifold, the land, and the discharge port are formed in the slit nozzle 41 (combined body) by coupling the first body portion and the second body portion.

  FIG. 8 is a cross-sectional view of the slit nozzle 41 in the third embodiment configured based on such a principle.

  A manifold 415b and a land 415d are formed on the side surface on the (−X) side of the first main body 415 in the third embodiment. A manifold 416b and a land 416d are formed on the side surface of the second main body 416 on the (+ X) side. That is, in the substrate processing apparatus 1 according to the third embodiment, the state in which the first main body portion 415 is rotated around the Z axis corresponds to the second main body portion 416, and the first main body portion 415 and the second main body portion. 416 has substantially the same shape. Then, by connecting the first main body 415 and the second main body 416, a manifold 417 and a land 418 are formed inside the slit nozzle 41, and a lower end opening of the land 418 serves as an outlet 41a of the slit nozzle 41. Form.

  As described above, also in the substrate processing apparatus 1 in the third embodiment, the same effect as in the above embodiment can be obtained.

  Further, by configuring the first main body portion 415 and the second main body portion 416 with substantially the same members, the number of parts can be suppressed, and the manufacturing cost can be reduced. In addition, processing accuracy (such as acceptance accuracy when facing each other) can be improved.

  As shown in FIG. 8, the slit nozzle 41 in the third embodiment is not provided with a member corresponding to the shim plate 412 unlike the slit nozzle 41 in the first embodiment. A member corresponding to the shim plate 412 may be disposed between the first main body 415 and the second main body 416.

<4. Modification>
Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and various modifications can be made.

  For example, the manifold 411b is not limited to a linear structure. That is, the manifold 411b may have a gentle curve toward both ends of the slit nozzle 41. In this case, the reference line L may be determined as a curve connecting the midpoints of the upper end line 411e and the lower end line 411c at a predetermined position on the Y axis.

  Further, the case where the resist solution is supplied from the supply mechanism 7 to the slit nozzle 41 is not limited to the case where the resist solution is supplied to the central portion of the slit nozzle 41. For example, the resist solution may be supplied to both ends of the slit nozzle 41.

1 is a perspective view schematically showing a substrate processing apparatus according to the present invention. It is a figure which shows the main component concerning the application | coating operation | movement of a resist liquid while showing the side cross section of the main body of a substrate processing apparatus. It is a perspective view which shows the main members which comprise a slit nozzle. It is a front view which shows a part of 2nd main-body part in 1st Embodiment. It is sectional drawing of the coupling body which combined the 1st main-body part and the 2nd main-body part. It is a figure which shows the practicality of the said slit nozzle when the dimension of a slit nozzle and the arrangement position of a volt | bolt are changed. It is a front view which shows a part of 2nd main-body part in 2nd Embodiment. It is sectional drawing of the slit nozzle in 3rd Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate processing apparatus 3 Stage 30 Holding surface 41 Slit nozzle 41a Discharge port 410,415 1st main-body part 410a 1st screw hole group 411,414,416 2nd main-body part 411a 2nd screw hole group 411c Lower end line 412 Shim board ( Spacer)
413 Bolt 411b, 415b, 416b, 417 Manifold (diffusion groove)
411d Land (gap space)
411e Upper end line 43, 44 Lifting mechanism 5 Traveling mechanism 90 Substrate D Opening interval L Reference line S Mutual restraint surface ψ Angle

Claims (12)

A slit nozzle that discharges a predetermined processing liquid from a linear discharge port extending in a substantially horizontal direction,
A first insertion hole group, a long first main body extending in a substantially horizontal direction;
A second main body portion that is disposed so as to face the first main body portion, is provided with a second insertion hole group at a position facing the first insertion hole group, and extends in a substantially horizontal direction;
By passing through both the first insertion hole group and the second insertion hole group with the first main body part and the second main body part facing each other, the first main body part and the second main body part are passed through. A plurality of fastening means for joining the main body portions to each other to form a long combined body extending in a substantially horizontal direction;
With
In the combined body, a gap space serving as a flow path for a predetermined processing liquid is formed in a part of a facing surface between the first body portion and the second body portion, and the slit is formed by a lower opening of the gap space. The discharge port is formed in the nozzle,
The first insertion hole group and the second insertion hole group are arranged on a reference line that substantially bisects the mutual constraining surface of the first body portion and the second body portion in the combined body in the vertical direction. A slit nozzle characterized by that. The slit nozzle according to claim 1,
The upper end line of the mutual constraining surface and the lower end line of the mutual constraining surface form a non-zero angle;
The slit nozzle, wherein the reference line is a straight line that bisects the angle. The slit nozzle according to claim 1,
The upper end line of the mutual restraint surface and the lower end line of the mutual restraint surface are substantially parallel,
The slit nozzle, wherein the reference line is a straight line that is equidistant from an upper end line of the mutual restraint surface and a lower end line of the mutual restraint surface. The slit nozzle according to any one of claims 1 to 3,
The slit nozzle, wherein the gap space is formed by providing a spacer between the first main body and the second main body. The slit nozzle according to any one of claims 1 to 4,
The slit nozzle, wherein the first main body portion and the second main body portion are formed of members having substantially the same shape. A slit nozzle according to any one of claims 1 to 5,
The slit nozzle is characterized by comprising a diffusion groove for diffusing the predetermined processing liquid in the longitudinal direction of the slit nozzle. A substrate processing apparatus for applying a predetermined processing liquid to a substrate,
Holding means for holding the substrate;
A slit nozzle that discharges the predetermined processing liquid from a linear discharge port toward the substrate held by the holding unit;
Moving means for relatively moving the substrate held by the holding means and the slit nozzle;
With
The slit nozzle is
A first insertion hole group, a long first main body extending in a substantially horizontal direction;
A second main body portion that is disposed so as to face the first main body portion, is provided with a second insertion hole group at a position facing the first insertion hole group, and extends in a substantially horizontal direction;
By passing through both the first insertion hole group and the second insertion hole group with the first main body part and the second main body part facing each other, the first main body part and the second main body part are passed through. A plurality of fastening means for joining the main body portions to each other to form a long combined body extending in a substantially horizontal direction;
With
In the combined body, a gap space serving as a flow path for a predetermined processing liquid is formed in a part of a facing surface between the first body portion and the second body portion, and the slit is formed by a lower opening of the gap space. The discharge port is formed in the nozzle,
The first insertion hole group and the second insertion hole group are arranged on a reference line that substantially bisects the mutual constraining surface of the first body portion and the second body portion in the combined body in the vertical direction. A substrate processing apparatus. The substrate processing apparatus according to claim 7,
The upper end line of the mutual constraining surface and the lower end line of the mutual constraining surface form a non-zero angle;
The substrate processing apparatus, wherein the reference line is a straight line that bisects the angle. The substrate processing apparatus according to claim 7,
The upper end line of the mutual restraint surface and the lower end line of the mutual restraint surface are substantially parallel,
The substrate processing apparatus, wherein the reference line is a straight line equidistant from an upper end line of the mutual restraint surface and a lower end line of the mutual restraint surface. A substrate processing apparatus according to any one of claims 7 to 9,
The substrate processing apparatus, wherein the gap space is formed by providing a spacer between the first main body and the second main body. A substrate processing apparatus according to any one of claims 7 to 10,
The substrate processing apparatus, wherein the first main body portion and the second main body portion are formed of members having substantially the same shape. A substrate processing apparatus according to any one of claims 7 to 11,
The substrate processing apparatus, wherein the gap space includes a diffusion groove for diffusing the predetermined processing liquid in a longitudinal direction of the slit nozzle.

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