JP2005175435A5 - - Google Patents
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- Publication number
- JP2005175435A5 JP2005175435A5 JP2004287734A JP2004287734A JP2005175435A5 JP 2005175435 A5 JP2005175435 A5 JP 2005175435A5 JP 2004287734 A JP2004287734 A JP 2004287734A JP 2004287734 A JP2004287734 A JP 2004287734A JP 2005175435 A5 JP2005175435 A5 JP 2005175435A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US50758403P | 2003-09-30 | 2003-09-30 | |
| EP03447239A EP1521301A1 (en) | 2003-09-30 | 2003-09-30 | Method of formation of airgaps around interconnecting line |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005175435A JP2005175435A (ja) | 2005-06-30 |
| JP2005175435A5 true JP2005175435A5 (enExample) | 2005-11-04 |
| JP4379878B2 JP4379878B2 (ja) | 2009-12-09 |
Family
ID=34740672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004287734A Expired - Fee Related JP4379878B2 (ja) | 2003-09-30 | 2004-09-30 | エアーギャップを選択的に形成する方法及び当該方法により作製された装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4379878B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100712517B1 (ko) * | 2005-07-14 | 2007-04-30 | 삼성전자주식회사 | 에어 갭 구조를 갖는 반도체 소자의 인터포저 |
| JP4735314B2 (ja) * | 2006-02-14 | 2011-07-27 | ソニー株式会社 | 半導体装置およびその製造方法 |
| FR2916303B1 (fr) * | 2007-05-15 | 2009-07-31 | Commissariat Energie Atomique | Procede de fabrication de cavites d'air utilisant des nanotubes |
| JP2010258215A (ja) | 2009-04-24 | 2010-11-11 | Renesas Electronics Corp | 半導体装置及び半導体装置の製造方法 |
| KR102190654B1 (ko) * | 2014-04-07 | 2020-12-15 | 삼성전자주식회사 | 반도체 장치 및 이의 제조 방법 |
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2004
- 2004-09-30 JP JP2004287734A patent/JP4379878B2/ja not_active Expired - Fee Related