JP2005171364A5 - - Google Patents

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Publication number
JP2005171364A5
JP2005171364A5 JP2003416422A JP2003416422A JP2005171364A5 JP 2005171364 A5 JP2005171364 A5 JP 2005171364A5 JP 2003416422 A JP2003416422 A JP 2003416422A JP 2003416422 A JP2003416422 A JP 2003416422A JP 2005171364 A5 JP2005171364 A5 JP 2005171364A5
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JP
Japan
Prior art keywords
forming
thin film
gold plating
vacuum thin
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003416422A
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English (en)
Japanese (ja)
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JP2005171364A (ja
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Publication date
Application filed filed Critical
Priority to JP2003416422A priority Critical patent/JP2005171364A/ja
Priority claimed from JP2003416422A external-priority patent/JP2005171364A/ja
Publication of JP2005171364A publication Critical patent/JP2005171364A/ja
Publication of JP2005171364A5 publication Critical patent/JP2005171364A5/ja
Pending legal-status Critical Current

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JP2003416422A 2003-12-15 2003-12-15 導電性金属膜の形成方法 Pending JP2005171364A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003416422A JP2005171364A (ja) 2003-12-15 2003-12-15 導電性金属膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003416422A JP2005171364A (ja) 2003-12-15 2003-12-15 導電性金属膜の形成方法

Publications (2)

Publication Number Publication Date
JP2005171364A JP2005171364A (ja) 2005-06-30
JP2005171364A5 true JP2005171364A5 (zh) 2006-12-28

Family

ID=34735623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003416422A Pending JP2005171364A (ja) 2003-12-15 2003-12-15 導電性金属膜の形成方法

Country Status (1)

Country Link
JP (1) JP2005171364A (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012214858A (ja) * 2011-04-01 2012-11-08 Nikon Corp パターン形成方法

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